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High-Pressure Oxidation on Ge:Improvement of Ge/GeO2 Interface and GeO2 Bulk Properties
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作者 Choong Hyun Lee 《Journal of Microelectronic Manufacturing》 2020年第2期6-11,共6页
On the basis of thermodynamic and kinetic consideration of Ge-O system,high-pressure oxidation(HPO)on Ge was proposed to suppress the GeO desorption during the thermal oxidation and significant improvements of Ge/GeO2... On the basis of thermodynamic and kinetic consideration of Ge-O system,high-pressure oxidation(HPO)on Ge was proposed to suppress the GeO desorption during the thermal oxidation and significant improvements of Ge/GeO2-based gate stacks have been achieved.It is found that the post oxidation annealing at lower temperatures is helpful to passivate the interface defects at the Ge/GeO2 stack generated by the conventional thermal oxidation,while the high-quality GeO2 bulk properties can only be achieved by HPO that grows GeO2 film at high temperatures without the GeO desorption.This paper reviews the advantage of HPO on the formation of Ge/GeO2 stacks in terms of Ge/GeO2 interface and GeO2 bulk properties. 展开更多
关键词 High-pressure oxidation ge oxidation High mobility channel ge/geo2 interface Interface trap density
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Fabricating GeO_2 passivation layer by N_2O plasma oxidation for Ge NMOSFETs application 被引量:1
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作者 林猛 安霞 +6 位作者 黎明 云全新 李敏 李志强 刘朋强 张兴 黄如 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第6期538-541,共4页
In this paper, oxidation of Ge surface by N2O plasma is presented and experimentally demonstrated. Results show that 1.0-nm GeO2 is achieved after 120-s N20 plasma oxidation at 300 ℃. The GeO2/Ge interface is atomica... In this paper, oxidation of Ge surface by N2O plasma is presented and experimentally demonstrated. Results show that 1.0-nm GeO2 is achieved after 120-s N20 plasma oxidation at 300 ℃. The GeO2/Ge interface is atomically smooth. The interface state density of Ge surface after N20 plasma passivation is about - 3 × 1011 cm-2.eV-1. With GeO2 passivation, the hysteresis of metal-oxide-semiconductor (MOS) capacitor with A1203 serving as gate dielectric is reduced to - 50 mV, compared with - 130 mV of the untreated one. The Fermi-level at GeO2/Ge interface is unpinned, and the surface potential is effectively modulated by the gate voltage. 展开更多
关键词 ge geo2 passivation N2O plasma oxidation ge NMOSFETs
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Ge/GeO_2/多层石墨纳米复合物锂离子电池负极材料性能研究 被引量:1
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作者 连小兵 杨阳 +7 位作者 肖春妹 黄妙龄 陈文杰 孙雪娇 许妙琼 郑明森 吴启辉 陈国良 《中国科学:化学》 CAS CSCD 北大核心 2017年第5期626-631,共6页
由于其高容量、快速锂离子扩散速率和高电导性的优点,锗被认为是一种非常有前景的锂离子电池负极材料.本研究利用GeO2和石墨作为前驱体,通过水热法制备Ge/GeO_2/多层石墨复合物并将其应用于锂离子电池负极材料进行电化学性能研究.实验... 由于其高容量、快速锂离子扩散速率和高电导性的优点,锗被认为是一种非常有前景的锂离子电池负极材料.本研究利用GeO2和石墨作为前驱体,通过水热法制备Ge/GeO_2/多层石墨复合物并将其应用于锂离子电池负极材料进行电化学性能研究.实验结果表明,Ge/GeO2纳米粒子的粒径约为40 nm.该复合物电极的第一次充放电容量分别是2045和1146 mA h g.1,库仑效率为56.0%.50圈充放电循环后,当电压范围为0.01~1.50 V时,容量保持在1008 mAhg^(-1).倍率实验表明,该电极在1C(1C=1000mAg^(-1))和2 C倍率大电流下,虽然容量略有衰减,但仍保持790和710 mAhg^(-1)的高容量. 展开更多
关键词 二氧化锗 负极材料 锂离子电池
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Effect of Ge–GeO_2 co-doping on non-ohmic behaviour of TiO_2–V_2O_5–Y_2O_3 varistor ceramics 被引量:2
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作者 康昆勇 甘国友 +5 位作者 严继康 易建宏 张家敏 杜景红 赵文超 荣雪全 《Journal of Semiconductors》 EI CAS CSCD 2015年第7期39-44,共6页
An investigation was made into the effect of doping with the elemental crystal Ge or/and GeO2 on the TiO2-V2O5-Y2O3 varistor ceramics. The result shows that as the doping contents of V2O5 and Y2O3 are 0.5 tool%, respe... An investigation was made into the effect of doping with the elemental crystal Ge or/and GeO2 on the TiO2-V2O5-Y2O3 varistor ceramics. The result shows that as the doping contents of V2O5 and Y2O3 are 0.5 tool%, respectively, co-doping with 0.3 mol% Ge and 0.9 mol% GeO2 makes the highest α value (α = 12.8), the lowest breakdown voltage Vlmg (VlmA = 15.8 V/ram) and the highest grain boundary barrier ФB (ФB = 1.48 eV), which is remarkably superior to the TiO2-V2Os-Y203 varistor ceramics undoped with Ge and GeO2 and mono-doped with Ge or GeO2. The TiO2-V2Os-YEO3-Ge-GeO2 ceramic has the prospect of becoming a novel varistor ceramic with excellent electrical properties. 展开更多
关键词 TiO2 varistor CO-DOPING nonlinear coefficient breakdown voltage ge and geo2
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一种创新结构宽波段中红外空芯光纤的设计与研究 被引量:1
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作者 侯峙云 洪文学 +2 位作者 赵兵 韩华 侯蓝田 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2013年第1期28-31,96,共5页
提出一种双包层结构Ge/GeO2介质膜空芯中红外光纤.先采用排布法拉制出包层带有多层空气孔的空芯毛细管,最外层涂有一层硅胶,以加强其机械强度,然后利用化学气相沉积和还原方法在空芯石英毛细管中制备出GeO2-Ge的多层介质反射膜,该膜层... 提出一种双包层结构Ge/GeO2介质膜空芯中红外光纤.先采用排布法拉制出包层带有多层空气孔的空芯毛细管,最外层涂有一层硅胶,以加强其机械强度,然后利用化学气相沉积和还原方法在空芯石英毛细管中制备出GeO2-Ge的多层介质反射膜,该膜层提高了Ge/GeO2膜层在短波段的反射效率.经光谱检测分析,该光纤可传输波长为3-12μm,并且中间没有出现大的吸收峰. 展开更多
关键词 多层介质膜 ge geo2 宽波段
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大麦苗富锗能力的探究 被引量:3
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作者 于爱洁 何萌 +5 位作者 卞菲菲 贺君 王晓洁 李琪琪 肖波 柳全文 《鲁东大学学报(自然科学版)》 2019年第3期210-215,共6页
为找出培育富锗麦苗的最佳方案,本研究采用不同富锗方法以及不同浓度的锗溶液培养富锗麦苗,观察不同方法及不同浓度的锗溶液对麦苗的生长及富锗量的影响情况.采用水培法培育麦苗.具体方法包括:浸麦阶段富锗法,出苗阶段富锗法,全过程富锗... 为找出培育富锗麦苗的最佳方案,本研究采用不同富锗方法以及不同浓度的锗溶液培养富锗麦苗,观察不同方法及不同浓度的锗溶液对麦苗的生长及富锗量的影响情况.采用水培法培育麦苗.具体方法包括:浸麦阶段富锗法,出苗阶段富锗法,全过程富锗法;采用氢化物发生原子荧光光谱法测定富锗麦苗中锗的含量.结果显示:综合麦苗的长势和含锗量,10 mg·L-1(浸麦阶段富锗)麦苗组有机锗转化率较高,是最佳麦苗组.全锗含量是空白对照组的2.19倍,有机锗含量是空白对照的2.73倍. 展开更多
关键词 富锗大麦 锗含量 二氧化锗
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