The effects of the multimode diluted waveguide on quantum efficiency and saturation behavior of the evanescently coupled uni-traveling carrier (UTC) photodiode structures are reported. Two kinds of evanescently coup...The effects of the multimode diluted waveguide on quantum efficiency and saturation behavior of the evanescently coupled uni-traveling carrier (UTC) photodiode structures are reported. Two kinds of evanescently coupled uni-traveling carrier photodiodes (EC-UTC-PD) were designed and characterized: one is a conventional EC-UTC-PD structure with a multimode diluted waveguide integrated with a UTC-PD; and the other is a compact EC-UTC-PD structure which fused the multimode diluted waveguide and the UTC-PD structure together. The effect of the absorption behavior of the photodiodes on the efficiency and saturation characteristics of the EC-UTC-PDs is analyzed using 3-D beam propagation method, and the results indicate that both the responsivity and saturation power of the compact EC-UTC-PD structures can be further improved by incorporating an optimized compact multimode diluted waveguide.展开更多
基金supported by the National High Technology Research and Development Program of China (Nos. 2006AA01Z256, 2007AA03Z419,2007AA03Z417)the State Key Development Program for Basic Research of China (Nos. 2006CB604901,2006CB604902)the Nati-onal Natural Science Foundation of China (Nos. 90401025,60736036,60706009, 60777021)
文摘The effects of the multimode diluted waveguide on quantum efficiency and saturation behavior of the evanescently coupled uni-traveling carrier (UTC) photodiode structures are reported. Two kinds of evanescently coupled uni-traveling carrier photodiodes (EC-UTC-PD) were designed and characterized: one is a conventional EC-UTC-PD structure with a multimode diluted waveguide integrated with a UTC-PD; and the other is a compact EC-UTC-PD structure which fused the multimode diluted waveguide and the UTC-PD structure together. The effect of the absorption behavior of the photodiodes on the efficiency and saturation characteristics of the EC-UTC-PDs is analyzed using 3-D beam propagation method, and the results indicate that both the responsivity and saturation power of the compact EC-UTC-PD structures can be further improved by incorporating an optimized compact multimode diluted waveguide.