A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet dur...A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet during the charging and discharging processes.The coupled problem is resolved by means of the finite element method(FEM)for the magneto-thermo-elastic behaviors and the Runge-Kutta method for the transient responses of the electrical circuits of the hybrid superconducting magnet system.The results reveal that the transient multi-physics responses of the insert NI coil primarily depend on the charging/discharging procedure of the hybrid magnet.Moreover,a reverse azimuthal current and a compressive hoop stress are induced in the insert NI coil during the charging process,while a forward azimuthal current and a tensile hoop stress are observed during the discharging process.The induced voltages in the insert NI coil can drive the currents flowing across the radial turns where the contact resistance exists.Therefore,it brings forth significant Joule heat,causing a temperature rise and a uniform distribution of this heat in the coil turns.Accordingly,a thermally/mechanically unstable or quenching event may be encountered when a high operating current is flowing in the insert NI coil.It is numerically predicted that a quick charging will induce a compressive hoop stress which may bring a risk of buckling instability in the coil,while a discharging will not.The simulations provide an insight of hybrid superconducting magnets under transient start-up or shutdown phases which are inevitably encountered in practical applications.展开更多
Inductive coupling transmission system is an important measurement device for acquiring and transmitting marine environmental information.However,low transmission rate cannot meet the current demand for large data tra...Inductive coupling transmission system is an important measurement device for acquiring and transmitting marine environmental information.However,low transmission rate cannot meet the current demand for large data transmission in marine environment detection at home.In order to improve the transmission performance of the system in practical communication system,optimizing the design by directly changing the circuit parameters is time-consuming and expensive.Therefore,a set of inductive coupling transmission channel analysis system is designed based on virtual instrument to improve the transmission rate and reliability of inductive coupling transmission system.The bit error rate of channel system at different frequency and noise levels are tested by using three kinds of digital modulation mode including amplitude shift keying(ASK),frequency shift keying(FSK)and differential phase shift keying(DPSK),taking square wave and sine wave as a carrier.Finally,the sine wave is selected to be carrier signal and DPSK is chosen to be modulation mode.The reliable transmission of signal with the error rate less than0.005and the transmission rate of9600bps,at the noise level of-10dB,is realized and verified by the debugging circuit experiments with multi-nodes in the laboratory.The study provides an important experimental evidence for improving signal transmission reliability of inductive coupling transmission system.展开更多
Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma(ICP)to meet the demand for large-area and uniformly distributed plasma in industrial m...Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma(ICP)to meet the demand for large-area and uniformly distributed plasma in industrial manufacturing.This study utilized a two-dimensional self-consistent fluid model to investigate how different coil configurations and chamber aspect ratios affect the radial uniformity of plasma in radio frequency ICP.The findings indicate that optimizing the radial spacing of the coil enhances plasma uniformity but with a reduction in electron density.Furthermore,optimizing the coil within the ICP reactor,using the interior point method in the Interior Point Optimizer significantly enhances plasma uniformity,elevating it from 56%to 96%within the range of the model sizes.Additionally,when the chamber aspect ratio k changes from 2.8 to 4.7,the plasma distribution changes from a center-high to a saddleshaped distribution.Moreover,the plasma uniformity becomes worse.Finally,adjusting process parameters,such as increasing source power and gas pressure,can enhance plasma uniformity.These findings contribute to optimizing the etching process by improving plasma radial uniformity.展开更多
The electrical parameters of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe,where Ar fractions range from 0%to 100%.The influence of gas composition ...The electrical parameters of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe,where Ar fractions range from 0%to 100%.The influence of gas composition and pressure on electron density,the effective electron temperature and the electron energy probability functions(EEPFs)at different spatial positions are present.In driver region,with the introduction of a small amount of Ar at 0.3 Pa,there is a rapid increase in electron density accompanied by a decrease in the effective electron temperature.Additionally,the shape of the EEPF transitions from a three-temperature distribution to a bi-Maxwellian distribution due to an increase in electron-electron collision.However,this phenomenon resulting from the changes in gas composition vanishes at 5 Pa due to the prior depletion of energetic electrons caused by the increase in pressure during hydrogen discharge.The EEPFs for the total energy in expansion region is coincident to these in the driver region at 0.3 Pa,as do the patterns of electron density variation between these two regions for differing Ar fractions.At 5 Pa,as the discharge transitions from H_(2)to Ar,the EEPFs evolved from a bi-Maxwellian distribution with pronounced low energy electrons to a Maxwellian distribution in expansion region.This evolve may be attributed to a reduction in molecular vibrational excitation reactions of electrons during transport and the transition from localized electron dynamics in hydrogen discharge to non-localized electron dynamics in argon discharge.In order to validate the experimental results,we use the COMSOL simulation software to calculate electrical parameters under the same conditions.The evolution and spatial distribution of the electrical parameters of the simulation results agree well with the trend of the experimental results.展开更多
We develop a new kind of underwater inductive coupling power transfer(ICPT)system to evaluate wireless power transfer in autonomous underwater vehicle(AUV)docking applications.Parameters that determine the performance...We develop a new kind of underwater inductive coupling power transfer(ICPT)system to evaluate wireless power transfer in autonomous underwater vehicle(AUV)docking applications.Parameters that determine the performance of the system are systematically analyzed through mathematical methods.A circuit simulation model and a finite element analysis(FEA)simulation model are developed to study the power losses of the system,including copper loss in coils,semiconductor loss in circuits,and eddy current loss in transmission media.The characteristics of the power losses can provide guidelines to improve the efficiency of ICPT systems.Calculation results and simulation results are validated by relevant experiments of the prototype system.The output power of the prototype system is up to 45 W and the efficiency is up to 0.84.The preliminary results indicate that the efficiency will increase as the transmission power is raised by increasing the input voltage.When the output power reaches 500 W,the efficiency is expected to exceed 0.94.The efficiency can be further improved by choosing proper semiconductors and coils.The analysis methods prove effective in predicting the performance of similar ICPT systems and should be useful in designing new systems.展开更多
The harmonics and resonance of traction power supply systems(TPSSs)aggravate the electromagnetic interference(EMI)to adjacent metallic pipelines(MPs),which has aroused widespread concern.In this paper,an evaluation me...The harmonics and resonance of traction power supply systems(TPSSs)aggravate the electromagnetic interference(EMI)to adjacent metallic pipelines(MPs),which has aroused widespread concern.In this paper,an evaluation method on pipeline interference voltage under harmonic induction is presented.The results show that the Carson integral formula is more accurate in calculating the mutual impedance at higher frequencies.Then,an integrated train-network-pipeline model is established to estimate the influences of harmonic distortion and resonance on an MP.It is revealed that the higher the harmonic cur-rent distortion rate of the traction load,the larger the interference voltage on an MP.Particularly,the interference voltage is amplified up to 7 times when the TPSS resonates,which is worthy of attention.In addition,the parameters that affect the variation and sensitivity of the interference voltage are studied,namely,the pipeline coating material,locomotive position,and soil resistivity,indicating that soil resistivity and 3PE(3-layer polyethylene)anticorrosive coating are more sensitive to harmonic induction.Field test results show that the harmonic distortion can make the interference voltage more serious,and the protective measures are optimized.展开更多
Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma (ICP) process was carried out. The microstructure of the polymer sub...Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma (ICP) process was carried out. The microstructure of the polymer substrate surfaces, which were exposed to different kinds of plasma treatment, was identified by scanning electron microscopy(SEM) analysis, peel strength of the copper coating and water surface contact angle. The adhesion of the substrate was largely enhanced by plasma treatment and the copper deposited coating reached a value of 7.68 kgf/m in verifying the adhesion of the copper coating with polymer material. The quality of the line/space 50/50 μm produced in the laboratory was examined by the pressure cooker test and proved to meet the requirement.展开更多
As an important part of buoy-type ocean monitoring systems,the inductively coupled mooring chain solves the problem of data cotransmission through the multinode sensors that it carries,which is significant for the rap...As an important part of buoy-type ocean monitoring systems,the inductively coupled mooring chain solves the problem of data cotransmission through the multinode sensors that it carries,which is significant for the rapid acquisition of fish,hydrology,and other information.This paper is based on a seawater channel transmission model with a depth of 300 m and a bandwidth of 2 MHz.An orthogonal frequency division multiplexing(OFDM)technology is used to overcome the multipath effect of signal transmission on a seawater medium.The adaptive technology is integrated into the OFDM,and an improved joint subcarrier and bit power allocation algorithm is proposed.This algorithm solves the problem of dynamic subcarrier allocation during the cotransmission of underwater multinode user data in seawater channels.The results show that the algorithm complexity can be reduced by 0.18126×10^(-2)s during one complete OFDM system data transmission by the improved greedy algorithm,and a total of 216 bits are transmitted by the OFDM.The normalized channel capacity can be improved by 0.012 bit s^(-1)Hz^(-1).At the bit error ratio(BER)of 10^(-3),the BER performance can be improved by approximately 6 d B.When the numbers of users are 4 and 8,the improved algorithm increases the channel capacity,and the higher the number of users,the more evident the channel capacity improvement effect is.The results of this paper have an important reference value for enhancing the transmission performance of inductively coupled mooring chain underwater multinode data.展开更多
To maintain the high-density plasma source in inductively coupled plasma(ICP),very high radiofrequency power is often delivered to the antenna,which can heat the dielectric windows near the antenna to high temperature...To maintain the high-density plasma source in inductively coupled plasma(ICP),very high radiofrequency power is often delivered to the antenna,which can heat the dielectric windows near the antenna to high temperature.This high temperature can modulate the plasma characteristics to a large degree.We thus study the effect of dielectric window temperature on plasma parameters in two different ICP structures based on COMSOL software.The distributions of various plasma species are examined at different dielectric window temperatures.The concentration of neutral gas is found to be largely modulated at high dielectric window temperature,which further affects the electron collision probability with neutrals and the electron temperature.However,the electron density profiles are barely affected by the dielectric window temperature,which is mainly concentrated at the center of the reactor due to the fixed power input and pressure.展开更多
In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at dif...In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma.The results indicate that when the bias voltage amplitude increases or the bias frequency decreases,the ion energy peak separation width becomes wider.Besides,the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there,indicating the nonuniformity of the ion energy distribution function(IEDF)along the radial direction.As the pressure increases from 1 to 10 Pa,the discrepancy of the IEDFs at different radial positions becomes more obvious,i.e.the IEDF at the radial edge is characterized by multiple low energy peaks.When a dual frequency bias source is applied,the IEDF exhibits three or four peaks,and it could be modulated efficiently by the relative phase between the two bias frequencies.The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.展开更多
Recently,there has been a huge increase in the usage of fuel resources for automobiles which is severely affecting the climate and causing global warming.The use of electric vehicle(EV)is an effective way to protect t...Recently,there has been a huge increase in the usage of fuel resources for automobiles which is severely affecting the climate and causing global warming.The use of electric vehicle(EV)is an effective way to protect the environment and reduce travel costs.However,the EV charging system has a single charging source,and the charging rate is limited.In this paper,an EV wireless charging system based on dual source power supply has been developed.It realizes intelligent switching between 12 V photovoltaic output and 220 V AC dual source power,and has wireless transmission function.Based on the proposed power supply architecture,the micro wireless charging model is built,which enables the EV model to store power and realize static and mobile control through the wireless induction charging system.展开更多
Due to a series of challenges such as low-orbit maintenance of satellites, the air-breathing electric propulsion has got widespread attention. Commonly, the radio frequency ion thruster is favored by low-orbit mission...Due to a series of challenges such as low-orbit maintenance of satellites, the air-breathing electric propulsion has got widespread attention. Commonly, the radio frequency ion thruster is favored by low-orbit missions due to its high specific impulse and efficiency. In this paper, the power transfer efficiency of the radio frequency ion thruster with different gas compositions is studied experimentally, which is obtained by measuring the radio frequency power and current of the antenna coil with and without discharge operation. The results show that increasing the turns of antenna coils can effectively improve the radio frequency power transfer efficiency, which is due to the improvement of Q factor. In pure N_2 discharge,with the increase of radio frequency power, the radio frequency power transfer efficiency first rises rapidly and then exhibits a less steep increasing trend. The radio frequency power transfer efficiency increases with the increase of gas pressure at relatively high power, while declines rapidly at relatively low power. In N_(2)/O_(2) discharge, increasing the N_(2) content at high power can improve the radio frequency power transfer efficiency, but the opposite was observed at low power. In order to give a better understanding of these trends, an analytic solution in limit cases is utilized, and a Langmuir probe was employed to measure the electron density. It is found that the evolution of radio frequency power transfer efficiency can be well explained by the variation of plasma resistance, which is related to the electron density and the effective electron collision frequency.展开更多
The radio frequency (rf) self-bias of the substrate in a rf inductively coupled plasma is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. Experimen...The radio frequency (rf) self-bias of the substrate in a rf inductively coupled plasma is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. Experimental studies were done on the relations of the tuned substrate self-bias with varying discharge and external circuit parameters. Under a certain discharge gas pressure, the curves of tuned substrate self-bias Vtsb versus tuning capacitance Ct demonstrate jumps and hysteresises when rf discharge power is higher than a threshold. The hysteresis loop in terms of △Ctcrit1(= Ccrit1-Ccrit2, here,Ccrit1, Ccrit2 are critical capacitance magnitudes under which the tuned substrate self-bias jumps) decreases with increasing rf discharge power, while the maximum |Vtsbimn| is achieved in the middle discharge-power region. Under a constant discharge power |Vtsb min|, Ccrit1 and Ccrit2 achieve their minimums in the middle gas-pressure region. When the tuning capacitance is pre-set at a lower value, Ttsb varies slightly with gas-flow rate; in the case of tuning capacitance sufficiently approaching Ctcriti, Vtsb undergoes the jump and hysteresis with the changing gas-flow rate. By inserting a resistor R into the external network, the characteristics of Vtsb-Ct curves are changed with the reduced quality factor Q depending on resistance values. Based on inductive- and capacitive-coupling characteristics of inductively coupled plasma, the dependence of a plasma sheath on plasma parameters, and the impedance properties of the substrate branch, the observed results can be qualitatively interpreted.展开更多
The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing paramet...The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing parameters such as the substrate axial position, different coupling coils and inserted resistance are experimentally studied. To get a better understanding of the experimental results, the axial distributions of the plasma density, electron temperature and plasma potential are measured with an rf compensated Langmuir probe; the coil rf peak-to-peak voltage is measured with a high voltage probe. As in the case of changing discharge power, it is found that continuity, instability and bi-stability of the tuned substrate bias can be obtained by means of changing the substrate axial position in the plasma source or the inserted resistance. Additionally, continuity can not transit directly into bi-stability, but evolves via instability. The inductance of the coupling coil has a substantial effect on the magnitude and the property of the tuned substrate bias.展开更多
本文利用微波消解对黄豆进行前处理,采用电感耦合等离子体质谱法(Inductively Coupled Plasma Mass Spectrometer,ICP-MS)对消解液中26种元素的含量进行测定,对方法的线性、精密度、准确度及质控样品进行验证。结果表明,各元素标准曲线...本文利用微波消解对黄豆进行前处理,采用电感耦合等离子体质谱法(Inductively Coupled Plasma Mass Spectrometer,ICP-MS)对消解液中26种元素的含量进行测定,对方法的线性、精密度、准确度及质控样品进行验证。结果表明,各元素标准曲线的相关系数均≥0.9990,线性关系良好,检出限为0.000583~0.453000 mg·kg^(-1),相对标准偏差≤5.513%,加标回收率为77%~113%,说明该方法能准确检测黄豆中无机元素,满足日常监测需求。展开更多
We study the quantization of mesoscopic inductance coupling circuit and discuss its time evolution. Bymeans of the thermal field dynamics theory we study the quantum fluctuation of the system at finite temperature.
The contents ofMg, Al, Si, Ti, Cr, Mn, Fe, Co, Cu, Ga, As, Se, Cd, Sb, Pb and Bi in high purity nickel were determined by high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS). The sample was diss...The contents ofMg, Al, Si, Ti, Cr, Mn, Fe, Co, Cu, Ga, As, Se, Cd, Sb, Pb and Bi in high purity nickel were determined by high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS). The sample was dissolved in HNO3 and HCI by microwave digestion. Most of the spectral interferences could be avoided by measuring in the high resolution mode. The matrix effects because of the presence of excess HC1 and nickel were evaluated. Correction for matrix effects was made using Sc, Rh and T1 as internal standards. The optimum conditions for the determination were tested and discussed. The detection limits range from 0.012 to 1.76 ~tg/g depending on the type of elements. The applicability of the proposed method is also validated by the analysis of high purity nickel reference material (NIST SRM 671). The relative standard deviation (RSD) is less than 3.3%. Results for determination of trace elements in high purity nickel were presented.展开更多
A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, ...A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, Mo, Ag, Cd, Sn Sb, Ba, Pt, Au, and Pb) in high purity cobalt was described. Sample digestions were performed in closed microwave vessels using HNO3 and HCI. The matrix effects because of the presence of excess HCI and Co were evaluated. The usefulness of high mass resolution for overcoming some spectral interference was demonstrated. The optimum conditions for the determination were tested and discussed. The standard addition method was employed for quantitative analysis. The detection limits were 0.016-1.50 ].tg·g^-1, the recovery ratios were 92.2%-111.2%, and the RSD was less than 3.6%. The method was accurate, quick, and convenient. It was applied to the determination of trace impurities in high purity cobalt with satisfactory results.展开更多
A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etc...A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etching depths of more than 150μm. Plasma etch characteristics with ICP process pressure and the percentage of BCI3 were studied in greater detail at a constant ICP coil/bias power. The measured peak-to-peak voltage as a function of pressure was used to estimate the minimum energy of the ions bombarding the substrate. The process pressure was found to have a substantial influence on the energy of heavy ions. Various ion species in plasma showed minimum energy variation from 1.85 eV to 7.5 eV in the pressure range of 20 mTorr to 50 mTorr. The effect of pressure and the percentage of BCl3 on the etching rate and surface smoothness of the bottom surface of the etched hole were studied for a fixed total flow rate. The etching rate was found to decrease with the percentage of BCl3, whereas the addition of BCl3 resulted in anisotropic holes with a smooth veil free bottom surface at a pressure of 30 mTorr and 42% BC13. In addition, variation of the etching yield with pressure and etching depth were also investigated.展开更多
ZrN fihns were deposited on Si(111) and M2 steel by inductively coupled plasma (ICP)-enhanced RF magnetron sputtering. The effect of ICP power on the microstructure, mechanical properties and corrosion resistance ...ZrN fihns were deposited on Si(111) and M2 steel by inductively coupled plasma (ICP)-enhanced RF magnetron sputtering. The effect of ICP power on the microstructure, mechanical properties and corrosion resistance of ZrN films was investigated. When the ICP power is below 300 W, the ZrN films show a columnar structure. With the increase of ICP power, the texture coefficient (To) of the (111) plane, the nanohardness and elastic modulus of the films increase and reach the maximum at a power of 300 W. As the ICP Power exceeds 300 W, the films exhibit a ZrN and ZrNx mixed crystal structure without columnar grain while the nanohardness and elastic modulus of the films decrease. All the ZrN coated samples show a higher corrosion resistance than that of the bare M2 steel substrate in 3.5% NaCl electrolyte. The nanohardness and elastic modulus mostly depend on the crystalline structure and Tc of ZrN(111).展开更多
基金the National Natural Science Foundation of China(Nos.11932008 and 11672120)the Fundamental Research Funds for the Central Universities of China(No.lzujbky-2022-kb01)。
文摘A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet during the charging and discharging processes.The coupled problem is resolved by means of the finite element method(FEM)for the magneto-thermo-elastic behaviors and the Runge-Kutta method for the transient responses of the electrical circuits of the hybrid superconducting magnet system.The results reveal that the transient multi-physics responses of the insert NI coil primarily depend on the charging/discharging procedure of the hybrid magnet.Moreover,a reverse azimuthal current and a compressive hoop stress are induced in the insert NI coil during the charging process,while a forward azimuthal current and a tensile hoop stress are observed during the discharging process.The induced voltages in the insert NI coil can drive the currents flowing across the radial turns where the contact resistance exists.Therefore,it brings forth significant Joule heat,causing a temperature rise and a uniform distribution of this heat in the coil turns.Accordingly,a thermally/mechanically unstable or quenching event may be encountered when a high operating current is flowing in the insert NI coil.It is numerically predicted that a quick charging will induce a compressive hoop stress which may bring a risk of buckling instability in the coil,while a discharging will not.The simulations provide an insight of hybrid superconducting magnets under transient start-up or shutdown phases which are inevitably encountered in practical applications.
基金National Natural Science Foundation of China(No.41506122)
文摘Inductive coupling transmission system is an important measurement device for acquiring and transmitting marine environmental information.However,low transmission rate cannot meet the current demand for large data transmission in marine environment detection at home.In order to improve the transmission performance of the system in practical communication system,optimizing the design by directly changing the circuit parameters is time-consuming and expensive.Therefore,a set of inductive coupling transmission channel analysis system is designed based on virtual instrument to improve the transmission rate and reliability of inductive coupling transmission system.The bit error rate of channel system at different frequency and noise levels are tested by using three kinds of digital modulation mode including amplitude shift keying(ASK),frequency shift keying(FSK)and differential phase shift keying(DPSK),taking square wave and sine wave as a carrier.Finally,the sine wave is selected to be carrier signal and DPSK is chosen to be modulation mode.The reliable transmission of signal with the error rate less than0.005and the transmission rate of9600bps,at the noise level of-10dB,is realized and verified by the debugging circuit experiments with multi-nodes in the laboratory.The study provides an important experimental evidence for improving signal transmission reliability of inductive coupling transmission system.
基金supported by the Scientific Research Foundation of Xijing University,China(No.XJ19T03)the Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory(No.ZHD201701)the Natural Science Basic Research Plan in Shaanxi Province of China(No.2024JC-YBMS-342).
文摘Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma(ICP)to meet the demand for large-area and uniformly distributed plasma in industrial manufacturing.This study utilized a two-dimensional self-consistent fluid model to investigate how different coil configurations and chamber aspect ratios affect the radial uniformity of plasma in radio frequency ICP.The findings indicate that optimizing the radial spacing of the coil enhances plasma uniformity but with a reduction in electron density.Furthermore,optimizing the coil within the ICP reactor,using the interior point method in the Interior Point Optimizer significantly enhances plasma uniformity,elevating it from 56%to 96%within the range of the model sizes.Additionally,when the chamber aspect ratio k changes from 2.8 to 4.7,the plasma distribution changes from a center-high to a saddleshaped distribution.Moreover,the plasma uniformity becomes worse.Finally,adjusting process parameters,such as increasing source power and gas pressure,can enhance plasma uniformity.These findings contribute to optimizing the etching process by improving plasma radial uniformity.
基金supported by the National Natural Science Foundation of China(Grant Nos.11935005 and 12075049)the National Key Research and Development Program of China(Grant No.2017YFE0300106).
文摘The electrical parameters of H_(2)/Ar plasma in a cylindrical inductive discharge with an expansion region are investigated by a Langmuir probe,where Ar fractions range from 0%to 100%.The influence of gas composition and pressure on electron density,the effective electron temperature and the electron energy probability functions(EEPFs)at different spatial positions are present.In driver region,with the introduction of a small amount of Ar at 0.3 Pa,there is a rapid increase in electron density accompanied by a decrease in the effective electron temperature.Additionally,the shape of the EEPF transitions from a three-temperature distribution to a bi-Maxwellian distribution due to an increase in electron-electron collision.However,this phenomenon resulting from the changes in gas composition vanishes at 5 Pa due to the prior depletion of energetic electrons caused by the increase in pressure during hydrogen discharge.The EEPFs for the total energy in expansion region is coincident to these in the driver region at 0.3 Pa,as do the patterns of electron density variation between these two regions for differing Ar fractions.At 5 Pa,as the discharge transitions from H_(2)to Ar,the EEPFs evolved from a bi-Maxwellian distribution with pronounced low energy electrons to a Maxwellian distribution in expansion region.This evolve may be attributed to a reduction in molecular vibrational excitation reactions of electrons during transport and the transition from localized electron dynamics in hydrogen discharge to non-localized electron dynamics in argon discharge.In order to validate the experimental results,we use the COMSOL simulation software to calculate electrical parameters under the same conditions.The evolution and spatial distribution of the electrical parameters of the simulation results agree well with the trend of the experimental results.
基金Project supported by the National High-Tech R&D Program of China(No.2013AA09A414)the National Natural Science Foundation of China(No.51221004)the Interdisciplinary Research Foundation of Zhejiang University(No.2012HY003A)
文摘We develop a new kind of underwater inductive coupling power transfer(ICPT)system to evaluate wireless power transfer in autonomous underwater vehicle(AUV)docking applications.Parameters that determine the performance of the system are systematically analyzed through mathematical methods.A circuit simulation model and a finite element analysis(FEA)simulation model are developed to study the power losses of the system,including copper loss in coils,semiconductor loss in circuits,and eddy current loss in transmission media.The characteristics of the power losses can provide guidelines to improve the efficiency of ICPT systems.Calculation results and simulation results are validated by relevant experiments of the prototype system.The output power of the prototype system is up to 45 W and the efficiency is up to 0.84.The preliminary results indicate that the efficiency will increase as the transmission power is raised by increasing the input voltage.When the output power reaches 500 W,the efficiency is expected to exceed 0.94.The efficiency can be further improved by choosing proper semiconductors and coils.The analysis methods prove effective in predicting the performance of similar ICPT systems and should be useful in designing new systems.
基金This work was supported by the National Natural Science Foundation of China(No.51877182).
文摘The harmonics and resonance of traction power supply systems(TPSSs)aggravate the electromagnetic interference(EMI)to adjacent metallic pipelines(MPs),which has aroused widespread concern.In this paper,an evaluation method on pipeline interference voltage under harmonic induction is presented.The results show that the Carson integral formula is more accurate in calculating the mutual impedance at higher frequencies.Then,an integrated train-network-pipeline model is established to estimate the influences of harmonic distortion and resonance on an MP.It is revealed that the higher the harmonic cur-rent distortion rate of the traction load,the larger the interference voltage on an MP.Particularly,the interference voltage is amplified up to 7 times when the TPSS resonates,which is worthy of attention.In addition,the parameters that affect the variation and sensitivity of the interference voltage are studied,namely,the pipeline coating material,locomotive position,and soil resistivity,indicating that soil resistivity and 3PE(3-layer polyethylene)anticorrosive coating are more sensitive to harmonic induction.Field test results show that the harmonic distortion can make the interference voltage more serious,and the protective measures are optimized.
文摘Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma (ICP) process was carried out. The microstructure of the polymer substrate surfaces, which were exposed to different kinds of plasma treatment, was identified by scanning electron microscopy(SEM) analysis, peel strength of the copper coating and water surface contact angle. The adhesion of the substrate was largely enhanced by plasma treatment and the copper deposited coating reached a value of 7.68 kgf/m in verifying the adhesion of the copper coating with polymer material. The quality of the line/space 50/50 μm produced in the laboratory was examined by the pressure cooker test and proved to meet the requirement.
基金the National Natural Science Foundation of China(No.62071329)the National Science Foundation of Tianjin(No.20JCYB JC00130)。
文摘As an important part of buoy-type ocean monitoring systems,the inductively coupled mooring chain solves the problem of data cotransmission through the multinode sensors that it carries,which is significant for the rapid acquisition of fish,hydrology,and other information.This paper is based on a seawater channel transmission model with a depth of 300 m and a bandwidth of 2 MHz.An orthogonal frequency division multiplexing(OFDM)technology is used to overcome the multipath effect of signal transmission on a seawater medium.The adaptive technology is integrated into the OFDM,and an improved joint subcarrier and bit power allocation algorithm is proposed.This algorithm solves the problem of dynamic subcarrier allocation during the cotransmission of underwater multinode user data in seawater channels.The results show that the algorithm complexity can be reduced by 0.18126×10^(-2)s during one complete OFDM system data transmission by the improved greedy algorithm,and a total of 216 bits are transmitted by the OFDM.The normalized channel capacity can be improved by 0.012 bit s^(-1)Hz^(-1).At the bit error ratio(BER)of 10^(-3),the BER performance can be improved by approximately 6 d B.When the numbers of users are 4 and 8,the improved algorithm increases the channel capacity,and the higher the number of users,the more evident the channel capacity improvement effect is.The results of this paper have an important reference value for enhancing the transmission performance of inductively coupled mooring chain underwater multinode data.
基金financially supported by National Natural Science Foundation of China(NSFC)(Nos.12105035 and 11935005)Guangdong Basic and Applied Basic Research Foundation(No.2021B1515120018)+1 种基金the Fundamental Research Funds for the Central Universities(No.DUT21TD104)the Advanced Space Propulsion Laboratory of BICE and Beijing Engineering Research Center of Efficient and Green Aerospace Propulsion Technology(No.Lab ASP-2020-01)。
文摘To maintain the high-density plasma source in inductively coupled plasma(ICP),very high radiofrequency power is often delivered to the antenna,which can heat the dielectric windows near the antenna to high temperature.This high temperature can modulate the plasma characteristics to a large degree.We thus study the effect of dielectric window temperature on plasma parameters in two different ICP structures based on COMSOL software.The distributions of various plasma species are examined at different dielectric window temperatures.The concentration of neutral gas is found to be largely modulated at high dielectric window temperature,which further affects the electron collision probability with neutrals and the electron temperature.However,the electron density profiles are barely affected by the dielectric window temperature,which is mainly concentrated at the center of the reactor due to the fixed power input and pressure.
基金financially supported by National Natural Science Foundation of China(Nos.11935005 and 11875101)the Fundamental Research Funds for the Central Universities(No.DUT21LAB110)。
文摘In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma.The results indicate that when the bias voltage amplitude increases or the bias frequency decreases,the ion energy peak separation width becomes wider.Besides,the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there,indicating the nonuniformity of the ion energy distribution function(IEDF)along the radial direction.As the pressure increases from 1 to 10 Pa,the discrepancy of the IEDFs at different radial positions becomes more obvious,i.e.the IEDF at the radial edge is characterized by multiple low energy peaks.When a dual frequency bias source is applied,the IEDF exhibits three or four peaks,and it could be modulated efficiently by the relative phase between the two bias frequencies.The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.
基金supported in part by the National Natural Science Foundation of China(No.62371233)in part by the Aviation Science Foundation Project(Nos.2022Z024052003,20230058052001)。
文摘Recently,there has been a huge increase in the usage of fuel resources for automobiles which is severely affecting the climate and causing global warming.The use of electric vehicle(EV)is an effective way to protect the environment and reduce travel costs.However,the EV charging system has a single charging source,and the charging rate is limited.In this paper,an EV wireless charging system based on dual source power supply has been developed.It realizes intelligent switching between 12 V photovoltaic output and 220 V AC dual source power,and has wireless transmission function.Based on the proposed power supply architecture,the micro wireless charging model is built,which enables the EV model to store power and realize static and mobile control through the wireless induction charging system.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.12005031 and 12275041)the Natural Science Fund from the Interdisciplinary Project of Dalian University(Grant No.DLUXK-2023-QN-001)。
文摘Due to a series of challenges such as low-orbit maintenance of satellites, the air-breathing electric propulsion has got widespread attention. Commonly, the radio frequency ion thruster is favored by low-orbit missions due to its high specific impulse and efficiency. In this paper, the power transfer efficiency of the radio frequency ion thruster with different gas compositions is studied experimentally, which is obtained by measuring the radio frequency power and current of the antenna coil with and without discharge operation. The results show that increasing the turns of antenna coils can effectively improve the radio frequency power transfer efficiency, which is due to the improvement of Q factor. In pure N_2 discharge,with the increase of radio frequency power, the radio frequency power transfer efficiency first rises rapidly and then exhibits a less steep increasing trend. The radio frequency power transfer efficiency increases with the increase of gas pressure at relatively high power, while declines rapidly at relatively low power. In N_(2)/O_(2) discharge, increasing the N_(2) content at high power can improve the radio frequency power transfer efficiency, but the opposite was observed at low power. In order to give a better understanding of these trends, an analytic solution in limit cases is utilized, and a Langmuir probe was employed to measure the electron density. It is found that the evolution of radio frequency power transfer efficiency can be well explained by the variation of plasma resistance, which is related to the electron density and the effective electron collision frequency.
文摘The radio frequency (rf) self-bias of the substrate in a rf inductively coupled plasma is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. Experimental studies were done on the relations of the tuned substrate self-bias with varying discharge and external circuit parameters. Under a certain discharge gas pressure, the curves of tuned substrate self-bias Vtsb versus tuning capacitance Ct demonstrate jumps and hysteresises when rf discharge power is higher than a threshold. The hysteresis loop in terms of △Ctcrit1(= Ccrit1-Ccrit2, here,Ccrit1, Ccrit2 are critical capacitance magnitudes under which the tuned substrate self-bias jumps) decreases with increasing rf discharge power, while the maximum |Vtsbimn| is achieved in the middle discharge-power region. Under a constant discharge power |Vtsb min|, Ccrit1 and Ccrit2 achieve their minimums in the middle gas-pressure region. When the tuning capacitance is pre-set at a lower value, Ttsb varies slightly with gas-flow rate; in the case of tuning capacitance sufficiently approaching Ctcriti, Vtsb undergoes the jump and hysteresis with the changing gas-flow rate. By inserting a resistor R into the external network, the characteristics of Vtsb-Ct curves are changed with the reduced quality factor Q depending on resistance values. Based on inductive- and capacitive-coupling characteristics of inductively coupled plasma, the dependence of a plasma sheath on plasma parameters, and the impedance properties of the substrate branch, the observed results can be qualitatively interpreted.
基金National Natural Science Foundation of China (No 10175014)
文摘The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing parameters such as the substrate axial position, different coupling coils and inserted resistance are experimentally studied. To get a better understanding of the experimental results, the axial distributions of the plasma density, electron temperature and plasma potential are measured with an rf compensated Langmuir probe; the coil rf peak-to-peak voltage is measured with a high voltage probe. As in the case of changing discharge power, it is found that continuity, instability and bi-stability of the tuned substrate bias can be obtained by means of changing the substrate axial position in the plasma source or the inserted resistance. Additionally, continuity can not transit directly into bi-stability, but evolves via instability. The inductance of the coupling coil has a substantial effect on the magnitude and the property of the tuned substrate bias.
文摘We study the quantization of mesoscopic inductance coupling circuit and discuss its time evolution. Bymeans of the thermal field dynamics theory we study the quantum fluctuation of the system at finite temperature.
基金Project(21075138) supported by the National Natural Science Foundation of ChinaProject(cstc2011jjA0780) supported by Natural Science Foundation of Chongqing City,ChinaProject(KJ121311) supported by Educational Commission of Chongqing City of China
文摘The contents ofMg, Al, Si, Ti, Cr, Mn, Fe, Co, Cu, Ga, As, Se, Cd, Sb, Pb and Bi in high purity nickel were determined by high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS). The sample was dissolved in HNO3 and HCI by microwave digestion. Most of the spectral interferences could be avoided by measuring in the high resolution mode. The matrix effects because of the presence of excess HC1 and nickel were evaluated. Correction for matrix effects was made using Sc, Rh and T1 as internal standards. The optimum conditions for the determination were tested and discussed. The detection limits range from 0.012 to 1.76 ~tg/g depending on the type of elements. The applicability of the proposed method is also validated by the analysis of high purity nickel reference material (NIST SRM 671). The relative standard deviation (RSD) is less than 3.3%. Results for determination of trace elements in high purity nickel were presented.
基金the Natural Science Foundation of Hunan Province, China (No. 05JJ40017).
文摘A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, Mo, Ag, Cd, Sn Sb, Ba, Pt, Au, and Pb) in high purity cobalt was described. Sample digestions were performed in closed microwave vessels using HNO3 and HCI. The matrix effects because of the presence of excess HCI and Co were evaluated. The usefulness of high mass resolution for overcoming some spectral interference was demonstrated. The optimum conditions for the determination were tested and discussed. The standard addition method was employed for quantitative analysis. The detection limits were 0.016-1.50 ].tg·g^-1, the recovery ratios were 92.2%-111.2%, and the RSD was less than 3.6%. The method was accurate, quick, and convenient. It was applied to the determination of trace impurities in high purity cobalt with satisfactory results.
文摘A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etching depths of more than 150μm. Plasma etch characteristics with ICP process pressure and the percentage of BCI3 were studied in greater detail at a constant ICP coil/bias power. The measured peak-to-peak voltage as a function of pressure was used to estimate the minimum energy of the ions bombarding the substrate. The process pressure was found to have a substantial influence on the energy of heavy ions. Various ion species in plasma showed minimum energy variation from 1.85 eV to 7.5 eV in the pressure range of 20 mTorr to 50 mTorr. The effect of pressure and the percentage of BCl3 on the etching rate and surface smoothness of the bottom surface of the etched hole were studied for a fixed total flow rate. The etching rate was found to decrease with the percentage of BCl3, whereas the addition of BCl3 resulted in anisotropic holes with a smooth veil free bottom surface at a pressure of 30 mTorr and 42% BC13. In addition, variation of the etching yield with pressure and etching depth were also investigated.
文摘ZrN fihns were deposited on Si(111) and M2 steel by inductively coupled plasma (ICP)-enhanced RF magnetron sputtering. The effect of ICP power on the microstructure, mechanical properties and corrosion resistance of ZrN films was investigated. When the ICP power is below 300 W, the ZrN films show a columnar structure. With the increase of ICP power, the texture coefficient (To) of the (111) plane, the nanohardness and elastic modulus of the films increase and reach the maximum at a power of 300 W. As the ICP Power exceeds 300 W, the films exhibit a ZrN and ZrNx mixed crystal structure without columnar grain while the nanohardness and elastic modulus of the films decrease. All the ZrN coated samples show a higher corrosion resistance than that of the bare M2 steel substrate in 3.5% NaCl electrolyte. The nanohardness and elastic modulus mostly depend on the crystalline structure and Tc of ZrN(111).