Laser tracers are a three-dimensional coordinate measurement system that are widely used in industrial measurement.We propose a geometric error identification method based on multi-station synchronization laser tracer...Laser tracers are a three-dimensional coordinate measurement system that are widely used in industrial measurement.We propose a geometric error identification method based on multi-station synchronization laser tracers to enable the rapid and high-precision measurement of geometric errors for gantry-type computer numerical control(CNC)machine tools.This method also improves on the existing measurement efficiency issues in the single-base station measurement method and multi-base station time-sharing measurement method.We consider a three-axis gantry-type CNC machine tool,and the geometric error mathematical model is derived and established based on the combination of screw theory and a topological analysis of the machine kinematic chain.The four-station laser tracers position and measurement points are realized based on the multi-point positioning principle.A self-calibration algorithm is proposed for the coordinate calibration process of a laser tracer using the Levenberg-Marquardt nonlinear least squares method,and the geometric error is solved using Taylor’s first-order linearization iteration.The experimental results show that the geometric error calculated based on this modeling method is comparable to the results from the Etalon laser tracer.For a volume of 800 mm×1000 mm×350 mm,the maximum differences of the linear,angular,and spatial position errors were 2.0μm,2.7μrad,and 12.0μm,respectively,which verifies the accuracy of the proposed algorithm.This research proposes a modeling method for the precise measurement of errors in machine tools,and the applied nature of this study also makes it relevant both to researchers and those in the industrial sector.展开更多
Parallel kinematic machines (PKMs) have the advantages of a compact structure,high stiffness,a low moving inertia,and a high load/weight ratio.PKMs have been intensively studied since the 1980s,and are still attract...Parallel kinematic machines (PKMs) have the advantages of a compact structure,high stiffness,a low moving inertia,and a high load/weight ratio.PKMs have been intensively studied since the 1980s,and are still attracting much attention.Compared with extensive researches focus on their type/dimensional synthesis,kinematic/dynamic analyses,the error modeling and separation issues in PKMs are not studied adequately,which is one of the most important obstacles in its commercial applications widely.Taking a 3-PRS parallel manipulator as an example,this paper presents a separation method of source errors for 3-DOF parallel manipulator into the compensable and non-compensable errors effectively.The kinematic analysis of 3-PRS parallel manipulator leads to its six-dimension Jacobian matrix,which can be mapped into the Jacobian matrix of actuations and constraints,and then the compensable and non-compensable errors can be separated accordingly.The compensable errors can be compensated by the kinematic calibration,while the non-compensable errors may be adjusted by the manufacturing and assembling process.Followed by the influence of the latter,i.e.,the non-compensable errors,on the pose error of the moving platform through the sensitivity analysis with the aid of the Monte-Carlo method,meanwhile,the configurations of the manipulator are sought as the pose errors of the moving platform approaching their maximum.The compensable and non-compensable errors in limited-DOF parallel manipulators can be separated effectively by means of the Jacobian matrix of actuations and constraints,providing designers with an informative guideline to taking proper measures for enhancing the pose accuracy via component tolerancing and/or kinematic calibration,which can lay the foundation for the error distinguishment and compensation.展开更多
With the development of new materials and ultra-precision processing technology, the sizes of mea- sured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The trad...With the development of new materials and ultra-precision processing technology, the sizes of mea- sured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The traditional measurement method based on reference datum is inadequate for measuring a high-precision object when the quality of the reference datum is approximately within the same order as that of the object. Self-referenced measurement techniques provide an effective means when the direct reference-based method cannot satisfy the required measurement or calibration accuracy. This paper discusses the reconstruction algorithms for self-referenced measurement and connects lateral shearing interferometry and multi-probe error separation. In lateral shearing interferometry, the reconstruction algorithms are generally categorized into modal or zonal methods. The multi-probe error separation techniques for straightness measurement are broadly divided into two-point and three-point methods. The common features of the lateral sheafing interferometry method and the multi-probe error separation method are identified. We conclude that the reconstruction principle in lateral shearing interferometry is similar to the two-point method in error separation on the condition that no yaw error exists. This similarity may provide a basis or inspiration for the development of both classes of methods.展开更多
In this study,three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement.Here,the harmonic suppression is discussed first to set suitable orientation angles...In this study,three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement.Here,the harmonic suppression is discussed first to set suitable orientation angles among three sensors.Monte Carlo simulation is utilized to test the error separation and optimize the orientation angles and off-axial distance.The experimental setup is established using chromatic confocal sensors with a precise rotary platform.The experimental results show that the measured roundness with an orientation-angle combination of(0°,90.1°,and 178.6°)is much better than that of another nonoptimal selection(0°,90.4°,and 177.4°).The roundness error is only 0.7%between the proposed measurement system and an expensive ultraprecision roundness meter.Furthermore,it is proven that the eccentricity distance should be decreased as small as possible to improve the measurement accuracy.In sum,this paper proposes a feasible method for roundness measurement with reliable simulations,easily integrated sensors,and an ordinary precision rotary platform.展开更多
Round inductosyn is widely used in inertial navigation test equipment, and its accuracy has significant effect on the general accuracy of the equipment. Four main errors of round inductosyn,i.e. the first-order long-p...Round inductosyn is widely used in inertial navigation test equipment, and its accuracy has significant effect on the general accuracy of the equipment. Four main errors of round inductosyn,i.e. the first-order long-period (360°) harmonic error, the second-order long-period harmonic error, the first-order short-period harmonic error and the second-order short-period harmonic error, are described, and the orthogonality of these four kinds of errors is studied. An error separating technology is proposed to separate these four kinds of errors, and in the process of separating the short-period harmonic errors, the arrangement in the order of decimal part of the angle pitch number can be omitted. The effectiveness of the technology proposed is proved through measuring and adjusting the angular errors.展开更多
This paper presents a method of rapid machine tool error modeling, separation, and compensation using grating ruler. A robust modeling procedure for geometric errors is developed and a fast data processing algorithm i...This paper presents a method of rapid machine tool error modeling, separation, and compensation using grating ruler. A robust modeling procedure for geometric errors is developed and a fast data processing algorithm is designed by using the error separation technique. After compensation with the new method, the maximum position error of the experiment workbench can be reduced from 400 μm to 15 μm. The experimental results show the effectiveness and accuracy of this method.展开更多
Harmonic suppression, non-periodic and non-closing in straightness profile error that will bring about harmonic component distortion in measurement result are analyzed. The countermeasure-a novel accurate two-probe me...Harmonic suppression, non-periodic and non-closing in straightness profile error that will bring about harmonic component distortion in measurement result are analyzed. The countermeasure-a novel accurate two-probe method in time domain is put forward to measure straight-going component motion error in machine tools based on the frequency domain 3-point method after symmetrical continuation of probes' primitive signal. Both straight-going component motion error in machine tools and the profile error in workpiece that is manufactured on this machine can be measured at the same time. The information is available to diagnose the fault origin of machine tools. The analysis result is proved to be correct by the experiment.展开更多
In order to measure three-axis intersection error, two crosshair targets were fixed in the inner axis frame of a three-axis turntable. Also a theodolite was used to point its telescope to the targets and to measure th...In order to measure three-axis intersection error, two crosshair targets were fixed in the inner axis frame of a three-axis turntable. Also a theodolite was used to point its telescope to the targets and to measure the horizontal angles when three axes were on equi-spaced angle positions. The calculation equations of the axis intersection were deduced from the mounting position of the theodolite, positions of two targets, angular positions of three axes, and the measured horizontal angles with the theodolite. Finally, a practical measurement is carried out on a horizontal three-axis turntable and error analysis is conducted.展开更多
基金Supported by Natural Science Foundation of Shaanxi Province of China(Grant No.2021JM010)Suzhou Municipal Natural Science Foundation of China(Grant Nos.SYG202018,SYG202134).
文摘Laser tracers are a three-dimensional coordinate measurement system that are widely used in industrial measurement.We propose a geometric error identification method based on multi-station synchronization laser tracers to enable the rapid and high-precision measurement of geometric errors for gantry-type computer numerical control(CNC)machine tools.This method also improves on the existing measurement efficiency issues in the single-base station measurement method and multi-base station time-sharing measurement method.We consider a three-axis gantry-type CNC machine tool,and the geometric error mathematical model is derived and established based on the combination of screw theory and a topological analysis of the machine kinematic chain.The four-station laser tracers position and measurement points are realized based on the multi-point positioning principle.A self-calibration algorithm is proposed for the coordinate calibration process of a laser tracer using the Levenberg-Marquardt nonlinear least squares method,and the geometric error is solved using Taylor’s first-order linearization iteration.The experimental results show that the geometric error calculated based on this modeling method is comparable to the results from the Etalon laser tracer.For a volume of 800 mm×1000 mm×350 mm,the maximum differences of the linear,angular,and spatial position errors were 2.0μm,2.7μrad,and 12.0μm,respectively,which verifies the accuracy of the proposed algorithm.This research proposes a modeling method for the precise measurement of errors in machine tools,and the applied nature of this study also makes it relevant both to researchers and those in the industrial sector.
基金supported by Tianjin Research Program of Application Foundation and Advanced Technology of China (Grant No.11JCZDJC22700)National Natural Science Foundation of China (GrantNo. 51075295,Grant No. 50675151)+1 种基金National High-tech Research and Development Program of China (863 Program,Grant No.2007AA042001)PhD Programs Foundation of Ministry of Education of China (Grant No. 20060056018)
文摘Parallel kinematic machines (PKMs) have the advantages of a compact structure,high stiffness,a low moving inertia,and a high load/weight ratio.PKMs have been intensively studied since the 1980s,and are still attracting much attention.Compared with extensive researches focus on their type/dimensional synthesis,kinematic/dynamic analyses,the error modeling and separation issues in PKMs are not studied adequately,which is one of the most important obstacles in its commercial applications widely.Taking a 3-PRS parallel manipulator as an example,this paper presents a separation method of source errors for 3-DOF parallel manipulator into the compensable and non-compensable errors effectively.The kinematic analysis of 3-PRS parallel manipulator leads to its six-dimension Jacobian matrix,which can be mapped into the Jacobian matrix of actuations and constraints,and then the compensable and non-compensable errors can be separated accordingly.The compensable errors can be compensated by the kinematic calibration,while the non-compensable errors may be adjusted by the manufacturing and assembling process.Followed by the influence of the latter,i.e.,the non-compensable errors,on the pose error of the moving platform through the sensitivity analysis with the aid of the Monte-Carlo method,meanwhile,the configurations of the manipulator are sought as the pose errors of the moving platform approaching their maximum.The compensable and non-compensable errors in limited-DOF parallel manipulators can be separated effectively by means of the Jacobian matrix of actuations and constraints,providing designers with an informative guideline to taking proper measures for enhancing the pose accuracy via component tolerancing and/or kinematic calibration,which can lay the foundation for the error distinguishment and compensation.
文摘With the development of new materials and ultra-precision processing technology, the sizes of mea- sured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The traditional measurement method based on reference datum is inadequate for measuring a high-precision object when the quality of the reference datum is approximately within the same order as that of the object. Self-referenced measurement techniques provide an effective means when the direct reference-based method cannot satisfy the required measurement or calibration accuracy. This paper discusses the reconstruction algorithms for self-referenced measurement and connects lateral shearing interferometry and multi-probe error separation. In lateral shearing interferometry, the reconstruction algorithms are generally categorized into modal or zonal methods. The multi-probe error separation techniques for straightness measurement are broadly divided into two-point and three-point methods. The common features of the lateral sheafing interferometry method and the multi-probe error separation method are identified. We conclude that the reconstruction principle in lateral shearing interferometry is similar to the two-point method in error separation on the condition that no yaw error exists. This similarity may provide a basis or inspiration for the development of both classes of methods.
基金This work was supported by the National Natural Science Foundation of China(61905129)Start-up Funding of Tsinghua Shenzhen International Graduate School,Tsinghua University(QD2020001N)Shenzhen Stable Supporting Program(WDZC20200820200655001).
文摘In this study,three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement.Here,the harmonic suppression is discussed first to set suitable orientation angles among three sensors.Monte Carlo simulation is utilized to test the error separation and optimize the orientation angles and off-axial distance.The experimental setup is established using chromatic confocal sensors with a precise rotary platform.The experimental results show that the measured roundness with an orientation-angle combination of(0°,90.1°,and 178.6°)is much better than that of another nonoptimal selection(0°,90.4°,and 177.4°).The roundness error is only 0.7%between the proposed measurement system and an expensive ultraprecision roundness meter.Furthermore,it is proven that the eccentricity distance should be decreased as small as possible to improve the measurement accuracy.In sum,this paper proposes a feasible method for roundness measurement with reliable simulations,easily integrated sensors,and an ordinary precision rotary platform.
文摘Round inductosyn is widely used in inertial navigation test equipment, and its accuracy has significant effect on the general accuracy of the equipment. Four main errors of round inductosyn,i.e. the first-order long-period (360°) harmonic error, the second-order long-period harmonic error, the first-order short-period harmonic error and the second-order short-period harmonic error, are described, and the orthogonality of these four kinds of errors is studied. An error separating technology is proposed to separate these four kinds of errors, and in the process of separating the short-period harmonic errors, the arrangement in the order of decimal part of the angle pitch number can be omitted. The effectiveness of the technology proposed is proved through measuring and adjusting the angular errors.
文摘This paper presents a method of rapid machine tool error modeling, separation, and compensation using grating ruler. A robust modeling procedure for geometric errors is developed and a fast data processing algorithm is designed by using the error separation technique. After compensation with the new method, the maximum position error of the experiment workbench can be reduced from 400 μm to 15 μm. The experimental results show the effectiveness and accuracy of this method.
基金National Nature Science Foundation of China.No.50075056
文摘Harmonic suppression, non-periodic and non-closing in straightness profile error that will bring about harmonic component distortion in measurement result are analyzed. The countermeasure-a novel accurate two-probe method in time domain is put forward to measure straight-going component motion error in machine tools based on the frequency domain 3-point method after symmetrical continuation of probes' primitive signal. Both straight-going component motion error in machine tools and the profile error in workpiece that is manufactured on this machine can be measured at the same time. The information is available to diagnose the fault origin of machine tools. The analysis result is proved to be correct by the experiment.
文摘In order to measure three-axis intersection error, two crosshair targets were fixed in the inner axis frame of a three-axis turntable. Also a theodolite was used to point its telescope to the targets and to measure the horizontal angles when three axes were on equi-spaced angle positions. The calculation equations of the axis intersection were deduced from the mounting position of the theodolite, positions of two targets, angular positions of three axes, and the measured horizontal angles with the theodolite. Finally, a practical measurement is carried out on a horizontal three-axis turntable and error analysis is conducted.