An in situ growth method for property control of LPCVD polysilicon film

Polysilicon films deposited by low-pressure chemical vapor deposition (LPCVD) exhibit large residual stress and stress gradient, depending on the deposition condition. An in situ growth method based on multilayer concept is presented to control the property for as-deposited polysilicon. A 3-μm thick polysilicon film with nine layers structure is demonstrated under the detailed analysis of multi-layer theory and material characteristic of polysilicon. The results show that a 3-μm-thick polysilicon film with 8-MPa overall residual tensile stress and 2.125-MPa/μm stress gradient through the film thickness is fabricated successfully.

In situ synthesis of a spherical covalent organic framework as a stationary phase for capillary electrochromatography

Covalent organic frameworks(COFs)are a novel type of crystalline porous organic polymer materials recently developed.It has several advantages in chromatographic separation field,such as high thermal stability,porosity,structural regularity,and large specific surface area.Here,a novel spherical COF 1,3,5-tris(4-aminophenyl)benzene(TAPB)and 2,5-bis(2-propyn-1-yloxy)-1,4-benzenedicarboxaldehyde(BPTA)was developed as an electrochromatographic stationary phase for capillary electrochromatography separation.The COF TAPB-BPTA modified capillary column was fabricated via a facile in situ growth method at room temperature.The characterization results of scanning electron microscopy(SEM),Fourier transform infrared(FT-IR)spectroscopy,and X-ray diffraction(XRD)confirmed that COF TAPB-BPTA were successfully modified onto the capillary inner surface.The electrochromatography separation performance of the COF TAPB-BPTA modified capillary was investigated.The prepared column demonstrated outstanding separation performance toward alkylbenzenes,phenols,and chlorobenzenes compounds.Furthermore,the baseline separations of non-steroidal anti-inflammatory drugs(NSAIDs)and parabens with good efficiency and high resolution were achieved.Also,the prepared column possessed satisfactory precision of the intra-day runs(n=5),inter-day runs(n=3),and parallel columns(n=3),and the relative standard deviations(RSDs)of the retention times of tested alkylbenzenes were all less than 2.58%.Thus,this new COF-based stationary phase shows tremendous application potential in chromatographic separation field.

Synthesis of AgCl/Ti_(3)C_(2)@TiO_(2)Ternary Composite Photocatalysts for Photocatalytic Oxidation of 1,4-Dihydropyridine and Tetracycline Hydrochloride

AgCl/Ti_(3)C_(2)@TiO_(2)ternary composites were prepared to form a heterojunction structure between AgCl and TiO_(2)and introduce Ti3C2 as a cocatalyst.The as-prepared AgCl/Ti_(3)C_(2)@TiO_(2)composites showed higher photocatalytic activity than pure AgCl and Ti_(3)C_(2)@TiO_(2)for photooxidation of a 1,4-dihydropyridine derivative(1,4-DHP)and tetracycline hydrochloride(TCH)under visible light irradiation(λ>400 nm).The photocatalytic activity of AgCl/Ti_(3)C_(2)@TiO_(2)composites depended on Ti_(3)C_(2)@TiO_(2)content,and the catalytic activity of the optimized samples were 6.9 times higher than that of pure AgCl for 1,4-DHP photodehydrogenation and 7.3 times higher than that of Ti_(3)C_(2)@TiO_(2)for TCH photooxidation.The increased photocatalytic activity was due to the formation of a heterojunction structure between AgCl and TiO_(2)and the introduction of Ti3C2 as a cocatalyst,which lowered the internal resistance,sped up the charge transfer,and increased the separation efficiency of photogenerated carries.Photogenerated holes and superoxide radical anions were the major active species in the photocatalytic process.