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Trigger mechanism of PDSOI NMOS devices for ESD protection operating under elevated temperatures
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作者 王加鑫 李晓静 +7 位作者 赵发展 曾传滨 李多力 高林春 李江江 李博 韩郑生 罗家俊 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第7期613-618,共6页
Trigger characteristics of electrostatic discharge(ESD)protecting devices operating under various ambient temperatures ranging from 30℃to 195℃are investigated.The studied ESD protecting devices are the H-gate NMOS t... Trigger characteristics of electrostatic discharge(ESD)protecting devices operating under various ambient temperatures ranging from 30℃to 195℃are investigated.The studied ESD protecting devices are the H-gate NMOS transistors fabricated with a 0.18-μm partially depleted silicon-on-insulator(PDSOI)technology.The measurements are conducted by using a transmission line pulse(TLP)test system.The different temperature-dependent trigger characteristics of groundedgate(GGNMOS)mode and the gate-triggered(GTNMOS)mode are analyzed in detail.The underlying physical mechanisms related to the effect of temperature on the first breakdown voltage V_(T1)investigated through the assist of technology computer-aided design(TCAD)simulation. 展开更多
关键词 ESD trigger voltage TEMPERATURE GGNMOS gtnmos TCAD
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