Precision flat surfaces finished by hand-scraping are extensively used in the sliding parts of precision positioning systems or the surface plates of precision measuring instruments.These hand-scraped surfaces are emp...Precision flat surfaces finished by hand-scraping are extensively used in the sliding parts of precision positioning systems or the surface plates of precision measuring instruments.These hand-scraped surfaces are employed to improve the flatness of the machined surfaces and the motion accuracy of the instruments.The numerous depressions of micrometer-scale depth on a scraped surface are thought to prevent wringing and improve the lubrication properties by forming oil pockets.Form measurement of the micrometer-scale features of a hand-scraped surface is one of the reasonable methods for investigating its effect on the motion accuracy of the positioning systems or the lubrication properties of the sliding parts.Because a hand-scraped surface is a rough surface composed of micrometric complex features,it is difficult to conduct precision measurement of the three-dimensional surface form using conventional measurement instruments,such as vertical-incident interferometers or stylus-type profilometers.In this study,an oblique-incident interferometer based on Abramson interferometry is introduced to measure the form of a rough surface produced by hand-scraping.Because this technique can detect high-intensity reflected light on a rough surface,it allows the measurement of the form of the hand-scraped surface in noncontact condition.In order to shorten the measurement time,the form calculation based on a five-step phase shifting method was introduced.展开更多
基金This research is supported by the JSPS,JapanJapan Society for the Promotion of Science,Japan KAKENHI Grant Number JP 20K04195 and research grant of the Mitutoyo Association for Science and Technology Grant Number R1901.
文摘Precision flat surfaces finished by hand-scraping are extensively used in the sliding parts of precision positioning systems or the surface plates of precision measuring instruments.These hand-scraped surfaces are employed to improve the flatness of the machined surfaces and the motion accuracy of the instruments.The numerous depressions of micrometer-scale depth on a scraped surface are thought to prevent wringing and improve the lubrication properties by forming oil pockets.Form measurement of the micrometer-scale features of a hand-scraped surface is one of the reasonable methods for investigating its effect on the motion accuracy of the positioning systems or the lubrication properties of the sliding parts.Because a hand-scraped surface is a rough surface composed of micrometric complex features,it is difficult to conduct precision measurement of the three-dimensional surface form using conventional measurement instruments,such as vertical-incident interferometers or stylus-type profilometers.In this study,an oblique-incident interferometer based on Abramson interferometry is introduced to measure the form of a rough surface produced by hand-scraping.Because this technique can detect high-intensity reflected light on a rough surface,it allows the measurement of the form of the hand-scraped surface in noncontact condition.In order to shorten the measurement time,the form calculation based on a five-step phase shifting method was introduced.
