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Effect of inhomogeneous broadening on threshold current of GaN-based green laser diodes 被引量:3
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作者 Yipeng Liang Jianping Liu +7 位作者 Masao Ikeda Aiqin Tian Renlin Zhou Shuming Zhang Tong Liu Deyao Li Liqun Zhang Hui Yang 《Journal of Semiconductors》 EI CAS CSCD 2019年第5期67-70,共4页
The inhomogeneous broadening parameter and the internal loss of green LDs are determined by experiments and theoretical fitting. It is found that the inhomogeneous broadening plays an important role on the threshold c... The inhomogeneous broadening parameter and the internal loss of green LDs are determined by experiments and theoretical fitting. It is found that the inhomogeneous broadening plays an important role on the threshold current density of green LDs. The green LD with large inhomogeneous broadening even cannot lase. Therefore, reducing inhomogeneous broadening is a key issue to improve the performance of green LDs. 展开更多
关键词 GaN green laser diodE INHOMOGENEOUS BROADENING threshold current density
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Different influences of u-InGaN upper waveguide on the performance of GaN-based blue and green laser diodes 被引量:1
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作者 梁锋 赵德刚 +11 位作者 江德生 刘宗顺 朱建军 陈平 杨静 刘炜 李翔 刘双韬 邢瑶 张立群 李沫 张健 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第11期210-215,共6页
Performances of blue and green laser diodes(LDs) with different u-InGaN upper waveguides(UWGs) are investigated theoretically by using LASTIP. It is found that the slope efficiency(SE) of blue LD decreases due t... Performances of blue and green laser diodes(LDs) with different u-InGaN upper waveguides(UWGs) are investigated theoretically by using LASTIP. It is found that the slope efficiency(SE) of blue LD decreases due to great optical loss when the indium content of u-InGaN UWG is more than 0.02, although its leakage current decreases obviously. Meanwhile the SE of the green LD increases when the indium content of u-InGaN UWG is varied from 0 to 0.05, which is attributed to the reduction of leakage current and the small increase of optical loss. Therefore, a new blue LD structure with In(0.05) Ga(0.95)N lower waveguide(LWG) is designed to reduce the optical loss, and its slope efficiency is improved significantly. 展开更多
关键词 gan-based laser diode slope efficiency waveguide
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Material Growth and Device Fabrication of GaN-Based Blue-Violet Laser Diodes 被引量:1
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作者 杨辉 陈良惠 +16 位作者 张书明 种明 朱建军 赵德刚 叶小军 李德尧 刘宗顺 段俐宏 赵伟 王海 史永生 曹青 孙捷 陈俊 刘素英 金瑞琴 梁骏吾 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第2期414-417,共4页
Studies on first GaN-based blue-violet laser diodes(LDs) in China mainland are reported.High quality GaN materials as well as GaN-based quantum wells laser structures are grown by metal-organic chemical vapor depositi... Studies on first GaN-based blue-violet laser diodes(LDs) in China mainland are reported.High quality GaN materials as well as GaN-based quantum wells laser structures are grown by metal-organic chemical vapor deposition method.The X-ray double-crystal diffraction rocking curve measurements show the full-width half maximum of 180″ and 185″ for (0002) symmetric reflection and (10 12) skew reflection,respectively.A room temperature mobility of 850cm2/(V·s) is obtained for a 3μm thick GaN film.Gain guided and ridge geometry waveguide laser diodes are fabricated with cleaved facet mirrors at room temperature under pulse current injection.The lasing wavelength is 405 9nm.A threshold current density of 5kA/cm2 and an output light power over 100mW are obtained for ridge geometry waveguide laser diodes. 展开更多
关键词 metalorganic chemical vapor deposition gan-based laser diodes multiple quantum wells ridge geometry structure threshold current density
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Room-temperature continuous-wave operation of GaN-based blue-violet laser diodes with a lifetime longer than 1000h 被引量:5
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作者 Feng Liang Jing Yang +9 位作者 Degang Zhao Zongshun Liu Jianjun Zhu Ping Chen Desheng Jiang Yongsheng Shi Hai Wang Lihong Duan Liqun Zhang Hui Yang 《Journal of Semiconductors》 EI CAS CSCD 2019年第2期39-42,共4页
GaN-based continuous-wave operated blue-violet laser diodes(LDs) with long lifetime are demonstrated, which are grown on a c-plane GaN substrate by metal organic chemical vapor deposition with a 10 × 600 μm^2 ri... GaN-based continuous-wave operated blue-violet laser diodes(LDs) with long lifetime are demonstrated, which are grown on a c-plane GaN substrate by metal organic chemical vapor deposition with a 10 × 600 μm^2 ridge waveguide structure.The electrical and optical characteristics of a blue-violet LD are investigated under direct-current injection at room temperature(25 °C). The stimulated emission wavelength and peak optical power of the LD are around 413 nm and over 600 mW, respectively.In addition, the threshold current density and voltage are as small as 1.46 kA/cm^2 and 4.1 V, respectively. Moreover, the lifetime is longer than 1000 hours under room-temperature continuous-wave operation. 展开更多
关键词 gan-based blue-violet laser diodes long LIFETIME threshold voltage
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Performance Improvement of GaN-Based Violet Laser Diodes 被引量:1
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作者 赵德刚 江德生 +5 位作者 乐伶聪 杨静 陈平 刘宗顺 朱建军 张立群 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第1期98-101,共4页
The influences of InGaN/GaN multiple quantum wells (MQWs) and AlGaN electron-blocking layers (EBL) on the performance of GaN-based violet laser diodes are investigated. Compared with the InGaN/GaN MQWs grown at two di... The influences of InGaN/GaN multiple quantum wells (MQWs) and AlGaN electron-blocking layers (EBL) on the performance of GaN-based violet laser diodes are investigated. Compared with the InGaN/GaN MQWs grown at two different temperatures, the same-temperature growth of InGaN well and GaN barrier layers has a positive effect on the threshold current and slope efficiency of laser diodes, indicating that the quality of MQWs is improved. In addition, the performance of GaN laser diodes could be further improved by increasing Al content in the AlGaN EBL due to the fact that the electron leakage current could be reduced by properly increasing the barrier height of AlGaN EBL. The violet laser diode with a peak output power of 20 W is obtained. 展开更多
关键词 GAN Performance Improvement of gan-based Violet laser diodes
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Effect of Green Quantum Well Number on Properties of Green GaN-Based Light-Emitting Diodes
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作者 Zhi-Hui Wang Xiao-Lan Wang +6 位作者 Jun-Lin Liu Jian-Li Zhang Chun-Lan Mo Chang-Da Zheng Xiao-Ming Wu Guang-Xu Wang Feng-Yi Jiang 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第8期79-82,共4页
In GaN-based green light-emitting diodes(LEDs) with different green quantum well numbers grown on Si(111)substrates by metal organic chemical vapor deposition are investigated. It is observed that V-shaped pits ap... In GaN-based green light-emitting diodes(LEDs) with different green quantum well numbers grown on Si(111)substrates by metal organic chemical vapor deposition are investigated. It is observed that V-shaped pits appear in the AFM images with the green quantum well number increasing from 5 to 9, and results in larger reverse-bias leakage current. Meanwhile, in the case of the sample with the number from 5 to 7 then to 9, the external quantum efficiency increases firstly, and then decreases. These phenomena may be related to the size of V-shaped pits in the active area and the distribution of electrons and holes in the active area caused by V-shaped pits. The optimal number of green quantum wells is determined to be 7. 展开更多
关键词 GAN Effect of green Quantum Well Number on Properties of green gan-based Light-Emitting diodes
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Fabrication of room temperature continuous-wave operation GaN-based ultraviolet laser diodes 被引量:6
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作者 Degang Zhao Jing Yang +8 位作者 Zongshun Liu Ping Chen Jianjun Zhu Desheng Jiang Yongsheng Shi Hai Wang Lihong Duan Liqun Zhang Hui Yang 《Journal of Semiconductors》 EI CAS CSCD 2017年第5期1-3,共3页
Two kinds of continuous-wave GaN-based ultraviolet laser diodes(LDs) operated at room temperature and with different emission wavelengths are demonstrated.The LDs epitaxial layers are grown on GaN substrate by metal... Two kinds of continuous-wave GaN-based ultraviolet laser diodes(LDs) operated at room temperature and with different emission wavelengths are demonstrated.The LDs epitaxial layers are grown on GaN substrate by metalorganic chemical vapor deposition,with a 10 × 600 μm^2 ridge waveguide structure.The electrical and optical characteristics of the ultraviolet LDs are investigated under direct-current injection at room temperature.The stimulated emission peak wavelength of first LD is 392.9 nm,the threshold current density and voltage is 1.5kA/cm^2 and 5.0 V,respectively.The output light power is 80 mW under the 4.0 kA/cm^2 injection current density.The stimulated emission peak wavelength of second LD is 381.9 nm,the threshold current density the voltage is2.8 kA/cm^2 and 5.5 V,respectively.The output light power is 14 mW under a 4.0 kA/cm^2 injection current density. 展开更多
关键词 gan-based ultraviolet laser diodes continuous-wave operation threshold current
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Optimization of the cavity facet coating in high power GaN-based semiconductor laser diodes 被引量:1
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作者 FENG MeiXin ZHANG ShuMing +7 位作者 JIANG DeSheng WANG Hui LIU JianPing ZENG Chang LI ZengCheng WANG HuaiBing WANG Feng YANG Hui 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第4期883-887,共5页
A method to calculate the reflectivity of the coated cavity facet was proposed, and the distribution of the optical power near the two coated cavity facets was calculated for GaN-based laser diodes. A new design metho... A method to calculate the reflectivity of the coated cavity facet was proposed, and the distribution of the optical power near the two coated cavity facets was calculated for GaN-based laser diodes. A new design method for reducing the optical power at the two cavity facets without changing the output power of laser diodes was discussed, which is helpful to optimize the cavity facet coating and raise the threshold current at which catastrophic optical damage occurs. 展开更多
关键词 gan-based laser diodes facet coating AR coating HR coating COD
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组分阶梯InGaN势垒对绿光激光二极管光电性能的影响 被引量:1
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作者 侯俨育 董海亮 +3 位作者 贾志刚 贾伟 梁建 许并社 《人工晶体学报》 CAS 北大核心 2023年第8期1386-1393,共8页
为探究不同铟(In)组分In_(x)Ga_(1-x)N势垒对绿光激光二极管光电性能的影响,本文采用SiLENSe(simulator of light emitters based on nitride semiconductors)仿真软件对一系列具有不同In组分In_(x)Ga_(1-x)N势垒的激光二极管进行研究,... 为探究不同铟(In)组分In_(x)Ga_(1-x)N势垒对绿光激光二极管光电性能的影响,本文采用SiLENSe(simulator of light emitters based on nitride semiconductors)仿真软件对一系列具有不同In组分In_(x)Ga_(1-x)N势垒的激光二极管进行研究,结果发现In_(x)Ga_(1-x)N势垒中In组分最佳值为3%,此时结构的斜率效率最高,内部光学损耗最低,光学限制因子最大,性能最优。在具有In_(0.03)Ga_(0.97_N势垒的多量子阱结构基础上,设计了一种组分阶梯(composition step-graded,CSG)InGaN势垒多量子阱结构,提高了激光二极管的斜率效率和电光转换效率,增加了光场限制能力。仿真结果表明,当注入电流为120 mA时,具有CSG InGaN势垒的多量子阱结构,电光转换效率从17.7%提高至19.9%,斜率效率从1.09 mW/mA增加到1.14 mW/mA,光学限制因子从1.58%增加到1.62%。本文的研究为制备高功率GaN基绿光激光二极管提供了理论指导和数据支撑。 展开更多
关键词 绿光激光二极管 光电性能 In组分 组分阶梯InGaN势垒 斜率效率 电光转换效率
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GaN基绿光激光二极管发展现状及趋势
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作者 杜小娟 刘晶 +4 位作者 董海亮 贾志刚 张爱琴 梁建 许并社 《中国材料进展》 CAS CSCD 北大核心 2023年第7期597-604,共8页
由于氮化镓(GaN)基半导体材料在外延生长技术、外延结构设计方面取得了显著的成果,GaN基绿光激光二极管已广泛应用在激光显示、光纤维通讯、生物医疗器件和光数据存储等领域。综述了绿光激光二极管的发展历程及研究现状;重点详述了导致... 由于氮化镓(GaN)基半导体材料在外延生长技术、外延结构设计方面取得了显著的成果,GaN基绿光激光二极管已广泛应用在激光显示、光纤维通讯、生物医疗器件和光数据存储等领域。综述了绿光激光二极管的发展历程及研究现状;重点详述了导致GaN基绿光激光二极管输出功率低、光束质量差及可靠性差等问题的关键因素及解决方法;探讨了绿光波段量子阱的高In组分导致GaN基激光二极管光电性能骤降方面的问题;总结了制备高性能GaN基绿光激光二极管所面临的挑战仍是外延材料质量差、载流子泄漏严重和强极化效应引起的激射效率低等难题。同时,展望了GaN基绿光激光二极管向智能化和模块化方向发展的趋势以及研究重点。 展开更多
关键词 GaN基绿光激光二极管 输出功率 光束质量 可靠性 外延结构
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Design of 20 W fiber-coupled green laser diode by Zemax 被引量:2
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作者 Yunfei Qi Pengfei Zhao +2 位作者 Yulong Wu Yongqi Chen Yonggang Zou 《Journal of Semiconductors》 EI CAS CSCD 2017年第9期86-89,共4页
We represent a design of a 20 W, fiber-coupled diode laser module based on 26 single emitters at 520 nm. The module can produce more than 20 W output power from a standard fiber with core diameter of 400 Hm and numeri... We represent a design of a 20 W, fiber-coupled diode laser module based on 26 single emitters at 520 nm. The module can produce more than 20 W output power from a standard fiber with core diameter of 400 Hm and numerical aperture (NA) of 0.22. To achieve a 20 W laser beam, the spatial beam combination and polarization beam combination by polarization beam splitter are used to combine output of 26 single emitters into a single beam, and then an aspheric lens is used to couple the combined beam into an optical fiber. The simulation shows that the total coupling efficiency is more than 95%. 展开更多
关键词 laser diode green light single emitter combination technology
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Characteristics of InGaN multiple quantum well blue-violet laser diodes 被引量:1
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作者 LI Deyao1, ZHANG Shuming1, WANG Jianfeng1, CHEN Jun1, CHEN Lianghui2, CHONG Ming2, ZHU Jianjun1, ZHAO Degang1, LIU Zongshun1, YANG Hui1 & LIANG Junwu1 1. State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China 2. Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China 《Science China(Technological Sciences)》 SCIE EI CAS 2006年第6期727-732,共6页
Studies on InGaN multiple quantum well blue-violet laser diodes have been reported. Laser structures with long-period multiple quantum wells were grown by metal-organic chemical vapor deposition. Triple-axis X-ray dif... Studies on InGaN multiple quantum well blue-violet laser diodes have been reported. Laser structures with long-period multiple quantum wells were grown by metal-organic chemical vapor deposition. Triple-axis X-ray diffraction (TAXRD) measurements show that the multiple quantum wells were high quality. Ridge waveguide laser diodes were fabricated with cleaved facet mirrors. The laser diodes lase at room temperature under a pulsed current. A threshold current density of 3.3 kA/cm[2]; a characteristic temperature T 0 of 145 K were observed for the laser diode. 展开更多
关键词 metalorganic chemical vapor deposition (MOCVD) gan-based laser diodes multiple quantum well RIDGE waveguide threshold current.
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20.231 Gbit/s tricolor red/green/blue laser diode based bidirectional signal remodulation visible-light communication system 被引量:6
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作者 LIANG-YU WEI CHIN-WEI HSU +1 位作者 CHI-WAI CHOW CHIEN-HUNG YEH 《Photonics Research》 SCIE EI 2018年第5期422-426,共5页
We propose and experimentally demonstrate a recorded 1-m bidirectional 20.231-Gbit/s tricolor R/G/B laser diode(LD) based visible-light communication(VLC) system supporting signal remodulation. In the signal remodulat... We propose and experimentally demonstrate a recorded 1-m bidirectional 20.231-Gbit/s tricolor R/G/B laser diode(LD) based visible-light communication(VLC) system supporting signal remodulation. In the signal remodulation system, an LD source is not needed at the client side. The client reuses the downstream signal sent from the central office(CO) and remodulates it to produce the upstream signal. As the LD sources are located at the CO, the laser wavelength and temperature managements at the cost-sensitive client side are not needed.This is the first demonstration, to our knowledge, of a >20 Gbit∕s data rate tricolor R/G/B VLC signal transmission supporting upstream remodulation. 展开更多
关键词 bidirectional signal remodulation visible-light communication system blue laser
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LD泵浦的Nd∶GdVO_4/KTP腔内倍频激光器(英文) 被引量:14
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作者 侯学元 李宇飞 +1 位作者 孙渝明 潘雷 《光子学报》 EI CAS CSCD 北大核心 2004年第1期11-14,共4页
基于对Nd∶GdVO4 晶体热焦距的测量及其 1.0 6 μm激光基本性能 ,用三镜折叠腔研究了半导体激光器 (LD)泵浦的Nd∶GdVO4 /KTP晶体的内腔倍频性质 当用从直径为 2 0 0 μm的单光纤输出的低功率的半导体激光泵浦时 ,绿光的阈值是 2 6mW ... 基于对Nd∶GdVO4 晶体热焦距的测量及其 1.0 6 μm激光基本性能 ,用三镜折叠腔研究了半导体激光器 (LD)泵浦的Nd∶GdVO4 /KTP晶体的内腔倍频性质 当用从直径为 2 0 0 μm的单光纤输出的低功率的半导体激光泵浦时 ,绿光的阈值是 2 6mW ,光光转换效率为 17.3% 当用从直径为 1.5 5mm的光纤束输出的高功率的半导体激光泵浦时 ,绿光的阈值是 2 0 0mW ,光光转换效率为 19.35 % 展开更多
关键词 Nd:GdV04 半导体激光器 热焦距 绿光
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半导体激光端泵腔内倍频Nd:YVO_4/LBO连续波8W绿光激光器(英文) 被引量:7
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作者 田丰 解慧明 +3 位作者 陈浩伟 赵致民 李隆 白晋涛 《光子学报》 EI CAS CSCD 北大核心 2004年第6期651-653,共3页
利用两个半导体激光二极管 ,双端泵浦Nd∶YVO4 晶体 ,LBO采用I类非临界相位匹配、腔内倍频 在 2 8.9W的泵浦功率下 ,获得了 8W连续波 0 .5 32 μm绿光输出 ,其光—光转换效率为 2 7.7%
关键词 激光器结构 钕掺杂 钒酸钇晶体 二极管端泵 绿光激光 光转换效率
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ZnSe基蓝绿色半导体激光器研究进展 被引量:5
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作者 王善忠 谢绳武 +2 位作者 庞乾骏 郑杭 夏宇兴 《量子电子学报》 CAS CSCD 1999年第5期385-391,共7页
在全彩色显示、高密度激光存储、高速打印、高分辨图像处理和战地生化检测等强力推动下,ZnSe基蓝绿色半导体激光器的研究近年来取得了里程碑式的研究结果.为了明确该领域的研究方向,以便分析在实用化进程中必须解决的主要问题,本文... 在全彩色显示、高密度激光存储、高速打印、高分辨图像处理和战地生化检测等强力推动下,ZnSe基蓝绿色半导体激光器的研究近年来取得了里程碑式的研究结果.为了明确该领域的研究方向,以便分析在实用化进程中必须解决的主要问题,本文对Znse基蓝绿色半导体激光器及其相关材料的研究进展进行了较全面的评述.作为比较,对GaN基蓝绿色半导体激光器的发展情况和尚待解决的问题也进行了简要评述. 展开更多
关键词 ZnSe基材料 激光二极管 半导体激光器 激光器
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激光二极管泵浦NYAB的绿色激光特性 被引量:3
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作者 邱闽旺 Y.X.Fan +3 位作者 罗遵度 黄奕川 江爱栋 R.Schlecht 《人工晶体学报》 EI CAS CSCD 1992年第3期308-314,共7页
本文报道了用激光二极管(LD)泵浦自倍频激光晶体 Nd_xY_(1-x)Al_3(BO_3)_4(NYAB)发射0.53μm 绿色激光的实验结果。当用370mW 的泵浦功率激励尺寸为 3mm×3mm×5.7mm 的NYAB 棒时,获得了35mW 的 TEM_(oo)模绿色激光输出。输出... 本文报道了用激光二极管(LD)泵浦自倍频激光晶体 Nd_xY_(1-x)Al_3(BO_3)_4(NYAB)发射0.53μm 绿色激光的实验结果。当用370mW 的泵浦功率激励尺寸为 3mm×3mm×5.7mm 的NYAB 棒时,获得了35mW 的 TEM_(oo)模绿色激光输出。输出波长为0.531μm;总效率为9.5%;斜率效率为24%;光谱线宽为0.11nm;光束腰半径为0.196mm;绿色激光光束偏振度达到98%;光束发散度为1.1mrad。 展开更多
关键词 激光晶体 NYAB 激光特性
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二极管泵浦高能激光研究进展和展望 被引量:2
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作者 尚建力 王君涛 +14 位作者 彭万敬 刘航 汪丹 马毅 付博 于益 冯昱骏 张黎 阮旭 靳全伟 易家玉 叶先林 孙殷宏 王伟平 高清松 《强激光与粒子束》 CAS CSCD 北大核心 2022年第1期96-114,共19页
高能激光广泛应用于材料加工、科学研究、空间碎片清除、军事应用等领域。二极管泵浦高能激光具有结构紧凑,系统简单、全电驱无限弹仓的特点,近年来,各类二极管泵浦高能激光围绕着同时实现高功率、高效率、高光束质量这一总目标发展迅... 高能激光广泛应用于材料加工、科学研究、空间碎片清除、军事应用等领域。二极管泵浦高能激光具有结构紧凑,系统简单、全电驱无限弹仓的特点,近年来,各类二极管泵浦高能激光围绕着同时实现高功率、高效率、高光束质量这一总目标发展迅速。详细综述了国内外高平均功率块状固体激光、高功率可见光波段激光、高峰值功率激光、高功率光纤激光、碱金属蒸气激光等二极管泵浦高能激光的研究进展,并对其发展趋势进行了展望。 展开更多
关键词 二极管泵浦高能激光 高平均功率块状固体激光器 高平均功率光纤激光器 碱金属蒸气激光器 高功率绿光激光器 高峰值功率脉冲激光器
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半导体激光ICG白蛋白吻合中等动脉实验研究 被引量:6
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作者 翁国星 WarrenWiliamson 《中国激光医学杂志》 CAS CSCD 1998年第1期3-6,共4页
为取得更好的血管吻合远期通畅率和解决目前激光血管吻合强度不理想的问题,我们应用半导体激光和加靛蓝花青染料(ICG)白蛋白,比较三种不同吻合方法:直接吻合法、单纯白蛋白“焊接”吻合法和直接吻合法加焊接吻合法。吻合材料为... 为取得更好的血管吻合远期通畅率和解决目前激光血管吻合强度不理想的问题,我们应用半导体激光和加靛蓝花青染料(ICG)白蛋白,比较三种不同吻合方法:直接吻合法、单纯白蛋白“焊接”吻合法和直接吻合法加焊接吻合法。吻合材料为离体人胸廓内动脉、活体大白鼠腹主动脉及离体猪心脏和胸廓内动脉。结果表明,平均完成一个吻合口的时间为3.15min±0.36min;使用白蛋白加固或焊接吻合的耐压强度和抗拉强度都显著高于直接吻合法(P<0.05和P<0.01),而且焊接吻合法的热损伤仅限于动脉外膜,深度仅200μm;存活的大白鼠腹主动脉吻合结果满意。激光用于端—侧吻合胸廓内动脉和冠状动脉左前降支,其抗拉强度仍需进一步活体动物实验研究加以改进。 展开更多
关键词 半导体激光 血管吻合 靛蓝花青染料 白蛋白
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等离子体活性氮源的研制 被引量:2
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作者 王善忠 许颐璐 +6 位作者 姬荣斌 巫艳 俞锦陛 乔怡敏 于梅芳 杨建荣 何力 《光电子技术》 CAS 1998年第1期54-59,共6页
ZnSe基材料是研制蓝绿色发光器件的首选材料之一。本文报道一种自己研制的、以石英管为主体结构材料的、可适用于ZnSe基材料分子束外延掺杂的简易等离子体活性氛源。该氛源采用射频激励方式激活氮分子。在适当生长条件下,利用装备有该... ZnSe基材料是研制蓝绿色发光器件的首选材料之一。本文报道一种自己研制的、以石英管为主体结构材料的、可适用于ZnSe基材料分子束外延掺杂的简易等离子体活性氛源。该氛源采用射频激励方式激活氮分子。在适当生长条件下,利用装备有该氮源的国产FW-Ⅲ型分子束外延设备,成功地生长出了p型ZnSe优质单晶薄膜。SIMS测量表明,薄膜中氮浓度高达~2.3×1020cm-3;C-V测量表明,净空穴浓度[Na]-[Nd]为~5×1017cm-3,已经达到制备原理性蓝绿色激光二极管的要求(~4.0×1017cm-3)。 展开更多
关键词 射频激励 等离子体 活性氮源 发光器件
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