We developed a one-dimensional hybrid model to simulate the DC/RF combined driven capacitively coupled plasma for argon discharges. The numerical results are used to analyze the influence of the DC source on the plasm...We developed a one-dimensional hybrid model to simulate the DC/RF combined driven capacitively coupled plasma for argon discharges. The numerical results are used to analyze the influence of the DC source on the plasma density distribution, ion energy distributions （IEDs） and ion angle distributions （IADs） on both the RF and DC electrodes. The increase in DC voltage drives more high-energy ions to the electrode applied to the DC source, which makes the IEDs at the DC electrode shift towards higher energy, and the peaks in the IADs shift towards small angle regions. At the same time, it also decreases the ion energy at the RF electrode and enlarges the incident angles of the ions, which strike the RF electrode.展开更多
A hybrid model is used to simulate the characteristics of a collisional sheath in a capacitively coupled plasma （CCP） driven by a dual frequency source including a RF and a pulsed current source applied to the same ...A hybrid model is used to simulate the characteristics of a collisional sheath in a capacitively coupled plasma （CCP） driven by a dual frequency source including a RF and a pulsed current source applied to the same electrode. The hybrid model includes a fluid model used to simulate the characteristics of the collisional sheath, and a Monte-Carlo （MC） method to obtain both ion energy and ion angular distributions （IEDs and IADs） impinging on the substrate. The effects of the low frequency of the pulsed source and the gas pressure on the characteristics of the sheath, as well as the IEDs and IADs, are studied. The results show that the ratio of pulse/RF frequency and the gas pressure are crucial for the characteristics of the sheath and the IEDs. The IADs are significantly more sensitive to the gas pressure.展开更多
农民自组织参与集体行动是优化乡村旅游治理效率、确保乡村旅游取得积极成果的关键。为了识别其潜在机制,本文选择了Institutional Analysis and Development(IAD)智能决策扩展模型。采用混合方法对湖南省长沙市郊区239户家庭进行问卷...农民自组织参与集体行动是优化乡村旅游治理效率、确保乡村旅游取得积极成果的关键。为了识别其潜在机制,本文选择了Institutional Analysis and Development(IAD)智能决策扩展模型。采用混合方法对湖南省长沙市郊区239户家庭进行问卷调查和20次半结构化访谈。研究结果表明:家庭生计资本、户主特征、旅游市场环境、作为旅游发展进入和退出规则的制度规则、认知改革和土地整理水平对乡村旅游农民自组织参与行为集体行动具有显著影响。其中,旅游市场环境变量下的“居住环境”和“旅游资源”的影响力度最大,土地整理变量下的“土地用途”的影响力度最小。基于研究结果,探讨了本研究的理论和实践意义,并提出了未来的研究方向。展开更多
基金supported by the Scientific Foundation from Ministry of Education of China (No.N090305004)Doctor Startup Foundation Program of Liaoning Province (No.20111008)
文摘We developed a one-dimensional hybrid model to simulate the DC/RF combined driven capacitively coupled plasma for argon discharges. The numerical results are used to analyze the influence of the DC source on the plasma density distribution, ion energy distributions （IEDs） and ion angle distributions （IADs） on both the RF and DC electrodes. The increase in DC voltage drives more high-energy ions to the electrode applied to the DC source, which makes the IEDs at the DC electrode shift towards higher energy, and the peaks in the IADs shift towards small angle regions. At the same time, it also decreases the ion energy at the RF electrode and enlarges the incident angles of the ions, which strike the RF electrode.
基金supported by National Natural Science Foundation of China (Nos. 10635010, 10975030)the Science Research Foundation of Dalian University of Technology
文摘A hybrid model is used to simulate the characteristics of a collisional sheath in a capacitively coupled plasma （CCP） driven by a dual frequency source including a RF and a pulsed current source applied to the same electrode. The hybrid model includes a fluid model used to simulate the characteristics of the collisional sheath, and a Monte-Carlo （MC） method to obtain both ion energy and ion angular distributions （IEDs and IADs） impinging on the substrate. The effects of the low frequency of the pulsed source and the gas pressure on the characteristics of the sheath, as well as the IEDs and IADs, are studied. The results show that the ratio of pulse/RF frequency and the gas pressure are crucial for the characteristics of the sheath and the IEDs. The IADs are significantly more sensitive to the gas pressure.
基金Hunan Provincial Department of Education(2022A0053)The National Natural Science Foundation of China(42171232)。
文摘农民自组织参与集体行动是优化乡村旅游治理效率、确保乡村旅游取得积极成果的关键。为了识别其潜在机制,本文选择了Institutional Analysis and Development(IAD)智能决策扩展模型。采用混合方法对湖南省长沙市郊区239户家庭进行问卷调查和20次半结构化访谈。研究结果表明:家庭生计资本、户主特征、旅游市场环境、作为旅游发展进入和退出规则的制度规则、认知改革和土地整理水平对乡村旅游农民自组织参与行为集体行动具有显著影响。其中,旅游市场环境变量下的“居住环境”和“旅游资源”的影响力度最大,土地整理变量下的“土地用途”的影响力度最小。基于研究结果,探讨了本研究的理论和实践意义,并提出了未来的研究方向。
