A novel LDNMOS embedded silicon controlled rectifier(SCR) was proposed to enhance ESD robustness of high-voltage(HV) LDNMOS based on a 0.5 μm 18 V CDMOS process. A two-dimensional(2D) device simulation and a transmis...A novel LDNMOS embedded silicon controlled rectifier(SCR) was proposed to enhance ESD robustness of high-voltage(HV) LDNMOS based on a 0.5 μm 18 V CDMOS process. A two-dimensional(2D) device simulation and a transmission line pulse(TLP) testing were used to analyze the working mechanism and ESD performance of the novel device. Compared with the traditional GG-LDNMOS, the secondary breakdown current(It2) of the proposed device can successfully increase from 1.146 A to 3.169 A with a total width of 50 μm, and ESD current discharge efficiency is improved from 0.459 m A/μm2 to 1.884 m A/μm2. Moreover, due to their different turn-on resistances(Ron), the device with smaller channel length(L) owns a stronger ESD robustness per unit area.展开更多
基于SOI工艺,运用SILVACO公司的工艺仿真(Athena)和器件仿真(Atlas)模拟软件,结合实际流片测试结果完成对600 V LDNMOS的设计和器件性能分析.整个器件采用环形版图结构,以优化器件的横向尺寸,漏端漂移区通过渐变掺杂技术(VLD)调节器件...基于SOI工艺,运用SILVACO公司的工艺仿真(Athena)和器件仿真(Atlas)模拟软件,结合实际流片测试结果完成对600 V LDNMOS的设计和器件性能分析.整个器件采用环形版图结构,以优化器件的横向尺寸,漏端漂移区通过渐变掺杂技术(VLD)调节器件表面横向电场分布,并在漂移区上方加入一定厚度的槽氧层,从而增大器件的源漏击穿电压.流片测试结果(Vth=1.7 V,Idsat=48 mA,BV=550 V)表明,器件的各项指标基本达到预期目标,实现了设计和分析的目的.展开更多
基金Project(NCET-11-0975)supported by Program for New Century Excellent Talents in University of Ministry of Education of ChinaProjects(61233010,61274043)supported by the National Natural Science Foundation of China
文摘A novel LDNMOS embedded silicon controlled rectifier(SCR) was proposed to enhance ESD robustness of high-voltage(HV) LDNMOS based on a 0.5 μm 18 V CDMOS process. A two-dimensional(2D) device simulation and a transmission line pulse(TLP) testing were used to analyze the working mechanism and ESD performance of the novel device. Compared with the traditional GG-LDNMOS, the secondary breakdown current(It2) of the proposed device can successfully increase from 1.146 A to 3.169 A with a total width of 50 μm, and ESD current discharge efficiency is improved from 0.459 m A/μm2 to 1.884 m A/μm2. Moreover, due to their different turn-on resistances(Ron), the device with smaller channel length(L) owns a stronger ESD robustness per unit area.