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退火对非晶ErAlO高k栅介质薄膜特性的影响
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作者 陈伟 方泽波 《西华师范大学学报(自然科学版)》 2010年第1期38-41,67,共5页
利用射频磁控溅射法在P型Si(100)衬底上成功制备了非晶Er2O3-Al2O3(ErAlO)栅介质薄膜,得到了电学特性优异的薄膜样品,对薄膜的退火研究发现,600℃氧气氛退火可使ErAlO薄膜的介电常数得到了提高并使其漏电流特性也得到改善,退火后样品的... 利用射频磁控溅射法在P型Si(100)衬底上成功制备了非晶Er2O3-Al2O3(ErAlO)栅介质薄膜,得到了电学特性优异的薄膜样品,对薄膜的退火研究发现,600℃氧气氛退火可使ErAlO薄膜的介电常数得到了提高并使其漏电流特性也得到改善,退火后样品的有效介电常数达到了15,在-1.5V偏压下,漏电流密度仅为2.0×10-7A/cm2.氧气退火消除了薄膜中原有的缺陷,并使得薄膜更加致密,表面更加平整. 展开更多
关键词 高K栅介质 eralo 氧气退火
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Fracture Mechanics,Crack Propagation and Microhardness Studies on Flux Grown ErAlO_3 Single Crystals 被引量:3
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作者 K.K.Bamzai and P.N.Kotru (Department of Physics, University of Jammu, Jammu 180006, India) B.M Wanklyn (Department of Physics, Clarendon Laboratory, Oxford University, Oxford OX1 3PU, U.K.) 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2000年第4期405-410,共6页
Results on fracture mechanics and crack propagation have been obtained, making use of Vickers microhardness studies on two different crystallographic planes [(110) and (001)] of flux grown erbium aluminate crystals in... Results on fracture mechanics and crack propagation have been obtained, making use of Vickers microhardness studies on two different crystallographic planes [(110) and (001)] of flux grown erbium aluminate crystals in the load ranging from 10-100 g. The variation of microhardness with load which is best explained by Hays and Kendall's law leads to the load independent values of hardness. Classification of cracks is dealt with and it is reported that the transition from Palmqvist to median types of cracks occurs at higher loads. The values of fracture toughness (K_C), and brittleness index (B_i) are calculated using median types of cracks. 展开更多
关键词 Fracture Mechanics Crack Propagation and Microhardness Studies on Flux Grown eralo3 Single Crystals
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