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Development of Miniature Spectrometers
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作者 ZHANG Zhi-guo 《Semiconductor Photonics and Technology》 CAS 2007年第2期132-135,共4页
Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development ... Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development. 展开更多
关键词 MICRO-SPECTROMETER micro-opto-electro-mechanical system (MOEMS) fourier transform interferometer(FTS) spectroscopy
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