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Design and performance test of a two-axis fast steering mirror driven by piezoelectric actuators 被引量:4
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作者 方楚 郭劲 +3 位作者 杨国庆 姜振华 徐新行 王挺峰 《Optoelectronics Letters》 EI 2016年第5期333-336,共4页
A novel design of a two-axis fast steering mirror(FSM) with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting... A novel design of a two-axis fast steering mirror(FSM) with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting range of the mirror is about 4 mrad, and the 1st-order resonance frequency is about 250 Hz. A self-designed grating encoder is taken as the sensor, which ensures the optimal precision of 10 μrad. The novel mechanical design can meet the requirement of engineering in incoherent laser beam combination. 展开更多
关键词 mirror piezoelectric grating steering encoder requirement scanner absolute elliptical inertia
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