Hazy Backside Gettering with a-Si: H Film

Hazy backside gettering of boron-doped 【111】 siljcon wafer with a-Si: H film deposited by rf glowdischarge technique (rf-GD) has been investigated by SEM, optical microscope and preferential etching tech-lique. lt is evident that the deposited film can effectively getter the haze after annealing at l l00℃in wet oxy-len ambient for 120 min. The pre-crystallization annealing at 650℃ in argon ambient for 10 min enhances thegettering effectiveness. The low temperature(200～300℃) process of growing extrinsic gettering film reducesthe processing contamination.

Cu gettering to nanovoids in SOI materials

In this paper, the gettering of Cu impurities in silicon-on-insulator (SOI) materials is studied. Nanovoids are formed in the substrate of SOI beneath the buried oxide (BOX) by room temperature H+ (3.51016 /cm2 ) or He+ (91016 /cm2 ) implantation and subsequent annealing at 700oC. The gettering of different doses of Cu (51013/cm2, 51014 /cm2, 51015/cm2), which are introduced in the top Si layer by ion implantation, to the nanovoids are investigated by cross-section transmission electron microscopy (XTEM) and secondary ion mass spectroscopy (SIMS). The results demonstrate that Cu impurities in the top Si layer can diffuse through the bur-ied oxide (BOX) layer of SIMOX and Smart-Cut SOI at temperature above 700oC and be trapped by the nanovoids. Some of Cu impurities can be captured by the intrinsic defects at the BOX inter-face of SIMOX, but will be released out at high temperatures. The gettering effect of SIMOX intrin-sic defects at BOX is much lower than that of the nanovoids. No Cu impurities are trapped at the perfect BOX interfaces of Smart-Cut SOI. After 1000℃ annealing, high dose of Cu (3.61015 /cm2) was gettered by the nanovoids. The Cu gettering efficiency to the nanovoids increased with the decreasing of Cu doses. When the Cu doses in the top Si layer were lower than 41015 /cm2, the nanovoids could getter more than 90% of the Cu impurities and reduce the Cu concentration in the top Si layer to less than 4%. The results indicate that nanovoids gettering is a promising method for removing the impurities in SOI materials.

Intermetallic Getters Reactants for Vacuum Applications

The present work continues a series of publications devoted to the study of the sorption properties of reactive alloys based on IIA metals and the development of advanced getter materials for gas and vacuum technologies. This publication attempts to answer the current challenges in the field of gas sorption associated with the emergence of new vacuum products such as vacuum insulated glasses, electronic systems, cryogenic devices, etc. An analysis of the problems that arise here, as well as the results of sorption measurements, carried out with the participation of intermetallic phases of the composition CaLi2 and Ca0.33Li0.48Mg0.19, show that the best getter support for these new hermetically sealed products can be provided by intermetallic compounds formed in systems Li-IIA metals. Intermetallic phases of this family are easy to manufacture and demonstrate outstanding service characteristics: their specific sorption capacity is recorded high, exceeding traditional gas sorbents in this respect by at least an order of magnitude;the kinetics of gas capturing is set at the stage of alloy production, i.e., is adjustable;the temporary resistance of these phases to atmospheric gases allows to install the getter at its workplace in air, without further thermal activation. The sorption superiority of reactive intermetallics is explained by their special sorption mechanism: the gas/metal interaction is formed here as a combination of two processes, continuous growth of reaction products on a metallic surface and corrosion decay of brittle intermetallic phase under mechanical forces, which feeds the chemical reaction with a fresh surface. The advantages of sorption processes of this new type are undoubted and significant: compared with the conventional sorbents, an intermetallic getter reactant solves two important problems;it reduces production costs and increases the sorption yield.

Formation and Removement Mechanism of Haze Defects on（111）p－type Silicon Wafers

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Mathematical model of oxygen outdiffusion

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用Kotlin实现变量联动

变量联动指的是一个变量发生变化,其他变量也会发生变化。用Kotlin可以在语言层面实现变量联动。

Preparation of Ti-Mo getters by injection molding

Ti-Mo getters have been fabricated via metal injection molding (MIM) using three kinds of Ti powders with different mean particle sizes of 46 μm,35 μm and 26 μm,respectively. The surface morphology,porosity,and hydrogen sorption properties of Ti-Mo getters formed by MIM using paraffin wax as a principal binder constituent were examined. It has been proven that the powder injection molding is a viable forming technique for porous Ti-Mo getters. The particle size of Ti powders and the powder loading influence the porosity of getters,and this affects the sorption capacity of Ti-Mo getters. Ti-Mo getters produced with the Ti powders possessing a mean particle size of 35 μm using a powder loading of 40 vol.% have a high porosity,resulting in a good sorption capacity.

Activation and pumping characteristics of Ti-Zr-V films deposited on narrow tubes

Non-evaporable getter(NEG)films are an integral part of many particle accelerators.These films provide conductance-free evenly distributed pumping,a low thermal outgassing rate,and a low photon-and electron-stimulated desorption.These characteristics make it an ideal solution for resolving the non-uniform pressure distribution in conductance-limited narrow vacuum tubes.In this study,ternary Ti-Zr-V films were deposited on Si substrates and Ag-Cu(Ag 0.085 wt%)tubes with an inner diameter of 22 mm.All Ti-Zr-V films were prepared from an alloy target using the same DC magnetron sputtering parameters.The compositions and corresponding chemical bonding states were analyzed by X-ray photoelectron spectroscopy after activation at different temperatures.The test particle Monte Carlo(TPMC)method was used to measure the sticking probability of the Ti-Zr-V film based on pressure readings during gas injection.The results indicate that activation commences at temperatures as low as 150℃and Ti~0,Zr~0,and V~0 exist on the surface after annealing at 180℃for 1 h.Ti-Zr-V films can be fully activated at 180℃for 24 h.The CO sticking probability reaches 0.15,with a pumping capacity of 1 monolayer.

Different effect of NiMnCo or FeNiCo on the growth of type-Ⅱa large diamonds with Ti/Cu as nitrogen getter

In order to synthesize high-quality type-Ⅱa large diamond, the selection of catalyst is very important, in addition to the nitrogen getter. In this paper, type-IIa large diamonds are grown under high pressure and high temperature(HPHT) by using the temperature gradient method(TGM), with adopting Ti/Cu as the nitrogen getter in Ni_(70)Mn_(25)Co_5(abbreviated as NiMnCo) or Fe_(55)Ni_(29)Co_(16)(abbreviated FeNiCo) catalyst. The values of nitrogen concentration(N_c) in both synthesized high-quality diamonds are less than 1 ppm, when Ti/Cu(1.6 wt%) is added in the FeNiCo or Ti/Cu(1.8 wt%) is added in the NiMnCo. The difference in solubility of nitrogen between both catalysts at HPHT is the basic reason for the different effect of Ti/Cu on eliminating nitrogen. The nitrogen-removal efficiency of Ti/Cu in the NiMnCo catalyst is less than in the FeNiCo catalyst. Additionally, a high-quality type-Ⅱa large diamond size of 5.0 mm is obtained by reducing the growth rate and keeping the nitrogen concentration of the diamond to be less than 1 ppm, when Ti/Cu(1.6 wt%) is added in the FeNiCo catalyst.

Research on deposition rate of TiZrV/Pd film by DC magnetron sputtering method

An accelerator storage ring needs clean ultrahigh vacuum.A TiZrV non-evaporable getter(NEG) film deposited on interior walls of the chamber can realize distributed pumping,effective vacuum improvement and reduced longitudinal pressure gradient.But accumulation of pollutants such as N_2 and O_2 will decrease the adsorption ability of the NEG,leading to a reduction of NEG lifetime.Therefore,an NEG thin film coated with a layer of Pd,which has high diffusion rate and absorption ability for H_2,can extend the service life of NEG and improve the pumping rate of H_2 as well.In this paper,with argon as discharge gas,a magnetron sputtering method is adopted to prepare TiZrV-Pd films in a long straight pipe.By SEM measurement,deposition rates of TiZrV-Pd films are analyzed under different deposition parameters,such as magnetic field strength,gas flow rate,discharge current,discharge voltage and working pressure.By comparing the experimental results with the simulation results based on Sigmund's theory,the Pd deposition rate C can be estimated by the sputtered depth.

Getters: From Classification to Materials Design

The demand for getters with high sorption efficiency has generated a need for resources to assist in qualification of getter materials for their practical use. This paper discusses innovative steps which should provide a dramatic improvement in the selection and application of getter technologies used in various processes. The first step was to build a natural classification of chemisorbents, from which we obtain a corresponding order of suitability related to known getter products. The classification system suggested by the authors is based on criteria which are directly connected with the sorption behavior of the material. This has lead to the challenge of developing of a computing algorithm for characterization of sorption properties of getter materials and for solving the inverse problem—the problem of designing a chemisorbent based on the requirements of a fully realized application. The employment of the new methodology is demonstrated in the example of the calculations supporting the selection of getter films for MEMS.

The Newest Getter Technologies: Materials, Processes, Equipment

The efficiency of sorption purification of gases, as measured by an improvement in product quality and/or lowering of its cost, can be significantly increased via simple solutions: the substitution of current getter technology with reactive getters;and stimulation of the material in the sorption process using mechanochemical methods instead of heating or cooling. These ideas were embodied by the authors in new sorption apparatuses and devices such as mechanochemical sorption apparatuses for production of ultra pure gases, improved gas purifiers with reactive sorbent for production of pure and high purity gases and, finally, fluidized bed columns for mass production of pure and high purity gases.

The Study of Different Structuring Techniques for Creation of Non-Evaporable Getters

The results of observation of different structuring techniques of thin metal layers applied in micro system technologies are presented. The Ti V getter films formed by magnetron sputtering have been explored using scanning electron and atomic-force microscopy, Brunauer-Emmett-Teller method, thermogravimetric analysis and fractal geometry. The film sorption capacity for hydrogen given by thermogravimetry was of 7.7 m3·Pa·g-1. To estimate the effective surface area, the fractal geometry tools were used and the calculated value of the specific surface area was about 155 m2/m3. The second object under investigation was a structure composed of micro- and mesoporous silicon and copper layer deposited electrochemically on the pore walls. Porous silicon when coupled with a reactive metal or alloy is expected to be an effective getter for micro system techniques. The use of porous silicon and specific conditions of depositions allows to form the structure of complex fractal type with a specific surface area of 167 m2/cm3.

Reactive Alloys of IIA Metals: Gas Sorption and Corrosion as One Process

The present work summarizes the results of previously known, as well as the latest sorption measurements, which were carried out on IIA metal alloys in the form of films, powders and macrobodies with a monolithic structure. Analysis of these data made it possible to construct an empirical sorption model, according to which the corrosive decomposition of reactive alloys is one of the driving forces of the sorption process. This model provides a qualitative description of the sorption behavior of these alloys in a gas environment and can be useful in solving practical problems in the field of vacuum and gas technologies.

Structure and properties of ZrCoCe getter film with Pd protection layer

ZrCoCe getter films with thickness of ~2.3 lm were deposited on Si(100) wafers by direct current(DC)magnetron sputtering process. A 400-nm-thick Pd protection layer was then deposited on the as-deposited ZrCoCe film without exposure to atmosphere. Microstructure, surface morphology and surface chemical state of the films were analyzed. Moreover, hydrogen sorption properties were determined. The results show that the ZrCoCe film displays a cauliflower-like morphology and a porous columnar-like structure which is composed of nanocrystal grains. The Pd protection layer tightly adheres to the surface of the ZrCoCe film and efficiently prevents the oxidation of Zr under exposure to atmosphere. We find that the hydrogen sorption properties of the Pd-ZrCoCe film are significantly improved,in comparison with those of the as-deposited ZrCoCe film.

Aging effect of non-evaporable getter coatings

Introduction The pumping performance of getter materials has becoming one of the hotspots in accelerator field.The recovery of pumping performance after air venting,also called aging effect,is important for applications in accelerators.Materials and methods In this work,we investigated the aging effect of Ti-V-Zr-Hf-and Ti-V-Zr-coated copper tubular chambers,and the effect of initial air exposure time on the aging properties.The samples presented hierarchically micro/nano-structures and showed a featured aging curve,giving about 9 effective pumping cycles.Conclusion The pumping performance is inversely correlated with air exposure time suggesting that the getter coated cham-bers should be properly preserved before applied as a"pump".

Deposition and characterization of Pd-Ti thin film by sublimation

Introduction Pd/Ti double-layer thin film as non-evaporable getter(NEG)was deposited by sublimation,and its activation temperature was as low as 100℃.The Pd film was deposited in situ after Ti deposition to ensure no oxidization on Ti film.Pumping speed test and characterization method The pumping speed of the coated pipe was measured by a pumping speed test system.The sticking factor was calculated by Molflow.The surface morphology was observed by a scanning electron microscope(SEM).The chemical composition of the film was measured by an energy-dispersive spectrum inbuilt with the SEM.The crystalline structure of the film was measured using grazing incidence X-ray diffraction.Conclusion It was found that the pumping performance of the Pd/Ti film still remained high after 15 times of activation.The maximum pumping speed after heating at 100℃for 24 h was 1.1 L/s cm^(2)and 0.49 L/s cm^(2)for H_(2)and CO,respectively.It can be concluded that the key to reducing the activation temperature of NEG materials is to enhance the oxidation resistance of the surface of NEG.