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A Mirror-like ECR Plasma Source for Ionosphere Environment Simulator
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作者 吕庆敖 任兆杏 +1 位作者 梁荣庆 程绍玉 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第2期733-736,共4页
A compact mirror-like ECR (electron cyclotron resonance) Plasma source for the ionosphere environment simulator was described for the fort time in China. The Overall sources system was composed of a 200 W 2.45 GHz mic... A compact mirror-like ECR (electron cyclotron resonance) Plasma source for the ionosphere environment simulator was described for the fort time in China. The Overall sources system was composed of a 200 W 2.45 GHz microwave source, a coastal 3A./4 TEM-mode microwave resonance applicator, column and cylindrical Nd-Fe-P magnets, a quartz bell-shaped discharge chamber, a gas inlet system and a plasma-diffusing bore. The preliminary experiment demonstrated that ambi-polar diffusion plasma stream into the simulator (-500 mm long) formed an environment with following parameters: a plasma density ne of 104 cm-3 - 106 cm-3, an electron temperature Te < 5 eV at a pressure P of 10-1 Pa-10-3 Pa, a Plasma uniformity of > 80% over the experimental target with a 160-mm-in-diameter, satisfying primarily the requirement of simulating in a severe ionosphere environment. 展开更多
关键词 ecr A Mirror-like ecr plasma Source for ionosphere Environment Simulator than
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Development of plasma sources for Dipole Research EXperiment(DREX) 被引量:1
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作者 肖青梅 王志斌 +6 位作者 鄂鹏 王晓钢 肖池阶 任洋 吉瀚涛 毛傲华 李立毅 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第5期15-20,共6页
Dipole Research EXperiment(DREX) is a new terrella device as part of the Space Plasma Environment Research Facility(SPERF) for laboratory studies of space physics relevant to the inner magnetospheric plasmas. Adeq... Dipole Research EXperiment(DREX) is a new terrella device as part of the Space Plasma Environment Research Facility(SPERF) for laboratory studies of space physics relevant to the inner magnetospheric plasmas. Adequate plasma sources are very important for DREX to achieve its scientific goals. According to different research requirements, there are two density regimes for DREX. The low density regime will be achieved by an electron cyclotron resonance(ECR) system for the ‘whistler/chorus' wave investigation, while the high density regime will be achieved by biased cold cathode discharge for the desired ‘Alfvén' wave study. The parameters of ‘whistler/chorus' waves and ‘Alfvén' waves are determined by the scaling law between space and laboratory plasmas in the current device. In this paper, the initial design of these two plasma sources for DREX is described. Focus is placed on the chosen frequency and operation mode of the ECR system which will produce relatively low density ‘artificial radiation belt' plasmas and the seed electrons, followed by the design of biased cold cathode discharge to generate plasma with high density. 展开更多
关键词 Dipole Research EXperiment(DREX) plasma sources electron cyclotron resonance(ecr bias cold cathode discharge wave particle interaction
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Numercial Simulation for Plasma Stream of ECR Plasma Source
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作者 Guo Sheyu Ning Zhaoyuan (Institute of Plasma Physics, Academia Sinica. Hefel, Anhul, 230031) 《真空科学与技术学报》 EI CAS CSCD 1992年第Z1期111-114,共4页
Using a Monte Carlo method and resonable data in our experiment device, we simulate the plasma stream of ECR plasma source on condition that the plasma is collisionless. We can get the distribution of ion density and ... Using a Monte Carlo method and resonable data in our experiment device, we simulate the plasma stream of ECR plasma source on condition that the plasma is collisionless. We can get the distribution of ion density and the effect of magnetic field on the plasma along the divergent magnetic field. The research is beneficial to plasma processing applications. 展开更多
关键词 ecr Numercial Simulation for plasma Stream of ecr plasma Source SIMULATION
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Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University 被引量:1
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作者 武文斌 任海涛 +7 位作者 彭士香 徐源 温佳美 孙江 张艾霖 张滔 张景丰 陈佳洱 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第9期310-317,共8页
Optical emission spectroscopy(OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion sour... Optical emission spectroscopy(OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion source at Peking University(PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance(ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper. 展开更多
关键词 electron cyclotron resonance(ecr ion source hydrogen plasma plasma diagnosis optical emission spectroscopy
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Atomic-Oxygen Beam Source with Compact ECR Plasma
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作者 任兆杏 沈克明 吕庆敖 《Plasma Science and Technology》 SCIE EI CAS CSCD 2002年第6期1545-1550,共6页
An atomic-oxygen beam source with compact ECR plasma was successfully investigated. The microwave was produced and transmitted in a coaxial mode, and coupled with the loop. The plasma was produced at a higher asymmetr... An atomic-oxygen beam source with compact ECR plasma was successfully investigated. The microwave was produced and transmitted in a coaxial mode, and coupled with the loop. The plasma was produced at a higher asymmetry magnetic mirror field, and neutralized with the molybdenum target at a lower asymmetry magnetic mirror field. The magnetic field was constituted with permanent magnets. This source has a higher flux density of atom beam, a lower operating pressure, a smaller power consumption and low-cost. When it was installed at the equipment to study the interaction of the beam with the surface, the operation was carried out very easily and with a good stability. 展开更多
关键词 ecr plasma atomic-oxygen beam source
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2.45GHz ECR强流等离子体源核心部件设计与实验研究 被引量:1
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作者 李钢 陈根 +2 位作者 段文学 彭标 尉传颂 《原子与分子物理学报》 北大核心 2024年第5期94-100,共7页
电子回旋共振(Electron Cyclotron Resonance,ECR)等离子体源能产生高电荷态离子、高流强的单电荷态离子,提供稳定的束流和良好的重复性.核心部件的设计对ECR等离子体源是至关重要的,磁场对等离子体的生成和分布有直接影响,良好的磁场... 电子回旋共振(Electron Cyclotron Resonance,ECR)等离子体源能产生高电荷态离子、高流强的单电荷态离子,提供稳定的束流和良好的重复性.核心部件的设计对ECR等离子体源是至关重要的,磁场对等离子体的生成和分布有直接影响,良好的磁场可以提高等离子体的性能和效率.采用有限元分析方法对ECR等离子体源磁场进行分析与设计,得到了满足设计需求与目标的磁场位形,通过高斯计对设计的永磁环轴向磁场精确测量,发现磁场仿真结果与实验结果吻合比较好,只是轴向磁场最大值及对应位置上有点偏差.通过集成实验,研究核心部件对离子源引出束流强度的影响,引出束流稳定且强度达到7 mA. 展开更多
关键词 ecr等离子体源 磁场设计 引出束流
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高电荷态ECR离子源的金属离子产生 被引量:1
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作者 曹云 马雷 +3 位作者 孙良亭 张子民 赵红卫 马保华 《原子核物理评论》 CAS CSCD 北大核心 2004年第1期26-29,共4页
简单介绍了采用炉子加热、挥发性金属化合物和溅射产生ECR离子源的金属离子的3种方法和实验结果,主要研究了铜、锌、镍和铁等多种电荷态离子的产生.对3种方法分别进行了探讨.
关键词 ecr离子源 加热炉 挥发性金属化合物法 高电荷态 等离子体溅射法 重离子加速器 放射性束产生
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紧凑型微波ECR等离子体源的设计及其特性研究 被引量:1
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作者 柴昊 贾军伟 +7 位作者 王斌 李鹏 崔爽 冯旭 李伟 刘展 李绍飞 陈权 《真空》 CAS 2021年第1期6-9,共4页
地面电推进试验、星载Langmuir探针地面标定等航天任务,均对等离子体参数的校准提出了需求。目前,等离子体参数的校准主要是在稳定的等离子体环境中,通过被测仪器与标准进行量值比对的方式实现,因此,获得稳定的等离子体环境是开展校准... 地面电推进试验、星载Langmuir探针地面标定等航天任务,均对等离子体参数的校准提出了需求。目前,等离子体参数的校准主要是在稳定的等离子体环境中,通过被测仪器与标准进行量值比对的方式实现,因此,获得稳定的等离子体环境是开展校准技术研究的重要前提。微波ECR源产生的等离子体具有均匀、稳定、可调节范围宽等特点,十分适合应用于等离子体校准中。本文设计研制了永磁型微波ECR等离子体源,并对该源的特性进行了实验研究,获得了该源的空间分布特性、稳定性实验结果。实验结果表明:研制的紧凑型微波ECR源稳定性、重复性均在10%以内,具有作为标准源应用于等离子体校准的潜力。 展开更多
关键词 微波ecr 等离子体校准 空间分布 稳定性
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ECR等离子源静电探针自动监测系统
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作者 彭辉俊 程健 吕鑫 《工业仪表与自动化装置》 2005年第5期49-50,共2页
ECR等离子源主要由电源系统、抽气系统、供气系统、真空室等设备组成,对于研究型设备,还包括测控部分。传统的测控系统对系统设备大多采用单台测控,人工调节,这样系统效率比较低。该文采用模拟开关切换8路静电探针得到不同位置的等离子... ECR等离子源主要由电源系统、抽气系统、供气系统、真空室等设备组成,对于研究型设备,还包括测控部分。传统的测控系统对系统设备大多采用单台测控,人工调节,这样系统效率比较低。该文采用模拟开关切换8路静电探针得到不同位置的等离子体参数,经电荷放大器对弱信号进行放大后显示。该方法在实际使用中取得了较好的效果。 展开更多
关键词 电荷放大器 ecr等离子源 静电探针
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微波ECR等离子体源离子注入法制备DLC薄膜 被引量:4
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作者 王金刚 马国佳 +2 位作者 邓新绿 李新 唐祯安 《真空科学与技术》 CSCD 北大核心 2003年第6期429-431,共3页
用微波ECR等离子体源离子注入 (PSII)法 ,在硅片 ( 10 0 )上制备了类金刚石 (DLC)薄膜 ,工作气体采用CH4气体 ,研究了不同的气体流量对薄膜的影响。对制备的DLC薄膜 ,用拉曼光谱、FT IR光谱、AFM以及纳米压痕等手段对化学成分、化学键... 用微波ECR等离子体源离子注入 (PSII)法 ,在硅片 ( 10 0 )上制备了类金刚石 (DLC)薄膜 ,工作气体采用CH4气体 ,研究了不同的气体流量对薄膜的影响。对制备的DLC薄膜 ,用拉曼光谱、FT IR光谱、AFM以及纳米压痕等手段对化学成分、化学键结构。 展开更多
关键词 类金刚石薄膜 电子回旋共振 微波ecr等离子体源离子注入法 DLC薄膜 拉曼光谱 纳米压痕
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用于电离层环境模拟器的ECR等离子体源 被引量:11
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作者 吕庆敖 任兆杏 +1 位作者 梁荣庆 程绍玉 《真空科学与技术》 CSCD 北大核心 2001年第3期226-228,共3页
为了经济地考验空间电离层等离子体对处于其中的飞行器表面的作用 ,需要在地面建立等离子体环境模拟器。本文就是为空间电离层环境模拟器研制的扩散型极低气压、低电子温度和极低密度的紧凑型电子回旋共振等离子体源的研制。结果显示 :... 为了经济地考验空间电离层等离子体对处于其中的飞行器表面的作用 ,需要在地面建立等离子体环境模拟器。本文就是为空间电离层环境模拟器研制的扩散型极低气压、低电子温度和极低密度的紧凑型电子回旋共振等离子体源的研制。结果显示 :在等离子体源下游 5 0cm处 ,在 10 -2 ~ 10 -3 Pa范围内获得了电子温度低于 5eV ,密度在 10 4 ~ 10 6cm-3 范围内的较为均匀的等离子体束流 。 展开更多
关键词 电子回旋共振 等离子体源 空间电离层 飞行器 环境模拟器 空间环境 模拟实验
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Effect of magnetic field distribution on ECR ion source discharge 被引量:1
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作者 Yu-Guo Liu Jian-Lin Ke +3 位作者 Guang-Yi Zhao Ben-Chao Lou Yong-Hong Hu Rong Liu 《Nuclear Science and Techniques》 SCIE CAS CSCD 2018年第9期157-164,共8页
An electron cyclotron resonance ion source model that uses a coaxial antenna to inject the RF power was simulated, and the corresponding hydrogen plasma densities of the ion source were calculated at different magneti... An electron cyclotron resonance ion source model that uses a coaxial antenna to inject the RF power was simulated, and the corresponding hydrogen plasma densities of the ion source were calculated at different magnetic field distributions via a fluid model. The results show that most of the microwave power is absorbed around the resonance surface near the antenna when the plasma density is below the cutoff density of 7.4 × 10^(16) m^(-3) for 2.45 GHz microwaves, and the simulation results also show that the plasma density is strongly influenced by the position and shape of the resonance surface, where a larger resonance surface would improve the plasma density. 展开更多
关键词 ecr ION SOURCE Magnetic field DISTRIBUTION plasma simulation
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A miniaturized 2.45 GHz ECR ion source at Peking University 被引量:1
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作者 Jia-Mei Wen Shi-Xiang Peng +6 位作者 Hai-Tao Ren Tao Zhang Jing-Feng Zhang Wen-Bin Wu Jiang Sun Zhi-Yu Guo Jia-Er Chen 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第5期374-377,共4页
A miniaturized 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion source, which has the ability of producing a tens-m A H+beam, has been built and tested at Peking University(PKU). Its plasma chamb... A miniaturized 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion source, which has the ability of producing a tens-m A H+beam, has been built and tested at Peking University(PKU). Its plasma chamber dimension is Φ30 mm×40 mm and the whole size of the ion source is Φ180 mm×130 mm. This source has a unique structure with the whole source body embedded into the extraction system. It can be operated in both continuous wave(CW) mode and pulse mode. In the CW mode, more than 20 m A hydrogen ion beam at 40 k V can be obtained with the microwave power of 180 W and about 1 m A hydrogen ion beam is produced with a microwave power of 10 W. In the pulse mode, more than50 m A hydrogen ion beam with a duty factor of 10% can be extracted when the peak microwave power is 1800 W. 展开更多
关键词 miniaturized ecr ion source hydrogen plasma continuous wave (CW) beam pulse beam
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关于强流ECR质子源氢等离子体发射光谱的诊断研究 被引量:1
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作者 冯哲 张小章 +1 位作者 刘占稳 赵红卫 《核技术》 CAS CSCD 北大核心 2010年第12期933-936,共4页
本文通过发射光谱诊断方法,用H_2等离子体的辐射碰撞模型对连续溃入的微波功率和全永磁磁场约束下产生高密度的H_2等离子体进行光谱诊断,计算出一定放电条件下(微波功率200-700 W,压强0-2 Pa)H^+的密度为1010-1011 cm^(-3),另外讨论了... 本文通过发射光谱诊断方法,用H_2等离子体的辐射碰撞模型对连续溃入的微波功率和全永磁磁场约束下产生高密度的H_2等离子体进行光谱诊断,计算出一定放电条件下(微波功率200-700 W,压强0-2 Pa)H^+的密度为1010-1011 cm^(-3),另外讨论了实验中观察到的Balmer系氢原子发射光谱强度随放电条件的变化规律。 展开更多
关键词 质子源 H2等离子体 激发态氢原子 巴尔默系 离子密度 发射光谱 辐射碰撞
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2.45GHz ECR等离子体源引出系统初步设计
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作者 李钢 《科技风》 2023年第31期68-70,共3页
电子回旋共振(Electron Cyclotron Resonance,ECR)等离子体源是用来产生单电荷态离子束的等离子体装置,它可以产生束流较强或者较高的电荷态离子,同时还能提供束流的稳定性、重复性和工作寿命。引出系统的设计对ECR等离子体源是至关重要... 电子回旋共振(Electron Cyclotron Resonance,ECR)等离子体源是用来产生单电荷态离子束的等离子体装置,它可以产生束流较强或者较高的电荷态离子,同时还能提供束流的稳定性、重复性和工作寿命。引出系统的设计对ECR等离子体源是至关重要的,引出系统对等离子体的引出束流有直接影响,良好的引出系统设计可以提高引出束流强度。采用有限元分析方法对ECR等离子体源引出系统进行分析与设计,得到了满足设计需求与目标的引出束流。 展开更多
关键词 ecr等离子体源 引出系统设计 引出系统仿真
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Enhancing the Performances of Conventional B-Geometry ECR Ion Sources with Broadband Microwave Radiation
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作者 G.D.Alton Y.Kawai +3 位作者 Y.Liu O.Tarvainen P.Suominen H.Koivisto 《Chinese Physics C》 SCIE CAS CSCD 北大核心 2007年第S1期128-132,共5页
As clearly demonstrated at several laboratories,the performances of electron-cyclotron resonance (ECR)ion sources can be enhanced by increasing the physical sizes(volumes)of embedded ECR zones.En- larged ECR zones hav... As clearly demonstrated at several laboratories,the performances of electron-cyclotron resonance (ECR)ion sources can be enhanced by increasing the physical sizes(volumes)of embedded ECR zones.En- larged ECR zones have been achieved by engineering the central magnetic field region of these sources so they are uniformly-distributed"volumes"in resonance with single-frequency rf power.Alternatively,the number of ECR surfaces in conventional minimum-B geometry sources can be increased by heating their plasmas with multiple,discrete frequency microwave radiation.Broadband rf power offers a simple,low cost and arguably more effective means for increasing the physical sizes of the ECR zones within the latter source type.In this article,theoretical arguments are made in support of the volume effect and the charge-state enhancing ef- fects of broadband microwave radiation(bandwidth:200MHz)plasma heating are demonstrated by comparing the high-charge-states of Ar ion beams,produced by powering a conventional minimum-B geometry,6.4GHz ECR ion source,equipped with a biased disk,with those produced by conventional bandwidth(bandwidth:~1.5MHz)radiation. 展开更多
关键词 ecr ion source ecr volume-effect ecr zone size broadband ecr plasma heating
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Transformation of the ATOMKI-ECRIS into a Plasma Device
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作者 S.Biri .Fekete +1 位作者 I.Iván I.Gál 《Chinese Physics C》 SCIE CAS CSCD 北大核心 2007年第S1期156-158,共3页
In order to extend the capabilities of the ATOMKI-ECRIS it is being transformed into a modified plasma device by changing its three main components with new ones.The cylindrical plasma chamber is replaced by a larger ... In order to extend the capabilities of the ATOMKI-ECRIS it is being transformed into a modified plasma device by changing its three main components with new ones.The cylindrical plasma chamber is replaced by a larger one(ID=10cm,L=40cm).A new NdFeB multi-pole radial trap was designed and pur- chased.The basic configuration is 6-pole,but 8-or 12-pole arrangements can also be formed later.The present microwave source(2000W,14.5GHz)and two additional low-power,wide frequency TWT amplifiers give many opportunities to form plasmas with different sizes and characters.Actually a new facility with two sharply different operation modes is being established.All the modifications are reversible so the transformation of the ECRIS into this new device or back can be easily done. 展开更多
关键词 plasma ecr ecrIS ION SOURCE
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ECR离子源束流发射度的实验研究(英文) 被引量:1
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作者 孙良亭 曹云 +8 位作者 冯玉成 李锦钰 赵红卫 张子民 王辉 马宝华 何伟 赵环昱 郭晓虹 《高能物理与核物理》 EI CSCD 北大核心 2005年第12期1179-1184,共6页
利用最新自行研制的电扫描发射度探测系统,在ECR离子源上进行了一系列关于ECR离子源引出束流发射度的研究.这套电扫描发射度探测系统安装在中国科学院近代物理研究所(兰州)的LECR3试验平台的束运线上.试验中,通过测量相关参数,研究了磁... 利用最新自行研制的电扫描发射度探测系统,在ECR离子源上进行了一系列关于ECR离子源引出束流发射度的研究.这套电扫描发射度探测系统安装在中国科学院近代物理研究所(兰州)的LECR3试验平台的束运线上.试验中,通过测量相关参数,研究了磁场、微波、掺气效应及负偏压效应等对引出束流发射度的影响.利用实验所得的结果与关于ECR等离子体和离子源束流发射度的半经验理论,分析推导了离子源各可调参数与ECR等离子体的直接关系,这为分析探索ECR离子源的工作机制提供了一定的参考依据. 展开更多
关键词 ecr离子源 发射度 ecr等离子体
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2.45GHz ECR离子源的微波阻抗匹配 被引量:2
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作者 钱程 陈志 +10 位作者 马鸿义 武启 张文慧 王云 杨尧 方兴 孙良亭 张雪珍 张子民 刘占稳 赵红卫 《原子核物理评论》 CAS CSCD 北大核心 2013年第1期32-37,共6页
ECR离子源的等离子体阻抗对其微波传输与阻抗匹配设计至关重要。在中国科学院近代物理研究所现有的2.45 GHz ECR质子源上,对等离子体阻抗进行了测量。首先用水吸收负载代替等离子体负载测量得到了所用微波窗阻抗,然后根据质子源测量数据... ECR离子源的等离子体阻抗对其微波传输与阻抗匹配设计至关重要。在中国科学院近代物理研究所现有的2.45 GHz ECR质子源上,对等离子体阻抗进行了测量。首先用水吸收负载代替等离子体负载测量得到了所用微波窗阻抗,然后根据质子源测量数据,推算得到了等离子体阻抗。实验结果表明,脊波导输出端阻抗与后续负载不完全匹配,等离子体阻抗随微波功率变化呈非线性。这些结果为ECR离子源过渡匹配和微波窗的设计提供了参考依据。 展开更多
关键词 ecr离子源 等离子体阻抗 脊波导 阻抗匹配
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3^(rd) and 4^(th) Generation ECRIS:Some Possible Scenarios
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作者 S.Gammino 《Chinese Physics C》 SCIE CAS CSCD 北大核心 2007年第S1期137-141,共5页
Since the end of’70s the Electron Cyclotron Resonance ion sources(ECRIS)allowed to increase both the energy and intensity of the beams available from different types of accelerators;perspectives for the future are st... Since the end of’70s the Electron Cyclotron Resonance ion sources(ECRIS)allowed to increase both the energy and intensity of the beams available from different types of accelerators;perspectives for the future are still optimistic.It is commonly agreed that only some ECRIS parameters have been fully exploited, whether some others are still not efficiently used,or not understood.The developments in the last 20 years have followed the so called Standard Model and the availability of higher frequency generators and higher field magnets have permitted relevant increase;the use of Nb_3Sn may extend the range.The availability of new schemes of microwave coupling to plasma is promising,and the focusing of the electromagnetic wave towards the chamber axis may improve the density of warm electron population.The paper will also describe some critical point of the 3^(rd) generation ECRIS(including technological troubles and limits)and the scenario for future 4^(th) generation ECRIS,operating at f=56—75GHz,to be built in 2010s. 展开更多
关键词 ecr ION sources plasma microwaves ION BEAMS SUPERCONDUCTING MAGNETS
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