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Effect of phosphorus content on interfacial heat transfer and film deposition behavior during the high-temperature simulation of strip casting
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作者 Wanlin Wang Cheng Lu +5 位作者 Liang Hao Jie Zeng Lejun Zhou Xinyuan Liu Xia Li Chenyang Zhu 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2024年第5期1016-1025,共10页
The interfacial wettability and heat transfer behavior are crucial in the strip casting of high phosphorus-containing steel.A hightemperature simulation of strip casting was conducted using the droplet solidification ... The interfacial wettability and heat transfer behavior are crucial in the strip casting of high phosphorus-containing steel.A hightemperature simulation of strip casting was conducted using the droplet solidification technique with the aims to reveal the effects of phosphorus content on interfacial wettability,deposited film,and interfacial heat transfer behavior.Results showed that when the phosphorus content increased from 0.014wt%to 0.406wt%,the mushy zone enlarged,the complete solidification temperature delayed from1518.3 to 1459.4℃,the final contact angle decreased from 118.4°to 102.8°,indicating improved interfacial contact,and the maximum heat flux increased from 6.9 to 9.2 MW/m2.Increasing the phosphorus content from 0.081wt%to 0.406wt%also accelerated the film deposition rate from 1.57 to 1.73μm per test,resulting in a thickened naturally deposited film with increased thermal resistance that advanced the transition point of heat transfer from the fifth experiment to the third experiment. 展开更多
关键词 strip casting interfacial heat transfer interfacial wettability naturally deposited film phosphorus content
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Effects of Implant Copper Layer on Diamond Film Deposition on Cemented Carbides
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作者 马志斌 汪建华 +1 位作者 邬钦崇 王传新 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第1期647-651,共5页
The deposition of high-quality diamond films and their adhesion on cemented carbides are strongly influenced by the catalytic effect of cobalt under typical deposition conditions. Decreasing Co content on the surface... The deposition of high-quality diamond films and their adhesion on cemented carbides are strongly influenced by the catalytic effect of cobalt under typical deposition conditions. Decreasing Co content on the surface of the cemented carbide is often used for the diamond film deposition. But the leaching of Co from the WC-Co substrate leading to a mechanical weak surface often causes a poor adhesion. In this paper we adopted an implant copper layer prepared by vaporization to improve the mechanical properties of the Co-leached substrate. The diamond films were grown by microwave plasma chemical vapor deposition from CH4:H2 gas mixture. The cross section and the morphology of the diamond film were characterized by scanning electron microscopy (SEM). The non-diamond content in the film was analyzed by Raman spectroscopy. The effects of pretreatment on the concentrations of Co and Cu near the interfacial region were examined by energy dispersive spectrum (EDS) equipped with SEM. The adhesion of the diamond on the substrate was evaluated with a Rockwell-type hardness tester. The results indicate that the diamond films prepared with implant copper layer have a good adhesion to the cemented carbide substrate due to the recovery of the mechanical properties of the Co-depleted substrate after the copper implantation and the formation of less amorphous carbon between the substrate and the diamond film. 展开更多
关键词 Effects of Implant Copper Layer on Diamond film deposition on Cemented Carbides Co
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Effects of deposition parameters on HFCVD diamond films growth on inner hole surfaces of WC-Co substrates 被引量:3
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作者 王新昶 林子超 +1 位作者 沈彬 孙方宏 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2015年第3期791-802,共12页
Deposition parameters that have great influences on hot filament chemical vapor deposition (HFCVD) diamond films growth on inner hole surfaces of WC?Co substrates mainly include the substrate temperature (t), carbon c... Deposition parameters that have great influences on hot filament chemical vapor deposition (HFCVD) diamond films growth on inner hole surfaces of WC?Co substrates mainly include the substrate temperature (t), carbon content (φ), total pressure (p) and total mass flow (F). Taguchi method was used for the experimental design in order to study the combined effects of the four parameters on the properties of as-deposited diamond films. A new figure-of-merit (FOM) was defined to assess their comprehensive performance. It is clarified thatt,φandp all have significant and complicated effects on the performance of the diamond film and the FOM, which also present some differences as compared with the previous studies on CVD diamond films growth on plane or external surfaces. Aiming to deposit HFCVD diamond films with the best comprehensive performance, the key deposition parameters were finally optimized as:t=830 °C,φ=4.5%,p=4000 Pa,F=800 mL/min. 展开更多
关键词 hot filament chemical vapor deposition diamond film inner hole surface Taguchi method deposition parameter optimization
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Effect of Radio-Frequency and Low-Frequency Bias Voltage on the Formation of Amorphous Carbon Films Deposited by Plasma Enhanced Chemical Vapor Deposition 被引量:1
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作者 Hadar MANIS-LEVY Tsachi LIVNEH +2 位作者 Ido ZUKERMAN Moshe H.MINTZ Avi RAVEH 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第10期954-959,共6页
The effect of radio-frequency (RF) or low-frequency (LF) bias voltage on the for- mation of amorphous hydrogenated carbon (a-C:H) films was studied on silicon substrates with a low methane (CH4) concentration... The effect of radio-frequency (RF) or low-frequency (LF) bias voltage on the for- mation of amorphous hydrogenated carbon (a-C:H) films was studied on silicon substrates with a low methane (CH4) concentration (2-10 vol.%) in CH4+Ar mixtures. The bias substrate was applied either by RF (13.56 MHz) or by LF (150 kHz) power supply. The highest hardness values (~18-22 GPa) with lower hydrogen content in the fihns (~20 at.%) deposited at 10 vol.% CH4, was achieved by using the RF bias, However, the films deposited using the LF bias, under similar RF plasma generation power and CH4 concentration (50 W and 10 vol.%, respectively), displayed lower hardness (~6-12 GPa) with high hydrogen content (~40 at.%). The structures analyzed by Fourier Transform Infrared (FTIR) and Raman scattering measurements provide an indication of trans-polyacetylene structure formation. However, its excessive formation in the films deposited by the LF bias method is consistent with its higher bonded hydrogen concentration and low level of hardness, as compared to the film prepared by the RF bias method. It was found that the effect of RF bias on the film structure and properties is stronger than the effect of the low-frequency (LF) bias under identical radio-frequency (RF) powered electrode and identical PECVD (plasma enhanced chemical vapor deposition) system configuration. 展开更多
关键词 amorphous carbon PECVD film deposition FTIR RAMAN
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Deposition of Thin Titania Films by Dielectric Barrier Discharge at Atmospheric Pressure 被引量:1
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作者 徐绍魁 徐金洲 +1 位作者 彭晓波 张菁 《Plasma Science and Technology》 SCIE EI CAS CSCD 2006年第3期292-296,共5页
A homogeneous atmospheric pressure dielectric barrier discharge is studied. It is in argon with small admixtures of titanium tetrachloride vapour and oxygen for the deposition of thin titania films on glass substrates... A homogeneous atmospheric pressure dielectric barrier discharge is studied. It is in argon with small admixtures of titanium tetrachloride vapour and oxygen for the deposition of thin titania films on glass substrates. A special electrode configuration was applied in order to deposit the titania film uniformly. The sustaining voltage (6 kV to 12 kV), current density (about 3 mA/cm^2) and total optical emission spectroscopy were monitored to characterize the discharge in the gap of 2 mm. Typical deposition rates ranged from approximately 30 nm/min to 120 nm/min. The film morphology was investigated by using scanning electron microscopy (SEM) and the composition was determined with an energy dispersive x-ray spectroscopy (EDS) analysis tool attached to the SEM. The crystal structure and phase composition of the films were studied by x-ray diffraction (XRD). Several parameters such as the discharge power, the ratio of carrier gas to the precursor gas, the deposition time on the crystallization behavior, the deposition rate and the surface morphology of the titania film were extensively studied. 展开更多
关键词 dielectric barrier discharge atmospheric pressure thin film deposition titania film
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Carbon Nitride Films Deposited on Pt Substrates byMicrowave Plasma Chemical Vapor Deposition
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作者 Yongping Zhang Yousong Gu +5 位作者 Xiangrong Chang Zhongzhuo Tian Dongxia Shi Xiufang Zhanga Lei Yuan Material Science and Engineering School, University of Science and Technology Beijing, Beijing 100083, China Beijing Laboratory of Vacuum Physics, Institut 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2000年第1期42-44,共3页
Carbon nitride thin films have been synthesized on polycrystalline Pt substrates using microwave plasma chemical vapor de- position (MPCVD) technique. The N/C atomic ratio is close to the stoichiometric value 1.33 of ... Carbon nitride thin films have been synthesized on polycrystalline Pt substrates using microwave plasma chemical vapor de- position (MPCVD) technique. The N/C atomic ratio is close to the stoichiometric value 1.33 of C_3N_4. The experimental X-ray diffraction spectra contain all the strong peaks of α-C_3N_4 and β -C_3N_4. The films are a mixture of α-C_3N_4 and β -C_3N_4. The observed Raman and FT- IR spectra support the existence of C-N covalent bond in carbon nitride compound. The bulk modulus detected by Nano II nanoindentor is up to 349 GPa. 展开更多
关键词 carbon nitride MPCVD thin film deposition
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A Study of the Adsorption of Molecular Deposition Filming Flooding Agent MD-1 on Quartz Sand 被引量:1
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作者 GaoManglai LiuYong MengXiuxia WangJianshe 《Petroleum Science》 SCIE CAS CSCD 2004年第1期70-74,82,共6页
Molecular deposition filming flooding (MDFF) is a novel oil recovery technique based on the thermopositive monolayer electrostatic adsorption of the MDFF agent on different interfaces within reservoir systems. In this... Molecular deposition filming flooding (MDFF) is a novel oil recovery technique based on the thermopositive monolayer electrostatic adsorption of the MDFF agent on different interfaces within reservoir systems. In this paper, the adsorption property of the MDFF agent, MD-1, on quartz sand has been studied through adsorption experiments at different pH and temperatures. Experimental data are also analyzed kinetically and thermodynamically. The results show that the adsorption of MD-1 on quartz sand takes place mainly because of electrostatic interactions, which corresponds to adsorption that increases with pH. Kinetic analyses show that at a higher pH the activation energy for adsorption gets lower and, therefore, the adsorption becomes quicker for MD-1 on quartz sand. Thermodynamic analyses show that pH plays an important role in the adsorption of MD-1 on quartz sand. At a higher pH, more negative surface charges result in the increase of electrostatic interactions between MD-1 and quartz sand. Therefore, the saturated adsorption amount increases and more adsorption heat will be released. 展开更多
关键词 Molecular deposition filming flooding agent quartz sand ADSORPTION kinetics thermodynamics
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Effect of nitrogen on deposition and field emission properties of boron-doped micro-and nano-crystalline diamond films 被引量:1
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作者 L.A.Li S.H.Cheng +3 位作者 H.D.Li Q.Yu J.W.Liu X.Y.Lv 《Nano-Micro Letters》 SCIE EI CAS 2010年第3期154-159,共6页
In this paper,we report the effect of nitrogen on the deposition and properties of boron doped diamond films synthesized by hot filament chemical vapor deposition.The diamond films consisting of micro-grains(nano-grai... In this paper,we report the effect of nitrogen on the deposition and properties of boron doped diamond films synthesized by hot filament chemical vapor deposition.The diamond films consisting of micro-grains(nano-grains) were realized with low(high) boron source flow rate during the growth processes.The transition of micro-grains to nano-grains is speculated to be strongly(weekly) related with the boron(nitrogen) flow rate.The grain size and Raman spectral feature vary insignificantly as a function of the nitrogen introduction at a certain boron flow rate.The variation of electron field emission characteristics dependent on nitrogen is different between microcrystalline and nanocrystalline boron doped diamond samples,which are related to the combined phase composition,boron doping level and texture structure.There is an optimum nitrogen proportion to improve the field emission properties of the boron-doped films. 展开更多
关键词 Chemical vapor deposited diamond film Nitrogen effect Boron doping MICROCRYSTALLINE NANOCRYSTALLINE Electron field emission
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Friction Behaviors of the Hot Filament Chemical Vapor Deposition Diamond Film under Ambient Air and Water Lubricating Conditions 被引量:2
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作者 SHEN Bin SUN Fanghong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2009年第5期658-664,共7页
The friction behavior of the hot filament chemical vapor deposition(HFCVD) diamond film plays a critical role on its applications in mechanical fields and largely depends on the environment. Studies on the tribologi... The friction behavior of the hot filament chemical vapor deposition(HFCVD) diamond film plays a critical role on its applications in mechanical fields and largely depends on the environment. Studies on the tribological properties of HFCVD diamond films coated on Co-cemented tungsten carbide (WC-Co) substrates are rarely reported in available literatures, especially in the water lubricating conditions. In this paper, conventional microcrystalline diamond(MCD) and fine-grained diamond(FGD) films are deposited on WC-Co substrates and their friction properties are evaluated on a reciprocating ball-on-plate tribometer, where they are brought to slide against ball-bearing steel and copper balls in dry and water lubricating conditions. Scanning electron microscopy(SEM), atomic force microscopy(AFM), surface profilometer and Raman spectroscopy are adopted to characterize as-deposited diamond films; SEM and energy dispersive X-ray(EDX) are used to investigate the worn region on the surfaces of both counterface balls and diamond films. The research results show that the friction coefficient of HFCVD diamond films always starts with a high initial value, and then gradually transits to a relative stable state. For a given counterface and a sliding condition, the FGD film presents lower stable friction coefficients by 0.02-0.03 than MCD film. The transferred materials adhered on sliding interface are supposed to have predominate effect on the friction behaviors of HFCVD diamond films. Furthermore, the effect of water lubricating on reducing friction coefficient is significant. For a given counterpart, the stable friction coefficients of MCD or FGD films reduce by about 0.07-0.08 while sliding in the water lubricating condition, relative to in dry sliding condition. This study is beneficial for widespread applications of HFCVD diamond coated mechanical components and adopting water lubricating system, replacing ofoil lubricating, in a variety of mechanical processing fields to implement the green production process. 展开更多
关键词 Hot filament chemical vapor deposition(HFCVD) diamond films friction behavior water lubricating
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Advances in studies of the tribological behavior of molecular deposition films 被引量:1
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作者 Xiao Yuqi Zhang Siwei +1 位作者 Wang Deguo Gao Manglai 《Petroleum Science》 SCIE CAS CSCD 2008年第4期379-387,共9页
An overview of the advances in studies on tribology of molecular deposition (MD) films is presented here to summarize the studies of nanofrictional properties, adhesion, wear and mechanical behavior, as well as the ... An overview of the advances in studies on tribology of molecular deposition (MD) films is presented here to summarize the studies of nanofrictional properties, adhesion, wear and mechanical behavior, as well as the molecular dynamics simulation of nanotribological properties of the film in the last decade. Some key research topics which need to be investigate further are addressed. 展开更多
关键词 Molecular deposition (MD) film tribological behavior adhesive property wear characteristics mechanical behavior
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Principle and Process Window of Cerium Dioxide Thin Film Fabrication with Dual Plasma Deposition 被引量:1
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作者 L.P. Wang B. Y Tang +2 位作者 X.B. Tian YX.Leng Q. YZhang and P.K.Chu Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2001年第1期29-30,共2页
Cerium dioxide, CeO2, is a potentially superior material in a myriad of areas, and many methods have been proposed to deposit single crystal CeO2 thin films. A novel fabrication technique utilizing dual plasma generat... Cerium dioxide, CeO2, is a potentially superior material in a myriad of areas, and many methods have been proposed to deposit single crystal CeO2 thin films. A novel fabrication technique utilizing dual plasma generated by metal vacuum arc (MEVVA) and radio frequency (RF) is discussed in this paper. We have recently conducted a systematic investigation to determine the optimal process window to deposit CeO2 thin films'on Si(100) substrates. The X-ray diffraction results show the existence of CeO2(100) in the as-deposited sample. 展开更多
关键词 Thin Window Principle and Process Window of Cerium Dioxide Thin film Fabrication with Dual Plasma deposition
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Optical properties of titanium oxide films obtained by cathodic arc plasma deposition 被引量:1
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作者 Vukoman JOKANOVIC Bozana COLOVIC +5 位作者 Anka TRAJKOVSKA PETKOSKA Ana MRAKOVIC Bojan JOKANOVIC Milo NENADOVIC Manuela FERRARA llija NASOV 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第12期111-118,共8页
Structural and optical properties of nanometric titanium oxide(TixOy) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fouriertransform infrared spectroscop... Structural and optical properties of nanometric titanium oxide(TixOy) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fouriertransform infrared spectroscopy showed the presence of anatase, rutile, Ti_2O_3, Ti_4O_7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet–visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined. 展开更多
关键词 optical materials plasma deposition thin films ellipsometry
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The Effect of Pressure on the Dissociation of H_2/CH_4Gas Mixture during Diamond Films Growth via Chemical Vapor Deposition 被引量:1
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作者 赵庆勋 辛红丽 +2 位作者 韩佳宁 文钦若 杨景发 《Plasma Science and Technology》 SCIE EI CAS CSCD 2002年第1期1113-1118,共6页
Monte Carlo simulations are adopted to study the electron motion in the mixture of H2 and CH4 during diamond synthesis via Glow Plasma-assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used... Monte Carlo simulations are adopted to study the electron motion in the mixture of H2 and CH4 during diamond synthesis via Glow Plasma-assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used and the avalanche of electrons is taken into account in this simulation. The average energy distribution of electrons and the space distribution of effective species such as CH3, CH+3, CH+ and H at various gas pressures are given in this paper, and optimum experimental conditions are inferred from these results. 展开更多
关键词 The Effect of Pressure on the Dissociation of H2/CH4Gas Mixture during Diamond films Growth via Chemical Vapor deposition CH
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Improvement of Surface Morphology of Yttrium-Stabilized Zirconia Films Deposited by Pulsed Laser Deposition on Rolling Assisted Biaxially Textured Substrate Tapes
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作者 王梦麟 刘林飞 李贻杰 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第11期101-105,共5页
The surface morphology of buffer layer yttrium-stabilized zirconia (YSZ) of YBa2CuaO7-σ (YBCO) high temperature superconducting films relies on a series of controllable experimental parameters. In this work, we f... The surface morphology of buffer layer yttrium-stabilized zirconia (YSZ) of YBa2CuaO7-σ (YBCO) high temperature superconducting films relies on a series of controllable experimental parameters. In this work, we focus on the influence of pulsed laser frequency and target crystalline type on surface morphology of YSZ films deposited by pulsed laser deposition (PLD) on rolling assisted biaxially textured substrate tapes. Usually two kinds of particles are observed in the YSZ layer: randomly distributed ones on the whole film and self-assembled ones along grain boundaries. SEM images are used to prove that particles can be partly removed when choosing dense targets of single crystalline. Lower frequency of pulsed laser also contributes to a smoother film surface. TEM images are used to view the crystalline structure of thin film. Thus we can obtain a basic understanding of how to prepare a particle-free YSZ buffer layer for YBCO in optimized conditions using PLD. The YBCO layer with nice structure and critical current density of around 5 MA/cm2 can be reached on smooth YSZ samples. 展开更多
关键词 YSZ Improvement of Surface Morphology of Yttrium-Stabilized Zirconia films Deposited by Pulsed Laser deposition on Rolling Assisted Biaxially Textured Substrate Tapes PLD
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Nanomechanical Properties of Molecular Deposition Film
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作者 兰惠清 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2005年第3期20-22,共3页
Two nanomechanical properties of the moleculor deposition ( MD ) film deposited on the Au substrate were studied. The first is its nanotribological property investigated by an atomic force microscope, which indicate... Two nanomechanical properties of the moleculor deposition ( MD ) film deposited on the Au substrate were studied. The first is its nanotribological property investigated by an atomic force microscope, which indicates that the deposition of the MD film could reduce the frictional force. The second is its nanoindent property studied by a nano-indenter. The results show that, after the MD film is deposited on the Au substrate , the elastic modulus, hardness and load decreased all, moreover, the elastic deformation increased and the plastic deformation decreased, which indicates that the MD film can improve the nanomechanical properties of the Au substrate. 展开更多
关键词 molecular deposition film atomic force miroscope nanomechanical properties nanoindent
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Deposition of Diamond Films on Copper Substrate
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作者 马志斌 邬钦崇 +3 位作者 舒兴胜 汪建华 王传新 黎向锋 《Plasma Science and Technology》 SCIE EI CAS CSCD 2000年第2期207-212,共6页
The direct deposition of diamond films on copper substrate has been suffered fromadhesion problems due to the mismatch of the thermal expansion coefficients of diamond andcopper. In this paper nuclei with valuable den... The direct deposition of diamond films on copper substrate has been suffered fromadhesion problems due to the mismatch of the thermal expansion coefficients of diamond andcopper. In this paper nuclei with valuable density were directly introduced thirough a submicrondiamond powder layer. The diamond grits partially were buried in the copper substrate leadingto better adhesion. Another method with nickel intermediate layer for enhancing the adhesionwas studied here in detail. It was suggested that Cu-Ni eutectic between the copper substrate andNi interlayer might contribute to the adhesion improvement. The quality of the diamond filmsdeposited wlth rnckel interlayer was investigated by scanning electron microscopy and Ramanspectroscopy. 展开更多
关键词 NI OO deposition of Diamond films on Copper Substrate
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Preparation of Highly Textured Bi and MnBi Films by the Pulsed Laser Deposition Method
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作者 周栋 张银峰 +5 位作者 马小柏 刘顺荃 韩景智 朱明刚 王常生 杨金波 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第12期139-142,共4页
Textured Bi and MnBi/Bi thin films are prepared by the pulsed laser deposition method. The highly c-axis textured MnBi films are obtained by annealing the bilayer consisting of textured Bi and Mn films. The eoerciviti... Textured Bi and MnBi/Bi thin films are prepared by the pulsed laser deposition method. The highly c-axis textured MnBi films are obtained by annealing the bilayer consisting of textured Bi and Mn films. The eoercivities of the MnBi/Bi film are 1.5 T and 2.35 T at room temperature and at 373K, respectively, showing a positive temperature coefficient. Microstructural investigations show that the textured MnBi film results from the orientated growth induced by the textured Bi under-layer. 展开更多
关键词 BI Preparation of Highly Textured Bi and MnBi films by the Pulsed Laser deposition Method Mn Figure PLD
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Study on Diamond Thin Films Deposition in a Quartz Bell-jar Type System for MWPCVD
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作者 俞世吉 丁振峰 +1 位作者 马滕才 邬钦崇 《Plasma Science and Technology》 SCIE EI CAS CSCD 2000年第1期161-165,共5页
Diamond thin films were prepared in a modified quartz bell-jar type microwave chemical vapor deposition (MWPCVD) system. The influences of process parameters on MWPCVD diamond thin films quality such as substrate pre... Diamond thin films were prepared in a modified quartz bell-jar type microwave chemical vapor deposition (MWPCVD) system. The influences of process parameters on MWPCVD diamond thin films quality such as substrate pretreatment, deposition gas ratio, deposition pressure and substrate position were examined and studied. The deposited films were characterized by using Scanning electron microscopy(SEM) and Raman spectroscopy. It was shown that this quartz bell-jar type MWPCVD system is beneficial to the deposition of high quality diamond thin films. 展开更多
关键词 Study on Diamond Thin films deposition in a Quartz Bell-jar Type System for MWPCVD
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SYNTHESIS OF PPCuPc FILM BY MICROWAVE PLASMA CHEMICAL VAPORIZATION DEPOSITION(MPCVD)
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作者 Ai Min YU Wen Guo XU +1 位作者 Wen Jun YANG Qin Han JIN 《Chinese Chemical Letters》 SCIE CAS CSCD 1991年第11期897-900,共4页
Using a low power microwave generator(W_(max)=100W) and a Surfatron discharge device, Plasma-polymerized copper phthalocyanine (PPCuPc) film was synthesised from monomer copper phthalocyanine(CuPc) by microwave plasma... Using a low power microwave generator(W_(max)=100W) and a Surfatron discharge device, Plasma-polymerized copper phthalocyanine (PPCuPc) film was synthesised from monomer copper phthalocyanine(CuPc) by microwave plasma chemical vaporization deposition(MPCVD) with Ar as incorporation gas. The film was characterized by FTIR and ESCA. The role of dissociation of chemical bond in the polymerization process and the influence of substrate temperature and material on deposition were investigated in some detail. 展开更多
关键词 FTIR MPCVD SYNTHESIS OF PPCuPc film BY MICROWAVE PLASMA CHEMICAL VAPORIZATION deposition ESCA
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Field Emission Properties of Nano-DLC Films Prepared on Cu Substrates by Pulsed Laser Deposition
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作者 彭丽萍 LI Xiangkun +2 位作者 FAN Long WANG Xuemin 吴卫东 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2018年第2期326-330,共5页
Nano-diamond like carbon(DLC) thin films were prepared on fused silica and Cu substrates by the pulsed-laser deposition technique with different laser intensities. Step-measurement, atomic force microscope(AFM), U... Nano-diamond like carbon(DLC) thin films were prepared on fused silica and Cu substrates by the pulsed-laser deposition technique with different laser intensities. Step-measurement, atomic force microscope(AFM), UV-VIS-NIR transmittance spectroscopy and Raman spectroscopy were used to characterize the films. It was shown that the deposition rate increases with the laser intensity, and the films prepared under different laser intensities show different transparency. Raman measurement showed that the content of sp^3 of the Nano-DLC thin films decreases with the laser intensity. The field emission properties of the Nano-DLC thin films on Cu substrates were studied by the conventional diode method, which showed that the turn-on field increases and the current density decreases with sp^3 content in the films. A lower turn-on field of 6 V/um and a higher current density of 1 uA/cm^2 were obtained for Nano-DLC thin films on Cu substrate. 展开更多
关键词 nano-DLC thin films pulsed-laser deposition field emission properties
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