This letter reports the nanoscale spatial phase modulation of GaAs growth in V-grooved trenches fabricated on a Si （001） substrate by metal-organic vapor-phase epitaxy, Two hexagonal GaAs regions with high density o...This letter reports the nanoscale spatial phase modulation of GaAs growth in V-grooved trenches fabricated on a Si （001） substrate by metal-organic vapor-phase epitaxy, Two hexagonal GaAs regions with high density of stacking faults parallel to Si {111 } surfaces are observed. A strain-relieved and defect-free cubic phase GaAs was achieved above these highly defective regions. High-resolution transmission electron microscopy and fast Fourier transforms analysis were performed to characterize these regions of GaAs/Si interface. We also discussed the strain relaxation mechanism and phase structure modulation of GaAs selectively grown on this artificially manipulated surface.展开更多
A high quality of GaAs crystal growth in nanoscale V-shape trenches on Si（O01） substrates is achieved by using the aspect-ratio trapping method. GaAs thin films are deposited via metal-organic chemical vapor deposit...A high quality of GaAs crystal growth in nanoscale V-shape trenches on Si（O01） substrates is achieved by using the aspect-ratio trapping method. GaAs thin films are deposited via metal-organic chemical vapor deposition by using a two-step growth process. Threading disJocations arising from lattice mismatch are trapped by laterally confining sidewalls, and antiphase domains boundaries are completely restricted by V-groove trenches with Si { 111} facets. Material quality is confirmed by scanning electron microscopy （SEM）, transmission electron microscopy （TEM） and high resolution X-ray diffraction. Low temperature photoluminescence （PL） measurement is used to analyze the thermal strain relaxation in GaAs layers. This approach shows great promise for the realization of high mobility devices or optoelectronie integrated circuits on Si substrates.展开更多
采用RHEED与STM技术对GaAs(001)-(2×6)表面重构下的表面形貌进行研究,研究发现GaAs(001)-(2×6)重构表面是GaAs(001)-β2(2×4)重构表面经530℃,1.33μPa As BEP退火获得,在(2×6)重构下的GaAs(001)表面形貌已经进入...采用RHEED与STM技术对GaAs(001)-(2×6)表面重构下的表面形貌进行研究,研究发现GaAs(001)-(2×6)重构表面是GaAs(001)-β2(2×4)重构表面经530℃,1.33μPa As BEP退火获得,在(2×6)重构下的GaAs(001)表面形貌已经进入表面存在系列单层岛和坑覆盖的无序平坦状态。为了进一步确定(2×6)重构的原胞结构,采用球棍模型对其原胞结构进行模拟,提出新的As表面覆盖率计算方法、结合STM图片分析对球棍模型进行验证和筛选,首次在实验上证实(2×6)重构原胞中存在2个As Dimers和2个Ga Dimers,并以此重构原胞结构构建理论下的(2×6)重构表面,获得结果与STM图片高度吻合。展开更多
用分子束外延 (MBE)设备制备了 Ga As/ Al As和 Ga As/ Si/ Al As异质结 ,通过 XPS分别研究了异质结界面处 Si层厚度为 0 .5 ML 和 1ML 对异质结带阶的调节 ,得到最大调节量为 0 .2 e V;通过 C- V法研究了异质结的Ga As层在不同温度下...用分子束外延 (MBE)设备制备了 Ga As/ Al As和 Ga As/ Si/ Al As异质结 ,通过 XPS分别研究了异质结界面处 Si层厚度为 0 .5 ML 和 1ML 对异质结带阶的调节 ,得到最大调节量为 0 .2 e V;通过 C- V法研究了异质结的Ga As层在不同温度下生长对 0 .5 ML Si夹层的影响 ,得到 Si夹层的空间分布随 Ga As层生长温度的升高而扩散增强的温度效应 ,通过深能级瞬态谱 (DL TS)研究了在上述不同温度下生长的 Ga As层的晶体质量 .展开更多
基金Project supported by the National Science and Technology Major Project of Science and Technology of China(Grant No.2011ZX02708)the National Natural Science Foundation of China(Grant No.61504137)
文摘This letter reports the nanoscale spatial phase modulation of GaAs growth in V-grooved trenches fabricated on a Si （001） substrate by metal-organic vapor-phase epitaxy, Two hexagonal GaAs regions with high density of stacking faults parallel to Si {111 } surfaces are observed. A strain-relieved and defect-free cubic phase GaAs was achieved above these highly defective regions. High-resolution transmission electron microscopy and fast Fourier transforms analysis were performed to characterize these regions of GaAs/Si interface. We also discussed the strain relaxation mechanism and phase structure modulation of GaAs selectively grown on this artificially manipulated surface.
基金Supported by the National Science and Technology Major Project of China under Grant No 2011ZX02708
文摘A high quality of GaAs crystal growth in nanoscale V-shape trenches on Si（O01） substrates is achieved by using the aspect-ratio trapping method. GaAs thin films are deposited via metal-organic chemical vapor deposition by using a two-step growth process. Threading disJocations arising from lattice mismatch are trapped by laterally confining sidewalls, and antiphase domains boundaries are completely restricted by V-groove trenches with Si { 111} facets. Material quality is confirmed by scanning electron microscopy （SEM）, transmission electron microscopy （TEM） and high resolution X-ray diffraction. Low temperature photoluminescence （PL） measurement is used to analyze the thermal strain relaxation in GaAs layers. This approach shows great promise for the realization of high mobility devices or optoelectronie integrated circuits on Si substrates.
文摘采用RHEED与STM技术对GaAs(001)-(2×6)表面重构下的表面形貌进行研究,研究发现GaAs(001)-(2×6)重构表面是GaAs(001)-β2(2×4)重构表面经530℃,1.33μPa As BEP退火获得,在(2×6)重构下的GaAs(001)表面形貌已经进入表面存在系列单层岛和坑覆盖的无序平坦状态。为了进一步确定(2×6)重构的原胞结构,采用球棍模型对其原胞结构进行模拟,提出新的As表面覆盖率计算方法、结合STM图片分析对球棍模型进行验证和筛选,首次在实验上证实(2×6)重构原胞中存在2个As Dimers和2个Ga Dimers,并以此重构原胞结构构建理论下的(2×6)重构表面,获得结果与STM图片高度吻合。
文摘用分子束外延 (MBE)设备制备了 Ga As/ Al As和 Ga As/ Si/ Al As异质结 ,通过 XPS分别研究了异质结界面处 Si层厚度为 0 .5 ML 和 1ML 对异质结带阶的调节 ,得到最大调节量为 0 .2 e V;通过 C- V法研究了异质结的Ga As层在不同温度下生长对 0 .5 ML Si夹层的影响 ,得到 Si夹层的空间分布随 Ga As层生长温度的升高而扩散增强的温度效应 ,通过深能级瞬态谱 (DL TS)研究了在上述不同温度下生长的 Ga As层的晶体质量 .
