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Fabrication of GaN-Based Heterostructures with an InA1GaN/AlGaN Composite Barrier
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作者 全汝岱 张进成 +6 位作者 薛军帅 赵一 宁静 林志宇 张雅超 任泽阳 郝跃 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第8期127-130,共4页
CaN-based heterostructures with an InAlCaN/AlCaN composite barrier on sapphire (0001) substrates are grown by a low-pressure metal organic chemical vapor deposition system. Compositions of the InAiGaN layer are dete... CaN-based heterostructures with an InAlCaN/AlCaN composite barrier on sapphire (0001) substrates are grown by a low-pressure metal organic chemical vapor deposition system. Compositions of the InAiGaN layer are determined by x-ray photoelectron spectroscopy, structure and crystal quality of the heterostruetures are identified by high resolution x-ray diffraction, surface morphology of the samples are examined by an atomic force microscope, and Hall effect and capacitance-voltage measurements are performed at room temperature to evaluate the electrical properties of heterostructures. The Al/In ratio of the InAlGaN layer is 4.43, which indicates that the InAlCaN quaternary layer is nearly lattice-matched to the CaN channel. Capacitance-voltage results show that there is no parasitic channel formed between the InAIGaN layer and the AlCaN layer. Compared with the InAl- CaN/CaN heterostructure, the electrical properties of the InAlCaN/AlGaN/GaN heterostructure are improved obviously. Influences of the thickness of the AlGaN layer on the electrical properties of the heterostructures are studied. With the optimal thickness of the AlGaN layer to be 5 nm, the 2DEG mobility, sheet density and the sheet resistance of the sample is 1889.61 cm2/V.s, 1.44 × 10^13 cm-2 and as low as 201.1 Ω/sq, respectively. 展开更多
关键词 ALGAN in on as is Fabrication of GaN-Based Heterostructures with an ina1gan/AlGaN Composite Barrier of with
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六方系InAlGaN晶体的长波长光学声子研究(英文) 被引量:3
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作者 陈贵楚 范广涵 《发光学报》 EI CAS CSCD 北大核心 2012年第8期808-811,共4页
利用拉曼散射实验方法对六方系InAlGaN晶体的光学声子进行了测量,同时利用修正随机元素同向位移模型对其光学声子与组分的关系进行了理论模拟。结果表明InAlGaN晶体的E1与A1光学声子分支都表现为单模行为,测量得到的InxGa0.45-xAl0.55N... 利用拉曼散射实验方法对六方系InAlGaN晶体的光学声子进行了测量,同时利用修正随机元素同向位移模型对其光学声子与组分的关系进行了理论模拟。结果表明InAlGaN晶体的E1与A1光学声子分支都表现为单模行为,测量得到的InxGa0.45-xAl0.55N晶体的A1(LO)声子与计算结果一致。对InxAl0.42-xGa0.58N晶体的A1(LO)声子的计算结果与Cros的测量结果进行了对比,两者也相符。 展开更多
关键词 InAlGaN 光学声子 拉曼散射 MREI
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基于再生长欧姆接触工艺的220 GHz InAlN/GaN场效应晶体管(英文) 被引量:1
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作者 尹甲运 吕元杰 +5 位作者 宋旭波 谭鑫 张志荣 房玉龙 冯志红 蔡树军 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2017年第1期6-9,34,共5页
在蓝宝石衬底上研制了具有高电流增益截止频率(f_T)的InAlN/GaN异质结场效应晶体管(HFETs).基于MOCVD外延n+-GaN欧姆接触工艺实现了器件尺寸的缩小,有效源漏间距(Lsd)缩小至600 nm.此外,采用自对准工艺制备了50 nm直栅.由于器件尺寸的缩... 在蓝宝石衬底上研制了具有高电流增益截止频率(f_T)的InAlN/GaN异质结场效应晶体管(HFETs).基于MOCVD外延n+-GaN欧姆接触工艺实现了器件尺寸的缩小,有效源漏间距(Lsd)缩小至600 nm.此外,采用自对准工艺制备了50 nm直栅.由于器件尺寸的缩小,Vgs=1 V下器件最大饱和电流(I_(ds))达到2.11 A/mm,峰值跨导达到609 mS/mm.根据小信号测试结果,外推得到器件的fT和最大振荡频率(fmax)分别为220 GHz和48 GHz.据我们所知,该f_T值是目前国内InAlN/GaN HFETs器件报道的最高结果. 展开更多
关键词 InA1N/GaN HFET FT 再生长n+-GaN欧姆接触
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Performance improvement of GaN-based light-emitting diode with a p-InAlGaN hole injection layer
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作者 喻晓鹏 范广涵 +4 位作者 丁彬彬 熊建勇 肖瑶 张涛 郑树文 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第2期557-560,共4页
The characteristics of a blue light-emitting diode (LED) with a p-InA1GaN hole injection layer (HIL) is analyzed numerically. The simulation results indicate that the newly designed structure presents superior opt... The characteristics of a blue light-emitting diode (LED) with a p-InA1GaN hole injection layer (HIL) is analyzed numerically. The simulation results indicate that the newly designed structure presents superior optical and electrical performance such as an increase in light output power, a reduction in current leakage and alleviation of efficiency droop. These improvements can be attributed to the p-InA1GaN serving as hole injection layers, which can alleviate the band bending induced by the polarization field, thereby improving both the hole injection efficiency and the electron blocking efficiency. 展开更多
关键词 InGaN light-emitting diodes (LEDs) p-ina1gan hole injection layer (HIL) numerical simulation
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70-nm-gated InAlN/GaN HEMTs grown on SiC substrate with f_T/f_(max)>160GHz 被引量:1
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作者 韩婷婷 敦少博 +5 位作者 吕元杰 顾国栋 宋旭波 王元刚 徐鹏 冯志红 《Journal of Semiconductors》 EI CAS CSCD 2016年第2期86-89,共4页
lnA1N/GaN high-electron-mobility transistors (HEMTs) on SiC substrate were fabricated and character- ized. Several techniques, consisting of high electron density, 70 nm T-shaped gate, low ohmic contacts and a short... lnA1N/GaN high-electron-mobility transistors (HEMTs) on SiC substrate were fabricated and character- ized. Several techniques, consisting of high electron density, 70 nm T-shaped gate, low ohmic contacts and a short drain-source distance, are integrated to gain high device performance. The fabricated InA1N/GaN HEMTs exhibit a maximum drain saturation current density of 1.65 A/ram at Vgs = 1 V and a maximum peak transconductance of 382 mS/rnm. In addition, a unity current gain cut-off frequency (fT) of 162 GHz and a maximum oscillation frequency (fmax) of 176 GHz are achieved on the devices with the 70 nm gate length. 展开更多
关键词 InA1N/GaN high-electron-mobility transistors (HEMTs) T-shaped gate current gain cut-off fre-quency (fT) maximum oscillation frequency (fmax)
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DC and RF characteristics of enhancement-mode InAlN/GaN HEMT with fluorine treatment
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作者 宋旭波 顾国栋 +5 位作者 敦少博 吕元杰 韩婷婷 王元刚 徐鹏 冯志红 《Journal of Semiconductors》 EI CAS CSCD 2014年第4期52-55,共4页
We report an enhancement-mode InA1N/GaN HEMT using a fluorine plasma treatment. The threshold voltage was measured to be +0.86 V by linear extrapolation from the transfer characteristics. The transconductance is 0 mS... We report an enhancement-mode InA1N/GaN HEMT using a fluorine plasma treatment. The threshold voltage was measured to be +0.86 V by linear extrapolation from the transfer characteristics. The transconductance is 0 mS/mm at Vc, s = 0 V and VDS = 5 V, which shows a truly normal-offstate. The gate leakage current density of the enhancement-mode device shows two orders of magnitude lower than that of the depletion-mode device. The transfer characteristics of the E-mode InA1N/GaN HEMT at room temperature and high temperature are reported. The current gain cut-off frequency (fT) and the maximum oscillation frequency (fmax) of the enhancement-mode device with a gate length of 0.3 #m were 29.4 GHz and 37.6 GHz respectively, which is comparable with the depletion-mode device. A classical 16 elements small-signal model was deduced to describe the parasitic and the intrinsic parameters of the device. 展开更多
关键词 ENHANCEMENT-MODE InA1N/GaN HEMT threshold voltage fluorine treatment small-signal model
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A 4.69-W/mm output power density InAlN/GaN HEMT grown on sapphire substrate
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作者 刘波 冯志红 +7 位作者 张森 敦少博 尹甲运 李佳 王晶晶 张效帏 房玉龙 蔡树军 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第12期68-71,共4页
We report high performance InA1N/GaN HEMTs grown on sapphire substrates. The lattice-matched InA1N/GaN HEMT sample showed a high 2DEG mobility of 1210 cmZ/(V.s) under a sheet density of 2.6 × 10^13 cm^-2. Large... We report high performance InA1N/GaN HEMTs grown on sapphire substrates. The lattice-matched InA1N/GaN HEMT sample showed a high 2DEG mobility of 1210 cmZ/(V.s) under a sheet density of 2.6 × 10^13 cm^-2. Large signal load-pull measurements for a (2 × 100 μm) x 0.25 μm device have been conducted with a drain voltage of 24 V at 10 GHz. The presented results confirm the high performances reachable by InAIN- based technology with an output power density of 4.69 W/ram, a linear gain of 11.8 dB and a peak power-added efficiency of 48%. This is the first report of high performance InA1N/GaN HEMTs in China's Mainland. 展开更多
关键词 InA1N/GaN HEMT output power density metal-organic chemical vapor deposition
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