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A Bilayer High-Temperature Dielectric Film with Superior Breakdown Strength and Energy Storage Density 被引量:4
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作者 Jiang-Bo Ping Qi-Kun Feng +4 位作者 Yong-Xin Zhang Xin-Jie Wang Lei Huang Shao-Long Zhong Zhi-Min Dang 《Nano-Micro Letters》 SCIE EI CAS CSCD 2023年第9期479-491,共13页
The further electrification of various fields in production and daily life makes it a topic worthy of exploration to improve the performance of capacitors for a long time,including thin-film capacitors.The discharge e... The further electrification of various fields in production and daily life makes it a topic worthy of exploration to improve the performance of capacitors for a long time,including thin-film capacitors.The discharge energy density of thin-film capacitors that serves as one of the important types directly depends on electric field strength and the dielectric constant of the insulation material.However,it has long been a great challenge to improve the breakdown strength and dielectric constant simultaneously.Considering that boron nitride nanosheets(BNNS)possess superior insulation and thermal conductivity owing to wide band gap and 2-dimensional structure,a bilayer polymer film is prepared via coating BNNS by solution casting on surface of polyethylene terephthalate(PET)films.By revealing the bandgap and insulating behavior with UV absorption spectrum,leakage current,and finite element calculation,it is manifested that nanocoating contributes to enhance the bandgap of polymer films,thereby suppressing the charge injection by redirecting their transport from electrodes.Worthy to note that an ultrahigh breakdown field strength(~736 MV m^(−1)),an excellent discharge energy density(~8.77 J cm^(−3))and a prominent charge-discharge efficiency(~96.51%)are achieved concurrently,which is ascribed to the contribution of BNNS ultrathin layer.In addition,the modified PET films also have superior comprehensive performance at high temperatures(~120°C).The materials and methods here selected are easily accessible and facile,which are suitable for large-scale roll-to-roll process production,and are of certain significance to explore the methods about film modification suitable for commercial promotion. 展开更多
关键词 film capacitor Dielectric property Boron nitride nanosheets Surface coating Energy storage characteristics
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Experimental Characterization of ALD Grown Al<SUB>2</SUB>O<SUB>3</SUB>Film for Microelectronic Applications 被引量:1
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作者 Yuxi Wang Yida Chen +6 位作者 Yong Zhang Zhaoxin Zhu Tao Wu Xufeng Kou Pingping Ding Romain Corcolle Jangyong Kim 《Advances in Materials Physics and Chemistry》 2021年第1期7-19,共13页
<span style="white-space:normal;">The study of high dielectric materials has received great attention lately as a key passive component for the application of metal-insulator-metal (MIM) capacitors. In... <span style="white-space:normal;">The study of high dielectric materials has received great attention lately as a key passive component for the application of metal-insulator-metal (MIM) capacitors. In this paper, 50 nm thick Al</span><sub style="white-space:normal;">2</sub><span style="white-space:normal;">O</span><sub style="white-space:normal;">3</sub><span style="white-space:normal;"> thin films have been prepared by atomic layer deposition technique on indium tin oxide (ITO) pre-coated glass substrates and titanium nitride (TiN) coated Si substrates with typical MIM capacitor structure. Photolithography and metal lift-off technique were used for processing of the MIM capacitors. Semiconductor Analyzer with probe station was used to perform capacitance-voltage (C-V) characterization with low-medium frequency range. Current-voltage (I-V) characteristics of MIM capacitors were measured on precision source/measurement system. The performance of Al</span><sub style="white-space:normal;">2</sub><span style="white-space:normal;">O</span><sub style="white-space:normal;">3</sub><span style="white-space:normal;"> films of MIM capacitors on glass was examined in the voltage range from <span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;">&#8722;</span></span></span></span>5 to 5 V with a frequency range from 10 kHz to 5 MHz. Au/Al</span><sub style="white-space:normal;">2</sub><span style="white-space:normal;">O</span><sub style="white-space:normal;">3</sub><span style="white-space:normal;">/ITO/Glass MIM capacitors demonstrate a capacitance density of 1.6 fF/μm</span><sup style="white-space:normal;">2</sup><span style="white-space:normal;">at 100 kHz, a loss tangent ~0.005 at 100 kHz and a leakage current of 1.79 × 10</span><sup style="white-space:normal;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;">&#8722;</span></span></span></span>8</sup><span style="white-space:normal;"> A/cm</span><sup style="white-space:normal;">2</sup><span style="white-space:normal;"> at 1 MV/cm (5 V) at room temperature. Au/Al</span><sub style="white-space:normal;">2</sub><span style="white-space:normal;">O</span><sub style="white-space:normal;">3</sub><span style="white-space:normal;">/TiN/Si MIM capacitors demonstrate a capacitance density of 1.5 fF/μm</span><sup style="white-space:normal;">2</sup><span style="white-space:normal;"> at 100 kHz, a loss tangent ~0.007 at 100 kHz and a lower leakage current of 2.93 × 10</span><sup style="white-space:normal;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;"><span style="white-space:nowrap;">&#8722;</span></span></span></span>10</sup><span style="white-space:normal;"> A/cm</span><sup style="white-space:normal;">2</sup><span style="white-space:normal;"> at 1 MV/cm (5 V) at room temperature. The obtained electrical properties could indicate a promising application of MIM Capacitors.</span> 展开更多
关键词 Dielectrics High-k Thin film capacitors Atomic Layer Deposition MICROFABRICATION
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Electrical Properties of Compositional Al2O3 Supplemented HfO2 Thin Films by Atomic Layer Deposition
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作者 Yuxi Wang Yong Zhang +4 位作者 Tingqu Wu Weizheng Fang Xufeng Kou Tao Wu Jangyong Kim 《Materials Sciences and Applications》 CAS 2022年第9期491-505,共15页
With advanced research for dielectrics including capacitors in DRAMs, decoupling filters in microcircuits and insulating gates in transistors, a lot of demand for the new challenging of high-k materials in semiconduct... With advanced research for dielectrics including capacitors in DRAMs, decoupling filters in microcircuits and insulating gates in transistors, a lot of demand for the new challenging of high-k materials in semiconductor industries has been emerged. This study explores and addresses the experimental approach for composite materials with one of the major concerns of high capacitance, and low leakage, as well as ease of integration technology. The characteristics of Al<sub>2</sub>O<sub>3</sub> supported HfO<sub>2</sub> (AHO) thin films for a series of different Hf ratios with Al<sub>2</sub>O<sub>3</sub> dielectrics by atomic layer deposition demonstrated as a candidate material. A composite AHO films with the homogeneous compositions of Al and Hf atoms into the Al-Hf-O mixed oxide system could stabilize the polycrystalline structure with increasing of dielectric constant (k) and decreasing of leakage current density, as well as a higher breakdown voltage than HfO<sub>2</sub> film on its own. 70 nm thick AHO thin films with different composition of Al and Hf contents were prepared by atomic layer deposition technique on titanium nitride (TiN) and silicon dioxide (SiO<sub>2</sub>) coated Si substrates. Photolithography and metal lift-off technique were used for the device fabrication of the metal-insulator-metal (MIM) capacitor structures. AHO films on TiN/SiO<sub>2</sub>/Si were measured by semiconductor analyzer and source/ measure system with probe station in the voltage range from -5 to 5 V with a frequency range from 10 kHz to 1 MHz were used to conduct capacitance-voltage (C-V) measurements with low/medium frequency range and current-voltage (I-V) measurements. It was found that Au/AHO/TiN/SiO<sub>2</sub>/Si MIM capacitors demonstrate a capacitance density of 1.5 - 4.5 fF/μm<sup>2</sup> at 10 kHz, a loss tangent of 0.02 - 0.04 at 10 kHz, dielectric constant of 11.7 - 35.5 depending on the composition and a low leakage current of 1.7 × 10<sup>-9</sup> A/cm<sup>2</sup> at 0.5 MV/cm at room temperature. The acquired experimental results could show the possibility of compositional alloy thin films that could potentially replace or open new market for high-k challenges in semiconductor technology. 展开更多
关键词 High-k Dielectrics Hafnium Oxide Aluminium Oxide COMPOSITES Thin film capacitors Atomic Layer Deposition MICROFABRICATION
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Composition change and capacitance properties of ruthenium oxide thin film 被引量:1
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作者 刘泓 甘卫平 +1 位作者 刘仲武 郑峰 《Journal of Central South University》 SCIE EI CAS CSCD 2015年第1期8-13,共6页
Ru O2·n H2O film was deposited on tantalum foils by electrodeposition and heat treatment using Ru Cl3·3H2O as precursor.Surface morphology, composition change and cyclic voltammetry from precursor to amorpho... Ru O2·n H2O film was deposited on tantalum foils by electrodeposition and heat treatment using Ru Cl3·3H2O as precursor.Surface morphology, composition change and cyclic voltammetry from precursor to amorphous and crystalline RuO2·n H2O films were studied by X-ray diffractometer, Fourier transformation infrared spectrometer, differential thermal analyzer, scanning electron microscope and electrochemical analyzer, respectively. The results show that the precursor was transformed gradually from amorphous to crystalline phase with temperature. When heat treated at 300 °C for 2h, RuO2·n H2O electrode surface gains mass of2.5 mg/cm2 with specific capacitance of 782 F/g. Besides, it is found that the specific capacitance of the film decreased by roughly20% with voltage scan rate increasing from 5 to 250 m V/s. 展开更多
关键词 ruthenium oxide thin film heat treatment composition change electrochemical capacitor
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Aging Mechanism and Life Estimation of Photovoltaic Inverter DC-link Capacitors in Alternating Humid and Thermal Environment
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作者 Quanyi Gao Shuaibing Li +2 位作者 Yi Cui Yongqiang Kang Haiying Dong 《Chinese Journal of Electrical Engineering》 EI CSCD 2024年第1期48-62,共15页
DC-link capacitors play a vital role in managing ripple voltage and current in converters and various devices.This study focuses on exploring the aging characteristics of DC-link capacitors in alternating humid and th... DC-link capacitors play a vital role in managing ripple voltage and current in converters and various devices.This study focuses on exploring the aging characteristics of DC-link capacitors in alternating humid and thermal environments aligned with the operational conditions in photovoltaic and wind power applications.Adhering to relevant power equipment standards,we designed a 24-h alternating humid and thermal aging environment tailored to the requirements of DC-link capacitors.An aging test platform is established,and 20 widely used metallized polypropylene film capacitors are selected for evaluation.Parameters such as the capacitance,equivalent series resistance(ESR),and phase angle are assessed during aging,as well as the onset time and extent of aging at various intervals.This study focuses on the aging mechanisms,analyzing electrode corrosion,the self-healing process,and dielectric aging.Fitting the aging characteristics enabled us to calculate the lifespan of the capacitor and predict it under different degrees of capacitance decay.The results show that under alternating humid and thermal conditions,capacitance attenuation and ESR increase exhibit exponential nonlinearity,influenced by factors such as the oxidation and self-healing of capacitive metal electrodes,dielectric main-chain fracture,and crystal transformation.This study underscores the pivotal role of encapsulation in determining the aging decay time. 展开更多
关键词 DC-link capacitors aging mechanism life prediction metallized film capacitors
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Effect of Frequency on Degradation in BOPP Films Under Repetitively Pulsed Voltage
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作者 Chuansheng Zhang Yu Feng +3 位作者 Fei Kong Bangdou Huang Cheng Zhang Tao Shao 《CSEE Journal of Power and Energy Systems》 SCIE EI CSCD 2024年第3期1280-1290,共11页
Operating conditions of film capacitors are complex,and the problem of film insulation failure caused by repetitively pulsed voltage is becoming ever serious.Degradation of the film under repetitively pulsed voltage c... Operating conditions of film capacitors are complex,and the problem of film insulation failure caused by repetitively pulsed voltage is becoming ever serious.Degradation of the film under repetitively pulsed voltage cannot be accurately evaluated by the average breakdown electric field.In this paper,the effects of pulsed electric field and pulse repetition frequency on the breakdown in biaxially oriented polypropylene(BOPP)films are investigated.Three phases of BOPP degradation are proposed based on the voltage amplitude,i.e.,maintenance(M),decline(D),and near-zero(N).Evolution of the BOPP film from degradation to breakdown at different frequencies is presented.Meanwhile,transition of discharge mode and elemental composition of the film are analyzed.Experimental results show continuous heat generation under repetitive microsecond pulses is the dominant factor for degradation of BOPP film.The number of applied pulses and the repetitive stressing time decrease exponentially with increase of frequency.This research can be contributed to the safe and reliable operation of capacitors. 展开更多
关键词 AGING BREAKDOWN film capacitor POLYPROPYLENE repetitive pulse
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Achieving a high energy storage density in Ag(Nb,Ta)O_(3) antiferroelectric films via nanograin engineering 被引量:5
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作者 Hongbo CHENG Xiao ZHAI +7 位作者 Jun OUYANG Limei ZHENG Nengneng LUO Jinpeng LIU Hanfei ZHU Yingying WANG Lanxia HAO Kun WANG 《Journal of Advanced Ceramics》 SCIE EI CAS CSCD 2023年第1期196-206,共11页
Due to its lead-free composition and a unique double polarization hysteresis loop with a large maximum polarization(Pmax)and a small remnant polarization(Pr),AgNbO_(3)-based antiferroelectrics(AFEs)have attracted exte... Due to its lead-free composition and a unique double polarization hysteresis loop with a large maximum polarization(Pmax)and a small remnant polarization(Pr),AgNbO_(3)-based antiferroelectrics(AFEs)have attracted extensive research interest for electric energy storage applications.However,a low dielectric breakdown field(Eb)limits an energy density and its further development.In this work,a highly efficient method was proposed to fabricate high-energy-density Ag(Nb,Ta)O_(3) capacitor films on Si substrates,using a two-step process combining radio frequency(RF)-magnetron sputtering at 450℃and post-deposition rapid thermal annealing(RTA).The RTA process at 700℃led to sufficient crystallization of nanograins in the film,hindering their lateral growth by employing short annealing time of 5 min.The obtained Ag(Nb,Ta)O_(3) films showed an average grain size(D)of~14 nm(obtained by Debye-Scherrer formula)and a slender room temperature(RT)polarization-electric field(P-E)loop(Pr≈3.8 mC·cm^(−2) and P_(max)≈38 mC·cm^(−2) under an electric field of~3.3 MV·cm^(−1)),the P-E loop corresponding to a high recoverable energy density(W_(rec))of~46.4 J·cm^(−3) and an energy efficiency(η)of~80.3%.Additionally,by analyzing temperature-dependent dielectric property of the film,a significant downshift of the diffused phase transition temperature(T_(M2-M3))was revealed,which indicated the existence of a stable relaxor-like AFE phase near the RT.The downshift of the T_(M2-M3) could be attributed to a nanograin size and residual tensile strain of the film,and it led to excellent temperature stability(20-240℃)of the energy storage performance of the film.Our results indicate that the Ag(Nb,Ta)O_(3) film is a promising candidate for electrical energy storage applications. 展开更多
关键词 antiferroelectrics(AFE) AgNbO_(3) Ag(Nb Ta)O_(3) energy storage film capacitors nanograin engineering
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Stable dielectric response of low-loss aromatic polythiourea thin films on Pt/SiO_(2) substrate 被引量:2
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作者 A.Eršte L.Fulanović +4 位作者 L.Čoga M.Lin Y.Thakur Q.M.Zhang V.Bobnar 《Journal of Advanced Dielectrics》 CAS 2016年第1期46-49,共4页
We have investigated dielectric properties of aromatic polythiourea(ArPTU,a polar polymer containing high dipolar moments with very low defect levels)thin films that were developed on Pt/SiO_(2) substrate.The detected... We have investigated dielectric properties of aromatic polythiourea(ArPTU,a polar polymer containing high dipolar moments with very low defect levels)thin films that were developed on Pt/SiO_(2) substrate.The detected response is compared to the response of commercially available polymers,such as high density polyethylene(HDPE)and polypropylene(PP),which are at present used in foil capacitors.Stable values of the dielectric constantε'≈5(being twice higher than in HDPE and PP)over broad temperature and frequency ranges and dielectric losses as low as in commercial systems suggest ArPTU as a promising candidate for future use in a variety of applications. 展开更多
关键词 Aromatic polythiourea dielectric polymer film capacitor dielectric spectroscopy ELLIPSOMETRY
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Reliability Analysis of Grid-Interfaced Filter Capacitors 被引量:1
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作者 Dao Zhou Haoran Wang +1 位作者 Huai Wang Frede Blaabjerg 《Chinese Journal of Electrical Engineering》 CSCD 2018年第3期21-28,共8页
Growing with the increased adoption of renewable energy for the power generation,the reliable and cost-effective operation of grid-connected inverters is of more and more importance.A filter is interfaced between an i... Growing with the increased adoption of renewable energy for the power generation,the reliable and cost-effective operation of grid-connected inverters is of more and more importance.A filter is interfaced between an inverter and the utility grid to reduce the switching harmonics.According to the modulation scheme and the LCL filter impedance,the electrical stresses of the filter capacitor can be thoroughly investigated.With the help of the electro-thermal model,its long-term thermal stress can be obtained based on the mission profile like wind speed,ambient temperature.The reliability of the filter capacitor bank is obtained based on its individual capacitor reliability curves and reliability block diagram method.A case study on a 2MW wind turbine system demonstrates the relationship between the lifetime of the capacitor bank and the single capacitor.Moreover,the severe voltage and current stresses of the filter capacitors are analyzed during abnormal operations(e.g.,fault ride-through)with asymmetrical parasitic parameters. 展开更多
关键词 Metalized polypropylene film capacitor RELIABILITY doubly-fed induction generator fault ride-through
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Composite structure of ZnO films coated with reduced graphene oxide: structural,electrical and electrochemical properties
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作者 Weiqiang Shuai Yuehui Hu +5 位作者 Yichuan Chen Keyan Hu Xiaohua Zhang Wenjun Zhu Fan Tong Zixuan Lao 《Journal of Semiconductors》 EI CAS CSCD 2018年第2期22-27,共6页
ZnO films coated with reduced graphene oxide(RGO-ZnO) were prepared by a simple chemical approach. The graphene oxide(GO) films transferred onto ZnO films by spin coating were reduced to RGO films by two steps(ex... ZnO films coated with reduced graphene oxide(RGO-ZnO) were prepared by a simple chemical approach. The graphene oxide(GO) films transferred onto ZnO films by spin coating were reduced to RGO films by two steps(exposed to hydrazine vapor for 12 h and annealed at 600 °C). The crystal structures, electrical and photoluminescence properties of RGO-ZnO films on quartz substrates were systematically studied. The SEM images illustrated that RGO layers have successfully been coated on the ZnO films very tightly. The PL properties of RGO-ZnO were studied. PL spectra show two sharp peaks at 390 nm and a broad visible emission around 490 nm.The resistivity of RGO-ZnO films was measured by a Hall measurement system, RGO as nanofiller considerably decrease the resistivity of ZnO films. An electrode was fabricated, using RGO-ZnO films deposited on Si substrate as active materials, for super capacitor application. By comparison of different results, we conclude that the RGOZnO composite material couples possess the properties of super capacitor. 展开更多
关键词 RGO-ZnO films spin coating electrode super capacitor application
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具有分级界面的纳米纤维增强聚合物复合材料:用于高温介电储能应用 被引量:1
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作者 智佳鹏 王建 +3 位作者 沈忠慧 李宝文 张鑫 南策文 《Science China Materials》 SCIE EI CAS CSCD 2023年第7期2652-2661,共10页
陶瓷纳米填料增强的柔性聚合物基复合材料在先进电子电气系统中显示出巨大的储能应用潜力.但如何在高于150℃的条件下提高其能量密度和效率仍然是一个挑战.本文中我们采用氮化硼-钛酸钡(BNBaTiO_(3))非均质纳米纤维作为填料,耐高温的聚... 陶瓷纳米填料增强的柔性聚合物基复合材料在先进电子电气系统中显示出巨大的储能应用潜力.但如何在高于150℃的条件下提高其能量密度和效率仍然是一个挑战.本文中我们采用氮化硼-钛酸钡(BNBaTiO_(3))非均质纳米纤维作为填料,耐高温的聚醚酰亚胺(PEI)为基体,使复合材料的介电常数和击穿强度同时提高.分级结构的BN/BaTiO_(3)/PEI界面提升了材料的陷阱密度和能级,可进一步抑制传导损耗.在此基础上,复合材料在150℃,能量效率高于90%时展现出5.23J cm^(-3)的超高能量密度,这是迄今为止纳米纤维增强聚合物复合材料中最高的能量密度.研究表明,分级界面是提高材料高温储能的有效策略,对介电材料在高温下的应用具有重要意义. 展开更多
关键词 high temperature energy storage dielectrics polymer nanocomposite film capacitor
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