In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature o...In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature of 600℃. The design parameters of the antenna are similar to those of the sensor, which will increase the coupling strength between the sensor and testing antenna. The antenna is fabricated in thick film integrated technology, and the properties of the alumina ceramic and silver ensure the feasibility of the antenna in high-temperature environments. The sensor, coupled with the ceramic antenna, is investigated using a high-temperature pressure testing platform. The experimental measurement results show that the pressure signal in a harsh environment can be detected by the frequency diversity of the sensor.展开更多
Flexible pressure sensors have broad application prospects,such as human motion monitoring and personalized recognition.However,their applicability is limited by complex structures,low output performance,low sensitivi...Flexible pressure sensors have broad application prospects,such as human motion monitoring and personalized recognition.However,their applicability is limited by complex structures,low output performance,low sensitivity,and narrow measurement range.In this study,we report a single-electrode spongy triboelectric sensor(SSTS)mainly composed of spongy composite multi-walled carbon nanotubes/polydimethylsiloxane(MWCNT/PDMS)film and conductive fabric,which can simultaneously generate contact electrification and electrostatic induction coupling in a single-electrode contact-separation mode.The SSTS combines the triboelectric effect,properties of doping material,and spongy porous structure(soft sugar as a sacrificial template).An SSTS with an MWCNT content of 10 wt%and a porosity of 64%exhibits high sensitivity,a wide measurement range,and excellent linearity.It also displays two sensitivity regions(slopes):1.324 V/kPa from 1.5 to 28 kPa in the low-pressure range and 0.096 V/kPa from 28 to 316.5 kPa in the high-pressure range,with linearities of 0.980 and 0.979,respectively.Furthermore,the SSTS delivers a high-performance output and high stability,thus enhancing the monitoring of hand pressure changes,human movement,personalized spatial recognition,and other detection tasks.This new strategy for human motion monitoring shows great potential in the healthcare fields,sports rehabilitation,and human-computer interactions.展开更多
The research on flexible pressure sensors has drawn widespread attention in recent years,especially in the fields of health care and intelligent robots.In practical applications,the sensitivity of sensors directly aff...The research on flexible pressure sensors has drawn widespread attention in recent years,especially in the fields of health care and intelligent robots.In practical applications,the sensitivity of sensors directly affects the precision and integrity of weak pressure signals.Here,a pressure sensor with high sensitivity and a wide measurement range composed of porous fiber paper and 3D patterned electrodes is proposed.Multi-walled carbon nanotubes with excellent conductivity were evenly sprayed on the fiber paper to form the natural spatial conducting networks,while the copper-deposited polydimethylsiloxane films with micropyramids array were used as electrodes and flexible substrates.Increased conducting paths between electrodes and fibers can be obtained when high-density micro-pyramids fall into the porous structures of the fiber paper under external pressure,thereby promoting the pressure sensor to show an ultra-high sensitivity of 17.65 kPa^(-1)in the pressure range of 0–2 kPa,16 times that of the device without patterned electrodes.Besides,the sensor retains a high sensitivity of 2.06 kPa^(-1)in an ultra-wide measurement range of 150 kPa.Moreover,the sensor can detect various physiological signals,including pulse and voice,while attached to the human skin.This work provides a novel strategy to significantly improve the sensitivity and measurement range of flexible pressure sensors,as well as demonstrates attractive applications in physiological signal monitoring.展开更多
对传统的SOI压阻式压力传感器进行了结构优化。目的是提高灵敏度,以满足在高温环境下大量程压力测量的实际需求。通过力学性能模拟,采用浅凸台结构来提高灵敏度和测量范围。分析并模拟了凸台厚度和形状对灵敏度的影响。得到了适合高温...对传统的SOI压阻式压力传感器进行了结构优化。目的是提高灵敏度,以满足在高温环境下大量程压力测量的实际需求。通过力学性能模拟,采用浅凸台结构来提高灵敏度和测量范围。分析并模拟了凸台厚度和形状对灵敏度的影响。得到了适合高温工作的掺杂浓度,压敏电阻的尺寸,金属引线的材料和布局。电阻放置在(σl-σt)最大的区域以保持灵敏度和线性度。采用U形电阻补偿在浅凸台制作过程中的工艺偏差对灵敏度的影响。有限元分析(FEA)表明,优化后的芯片结构可以测量10 MPa范围内的压力,灵敏度高达86.6 m V/(V·MPa),非线性误差在0.1%以下。和其他文献报道的大量程压力传感器相比,浅凸台芯片结构灵敏度和过载能力优异。展开更多
基金Project supported by the National Natural Science Foundation for Distinguished Young Scholars,China(Grant No.51425505)the National Natural Science Foundation of China(Grant No.61471324)+1 种基金the Program for the Outstanding Innovative Teams of Higher Learning Institutions of Shanxi Province,China(Grant No.2013-077)the Graduate Students Outstanding Innovation Project of Shanxi Province,China(Grant No.20143020)
文摘In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature of 600℃. The design parameters of the antenna are similar to those of the sensor, which will increase the coupling strength between the sensor and testing antenna. The antenna is fabricated in thick film integrated technology, and the properties of the alumina ceramic and silver ensure the feasibility of the antenna in high-temperature environments. The sensor, coupled with the ceramic antenna, is investigated using a high-temperature pressure testing platform. The experimental measurement results show that the pressure signal in a harsh environment can be detected by the frequency diversity of the sensor.
基金supported in part by the National Key Research and Development Program of China(Grant No.2019YFB2004802)the National Natural Science Foundation of China(Grant Nos.62171414,52175554,52205608,62171415&62001431)+1 种基金the Fundamental Research Program of Shanxi Province(Grant Nos.20210302123059&20210302124610)the Program for the Innovative Talents of Higher Education Institutions of Shanxi。
文摘Flexible pressure sensors have broad application prospects,such as human motion monitoring and personalized recognition.However,their applicability is limited by complex structures,low output performance,low sensitivity,and narrow measurement range.In this study,we report a single-electrode spongy triboelectric sensor(SSTS)mainly composed of spongy composite multi-walled carbon nanotubes/polydimethylsiloxane(MWCNT/PDMS)film and conductive fabric,which can simultaneously generate contact electrification and electrostatic induction coupling in a single-electrode contact-separation mode.The SSTS combines the triboelectric effect,properties of doping material,and spongy porous structure(soft sugar as a sacrificial template).An SSTS with an MWCNT content of 10 wt%and a porosity of 64%exhibits high sensitivity,a wide measurement range,and excellent linearity.It also displays two sensitivity regions(slopes):1.324 V/kPa from 1.5 to 28 kPa in the low-pressure range and 0.096 V/kPa from 28 to 316.5 kPa in the high-pressure range,with linearities of 0.980 and 0.979,respectively.Furthermore,the SSTS delivers a high-performance output and high stability,thus enhancing the monitoring of hand pressure changes,human movement,personalized spatial recognition,and other detection tasks.This new strategy for human motion monitoring shows great potential in the healthcare fields,sports rehabilitation,and human-computer interactions.
基金supported by the National Key R&D Program of China(Grant Nos.2019YFE0120300,2019YFF0301802)National Natural Science Foundation of China(Grant Nos.52175554,62101513,51975542)+3 种基金Natural Science Foundation of Shanxi Province(Grant No.201801D121152)Shanxi“1331 Project”Key Subject Construction(Grant No.1331KSC)National Defense Fundamental Research ProjectResearch Project Supported by Shan Xi Scholarship Council of China(Grant No.2020-109)。
文摘The research on flexible pressure sensors has drawn widespread attention in recent years,especially in the fields of health care and intelligent robots.In practical applications,the sensitivity of sensors directly affects the precision and integrity of weak pressure signals.Here,a pressure sensor with high sensitivity and a wide measurement range composed of porous fiber paper and 3D patterned electrodes is proposed.Multi-walled carbon nanotubes with excellent conductivity were evenly sprayed on the fiber paper to form the natural spatial conducting networks,while the copper-deposited polydimethylsiloxane films with micropyramids array were used as electrodes and flexible substrates.Increased conducting paths between electrodes and fibers can be obtained when high-density micro-pyramids fall into the porous structures of the fiber paper under external pressure,thereby promoting the pressure sensor to show an ultra-high sensitivity of 17.65 kPa^(-1)in the pressure range of 0–2 kPa,16 times that of the device without patterned electrodes.Besides,the sensor retains a high sensitivity of 2.06 kPa^(-1)in an ultra-wide measurement range of 150 kPa.Moreover,the sensor can detect various physiological signals,including pulse and voice,while attached to the human skin.This work provides a novel strategy to significantly improve the sensitivity and measurement range of flexible pressure sensors,as well as demonstrates attractive applications in physiological signal monitoring.
基金funded by the National Science Foundation for Distinguished Young Scholars of China(51425505)National Natural Science Foundation of China(51405454)
文摘对传统的SOI压阻式压力传感器进行了结构优化。目的是提高灵敏度,以满足在高温环境下大量程压力测量的实际需求。通过力学性能模拟,采用浅凸台结构来提高灵敏度和测量范围。分析并模拟了凸台厚度和形状对灵敏度的影响。得到了适合高温工作的掺杂浓度,压敏电阻的尺寸,金属引线的材料和布局。电阻放置在(σl-σt)最大的区域以保持灵敏度和线性度。采用U形电阻补偿在浅凸台制作过程中的工艺偏差对灵敏度的影响。有限元分析(FEA)表明,优化后的芯片结构可以测量10 MPa范围内的压力,灵敏度高达86.6 m V/(V·MPa),非线性误差在0.1%以下。和其他文献报道的大量程压力传感器相比,浅凸台芯片结构灵敏度和过载能力优异。
