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Electrochemical Properties of Poly(ethylene oxide)(PEO) Doped TiO_2-PEO Films Prepared by Sol-gel Dip Coating Technique
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作者 袁坚 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2001年第2期6-8,12,共4页
PEO modified Ti02 -PEO organic-inorganic hybrid thin films were prepared via, sol-gel dipping process on glass substrate pre-coated with ITO. The preparation parameters were studied. Electrochemical and optical proper... PEO modified Ti02 -PEO organic-inorganic hybrid thin films were prepared via, sol-gel dipping process on glass substrate pre-coated with ITO. The preparation parameters were studied. Electrochemical and optical properties of the films were characterized by cyclic voltammetric response and visible transmittance. X-ray diffraction (XRD) was used to determined the crystalline structure of the gel. The results show the sols added with PEO have acceptable stable periods for practical use. The PEO modified optical transitivity of the hybrid films has heavy effects on the crystallization of TiO2 during structural evolution because of the interaction between PEO and Ti02 . PEO-TiO2 films have better electrochemical activity than the TiO2 equivalent behaved as higher Li + insertion/extraction current density and cyclic reversibility. 展开更多
关键词 sol-gel dip-coating films electrochromic materials PEO TI02
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Influence of Sn Low Doping on the Morphological, Structural and Optical Properties of ZnO Films Deposited by Sol Gel Dip-Coating
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作者 Chewki Zegadi Khalil Abdelkebir +2 位作者 Denis Chaumont Mohamed Adnane Saad Hamzaoui 《Advances in Materials Physics and Chemistry》 2014年第5期93-104,共12页
In this work, Undoped Zinc Oxide (ZnO) and Sndoped Zinc Oxide (ZnO:Sn) films have been deposited by sol-gel dip coating method, where the Sn/Zn atomic ratio was 3% and 5% in the solution. The effects of Sn incorporati... In this work, Undoped Zinc Oxide (ZnO) and Sndoped Zinc Oxide (ZnO:Sn) films have been deposited by sol-gel dip coating method, where the Sn/Zn atomic ratio was 3% and 5% in the solution. The effects of Sn incorporation on morphological, structural and optical properties of ZnO films were investigated. The Scanning Electron Microscopy (SEM) showed that the morphological surface of the films was affected by Sn low doping. The X-Ray Diffraction (XRD) patterns showed that all films have polycrystalline structures, and the doping incorporation has not lead to substantial changes in the structural characteristics of ZnO films. The crystallite size was calculated using the well-known Scherrer’s formula and found to be in the range of 23 - 40 nm. The measurements from UV-Visible Spectrophotometer (U-Vis) indicated that the highest average optical transmittance in the visible region was related to Undoped ZnO film, then the optical band gap and Urbach energy values of thin films were calculated. The X-Ray Photoelectron Spectroscopy (XPS) has demonstrated that Sn is incorporated in ZnO lattice. 展开更多
关键词 Sol-gel DIP-coatING ZnO films SN Low Doping SEM MICROGRAPHS X-Rays Patterns Optical Properties XPS Spectrum
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Structural, Optical and Luminescence Properties of ZnO Thin Films Prepared by Sol-Gel Spin-Coating Method: Effect of Precursor Concentration 被引量:1
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作者 R.Amari A.Mahroug +2 位作者 A.Boukhari B.Deghfel N.Selmi 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第1期63-67,共5页
Transparent zinc oxide(ZnO) thin films are fabricated by a simple sol-gel spin-coating technique on glass substrates with different solution concentrations(0.3-1.2 M) using zinc acetate dehydrate [Zn(CH_3COO)_2&... Transparent zinc oxide(ZnO) thin films are fabricated by a simple sol-gel spin-coating technique on glass substrates with different solution concentrations(0.3-1.2 M) using zinc acetate dehydrate [Zn(CH_3COO)_2·2H_2O] as precursor and isopropanol and monoethanolamine(MEA) as solvent and stabilizer, respectively. The molar ratio of zinc acetate dehydrate to MEA is 1.0. X-ray diffraction, ultraviolet-visible spectroscopy and photoluminescence spectroscopy are employed to investigate the effect of solution concentration on the structural and optical properties of the ZnO thin films. The obtained results of all thin films are discussed in detail and are compared with other experimental data. 展开更多
关键词 ZnO Optical and Luminescence Properties of ZnO Thin films Prepared by Sol-gel Spin-coating Method Structural
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Preparation Nano-Diamond Film by Sol-Gelled Coating Method for Field Emission Display
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作者 Xiuxia Zhang Shuyi Wei Qianyu Ji 《Advances in Nanoparticles》 2017年第1期1-9,共9页
The mixture of Nano-graphite and organic vehicles doped to Nano-diamond paste. The suitable paste proportion was found. Nano-diamond film (NDF) was prepared by sol-gel coating method on ITO glass at 3000/min. The fiel... The mixture of Nano-graphite and organic vehicles doped to Nano-diamond paste. The suitable paste proportion was found. Nano-diamond film (NDF) was prepared by sol-gel coating method on ITO glass at 3000/min. The field emission characteristics of luminance-current, luminance-voltage and luminance-power of Nano-diamond film were analyzed and tested. Comparing these tested curves, the luminance was well proportional to current was got. Theoretic, the inner resistance of NDF field emission display (FED) consumes electric energy and real voltage change between the cathode and the anode of NDF-FED was very small after electrons emit. So the characteristic of NDF-FED was preferable to describe by luminance-current linear relationship, which was advantageous to device tested and designed. 展开更多
关键词 NANO-DIAMOND film (NDF) SOL-gel coating Method Suitable PASTE PROPORTION Field Emission Display (FED)
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Review on Sol-Gel Derived Coatings: Process, Techniques and Optical Applications 被引量:5
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作者 S.M.Attia JueWANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2002年第3期211-218,共8页
Sol-gel process is one of the simplest techniques to manufacture thin films. The quality of the prepared films depends on the parameters of the sol-gel process and the used technique for deposition. A great variety of... Sol-gel process is one of the simplest techniques to manufacture thin films. The quality of the prepared films depends on the parameters of the sol-gel process and the used technique for deposition. A great variety of the sol-gel derived films have been prepared for different applications. We present a review on the sol-gel derived coatings. The description of the process is introduced in details. Different sol-gel deposition techniques are mentioned. The optical applications of the sol-gel derived coatings are reviewed. 展开更多
关键词 Sol-gel process coatING Thin film
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Synthesis Sol-Gel Derived Highly Transparent ZnO Thin Films for Optoelectronic Applications 被引量:1
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作者 Wasan R. Saleh Nada M. Saeed +1 位作者 Wesam A. Twej Mohammed Alwan 《Advances in Materials Physics and Chemistry》 2012年第1期11-16,共6页
In this work, ZnO thin films were derived by sol-gel using two different techniques;dip coating and spin coating technique. The films were deposited onto glass substrate at room temperature using sol-gel composed from... In this work, ZnO thin films were derived by sol-gel using two different techniques;dip coating and spin coating technique. The films were deposited onto glass substrate at room temperature using sol-gel composed from zinc acetate dehydrate, monoethanolamine, isopropanole, and de-ionized water, the films were preheated at 225?C for 15 min. The crystallographic structures of ZnO films were investigated using X-ray diffraction (XRD);the result shows that the good film was prepared at dip coating technique, it was polycrystalline and highly c-orientation along (002) plane, the lattice constant ratio (c/a) was calculated at (002), it was about 1.56. The structure of thin films, prepared by spin coating technique, was amorphous with low intensity and wide peaks. The optical properties of the prepared film were studied using UV-VIS spectrophotometer with the range 190 - 850 nm, and by using the fluorescence spectrometer. The optical characterization of ZnO thin films that were prepared by the dip coating method have good transmittance of about 92% in the visible region, it can be noted from the fluorescence spectrometer two broad visible emission bands centered at 380nm and 430 nm. The optical energy gaps for the direct and indirect allowed transitions were calculated, the values were equal 3.2 eV and 3.1 eV respectively. Dip coating technique create ZnO films with potential for application as transparent electrodes in optoelectronic devices such as solar cell. 展开更多
关键词 ZnO THIN film SOL-gel DIP and SPIN coating Technique
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Preparation and Properties of Dip-coated CeO_2-TiO_2 Thin Golden Glass Film
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作者 李宏 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2007年第3期482-485,共4页
The golden and ultraviolet-absorbed CeO2-TiO2 film was prepared on soda-lime glass substrate with the thickness of 2 mm via the sol-gel method. The transmission spectra in range of 200 nm-800 nm were measured, and the... The golden and ultraviolet-absorbed CeO2-TiO2 film was prepared on soda-lime glass substrate with the thickness of 2 mm via the sol-gel method. The transmission spectra in range of 200 nm-800 nm were measured, and the crystallization, the abrasion and acid resistance were also investigated. The appropriate sol contents and heat-treatment schedule were determined. The results indicate that the appropriate molar ratio of Ce/Ti was 3:5 to 5:6. The ultraviolet-absorbance ability increased with the increase of the Ce/Ti molar ratio, but when the Ce/Ti molar ratio was higher than 1.5, the homogeneity of the film was deteriorated. With the increase of heat-treatment temperature, the main wavelengths of the color of the coated glasses were equal, but the color' s saturation decreased; the transmission peaks were the same, while the intensity of the peaks decreased. The roughness, abrasion and acid resistance of the film were also enhanced at the same time. The appropriate heat- treatment temperature may be 340℃. 展开更多
关键词 sol-gel method CeO2-TiO2 film dip-coating process
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反提拉Sol-Gel法制备PZT薄膜及热处理工艺对薄膜性能结构影响的研究 被引量:4
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作者 陈祝 张树人 +3 位作者 杨成韬 李金龙 王升 张水琴 《真空科学与技术学报》 EI CAS CSCD 北大核心 2004年第5期377-380,384,共5页
通过醋酸铅、硝酸锆、钛酸丁酯分别制备独立稳定的前驱单体 ,采用Sol Gel反提拉涂膜技术在基片Pt/Ti/SiO2 /Si上制备PZT铁电薄膜。本文讨论了制备工艺对薄膜质量的影响 ,比较了在不同的退火速率 ,退火温度及退火气氛工艺中 ,制备的PZT... 通过醋酸铅、硝酸锆、钛酸丁酯分别制备独立稳定的前驱单体 ,采用Sol Gel反提拉涂膜技术在基片Pt/Ti/SiO2 /Si上制备PZT铁电薄膜。本文讨论了制备工艺对薄膜质量的影响 ,比较了在不同的退火速率 ,退火温度及退火气氛工艺中 ,制备的PZT铁电薄膜结构、性能的差异 ,并对其形成原因进行了分析。 展开更多
关键词 薄膜性能 PZT铁电薄膜 退火气氛 硝酸锆 SOL-gel 基片 SiO2 制备 钛酸丁酯 退火温度
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Sol-gel旋涂法制备纳米TiO2薄膜及其双亲性能研究 被引量:3
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作者 戴剑锋 李扬 +2 位作者 王青 李维学 吴中立 《材料导报》 EI CAS CSCD 北大核心 2008年第1期124-126,共3页
采用溶胶-凝胶法,利用旋涂技术在玻璃表面制备了膜厚小于100nm的纳米TiO_2薄膜,以去离子水和苯作为水和油模型,利用XRD、AFM系统研究了煅烧温度、粒径及膜厚对薄膜双亲性的影响。结果表明:煅烧温度强烈影响TiO_2薄膜的双亲性,煅烧温度为... 采用溶胶-凝胶法,利用旋涂技术在玻璃表面制备了膜厚小于100nm的纳米TiO_2薄膜,以去离子水和苯作为水和油模型,利用XRD、AFM系统研究了煅烧温度、粒径及膜厚对薄膜双亲性的影响。结果表明:煅烧温度强烈影响TiO_2薄膜的双亲性,煅烧温度为550℃时双亲性最佳;减小粒径和增加膜厚都有利于TiO_2薄膜双亲性的提高,当膜厚大于85nm后双亲性趋于稳定。 展开更多
关键词 TIO2薄膜 溶胶-凝胶法 旋涂技术 双亲性
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Sol-Gel法制备CoO-SiO_2膜 被引量:1
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作者 张兆艳 林财和 《玻璃》 1999年第3期5-8,共4页
用Sol- gel法在浮法玻璃上制备了CoO- SiO2 膜。用红外光谱仪、透射电镜和电子衍射仪等对薄膜的结构及光谱特性进行了研究。分析了影响着色的工艺因素。
关键词 溶胶凝胶 镀膜 玻璃 氧化硅 氧化钴
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Sol-gel法制备ZnO:Cd薄膜及性能研究
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作者 陈瀚 邓宏 《材料导报》 EI CAS CSCD 北大核心 2007年第8期143-145,153,共4页
采用Sol-gel法使用旋转涂覆技术在Si(100)基片上生长了ZnO:Cd薄膜。XRD结果表明:ZnO:Cd薄膜具有与ZnO一样的六角纤锌矿结构,随热处理温度的升高,(002)衍射峰强度逐增,FWHM减小,并沿c轴择优取向生长;透射光谱实验表明:以石英为基底,适度... 采用Sol-gel法使用旋转涂覆技术在Si(100)基片上生长了ZnO:Cd薄膜。XRD结果表明:ZnO:Cd薄膜具有与ZnO一样的六角纤锌矿结构,随热处理温度的升高,(002)衍射峰强度逐增,FWHM减小,并沿c轴择优取向生长;透射光谱实验表明:以石英为基底,适度掺镉可降低薄膜的禁带宽度Eg,特别是在800℃、8%Cd条件下,Eg=2.80eV,与纯ZnO的禁带宽度3.30eV相比,明显降低了光学禁带;光致发光谱(PL)实验表明:在吸收边附近均有较强的紫外发射峰,且随热处理温度升高呈规律的变化;电阻率测定表明:掺镉使薄膜导电性增强。 展开更多
关键词 ZnO:Cd薄膜 光致发光 SOL-gel 旋涂
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退火温度对溶胶-凝胶法氧化钨薄膜电致变色性能的影响
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作者 廖晴东 《材料研究与应用》 CAS 2024年第5期803-808,共6页
电致变色是指在外加电场的作用下电解质中离子嵌入材料中,使得材料本身光学特性发生变化的现象。电致变色材料被用于建筑隔热、装饰、信息显示等场景。氧化钨(WO_(3))作为一种被广泛研究的无机电致变色材料,虽其储量丰富,但受制于苛刻... 电致变色是指在外加电场的作用下电解质中离子嵌入材料中,使得材料本身光学特性发生变化的现象。电致变色材料被用于建筑隔热、装饰、信息显示等场景。氧化钨(WO_(3))作为一种被广泛研究的无机电致变色材料,虽其储量丰富,但受制于苛刻的制备工艺,以及透明导电基底的昂贵价格,在光热调控场景中很少大面积使用无机电致变色薄膜。基于此,采用溶胶-凝胶法(Sol-gel),通过改变退火温度制备了结晶态和非晶态的氧化钨(WO_(3))薄膜,同时探索了不同退火温度对其电致变色性能的影响。实验结果表明,随着退火温度(200、250、300和350℃)的增加,薄膜由非晶态逐渐转变为结晶态,且薄膜内部结构趋于致密化。在退火温度200℃下,薄膜呈现出最佳的电致变色性能及良好的反应可逆性,在1 mol·L^(-1)的AlCl3溶液中电压为-0.5 V时,薄膜在633 nm处的光学对比度为79%;而在250、300和350℃退火温度下,随着薄膜内部结构趋向于致密,当施加正向电压时嵌入的离子无法在短时间内脱离出来,使得薄膜的光学性质难以回复到初始的状态,造成着色褪色响应速度下降,导致光学对比度不同程度的降低,在633 nm处的光学对比度分别为39.1%、23.7%和46.1%。其中,350℃退火的样品在光学对比度上呈现差异化,这归因于薄膜结晶,细微的晶界提供了较多的反应位点。本研究提供了一种简易的、低成本的制备WO_(3)薄膜的方法,为大面积应用电致变色材料提供了理论参考。 展开更多
关键词 氧化钨薄膜 电致变色 溶胶凝胶 AlCl_(3) 非晶薄膜 旋涂 退火温度 光学对比度
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Sol-Gel法玻璃颜色涂层的研制
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作者 滕立东 张梅梅 王春龙 《山东轻工业学院学报(自然科学版)》 CAS 1994年第1期55-60,共6页
本文论述了溶胶──凝胶法制备Fe_2O_3-CoO-SiO_2系统玻璃涂层的工艺过程;研究了热处理过程中涂层由凝胶向玻璃态的转化过程;探讨了影响成膜过程的各种因素及工艺参数。结果表明;在热处理过程中凝胶发生缩聚反应逐... 本文论述了溶胶──凝胶法制备Fe_2O_3-CoO-SiO_2系统玻璃涂层的工艺过程;研究了热处理过程中涂层由凝胶向玻璃态的转化过程;探讨了影响成膜过程的各种因素及工艺参数。结果表明;在热处理过程中凝胶发生缩聚反应逐渐转化为非晶态固体薄膜,基质玻璃表面与膜层之间产生牢固的化学键结合,形成连续的无界面玻璃结构;适当选择涂液的成分、提升速度和热处理制度,可制备出性能优良的非晶态颜色涂层。 展开更多
关键词 颜色涂层 玻璃 溶胶-凝胶法
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Sol-Gel提拉法制备ZAO薄膜及其光电性能 被引量:3
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作者 李海峰 沈长斌 薛钰芝 《大连交通大学学报》 CAS 2009年第1期25-29,共5页
采用溶胶-凝胶(Sol-Gel)浸渍提拉法(基于组装的小型提拉装置)在普通玻璃片上制备出ZnO∶Al(ZAO)薄膜,利用扫描电子显微镜、紫外-可见分光光度计、数字式四探针测试仪等检测手段分别对其进行了分析比较.结果表明:Al3+浓度为1.0%的ZAO薄... 采用溶胶-凝胶(Sol-Gel)浸渍提拉法(基于组装的小型提拉装置)在普通玻璃片上制备出ZnO∶Al(ZAO)薄膜,利用扫描电子显微镜、紫外-可见分光光度计、数字式四探针测试仪等检测手段分别对其进行了分析比较.结果表明:Al3+浓度为1.0%的ZAO薄膜表面最为致密均匀;随着退火温度的提高,薄膜的晶体平均粒径明显增大,电阻率逐渐减小;不同掺Al量的ZAO薄膜在可见光区的平均透光率均在70%以上,当A l3+浓度为1.5%时,550℃退火2 h,电阻率最小,为5.9×10-2Ω.cm. 展开更多
关键词 SOL-gel 提拉法 ZAO薄膜 电阻率 透光率
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Kinetics of Photocatalytic Degradation of Formic Acid over Silica Composite Films Based on Polyoxometalates
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作者 Dan Feng LI Yi Hang GUO +2 位作者 Chang Wen HU Li MAO En Bo WANG 《Chinese Chemical Letters》 SCIE CAS CSCD 2002年第6期575-578,共4页
The composite films, XW11O39n-/SiO2, (X refers to Si, Ge or P, respectively) were prepared by tetraethoxysilane (TEOS) hydrolysis sol-gel method via spin-coating technique. Formation of the composite films is due to s... The composite films, XW11O39n-/SiO2, (X refers to Si, Ge or P, respectively) were prepared by tetraethoxysilane (TEOS) hydrolysis sol-gel method via spin-coating technique. Formation of the composite films is due to strong chemical reaction of organic silanol group with the surface oxygen atoms of XW11O39n-, resulted in the saturation of the surface of the lacunary polyoxometalates (POMs). Therefore, the coordination structural model of the films was proposed. As for the films, retention of the primary Keggin structure was confirmed by UV-vis, FT-IR spectra and MAS NMR. The surface morphology of the films was characterized by SEM, indicating that the film surface is relatively uniform, and the layer thickness is in the range of 250~350 nm. Aqueous formic acid (FA) (0-20 mmol/L) was degraded into CO2 and H2O by irradiating the films in the near-UV area. The results show that all the films have photocatalytic activities and the degradation reaction follows Langmuir-Hinshelwood first order kinetics. 展开更多
关键词 POLYOXOMETALATES SOL-gel spin coating composition film PHOTOCATALYSIS KINETICS formic acid.
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石英基底上可见光区减反射涂层的双层膜系设计 被引量:1
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作者 魏栋 靳志勇 +1 位作者 贾红宝 朱世海 《大学物理实验》 2023年第2期26-30,共5页
针对石英光学基底合理设计多层膜系是提高光学器件透射率的关键方法。设计了两种不同的膜系结构,运用导纳轨迹法分析这两种膜系的设计原理。利用光学薄膜设计软件Filmstar分别得到两种膜系的最优解,以使在可见光区膜系的平均透射率尽可... 针对石英光学基底合理设计多层膜系是提高光学器件透射率的关键方法。设计了两种不同的膜系结构,运用导纳轨迹法分析这两种膜系的设计原理。利用光学薄膜设计软件Filmstar分别得到两种膜系的最优解,以使在可见光区膜系的平均透射率尽可能接近于100%。 展开更多
关键词 filmstar 减反射膜 膜系设计 导纳轨迹法 溶胶-凝胶法
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Fe_(3)O_(4)@BiFeO_(3)纳米颗粒膜的结构及多铁性
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作者 唐平 欧阳辉 +1 位作者 周雷 王军 《磁性材料及器件》 CAS 2023年第5期18-27,共10页
为制备铁磁性和铁电性能兼优的BiFeO_(3)(简写为BFO)基多铁性复合薄膜材料,采用低成本溶胶-凝胶旋涂法将铁磁性Fe_(3)O_(4)(简写为FO)颗粒嵌入铁电性BFO薄膜中,在单晶硅衬底上构建自下而上生长的三层夹心结构的多铁性颗粒膜体系:即BFO(... 为制备铁磁性和铁电性能兼优的BiFeO_(3)(简写为BFO)基多铁性复合薄膜材料,采用低成本溶胶-凝胶旋涂法将铁磁性Fe_(3)O_(4)(简写为FO)颗粒嵌入铁电性BFO薄膜中,在单晶硅衬底上构建自下而上生长的三层夹心结构的多铁性颗粒膜体系:即BFO(缓冲层)/FO@BFO(颗粒膜)/BFO(表面覆盖层),成功制备出BFO表面覆盖层依次增厚的颗粒膜样品,以及用于对照的纯BFO薄膜。对各样品的结构、形貌及磁电性能进行了表征和测试。结果表明,除了BFO覆盖层最薄的样品,其它颗粒膜材料均为纯相结构,无杂相产生。BFO覆盖层能有效防止颗粒膜铁电性能的恶化,颗粒膜样品的最大极化强度小于纯BFO薄膜,但其剩余极化强度远大于纯BFO薄膜。此外,颗粒膜的磁学性能相比于纯BFO薄膜有了显著提高,且随着BFO覆盖层厚度的增大而增强。 展开更多
关键词 四氧化三铁 铁酸铋 颗粒膜 溶胶凝胶旋涂法 多铁性
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光降解用WO_3-TiO_2复合光催化剂 被引量:10
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作者 刘奎仁 韩庆 +1 位作者 陈建设 魏绪钧 《东北大学学报(自然科学版)》 EI CAS CSCD 北大核心 2003年第11期1064-1067,共4页
用溶胶 凝胶法制备了纳米WO3 TiO2复合薄膜型光催化剂·利用该薄膜对罗丹明B溶液的光催化降解作用,考察了钨酸盐种类及其掺杂量、涂膜层数、溶解氧、焙烧温度、焙烧时间、基体材料等因素对光催化活性的影响·结果表明,钨酸铵加... 用溶胶 凝胶法制备了纳米WO3 TiO2复合薄膜型光催化剂·利用该薄膜对罗丹明B溶液的光催化降解作用,考察了钨酸盐种类及其掺杂量、涂膜层数、溶解氧、焙烧温度、焙烧时间、基体材料等因素对光催化活性的影响·结果表明,钨酸铵加入量x(W)=1 5%、多孔钛片为基质,涂覆9层、500℃下焙烧1h得到的WO3 TiO2薄膜型复合光催化剂活性最高,其光催化活性较纯TiO2光催化剂提高1 5倍·该温度下多孔钛片负载的TiO2为锐钛矿型· 展开更多
关键词 光降解 二氧化钛 溶胶-凝胶法 薄膜 复合
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溶胶-凝胶法制备薄膜涂层的技术与应用 被引量:21
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作者 潘建平 彭开萍 陈文哲 《腐蚀与防护》 CAS 2001年第8期339-342,共4页
较系统地介绍了溶胶 凝胶法制备涂层材料技术的特点及一般原理。概述了溶胶 凝胶法制备涂层的工艺过程以及涂层材料的应用。展望了未来的发展前景。
关键词 溶胶-凝胶法 涂层材料 薄膜材料 薄膜涂层 应用 发展前景
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纳米多孔二氧化硅薄膜的制备与表征 被引量:8
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作者 王娟 冯坚 +1 位作者 杨大祥 张长瑞 《功能材料》 EI CAS CSCD 北大核心 2005年第1期54-56,共3页
以正硅酸乙酯为原料,采用酸/碱两步溶胶-凝胶法、结合匀胶和超临界干燥等工艺在硅片上成功制备了纳米多孔二氧化硅薄膜.适合匀胶的二氧化硅溶胶的粘度范围为9~15mPa·s;多孔二氧化硅薄膜表面均匀平整,其厚度为400~1000nm;折射率为... 以正硅酸乙酯为原料,采用酸/碱两步溶胶-凝胶法、结合匀胶和超临界干燥等工艺在硅片上成功制备了纳米多孔二氧化硅薄膜.适合匀胶的二氧化硅溶胶的粘度范围为9~15mPa·s;多孔二氧化硅薄膜表面均匀平整,其厚度为400~1000nm;折射率为1.09~1.24;介电常数为1.5~2.5.该多孔二氧化硅薄膜具有三维网络结构,二氧化硅微粒直径为10~20nm. 展开更多
关键词 纳米多孔二氧化硅薄膜 溶胶-凝胶 正硅酸 乙酯 低介电常数
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