The effect of a quartz plate (window) on the silicon wafer temperature is studied in the conditions of the combined thermal transfer in a lamp-based chamber for the rapid thermal treatment (RTP) set up. The chamber fo...The effect of a quartz plate (window) on the silicon wafer temperature is studied in the conditions of the combined thermal transfer in a lamp-based chamber for the rapid thermal treatment (RTP) set up. The chamber for RTP is simulated by a radiative-closed thermal system including the influence of quartz window as a spectral filter of lamp emission and a source of emitted thermal radiation. Energy equations for thermal fluxes involved in the heat input and output from the working wafer and quartz window are solved in spectral approximation. The transfer characteristics that are defined by the temperature dependencies of the silicon wafer and the quartz window on the temperature of the heater are accounted. It is shown that temperature bistability in the silicon wafer initiates an induced bistability into the quartz window that does not reveal bistable behavior because of the linear temperature dependence of its total optical characteristics. A possibility for simulation of the quartz window by spectral restriction of the heater radiation is confirmed. The availability of the weak bistable effect in the mode of zero effective heat exchange coefficient of a non-radiative component of the thermal flux removed from the working wafer has been obtained.展开更多
A new mobile communications network architecture is proposed to solve four existing bottlenecks that restrict the rapid development of mobile communications,as well as to meet the development demands of future broadba...A new mobile communications network architecture is proposed to solve four existing bottlenecks that restrict the rapid development of mobile communications,as well as to meet the development demands of future broadband mobile communications. The architecture introduces the Information Lamp (IL),a novel device carrying out transceiver function,as the access point,besides providing light. It fulfills information interaction between the access points and radio access network through the power line (or fiber). The new system,supported by core technologies such as multi-antenna based distributed space-time signal processing and distributed radio resource management,integrates the wired and wireless networks to provide high-speed and high-quality mobile communication services.展开更多
文摘The effect of a quartz plate (window) on the silicon wafer temperature is studied in the conditions of the combined thermal transfer in a lamp-based chamber for the rapid thermal treatment (RTP) set up. The chamber for RTP is simulated by a radiative-closed thermal system including the influence of quartz window as a spectral filter of lamp emission and a source of emitted thermal radiation. Energy equations for thermal fluxes involved in the heat input and output from the working wafer and quartz window are solved in spectral approximation. The transfer characteristics that are defined by the temperature dependencies of the silicon wafer and the quartz window on the temperature of the heater are accounted. It is shown that temperature bistability in the silicon wafer initiates an induced bistability into the quartz window that does not reveal bistable behavior because of the linear temperature dependence of its total optical characteristics. A possibility for simulation of the quartz window by spectral restriction of the heater radiation is confirmed. The availability of the weak bistable effect in the mode of zero effective heat exchange coefficient of a non-radiative component of the thermal flux removed from the working wafer has been obtained.
基金the National Natural Science Foundation of China under Grants 60572090, 60472045 and 60496313, Ph.D Programs Foundation of Ministry of Education of China under Grant 20050614009.
文摘A new mobile communications network architecture is proposed to solve four existing bottlenecks that restrict the rapid development of mobile communications,as well as to meet the development demands of future broadband mobile communications. The architecture introduces the Information Lamp (IL),a novel device carrying out transceiver function,as the access point,besides providing light. It fulfills information interaction between the access points and radio access network through the power line (or fiber). The new system,supported by core technologies such as multi-antenna based distributed space-time signal processing and distributed radio resource management,integrates the wired and wireless networks to provide high-speed and high-quality mobile communication services.
