Two-inch Ga_2O_3 films with（ˉ201）-orientation are grown on c-sapphire at 850–1050°C by hydride vapor phase epitaxy. High-resolution x-ray diffraction shows that pure β-Ga_2O_3 with a smooth surface has a hig...Two-inch Ga_2O_3 films with（ˉ201）-orientation are grown on c-sapphire at 850–1050°C by hydride vapor phase epitaxy. High-resolution x-ray diffraction shows that pure β-Ga_2O_3 with a smooth surface has a higher crystal quality, and the Raman spectra reveal a very small residual strain in β-Ga_2O_3 grown by hydride vapor phase epitaxy compared with bulk single crystal. The optical transmittance is higher than 80% in the visible and near-UV regions, and the optical bandgap energy is calculated to be 4.9 e V.展开更多
High quality epitaxial single phase（Ga_（0.96）Mn_（0.04））_2O_3 and Ga_2O_3 thin films have been prepared on sapphire substrates by using laser molecular b（eam）epitaxy（L-MBE）. X-ray diffraction results indicate...High quality epitaxial single phase（Ga_（0.96）Mn_（0.04））_2O_3 and Ga_2O_3 thin films have been prepared on sapphire substrates by using laser molecular b（eam）epitaxy（L-MBE）. X-ray diffraction results indicate that the thin films have the monoclinic structure with a 201 preferable orientation. Room temperature（RT） ferromagnetism appears and the magnetic properties of β-（Ga_（0.96）Mn_（0.04））_2O_3 thin film are enhanced compared with our previous works. Experiments as well as the first principle method are used to explain the role of Mn dopant on the structure and magnetic properties of the thin films. The ferromagnetic properties are explained based on the concentration of transition element and the defects in the thin films.展开更多
基金Supported by the National Key Research and Development Program of China under Grant No 2017YFB0404201the Solid State Lighting and Energy-Saving Electronics Collaborative Innovation Center,PAPDthe State Grid Shandong Electric Power Company
文摘Two-inch Ga_2O_3 films with（ˉ201）-orientation are grown on c-sapphire at 850–1050°C by hydride vapor phase epitaxy. High-resolution x-ray diffraction shows that pure β-Ga_2O_3 with a smooth surface has a higher crystal quality, and the Raman spectra reveal a very small residual strain in β-Ga_2O_3 grown by hydride vapor phase epitaxy compared with bulk single crystal. The optical transmittance is higher than 80% in the visible and near-UV regions, and the optical bandgap energy is calculated to be 4.9 e V.
基金Project supported by the National Natural Science Foundation of China(Nos.11404029,51572033,51172208)the Fund of State Key Laboratory of Information Photonics and Optical Communications(BUPT)
文摘High quality epitaxial single phase（Ga_（0.96）Mn_（0.04））_2O_3 and Ga_2O_3 thin films have been prepared on sapphire substrates by using laser molecular b（eam）epitaxy（L-MBE）. X-ray diffraction results indicate that the thin films have the monoclinic structure with a 201 preferable orientation. Room temperature（RT） ferromagnetism appears and the magnetic properties of β-（Ga_（0.96）Mn_（0.04））_2O_3 thin film are enhanced compared with our previous works. Experiments as well as the first principle method are used to explain the role of Mn dopant on the structure and magnetic properties of the thin films. The ferromagnetic properties are explained based on the concentration of transition element and the defects in the thin films.
