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温度对磁控溅射氮化钛薄膜光学性能的影响 被引量:4
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作者 史新伟 宋开兰 +3 位作者 崔立斌 安子风 姚宁 王新昌 《真空》 CAS 2013年第4期18-21,共4页
本文采用能量过滤磁控溅射技术(Energy Filter Direct Magnetron Sputtering,EFDMS),通过改变沉积温度在玻璃衬底上制备了一系列TiN薄膜。利用XRD进行了物相鉴定,使用分光光度计、椭圆偏振光谱仪和四探针电阻仪测试了TiN薄膜的光学性能... 本文采用能量过滤磁控溅射技术(Energy Filter Direct Magnetron Sputtering,EFDMS),通过改变沉积温度在玻璃衬底上制备了一系列TiN薄膜。利用XRD进行了物相鉴定,使用分光光度计、椭圆偏振光谱仪和四探针电阻仪测试了TiN薄膜的光学性能。结果表明:制备的TiN薄膜为多晶态立方结构TiN,且随着衬底温度的升高,薄膜结晶性提高,在近红外区的反射率显著上升,可见光区的透光率有所下降,同时,薄膜的禁带宽度变宽,折射率减小,消光系数升高。 展开更多
关键词 TIN薄膜 能量过滤磁控溅射 光学性能
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Magnetohydrodynamic Casson Fluid Flow over an Infinite Vertical Plate with Chemical Reaction and Heat Generation
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作者 E. Omokhuale M. L. Jabaka 《American Journal of Computational Mathematics》 2019年第3期187-200,共14页
In this paper, the fluid examined was electrically conducting. The presence of a uniform transverse magnetic field at the plate was also taken into cognizance. The flow was governed by a modeled coupled nonlinear syst... In this paper, the fluid examined was electrically conducting. The presence of a uniform transverse magnetic field at the plate was also taken into cognizance. The flow was governed by a modeled coupled nonlinear system of partial differential equations (PDEs) in dimensional form which was transformed into non-dimensional form using some non-dimensional variables. Explicit finite difference method (EFDM) was employed to approximate the fluid velocity, temperature and concentration. The effects of embedded thermo physical parameters of engineering interests on the flow quantities viz. velocity, temperature, concentration field presented through graphs were also examined through a series of numerical experiments and discussed. During the course of the numerical computations, it was found that heat generation has a tendency to enhance the fluid velocity as an opposite result is seen with chemical reaction parameter. A comparison was conducted of present results with the previous literature to show the accuracy of the results. 展开更多
关键词 Heat Generation Casson FLUID Chemical Reaction MHD and efdm
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