Laser direct writing of Ga_(2)O_(3)/liquid metal-based flexible humidity sensors

Flexible and wearable humidity sensors play a vital role in daily point-of-care diagnosis and noncontact human-machine interactions.However,achieving a facile and high-speed fabrication approach to realizing flexible humidity sensors remains a challenge.In this work,a wearable capacitive-type Ga_(2)O_(3)/liquid metal-based humidity sensor is demonstrated by a one-step laser direct writing technique.Owing to the photothermal effect of laser,the Ga_(2)O_(3)-wrapped liquid metal particles can be selectively sintered and converted from insulative to conductive traces with a resistivity of 0.19Ω·cm,while the untreated regions serve as active sensing layers in response to moisture changes.Under 95%relative humidity,the humidity sensor displays a highly stable performance along with rapid response and recover time.Utilizing these superior properties,the Ga_(2)O_(3)/liquid metal-based humidity sensor is able to monitor human respiration rate,as well as skin moisture of the palm under different physiological states for healthcare monitoring.

Functionalized Hydrogel-Based Wearable Gas and Humidity Sensors

Breathing is an inherent human activity;however,the composition of the air we inhale and gas exhale remains unknown to us.To address this,wearable vapor sensors can help people monitor air composition in real time to avoid underlying risks,and for the early detection and treatment of diseases for home healthcare.Hydrogels with three-dimensional polymer networks and large amounts of water molecules are naturally flexible and stretchable.Functionalized hydrogels are intrinsically conductive,self-healing,self-adhesive,biocompatible,and room-temperature sensitive.Compared with traditional rigid vapor sensors,hydrogel-based gas and humidity sensors can directly fit human skin or clothing,and are more suitable for real-time monitoring of personal health and safety.In this review,current studies on hydrogel-based vapor sensors are investigated.The required properties and optimization methods of wearable hydrogel-based sensors are introduced.Subsequently,existing reports on the response mechanisms of hydrogel-based gas and humidity sensors are summarized.Related works on hydrogel-based vapor sensors for their application in personal health and safety monitoring are presented.Moreover,the potential of hydrogels in the field of vapor sensing is elucidated.Finally,the current research status,challenges,and future trends of hydrogel gas/humidity sensing are discussed.

Dielectric Properties of Capacitive-Type Humidity Sensor Made under Different Pressures

Capacitive humidity sensors were made of nanometer barium titanate.The pellets were prepared under different pressures between 3920N to 7850N force.The capacitance changes in three orders of magnitude in the relative humidity range of 10%～98%,indicating high humidity sensitivity of the sensors.At a certain measuring frequency,the capacitance of the sensors increases as increasing of the preparation pressure,while the sensitivity of the sensors basically remains the same.The frequencies corresponding to the peaks of the dielectric loss of the sensors move to the higher frequency direction as increasing of the relative humidity.At a certain humidity,the frequencies corresponding to the peaks of the dielectric loss move to the higher frequency direction as increasing of the preparation pressure.

Study of the Preparation Technology and Mechanics of the Compound Temperature-Humidity Sensor

The development and character of compound temperature-humidity sensor were discussed in this study.The design of sampling,control and output unit of temperature-humidity sensor as well as their manufacture method and character were studied in detail.The relationship between components of humidity resistance materials and negative temperature coefficient ( NTC) thermistor materials in sampling unit of compound sensor and character of electrical resistance and temperature was obtained.Couples of character curves of compound temperature-humidity sensor and data of materials of sampling unit were shown in this paper too.

Polyimide Humidity Integrated Sensor Fabricated Using the MEMS Process

This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type systems on a chip structure using the MEMS process.The results show that the new sensor presents sensing characteristics over a humidity range from 10%～70% RH at 20℃,and the sensor is able to fabricated together with ICs technology.The result shows that integration of humidity sensor with integrated circuit of humidity measurement is considerably easier when they are built in sensing groove.The appeal of a new structure like this brings the possibility of applications that would require the flexibility of simple screen printing.

The Humidity Sensor Using the Polyacrylic Emulsion Containing Magnesium Chloride

An impedance type humidity sensor based on the polyacrylic emulsion containing magnesium chloride (MgCl_2) without chemical modification was investigated.The impedances of the sensor were measured from various relative humidity in the frequency range between 0.1kHz and 100 kHz.The sensor has a good sensitivity from 60%RH to 90%RH.According to the experimental results,the response time is about 240 seconds in the adsorption process and 310 seconds in the desorption process.

Electrospinning of Flexible Poly(vinyl alcohol)/MXene Nanofiber-Based Humidity Sensor Self-Powered by Monolayer Molybdenum Diselenide Piezoelectric Nanogenerator

Two-dimensional material has been widely investigated for potential applications in sensor and flexible electronics.In this work,a self-powered flexible humidity sensing device based on poly(vinyl alcohol)/Ti_(3)C_(2)Tx(PVA/MXene)nanofibers film and monolayer molybdenum diselenide(MoSe2)piezoelectric nanogenerator(PENG)was reported for the first time.The monolayer MoSe_(2)-based PENG was fabricated by atmospheric pressure chemical vapor deposition techniques,which can generate a peak output of 35 mV and a power density of42 mW m^(-2).The flexible PENG integrated on polyethylene terephthalate(PET)substrate can harvest energy generated by different parts of human body and exhibit great application prospects in wearable devices.The electrospinned PVA/MXene nanofiber-based humidity sensor with flexible PET substrate under the driven of monolayer MoSe_(2) PENG,shows high response of~40,fast response/recovery time of 0.9/6.3 s,low hysteresis of 1.8%and excellent repeatability.The self-powered flexible humidity sensor yields the capability of detecting human skin moisture and ambient humidity.This work provides a pathway to explore the high-performance humidity sensor integrated with PENG for the self-powered flexible electronic devices.

Orange dye polyaniline composite based impedance humidity sensors

This study presents the fabrication and investigation （PANI） composite films. A blend of 3 wt.% OD with 1 of humidity sensors based on orange dye （OD） and polyaniline wt.% PANI was prepared in 1 ml water. The composite films were deposited on glass substrates between pre-deposited silver electrodes. The gap between the electrodes was 45 um. The sensing mechanism was based on the impedance and capacitance variations due to the absorption/desorption of water vapor. It was observed that with the increase in relative humidity （RH） from 30% to 90%, the impedance decreases by 5.2 × 10^4 and 8.8 × 10^3 times for the frequencies of 120 Hz and 1 kHz, respectively. The impedance-humidity relationship showed a more uniform change compared to the capacitance-humidity relationship in the RH range of 30% to 90%. The consequence of annealing, measuring frequency, response and recovery time, and absorption-desorption behavior of the humidity sensor were also discussed in detail. The annealing resulted in an increase in sensitivity of up to 2.5 times, while the measured response time and recovery time were 34 s and 450 s, respectively. The impedance-humidity relationship was simulated.

Multifunctional Flexible Humidity Sensor Systems Towards Noncontact Wearable Electronics

In the past decade,the global industry and research attentions on intelligent skin-like electronics have boosted their applications in diverse fields including human healthcare,Internet of Things,human–machine interfaces,artificial intelligence and soft robotics.Among them,flexible humidity sensors play a vital role in noncontact measurements relying on the unique property of rapid response to humidity change.This work presents an overview of recent advances in flexible humidity sensors using various active functional materials for contactless monitoring.Four categories of humidity sensors are highlighted based on resistive,capacitive,impedance-type and voltage-type working mechanisms.Furthermore,typical strategies including chemical doping,structural design and Joule heating are introduced to enhance the performance of humidity sensors.Drawing on the noncontact perception capability,human/plant healthcare management,human-machine interactions as well as integrated humidity sensor-based feedback systems are presented.The burgeoning innovations in this research field will benefit human society,especially during the COVID-19 epidemic,where cross-infection should be averted and contactless sensation is highly desired.

A NOVEL RESISTIVE HUMIDITY SENSOR BASED ON SODIUM POLYSTYRENESULFONATE/TiO_2 NANOCOMPOSITES

A resistive humidity sensor was prepared based on sodium polystyrenesulfonate (NaPSS)/TiO2 nanocomposites, and its electrical response to humidity was examined. The sensor exhibits better linearity, smaller hysteresis (< 4% RH) and quicker response (absorption: less than 2 s; desorption: less than 20 s) in comparison with sensor composed of NaPSS. The effect of concentration of NaPSS and TiO2 on humidity response of sensors was discussed.

Multifunctional disk device for optical switch and temperature sensor

A multifunctional surface plasmon polariton disk device coupled by two metal-insulator-metal（MIM） waveguides is proposed and investigated numerically with finite-difference time-domain simulation. It can be used as optical switch and temperature sensor by filling disk with liquid crystal and ethanol, respectively. The simulation results demonstrate that the transmission characteristics of an optical switch can be manipulated by adjusting the radius of disk and the slit width between disk and MIM waveguides. The transmittance and modulation depth of optical switch at 1550 nm are up to 64.82% and 17.70 d B, respectively. As a temperature sensor, its figure of merit can reach 30.46. In this paper, an optical switch with better efficiency and a temperature sensor with better sensitivity can be achieved.

Surface Acoustic Wave Humidity Sensors Based on(1120) ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates

ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with （1120） texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the （1120） ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements.

Outstanding Humidity Chemiresistors Based on Imine-Linked Covalent Organic Framework Films for Human Respiration Monitoring

Human metabolite moisture detection is important in health monitoring and non-invasive diagnosis.However,ultra-sensitive quantitative extraction of respiration information in real-time remains a great challenge.Herein,chemiresistors based on imine-linked covalent organic framework(COF)films with dual-active sites are fabricated to address this issue,which demonstrates an amplified humidity-sensing signal performance.By regulation of monomers and functional groups,these COF films can be pre-engineered to achieve high response,wide detection range,fast response,and recovery time.Under the condition of relative humidity ranging from 13 to 98%,the COFTAPB-DHTA film-based humidity sensor exhibits outstanding humidity sensing perfor-mance with an expanded response value of 390 times.Furthermore,the response values of the COF film-based sensor are highly linear to the relative humidity in the range below 60%,reflecting a quantitative sensing mechanism at the molecular level.Based on the dual-site adsorption of the(-C=N-)and(C-N)stretching vibrations,the revers-ible tautomerism induced by hydrogen bonding with water molecules is demonstrated to be the main intrinsic mechanism for this effective humidity detection.In addition,the synthesized COF films can be further exploited to effectively detect human nasal and oral breathing as well as fabric permeability,which will inspire novel designs for effective humidity-detection devices.

The Sensing Behavior to Volatile Organic Compounds Gas on Polypyrrole Sensor under Humidity Condition

Polypyrrole (PPy) powder was synthesized by chemical polymerization at 0℃under atmospheric condition and its layer was prepared by dip coating method on the alumina substrate with interdigitated electrodes.The influence of relative humidity (RH 0～70%) to PPy sensor was studied.The measuring temperature was fixed at 25℃.Methanol and benzene were used as target gases.Various analytic techniques were examined to observe changes in the properties of PPy sensor.The sensitivity of PPy sensor to water vapor was linearly increased with the increasing humidity.As the relative humidity increase from 0% to 70%,the sensitivities to methanol and benzene vapor were reduced,and reduction ratio of sensitivity was 94%, 92.5% at RH 70%,respectively.

A Novel Thin Film Resistive Humidity Sensor Based on SolubleConjugated Polymer:(propionic acid)-co-(propargyl alcohol)

A novel soluble conjugated copolymer (propionic acid)-co-(propargyl alcohol) (PA-co-OHP) has been synthesized for the first time using a new palladium acetylide catalyst Pd(PPh3)(2)(C=CC(CH3)(2)OH)(2)(PPB). Thin film resistive humidity sensor based oil the copolymer doped with HClO4 was prepared. The impedance of the sensor changed from 10(3)similar to 10(7) Omega in 95%similar to 30%RH, and the response of that is very quick (<6 sec.). Preliminary results show the copolymer is a promising humidity sensitive material.

Fiber Optic Humidity Sensor Based on Self-Assembled Polyelectrolyte Multilayers

Polyelectrolyte multilayers were self-assembled onto planar glass substrates and multimode optic fibers. The multilayer thin films deposited on glass substrates were characterized by using UV-vis spectroscopy and X-ray photoelectron spectroscope. The multilayer thin films containing hydrophilic side-groups possessed are affinity for uwer molecules. The adsorption and desorption of free water vapor gave rise to the changes in the refractive index and in the reflectance of the thin films. A multilayer thin film based fiber optic humidity sensor with an LED light source of 0.85 mum was designed. Under certain conditions, the rejected light intensity of the thin film sensor was a function of the humidity of air. About 30 bilayers was optimal for the multilayer thin film sensor working at wavelength of 0.85 mum. This sensor can work over almost the whole relative humidity range with very good sensitivity.

Design of ispPAC-based Humidity Sensor Signal Processing Circuits

The widely used sensitive elements of humidity sensors can be divided into 3 types,i.e.,resistor,capacitor,and electrolyte.Humidity sensors consisting of these sensitive elements have corresponding signal processing circuit unique to each type of sensitive elements.This paper presents an ispPAC (in-system programmable Programmable Analog Circuit) -based humidity sensor signal processing circuit designed with software method and implemented with in-system programmable simulators.Practical operation shows that humidity sensor signal processing circuits of this kind,exhibit stable and reliable performance.

Sol-Gel Relative Humidity Sensors: Impact of Electrode Geometry on Performance in Soil Suction Measurements

This paper describes the experimental procedure followed to fabricate and validate sol-gel based RH sensors which will be incorporated in soil specimens for standard laboratorial tests. It is the first time such sensors were used for soil suction measurement. They are microfabricated relative humidity sensors (footprint area 11,000 μm × 22,000 μm) operating based on changes in electrical resistivity detected by a cerium doped silica titania film deposited using a sol-gel technique. Their design required gathering experts in several engineering specialties. The working principle of the sensors is based on water vapour equilibrium between the air in the soil and in the sol-gel pores, due to the contact between the two porous materials. The spacing between interdigitated aluminium electrodes was optimized to improve the sensing properties of the sol-gel. The calibration of the different prototypes was done against compacted clay, varying the spacing between 100 and 700 μm. The sensors were also incorporated in soil samples for suction measurement during wetting and drying paths. They were validated by comparing the readings with those from a water dew point potentiometer. From this study it was possible to determine the optimum electrodes spacing of 200 μm. Error was explained by sol-gel heterogeneity effect and by the resolution of the sensing area provided by the electrodes spacing. When comparing with other sensors operating inside soil specimens in standard laboratorial tests, these sol-gel sensors extend the operation range available with the alternative technologies: while conventional tensiometers measure suction ranges from 0 to 1.8 MPa, our sensors demonstrate good results between 1 to 10 MPa (and higher).

Humidity sensor based on BiOBr synthesized under ambient condition

Flexible humidity sensors are effective portable devices for human respiratory monitoring.However,the current pre-paration of sensitive materials need harsh terms and the small production output limits their practicability.Here,we report a syn-thesis method of single-crystal BiOBr nanosheets under room temperature and atmospheric pressure based on a sonochemic-al strategy.A flexible humidity sensor enabled by BiOBr nanosheets deliver efficient sensing performance,a high humidity sensit-ivity(Ig/I0=550%)with relative humidity from 40%to 100%,an excellent selectivity,and a detection response/recovery time of 11 and 6 s,respectively.The flexible humidity sensor shows a potential application value as a wearable monitoring device for res-piratory disease prevention and health monitoring.

Experimental Noise Analysis of Reed Switch Sensor Signal under Environmental Vibration

The chattering noise problem of reed switch sensor signal for Automatic Meter Reading system was analyzed experimentally under various types of external vibrations and shocks. The external vibration level amplitude was measured with an accelerometer. To apply for water flow measurement devices, the reed switch sensors should keep high reliability. But the measured digital meter data are occurred difference or errors by chattering noise. The reed switch contains chattering error by itself at the force equivalent position. The vibrations such as passing vehicle near to the reed switch installed location causes chattering. In order to reduce chattering error, most system uses just software methods, for example using digital filter algorithm and also statistical calibration methods. However software approaches were implemented for reducing chattering error, there has still generated chattering error due to external mechanical vibrations and magnetic field. The chattering errors can be reduced by changing leaf spring structure using mechanical hysteresis characteristics.