Plasma immersion ion implantation(PIII) was used to fabricate micro/nano structures on monocrystalline Si surfaces with different ratios of mixed gases(SF_6/O_2). The micro/nano structures on the surfaces of the sampl...Plasma immersion ion implantation(PIII) was used to fabricate micro/nano structures on monocrystalline Si surfaces with different ratios of mixed gases(SF_6/O_2). The micro/nano structures on the surfaces of the sample were characterized by scanning electron microscopy(SEM) and atomic force microscopy(AFM). The results showed that with increasing ratio of mixed gases(SF_6/O_2), the height of the micro/nano structures first increased and then decreased. Contact-angle measurements indicated that the surfaces' micro/nano structures have an obvious effect on the contact-angle, and could cause a change in surface wettability. The theoretical analysis of contact-angle showed that the Wenzel and Cassie theories cannot predict the contact-angle of a roughened surface accurately, and should be corrected for practical applications using an actual model. Moreover, the contact-angle first increased and then decreased with increasing ratio of mixed gases(SF_6/O_2), which is in accordance with the change of the height of micro/nano structures.展开更多
基金financially supported by NSFC Project(Grant No.51376022)
文摘Plasma immersion ion implantation(PIII) was used to fabricate micro/nano structures on monocrystalline Si surfaces with different ratios of mixed gases(SF_6/O_2). The micro/nano structures on the surfaces of the sample were characterized by scanning electron microscopy(SEM) and atomic force microscopy(AFM). The results showed that with increasing ratio of mixed gases(SF_6/O_2), the height of the micro/nano structures first increased and then decreased. Contact-angle measurements indicated that the surfaces' micro/nano structures have an obvious effect on the contact-angle, and could cause a change in surface wettability. The theoretical analysis of contact-angle showed that the Wenzel and Cassie theories cannot predict the contact-angle of a roughened surface accurately, and should be corrected for practical applications using an actual model. Moreover, the contact-angle first increased and then decreased with increasing ratio of mixed gases(SF_6/O_2), which is in accordance with the change of the height of micro/nano structures.
