A linear fluorinated benzocyclobutene-type monomer(4F-bis-BCB) was facilely synthesized by a one-step copper-catalyzed etherification reaction and a simple precipitation post-purification method.Moreover,a series of B...A linear fluorinated benzocyclobutene-type monomer(4F-bis-BCB) was facilely synthesized by a one-step copper-catalyzed etherification reaction and a simple precipitation post-purification method.Moreover,a series of BCB-based polymeric low-dielectric(low-k)materials were obtained by the thermal-induced ring-opening copolymerization of 4F-bis-BCB with divinyl tetramethyl disiloxanebisbenzocyclobutene(DVS-BCB) monomer and further simple thermal curing at high temperature(200-300℃).The resultant fully cured materials demonstrated excellent low dielectric properties at high frequency of 10 GHz(dielectric constant(D_(k))<2.6,dielectric loss(D_(f))<1.57×10^(-2)),great hydrophobicity(water contact angle>116°),ultra-low water absorption(<0.19% after soaked in water at room temperature for 60 h) and excellent planarization ability(surface roughness<0.56 nm of 3 μm-thick film).Overall,this new fluorinated BCB-type monomer provides us an alternative for the facile preparation of low-k polymeric materials and exhibits great potential for future applications in high-frequency communication and three-dimensional high-density packaging technologies.展开更多
基金the National Natural Science Foundation of China(No.22075298)the Beijing Municipal Natural Science Foundation(No.2212053)。
文摘A linear fluorinated benzocyclobutene-type monomer(4F-bis-BCB) was facilely synthesized by a one-step copper-catalyzed etherification reaction and a simple precipitation post-purification method.Moreover,a series of BCB-based polymeric low-dielectric(low-k)materials were obtained by the thermal-induced ring-opening copolymerization of 4F-bis-BCB with divinyl tetramethyl disiloxanebisbenzocyclobutene(DVS-BCB) monomer and further simple thermal curing at high temperature(200-300℃).The resultant fully cured materials demonstrated excellent low dielectric properties at high frequency of 10 GHz(dielectric constant(D_(k))<2.6,dielectric loss(D_(f))<1.57×10^(-2)),great hydrophobicity(water contact angle>116°),ultra-low water absorption(<0.19% after soaked in water at room temperature for 60 h) and excellent planarization ability(surface roughness<0.56 nm of 3 μm-thick film).Overall,this new fluorinated BCB-type monomer provides us an alternative for the facile preparation of low-k polymeric materials and exhibits great potential for future applications in high-frequency communication and three-dimensional high-density packaging technologies.
