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平板显示器中ITO透明电极制备的研究 被引量:1
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作者 姚亮 张永爱 +1 位作者 雷晓阳 郭太良 《液晶与显示》 CAS CSCD 北大核心 2008年第1期16-20,共5页
利用光刻技术和湿法刻蚀技术制备ITO透明电极,借助视频显微仪和台阶仪观测电极形状和表面形貌。比较了不同溶液的刻蚀效果,指出采用盐酸加三氯化铁溶液刻蚀效果最佳,分别讨论了HCl含量和FeCl3含量变化对ITO膜刻蚀速率的影响。最后指出在... 利用光刻技术和湿法刻蚀技术制备ITO透明电极,借助视频显微仪和台阶仪观测电极形状和表面形貌。比较了不同溶液的刻蚀效果,指出采用盐酸加三氯化铁溶液刻蚀效果最佳,分别讨论了HCl含量和FeCl3含量变化对ITO膜刻蚀速率的影响。最后指出在25±2℃的环境下,刻蚀液HCl、H2O和FeCl3.6H2O的配比满足3L∶1L∶(20~30g)时,ITO膜的刻蚀速率能达到1nm/s,所制备的透明电极边缘整齐无钻蚀,适合于制备平板显示器中的透明精细电极。 展开更多
关键词 平板显示器 ito透明电极 湿法刻蚀
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Analysis and simulation of lateral PIN photodiode gated by transparent electrode fabricated on fully-depleted SOI film 被引量:2
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作者 谢海情 曾云 +1 位作者 曾健平 王太宏 《Journal of Central South University》 SCIE EI CAS 2011年第3期744-748,共5页
A novel device, lateral PIN photodiode gated by transparent electrode (LPIN PD-GTE) fabricated on fully-depleted SOI film was proposed. ITO film was adopted in the device as gate electrode to reduce the light absorp... A novel device, lateral PIN photodiode gated by transparent electrode (LPIN PD-GTE) fabricated on fully-depleted SOI film was proposed. ITO film was adopted in the device as gate electrode to reduce the light absorption. Thin Si film was fully depleted under gate voltage to achieve low dark current and high photo4o-dark current ratio. The model of gate voltage was obtained and the numerical simulations were presented by ATLAS. Current-voltage characteristics of LPIN PD-GTE obtained in dark (dark current) and under 570 nm illumination (photo current) were studied to achieve the greatest photo-to-dark current ratio for active channel length from 2 to 12 /am. The results show that the photo-to-dark current ratio is 2.0×10^7, with dark current of around 5×10^-4 pA under VGK=0.6 V, PrN=5 mW/cm2, for a total area of 10μm×10μm in fully depleted SOI technology. Thus, the LPIN PD-GTE can be suitable for high-grade photoelectric systems such as blue DVD. 展开更多
关键词 lateral PIN photodiode transparent electrode physical model photo-to-dark current ratio SILICON-ON-INSULATOR
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Conductivity enhancement of PEDOT:PSS film via sulfonic acid modification: application as transparent electrode for ITO-free polymer solar cells 被引量:1
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作者 Zhiqiang Zhao Qing Liu +1 位作者 Wenfeng Zhang Shangfeng Yang 《Science China Chemistry》 SCIE EI CAS CSCD 2018年第9期1179-1186,共8页
3-Hydroxy-1-propanesulfonic acid(HPSA)was applied as a modification layer on poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate)(PEDOT:PSS)film via spin-coating,resulting in a massive boost of the conductivity of... 3-Hydroxy-1-propanesulfonic acid(HPSA)was applied as a modification layer on poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate)(PEDOT:PSS)film via spin-coating,resulting in a massive boost of the conductivity of PEDOT:PSS film,and thus the as-formed PEDOT:PSS/HPSA bilayer film was successfully used as a transparent electrode for ITO-free polymer solar cells(PSCs).Under the optimized concentration of HPSA(0.2 mol L^(-1)),the PEDOT:PSS/HPSA bilayer film has a conductivity of 1020 S cm^(-1),which is improved by about 1400 times of the pristine PEDOT:PSS film(0.7 S cm^(-1)).The sheet resistance of the PEDOT:PSS/HPSA bilayer film was 98Ωsq^(-1),and its transparency in the visible range was over 80%.Both parameters are comparable to those of ITO,enabling its suitability as the transparent electrode.According to atomic force microscopy(AFM),UV-Vis and Raman spectroscopic measurements,the conductivity enhancement was resulted from the removal of PSS moiety by methanol solvent and HPSA-induced segregation of insulating PSS chains along with the conformation transition of the conductive PEDOT chains within PEDOT:PSS.Upon applying PEDOT:PSS/HPSA bilayer film as the transparent electrode substituting ITO,the ITO-free polymer solar cells(PSCs)based on poly[N-9″-hepta-decanyl-2,7-carbazole-alt-5,5-(4′,7′-di-2-thienyl-2′,1′,3′-benzothiadiazole)]:[6,6]-phenyl C71-butyric acid methyl ester(PC_(71)BM)(PCDTBT:PC_(71)BM)active layer exhibited a power conversion efficiency(PCE)of 5.52%,which is comparable to that of the traditional ITO-based devices. 展开更多
关键词 polymer solar cells PEDOT:PSS 3-hydroxy-1-propanesulfonic acid CONDUCTIVITY transparent electrode
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