The paper presents a new method for fabricating a gas-sensitive micro-sensor based on MEMS.The primary target agents are nitrogen dioxides (NO_2),and DIMP.Past-per-billion concentration levels of these two chemicals c...The paper presents a new method for fabricating a gas-sensitive micro-sensor based on MEMS.The primary target agents are nitrogen dioxides (NO_2),and DIMP.Past-per-billion concentration levels of these two chemicals can be detected.An interdigitated gate electrode field-effect transistor (IGEFET) has been coupled with a chemically-active and electron-beam evaporated copper phthaiocyanine (CuPc) thin film to implement a gas-sensitive micro-sensor.The sensor is excited with voltage pulse.Time and frequency-domain response were measured.The magnitude of the normalized difference Fourier transform is distinct distinguished.展开更多
基金This project was supported by National Science Foundation of the U.S. under fund cite NSF 03-512. And it is supported by National Science Foundation of China+1 种基金 under fund cite NSFC 60272002. National ‘863 Project＇ of China under fund cite A05106AA5114.
文摘The paper presents a new method for fabricating a gas-sensitive micro-sensor based on MEMS.The primary target agents are nitrogen dioxides (NO_2),and DIMP.Past-per-billion concentration levels of these two chemicals can be detected.An interdigitated gate electrode field-effect transistor (IGEFET) has been coupled with a chemically-active and electron-beam evaporated copper phthaiocyanine (CuPc) thin film to implement a gas-sensitive micro-sensor.The sensor is excited with voltage pulse.Time and frequency-domain response were measured.The magnitude of the normalized difference Fourier transform is distinct distinguished.
