The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results s...The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results show that plasma exists inside the cavity when the sheath inside the hollow electrode hole is fully collapsed, which is an essential condition for the plasma density enhancement outside hollow electrodes. In addition, the existence of the electron density peak at the orifice is generated via the hollow cathode effect(HCE), which plays an important role in the density enhancement. It is also found that the radial width of bulk plasma at the orifice affects the magnitude of the density enhancement, and narrow radial plasma bulk width at the orifice is not beneficial to obtain high-density plasma outside hollow electrodes.Higher electron density at the orifice, combined with larger radial plasma bulk width at the orifice,causes higher electron density outside hollow electrodes. The results also imply that the HCE strength inside the cavity cannot be determined by the magnitude of the electron density outside hollow electrodes.展开更多
Radio frequency capacitively coupled plasma source(RF-CCP)with a hollow electrode can increase the electron density through the hollow cathode effect(HCE),which offers a method to modify the spatial profiles of the pl...Radio frequency capacitively coupled plasma source(RF-CCP)with a hollow electrode can increase the electron density through the hollow cathode effect(HCE),which offers a method to modify the spatial profiles of the plasma density.In this work,the variations of the HCE in one RF period are investigated by using a two-dimensional particle-in-cell/Monte-Carlo collision(PIC/MCC)model.The results show that the sheath electric field,the sheath potential drop,the sheath thickness,the radial plasma bulk width,the electron energy distribution function(EEDF),and the average electron energy in the cavity vary in one RF period.During the hollow electrode sheath's expansion phase,the secondary electron heating and sheath oscillation heating in the cavity are gradually enhanced,and the frequency of the electron pendular motion in the cavity gradually increases,hence the HCE is gradually enhanced.However,during the hollow electrode sheath's collapse phase,the secondary electron heating is gradually attenuated.In addition,when interacting with the gradually collapsed hollow electrode sheaths,high-energy plasma bulk electrons in the cavity will lose some energy.Furthermore,the frequency of the electron pendular motion in the cavity gradually decreases.Therefore,during the hollow electrode sheath's collapse phase,the HCE is gradually attenuated.展开更多
The utilization of industrial solid waste for metal recovery requires high-temperature tools due to the presence of silica and alumina, which is reducible at high temperature. In a plasma arc furnace, transferred arc ...The utilization of industrial solid waste for metal recovery requires high-temperature tools due to the presence of silica and alumina, which is reducible at high temperature. In a plasma arc furnace, transferred arc plasma furnace(TAP) can meet all requirements, but the disadvantage of this technology is the high cost. For performing experiments in the laboratory, the TAP was fabricated indigenously in a laboratory based on the different inputs provided in the literature for the furnace design and fabrication. The observed parameters such as arc length, energy consumption, graphite electrode consumption, noise level as well as lining erosion were characterized for this fabricated furnace. The nitrogen plasma increased by around 200 K(200 ℃) melt temperature and noise levels decreased by ~10 d B compared to a normal arc.Hydrogen plasma offered 100 K(100 ℃) higher melt temperature with ~5 d B higher sound level than nitrogen plasma. Nitrogen plasma arc melting showed lower electrode and energy consumption than normal arc melting, whereas hydrogen plasma showed lower energy consumption and higher electrode consumption in comparison to nitrogen plasma. The higher plasma arc temperature resulted in a shorter meltdown time than normal arc with smoother arcing. Hydrogen plasma permitted more heats, reduced meltdown time, and lower energy consumption, but with increased graphite consumption and crucible wear. The present study showed that the fabricated arc plasma is better than the normal arc furnace with respect to temperature generation, energy consumption, and environmental friendliness. Therefore, it could be used effectively for smelting-reduction studies.展开更多
文摘The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results show that plasma exists inside the cavity when the sheath inside the hollow electrode hole is fully collapsed, which is an essential condition for the plasma density enhancement outside hollow electrodes. In addition, the existence of the electron density peak at the orifice is generated via the hollow cathode effect(HCE), which plays an important role in the density enhancement. It is also found that the radial width of bulk plasma at the orifice affects the magnitude of the density enhancement, and narrow radial plasma bulk width at the orifice is not beneficial to obtain high-density plasma outside hollow electrodes.Higher electron density at the orifice, combined with larger radial plasma bulk width at the orifice,causes higher electron density outside hollow electrodes. The results also imply that the HCE strength inside the cavity cannot be determined by the magnitude of the electron density outside hollow electrodes.
文摘Radio frequency capacitively coupled plasma source(RF-CCP)with a hollow electrode can increase the electron density through the hollow cathode effect(HCE),which offers a method to modify the spatial profiles of the plasma density.In this work,the variations of the HCE in one RF period are investigated by using a two-dimensional particle-in-cell/Monte-Carlo collision(PIC/MCC)model.The results show that the sheath electric field,the sheath potential drop,the sheath thickness,the radial plasma bulk width,the electron energy distribution function(EEDF),and the average electron energy in the cavity vary in one RF period.During the hollow electrode sheath's expansion phase,the secondary electron heating and sheath oscillation heating in the cavity are gradually enhanced,and the frequency of the electron pendular motion in the cavity gradually increases,hence the HCE is gradually enhanced.However,during the hollow electrode sheath's collapse phase,the secondary electron heating is gradually attenuated.In addition,when interacting with the gradually collapsed hollow electrode sheaths,high-energy plasma bulk electrons in the cavity will lose some energy.Furthermore,the frequency of the electron pendular motion in the cavity gradually decreases.Therefore,during the hollow electrode sheath's collapse phase,the HCE is gradually attenuated.
文摘The utilization of industrial solid waste for metal recovery requires high-temperature tools due to the presence of silica and alumina, which is reducible at high temperature. In a plasma arc furnace, transferred arc plasma furnace(TAP) can meet all requirements, but the disadvantage of this technology is the high cost. For performing experiments in the laboratory, the TAP was fabricated indigenously in a laboratory based on the different inputs provided in the literature for the furnace design and fabrication. The observed parameters such as arc length, energy consumption, graphite electrode consumption, noise level as well as lining erosion were characterized for this fabricated furnace. The nitrogen plasma increased by around 200 K(200 ℃) melt temperature and noise levels decreased by ~10 d B compared to a normal arc.Hydrogen plasma offered 100 K(100 ℃) higher melt temperature with ~5 d B higher sound level than nitrogen plasma. Nitrogen plasma arc melting showed lower electrode and energy consumption than normal arc melting, whereas hydrogen plasma showed lower energy consumption and higher electrode consumption in comparison to nitrogen plasma. The higher plasma arc temperature resulted in a shorter meltdown time than normal arc with smoother arcing. Hydrogen plasma permitted more heats, reduced meltdown time, and lower energy consumption, but with increased graphite consumption and crucible wear. The present study showed that the fabricated arc plasma is better than the normal arc furnace with respect to temperature generation, energy consumption, and environmental friendliness. Therefore, it could be used effectively for smelting-reduction studies.