In this paper,IGBT history is briefl y reviewed and IGBT chip technology is discussed in detail,especially for soft punch through,carrier injection enhancement and trench technologies.Concurrently with the improvement...In this paper,IGBT history is briefl y reviewed and IGBT chip technology is discussed in detail,especially for soft punch through,carrier injection enhancement and trench technologies.Concurrently with the improvements in chip technology,there has been rapid development of the packaging technology which will be discussed in this paper.Some suggested technologies of IGBT in the future are presented to conclude the paper.展开更多
文摘In this paper,IGBT history is briefl y reviewed and IGBT chip technology is discussed in detail,especially for soft punch through,carrier injection enhancement and trench technologies.Concurrently with the improvements in chip technology,there has been rapid development of the packaging technology which will be discussed in this paper.Some suggested technologies of IGBT in the future are presented to conclude the paper.