Pt/Ti bottom electrodes were fabricated on SiO2/Si substrates by magnetron dual-facingtarget sputtering system. Lead zirconate titanate（PZT） thin films were deposited on Pt/Ti/SiO2/Si substrates by radio frequency ...Pt/Ti bottom electrodes were fabricated on SiO2/Si substrates by magnetron dual-facingtarget sputtering system. Lead zirconate titanate（PZT） thin films were deposited on Pt/Ti/SiO2/Si substrates by radio frequency （RF） magnetron sputtering system. The thickness of PZT thin films which were deposited for 5 h was about 800 nm. XRD spectra show that PZT thin films deposited in Ar ambience and rapid-thermal-annealed for 20 min at 700 ℃ have good crystallization behavior and perovskite structure. AFM micrographs show that mean diameter of crystallites is 70 nm and surface structures of PZT thin films are uniform and dense. Raw mean, root mean square roughness and mean roughness of PZT thin films are 34..357 rim, 2. 479 nm and 1. 954 nm respectively. As test frequency is 1 kHz, dielectric constant of PZT thin films is 327.5. Electric hysteresis loop shows that coercive field strength, residual polarization strength and spontaneous polarization strength of PZT thin films are 50 kV/cm, 10μC/cm^2 and 13μC/cm^2 respectively.展开更多
The electrocaloric effect(ECE) of multilayer ceramic capacitor(MLCC) of Y5 V type was directly measured via a differential scanning calorimetry(DSC) method and a reference resistor was used to calibrate the heat flow ...The electrocaloric effect(ECE) of multilayer ceramic capacitor(MLCC) of Y5 V type was directly measured via a differential scanning calorimetry(DSC) method and a reference resistor was used to calibrate the heat flow due to the heat dissipation. The results are compared with those calculated from Maxwell relations by using the polarization data obtained from the polarization–electric field hysteresis loops. The direct method shows a larger ECE temperature change, which is accounted for the situation approaches an ideal condition. For the indirect method using Maxwell relations, only the polarization projection along the electric field was taken into account, which will be less than the randomly distributed real polarizations that contribute to the ECE. The MLCCs exhibit a broad peak of ECE around 80 C, which will be favorite for the practical ECE cooling devices.展开更多
文摘Pt/Ti bottom electrodes were fabricated on SiO2/Si substrates by magnetron dual-facingtarget sputtering system. Lead zirconate titanate（PZT） thin films were deposited on Pt/Ti/SiO2/Si substrates by radio frequency （RF） magnetron sputtering system. The thickness of PZT thin films which were deposited for 5 h was about 800 nm. XRD spectra show that PZT thin films deposited in Ar ambience and rapid-thermal-annealed for 20 min at 700 ℃ have good crystallization behavior and perovskite structure. AFM micrographs show that mean diameter of crystallites is 70 nm and surface structures of PZT thin films are uniform and dense. Raw mean, root mean square roughness and mean roughness of PZT thin films are 34..357 rim, 2. 479 nm and 1. 954 nm respectively. As test frequency is 1 kHz, dielectric constant of PZT thin films is 327.5. Electric hysteresis loop shows that coercive field strength, residual polarization strength and spontaneous polarization strength of PZT thin films are 50 kV/cm, 10μC/cm^2 and 13μC/cm^2 respectively.
基金supported by the National Natural Science Foundation of China(Grant No.51372042)the Department of Education of Guangdong Province of People’s Republic of China(Grant No.2014GKXM039)+1 种基金Guangdong Provincial Natural Science Foundation(Grant No.2015A030308004)the NSFC-Guangdong Joint Fund(Grant NoU1501246)
文摘The electrocaloric effect(ECE) of multilayer ceramic capacitor(MLCC) of Y5 V type was directly measured via a differential scanning calorimetry(DSC) method and a reference resistor was used to calibrate the heat flow due to the heat dissipation. The results are compared with those calculated from Maxwell relations by using the polarization data obtained from the polarization–electric field hysteresis loops. The direct method shows a larger ECE temperature change, which is accounted for the situation approaches an ideal condition. For the indirect method using Maxwell relations, only the polarization projection along the electric field was taken into account, which will be less than the randomly distributed real polarizations that contribute to the ECE. The MLCCs exhibit a broad peak of ECE around 80 C, which will be favorite for the practical ECE cooling devices.
