To meet stringent requirements in vacuum and cleanness for semiconductor manufacturing, a new power drive module for Selective Compliant Assembly Robot Arm （SCARA） type robot has been developed for wafer-transfer. I...To meet stringent requirements in vacuum and cleanness for semiconductor manufacturing, a new power drive module for Selective Compliant Assembly Robot Arm （SCARA） type robot has been developed for wafer-transfer. In order to obtain complete hermetic volume for higher vacuum and prevent leakage of hazardous gases, feedthrough motions involving transfer between the vacuum and motors are achieved by the use of metal bellows and magnetic coupling. An analysis of the coaxial-type magnetic coupling by employing the technique of current sheet model is presented. This approach is proved to be a precise and easy method. The construction of power drive module shows its advantage in maintaining ultrahigh vacuum and also enhances the efficiency for transporting the wafer, as compared with conventional design.展开更多
In order to reduce the driving fatigue in sowing work, this paper based on heart rate （HR） as the main indicator to survey, tested and analyzed the fatigue condition of the drivers of three imported tractors and one...In order to reduce the driving fatigue in sowing work, this paper based on heart rate （HR） as the main indicator to survey, tested and analyzed the fatigue condition of the drivers of three imported tractors and one domestic tractor in sowing work. The results showed that when driving the imported tractors in sowing work, the HR increasing rate was 10.4%-14.3%, labor intensity belonged to the light level; when driving domestic tractor in sowing work, the HR increasing rate was 23.4%-33.0%, it was remarkably bigger than that of driving imported tractors （P〈0.05）, labor intensity belonged to the middle level. The main effects on driving fatigue included the control methods, tractors＇ cab environment, processing time, operating content, and so on. Finally, we proposed the concrete measures and suggestions to reduce driving fatigue and improve drivers＇ work condition.展开更多
基金supported by the National Natural Science Foundation of China(61203129,61174038,61473151,51507080)the Fundamental Research Funds for the Central Universities(30915011104,30920130121010,30920140112005)
文摘To meet stringent requirements in vacuum and cleanness for semiconductor manufacturing, a new power drive module for Selective Compliant Assembly Robot Arm （SCARA） type robot has been developed for wafer-transfer. In order to obtain complete hermetic volume for higher vacuum and prevent leakage of hazardous gases, feedthrough motions involving transfer between the vacuum and motors are achieved by the use of metal bellows and magnetic coupling. An analysis of the coaxial-type magnetic coupling by employing the technique of current sheet model is presented. This approach is proved to be a precise and easy method. The construction of power drive module shows its advantage in maintaining ultrahigh vacuum and also enhances the efficiency for transporting the wafer, as compared with conventional design.
基金"211" Talent Start-up Fund Project of Northeast Agricultural University (183)
文摘In order to reduce the driving fatigue in sowing work, this paper based on heart rate （HR） as the main indicator to survey, tested and analyzed the fatigue condition of the drivers of three imported tractors and one domestic tractor in sowing work. The results showed that when driving the imported tractors in sowing work, the HR increasing rate was 10.4%-14.3%, labor intensity belonged to the light level; when driving domestic tractor in sowing work, the HR increasing rate was 23.4%-33.0%, it was remarkably bigger than that of driving imported tractors （P〈0.05）, labor intensity belonged to the middle level. The main effects on driving fatigue included the control methods, tractors＇ cab environment, processing time, operating content, and so on. Finally, we proposed the concrete measures and suggestions to reduce driving fatigue and improve drivers＇ work condition.
