We study the effect of the AlGaN interlayer on structural quality and strain engineering of the GaN films grown on SiC substrates with an AlN buffer layer, hnproved structural quality and tensile stress releasing are ...We study the effect of the AlGaN interlayer on structural quality and strain engineering of the GaN films grown on SiC substrates with an AlN buffer layer, hnproved structural quality and tensile stress releasing are realized in unintentionally doped GaN thin films grown on 6H-SiC substrates by metal organic chemical vapor deposition. Using the optimized AlGaN interlayer, we find that the full width at half maximum of x-ray diffraction peaks for GaN decreases dramatically, indicating an improved crystalline quality. Meanwhile, it is revealed that the biaxial tensile stress in the GaN film is significantly reduced from the Raman results. Photoluminescence spectra exhibit a shift of the peak position of the near-band-edge emission, as well as the integrated intensity ratio variation of the near-band-edge emission to the yellow luminescence band. Thus by optimizing the AlGaN interlayer, we could acquire the high-quality and strain-relaxation GaN epilayer with large thickness on SiC substrates.展开更多
This paper reported a simple and effective method for fabricating and patterning highly ordered ZnO nanorod arrays on H2-decomposed GaN epilayer via hydrothermal route. The edge of pattern, which has been decomposed b...This paper reported a simple and effective method for fabricating and patterning highly ordered ZnO nanorod arrays on H2-decomposed GaN epilayer via hydrothermal route. The edge of pattern, which has been decomposed by H2 flow, provides appropriate nucleation sites for the selective-growth of aligned ZnO nanorods. The density of ZnO nanorod arrays assembled the hexagonal pattern can be tuned by varying the solution concentrations, growth time and reaction temperatures. The results have demonstrated that the ZnO nanorods are highly uniform in diameter and height with perfect alignment and are epitaxially grown along [0001] direc- tion. This work provides a novel and accessible route to prepare oriented and aligned ZnO nanorod arrays pattern. And the aligned ZnO nanorods form an ideal hexagonal pattern that might be used in many potential applications of ZnO nanomaterials.展开更多
基金Supported by the National Key R&D Program of China under Grant No 2016YFB0400200
文摘We study the effect of the AlGaN interlayer on structural quality and strain engineering of the GaN films grown on SiC substrates with an AlN buffer layer, hnproved structural quality and tensile stress releasing are realized in unintentionally doped GaN thin films grown on 6H-SiC substrates by metal organic chemical vapor deposition. Using the optimized AlGaN interlayer, we find that the full width at half maximum of x-ray diffraction peaks for GaN decreases dramatically, indicating an improved crystalline quality. Meanwhile, it is revealed that the biaxial tensile stress in the GaN film is significantly reduced from the Raman results. Photoluminescence spectra exhibit a shift of the peak position of the near-band-edge emission, as well as the integrated intensity ratio variation of the near-band-edge emission to the yellow luminescence band. Thus by optimizing the AlGaN interlayer, we could acquire the high-quality and strain-relaxation GaN epilayer with large thickness on SiC substrates.
基金Acknowledgements This work was supported by the Starting Research Fund from the Jianghan University （Nos. 2010014 and 2012017）, the National Natural Science Foundation of China （Grant Nos. 61006046 and 51002058）.
文摘This paper reported a simple and effective method for fabricating and patterning highly ordered ZnO nanorod arrays on H2-decomposed GaN epilayer via hydrothermal route. The edge of pattern, which has been decomposed by H2 flow, provides appropriate nucleation sites for the selective-growth of aligned ZnO nanorods. The density of ZnO nanorod arrays assembled the hexagonal pattern can be tuned by varying the solution concentrations, growth time and reaction temperatures. The results have demonstrated that the ZnO nanorods are highly uniform in diameter and height with perfect alignment and are epitaxially grown along [0001] direc- tion. This work provides a novel and accessible route to prepare oriented and aligned ZnO nanorod arrays pattern. And the aligned ZnO nanorods form an ideal hexagonal pattern that might be used in many potential applications of ZnO nanomaterials.
