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Surface form inspection with contact coordinate measurement:a review 被引量:3
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作者 Yijun Shen Jieji Ren +3 位作者 Nuodi Huang Yang Zhang Xinquan Zhang Limin Zhu 《International Journal of Extreme Manufacturing》 SCIE EI CAS CSCD 2023年第2期119-147,共29页
Parts with high-quality freeform surfaces have been widely used in industries,which require strict quality control during the manufacturing process.Among all the industrial inspection methods,contact measurement with ... Parts with high-quality freeform surfaces have been widely used in industries,which require strict quality control during the manufacturing process.Among all the industrial inspection methods,contact measurement with coordinate measuring machines or computer numerical control machine tool is a fundamental technique due to its high accuracy,robustness,and universality.In this paper,the existing research in the contact measurement field is systematically reviewed.First,different configurations of the measuring machines are introduced in detail,which may have influence on the corresponding sampling and inspection path generation criteria.Then,the entire inspection pipeline is divided into two stages,namely the pre-inspection and post-inspection stages.The typical methods of each sub-stage are systematically overviewed and classified,including sampling,accessibility analysis,inspection path generation,probe tip radius compensation,surface reconstruction,and uncertainty analysis.Apart from those classical research,the applications of the emerging deep learning technique in some specific tasks of measurement are introduced.Furthermore,some potential and promising trends are provided for future investigation. 展开更多
关键词 freeform surface form inspection contact measurement coordinate measurement on-machine inspection
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Multiple Measurement Models of Articulated Arm Coordinate Measuring Machines 被引量:6
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作者 ZHENG Dateng XIAO Zhongyue XIA Xiang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2015年第5期994-998,共5页
The existing articulated arm coordinate measuring machines(AACMM) with one measurement model are easy to cause low measurement accuracy because the whole sampling space is much bigger than the result in the unstable... The existing articulated arm coordinate measuring machines(AACMM) with one measurement model are easy to cause low measurement accuracy because the whole sampling space is much bigger than the result in the unstable calibration parameters. To compensate for the deficiency of one measurement model, the multiple measurement models are built by the Denavit-Hartenberg's notation, the homemade standard rod components are used as a calibration tool and the Levenberg-Marquardt calibration algorithm is applied to solve the structural parameters in the measurement models. During the tests of multiple measurement models, the sample areas are selected in two situations. It is found that the measurement errors' sigma value(0.083 4 ram) dealt with one measurement model is nearly two times larger than that of the multiple measurement models(0.043 1 ram) in the same sample area. While in the different sample area, the measurement errors' sigma value(0.054 0 ram) dealt with the multiple measurement models is about 40% of one measurement model(0.137 3 mm). The preliminary results suggest that the measurement accuracy of AACMM dealt with multiple measurement models is superior to the accuracy of the existing machine with one measurement model. This paper proposes the multiple measurement models to improve the measurement accuracy of AACMM without increasing any hardware cost. 展开更多
关键词 articulated arm coordinate measuring machine multiple measurement models sample area measurement accuracy
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Videometric research on deformation measurement of large-scale wind turbine blades 被引量:5
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作者 Xiangyi Sun,Yun Yuan,~(a))Zhaokun Zhu,Xiaohu Zhang,and Qifeng Yu College of Aerospace and Materials Engineering,National University of Defense Technology,Changsha 410073, Hunan,China 《Theoretical & Applied Mechanics Letters》 CAS 2011年第1期22-24,共3页
Utilization of wind energy is a promising way to generate power,and wind turbine blades play a key role in collecting the wind energy effectively.This paper attempts to measure the deformation parameter of wind turbin... Utilization of wind energy is a promising way to generate power,and wind turbine blades play a key role in collecting the wind energy effectively.This paper attempts to measure the deformation parameter of wind turbine blades in mechanics experiments using a videometric method. In view that the blades experience small buckling deformation and large integral deformation simultaneously, we proposed a parallel network measurement(PNM) method including the key techniques such as camera network construction,camera calibration,distortion correction,the semi-automatic high-precision extraction of targets,coordinate systems unification,and bundle adjustment,etc. The relatively convenient construction method of the measuring system can provide an abundant measuring content,a wide measuring range and post processing.The experimental results show that the accuracy of the integral deformation measurement is higher than 0.5 mm and that of the buckling deformation measurement higher than 0.1mm. 展开更多
关键词 VIDEOMETRICS deformation measurement wind turbine blades large-scale integral deformation buckling deformation
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Robot Vision System for Coordinate Measurement of Feature Points on Large Scale Automobile Part 被引量:1
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作者 Pongsak Joompolpong Pradit Mittrapiyanuruk Pakorn Keawtrakulpong 《Journal of Electronic Science and Technology》 CAS CSCD 2016年第1期80-86,共7页
In this paper,we present a robot vision based system for coordinate measurement of feature points on large scale automobile parts.Our system consists of an industrial 6-DOF robot mounted with a CCD camera and a PC.The... In this paper,we present a robot vision based system for coordinate measurement of feature points on large scale automobile parts.Our system consists of an industrial 6-DOF robot mounted with a CCD camera and a PC.The system controls the robot into the area of feature points.The images of measuring feature points are acquired by the camera mounted on the robot.3D positions of the feature points are obtained from a model based pose estimation that applies to the images.The measured positions of all feature points are then transformed to the reference coordinate of feature points whose positions are obtained from the coordinate measuring machine(CMM).Finally,the point-to-point distances between the measured feature points and the reference feature points are calculated and reported.The results show that the root mean square error(RMSE) of measure values obtained by our system is less than 0.5 mm.Our system is adequate for automobile assembly and can perform faster than conventional methods. 展开更多
关键词 3D pose estimation coordinate measurement coordinate measuring robot robot vision vision 3D coordinate measurement
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GUIDELESS SPATIAL COORDINATE MEASUREMENT TECHNOLOGY BASED ON CODING POLE
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作者 ZHAO Min QIU Zongming QU Jiamin LIU Hongzhao 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2008年第1期87-90,共4页
A new method of guideless spatial coordinate measurement technology based on coding pole and vision measurement is proposed. Unequal spacing of bar code is adopted to pole, so that the code combination of pole image i... A new method of guideless spatial coordinate measurement technology based on coding pole and vision measurement is proposed. Unequal spacing of bar code is adopted to pole, so that the code combination of pole image in measuring field is unique. Holographic characteristics of numeric coding pole are adopted to obtain pole pose and pole probe position by any section of bar code on the pole. Spatial coordinates of measuring points can be obtained by coordinate transform. The contradiction between high resolution and large visual field of image sensor is resolved, thereby providing a new concept for surface shape measurement of large objects with high precision. The measurement principles of the system are expounded and mathematic model is established. The measurement equation is evaluated by simulation experiments and the measurement precision is analyzed. Theoretical analysis and simulation experiments prove that this system is characterized by simple structure and wide measurement range. Therefore it can be used in the 3-dimentional coordinate measurement of large objects. 展开更多
关键词 Coding pole Guideless coordinate measurement Vision measurement
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Helical angle measurement of worm by a coordinate measuring machine and its uncertainty evaluation
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作者 邱有永 KANG Shuang-yang +2 位作者 彭云峰 YANG Ping HUANG Zi-qiang 《Journal of Chongqing University》 CAS 2016年第4期139-148,共10页
The purpose of the study concerns the measurement of worm's helical angle by a coordinate measurement machine in the ambient industrial environment. The novel measurement method and sampling strategy were describe... The purpose of the study concerns the measurement of worm's helical angle by a coordinate measurement machine in the ambient industrial environment. The novel measurement method and sampling strategy were described firstly. This method used the coordinate measurement machine to measure both of the worm gear's left and right surfaces. The worm surface was reconstructed based on the measured data of all the sampling points. Then a middle cylinder was established to truncate the fitted worm surfaces, and the truncated spiral lines were straightened to calculate the helical angle. The measurement uncertainty of worm's helical angle was evaluated by taking the difference of calculated helical angles along the truncated spiral lines on both the left and right side surfaces of the worm. Twenty-four measurement experiments show that the maximum measurement error of the proposed method is 0.105, and the measurement error ratios are all less than 3.5%. The result means that the measurement method can realize the precision measurement of worm's helical angle and can be employed in the generally industrial application. 展开更多
关键词 WORM HELICAL ANGLE coordinate measuring MACHINES measurement UNCERTAINTY
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A Study of Precision Factors of Large-scale Object Surface Profile Laser Scanning Measurement
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作者 WANG Long-shan 1, LI De-long 2, NIE Meng-yu 3, ZHENG Z hong-wei 1 (1. The Science of Mechanical and Engineering College of Ji lin University, Changchun 130025, China 2. The Factory Automation Deparment of Shanghai Marine Equipment Research Institute, Shanghai 200031,China 3. Changchun Lat Exhaust Systems Company Ltd., Changchun 130022, China) 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2002年第S1期162-,共1页
In this paper, we presented a method of using the l as er scanning triangulation for the non-contact 3D surface profile measurement of large-scale object. The characteristic of large-scale object non-contact mea surem... In this paper, we presented a method of using the l as er scanning triangulation for the non-contact 3D surface profile measurement of large-scale object. The characteristic of large-scale object non-contact mea surement is analyzed and the measuring method is proposed. Main factors influenc ing measurement precision such as image distortion and accurate designation of s peckle center are analyzed and methods of solving these problems are proposed. W e designed a combined filter by which the pulse noise and the Gaussian noise of speckle image can be eliminated efficiently. Using the characteristic of intensi ty distribution of laser speckle image we proposed a new approximating method th at could locate the center of laser speckle image at sub-pixel. The auxiliary v ariables are set to linearize the relationship between the image displacement an d the distance, the accurate values of laser triangulation system parameters cou ld be calibrated accurately and the measuring precision is increased remarkabl y. Using the above techniques we designed a measuring system based on laser sc anning triangulation. The results of the experiment show that these methods can raise the measuring precision of large-scale 3D surface profile effectively. 展开更多
关键词 large-scale object laser scanning precision fa ctors 3D measurement
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THEORETICAL ANALYSIS OF COORDINATES MEASUREMENT BY FLEXIBLE 3D MEASURING SYSTEM
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作者 ZHANG Guoyu SUN Tianxiang WANG Lingyun XU Xiping 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2007年第2期101-103,共3页
The system mathematical model of flexible 3D measuring system is built by theoretical analysis, and the theoretical formula for measuring space point coordinate is also derived. Frog-jumping based coordinate transform... The system mathematical model of flexible 3D measuring system is built by theoretical analysis, and the theoretical formula for measuring space point coordinate is also derived. Frog-jumping based coordinate transform method is put forward in order to solve measuring problem for large size parts. The frog-jumping method is discussed, and the coordinate transform mathematical model is method of the space point coordinate compared to original value, and an advanced method is provided, Form the space point coordinate transform formula can derive the calculation measuring method for measuring large size parts. 展开更多
关键词 Flexible 3D measuring system coordinate conversion Frog-jumping sphere
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Measurement of Urban Economic Gravity of China’s Three Major Agglomerations and Its Implications for the Coordinated Development of the Beijing-Tianjin-Hebei Region
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作者 Yang Weizhong Mei Guohui +4 位作者 Yu Jian Tao Yana Li Kang Yang Xiaoxuan Editage 《Contemporary Social Sciences》 2019年第6期53-67,共15页
This paper adopts the perspective of urban economic linkage and the modified urban economic gravity model to conduct a comparative analysis of the economic gravity among cities in China’s three major urban agglomerat... This paper adopts the perspective of urban economic linkage and the modified urban economic gravity model to conduct a comparative analysis of the economic gravity among cities in China’s three major urban agglomerations,including the Beijing-Tianjin-Hebei region,the Yangtze River Delta,and the Pearl River Delta.The results show that,despite the ever-tightening economic linkages among cities in the urban agglomerations,the development of the Beijing-Tianjin-Hebei region falls behind that of the Yangtze River Delta and the Pearl River Delta in terms of coordination,closeness,and balance.The economic linkages among cities in the Beijing-Tianjin-Hebei region are not as cohesive as they could be and display a significant“siphon effect”through Beijing and Tianjin as well as a prominently unidirectional economic flow.This study suggests that efforts should be put into directing the orderly flow of resources from Beijing and Tianjin to cities in Hebei and promoting a balanced economic flow among cities,thus facilitating the coordination of regional development. 展开更多
关键词 URBAN AGGLOMERATION measure of URBAN economic GRAVITY coordinateD development of the BEIJING-TIANJIN-HEBEI region Xiongan New Area
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Application of NURBS for Obtaining Free Form Curves and Surfaces in Spur and Helical Gears by Using CMM (Coordinate Measurement Machine)
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作者 Luiz Henrique Melo Silva Nobrega Verilton Nunes da Silva +3 位作者 Jose Carlos de Lima Junior Joao Bosco de Aquino Silva Igor Lucena Peixoto Andrezza Rafael Franklin Alves Silva 《Journal of Mechanics Engineering and Automation》 2014年第5期432-440,共9页
关键词 NURBS技术 三坐标测量机 贝塞尔曲线 应用检验 斜齿轮 直齿轮 曲面 计算机辅助制造
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Stability Analysis of Contact Scanning Probe for Micro/Nano Coordinate Measuring Machine 被引量:2
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作者 李瑞君 范光照 +3 位作者 钱剑钊 黄强先 龚伟 苗晋伟 《纳米技术与精密工程》 EI CAS CSCD 2012年第2期125-131,共7页
关键词 微纳米三坐标测量机 扫描探头 稳定性分析 传感哭喊中
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CAD Model-Based Intelligent Inspection Planning for Coordinate Measuring Machines 被引量:8
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作者 DONG Yude LIU Daxin +2 位作者 ZHAO Han WANG Wanlong WU Juan 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2011年第4期567-583,共17页
As the market competition among enterprises grows intensively and the demand for high quality products increases rapidly, product quality inspection and control has become one of the most important issues of manufactu... As the market competition among enterprises grows intensively and the demand for high quality products increases rapidly, product quality inspection and control has become one of the most important issues of manufacturing, and improving the efficiency and accuracy of inspection is also one of problems which enterprises must solve. It is particularly important to establish rational inspection planning for parts before inspecting product quality correctly. The traditional inspection methods have been difficult to satisfy the requirements on the speed and accuracy of modern manufacturing, so CAD-based computer-aided inspection planning (CAIP) system with the coordinate measuring machines (CMM) came into being. In this paper, an algorithm for adaptive sampling and collision-free inspection path generation is proposed, aiming at the CAD model-based inspection planning for coordinate measuring machines (CMM). Firstly, using the method of step adaptive subdivision and iteration , the sampling points for the specified number with even distribution will be generated automatically. Then, it generates the initial path by planning the inspection sequence of measurement points according to the values of each point's weight sum of parameters, and detects collision by constructing section lines between the probe swept-volume surfaces and the part surfaces, with axis-aligned bounding box (AABB) filtering to improve the detection efficiency. For collided path segments, it implements collision avoidance firstly aiming at the possible outer-circle features, and then at other collisions, for which the obstacle-avoiding movements are planned with the heuristic rules, and combined with a designed expanded AABB to set the obstacle-avoiding points. The computer experimental results show that the presented algorithm can plan sampling points' locations with strong adaptability for different complexity of general surfaces, and generate efficient optimum path in a short time and avoid collision effectively. 展开更多
关键词 coordinate measuring machines (CMM) sampling strategy adaptive subdivision path planning collision detection collision avoidance bounding box
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2-D distributed pose estimation of multi-agent systems using bearing measurements
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作者 Xu Fang Jitao Li +1 位作者 Xiaolei Li Lihua Xie 《Journal of Automation and Intelligence》 2023年第2期70-78,共9页
This article studies distributed pose(orientation and position)estimation of leader–follower multi-agent systems over𝜅-layer graphs in 2-D plane.Only the leaders have access to their orientations and position... This article studies distributed pose(orientation and position)estimation of leader–follower multi-agent systems over𝜅-layer graphs in 2-D plane.Only the leaders have access to their orientations and positions,while the followers can measure the relative bearings or(angular and linear)velocities in their unknown local coordinate frames.For the orientation estimation,the local relative bearings are used to obtain the relative orientations among the agents,based on which a distributed orientation estimation algorithm is proposed for each follower to estimate its orientation.For the position estimation,the local relative bearings are used to obtain the position constraints among the agents,and a distributed position estimation algorithm is proposed for each follower to estimate its position by solving its position constraints.Both the orientation and position estimation errors converge to zero asymptotically.A simulation example is given to verify the theoretical results. 展开更多
关键词 Pose estimation Distributed algorithm Bearing measurements Multi-agent system Local coordinate frame 2-D plane
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ERROR COMPENSATION OF COORDINATE MEASURING MACHINES WITH LOW STIFFNESS 被引量:1
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作者 Zhao Yingjian Zhang Guoxiong (College of Precision Instruments and Optical Electronics, Tianjin University) 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2000年第2期159-164,共6页
A technique for compensating the errors of coordinate measuring machines (CMMs) with low stiffness is proposed. Some additional items related with the force deformation are introduced to the error compensation aquatio... A technique for compensating the errors of coordinate measuring machines (CMMs) with low stiffness is proposed. Some additional items related with the force deformation are introduced to the error compensation aquations. The research was carried on a moving colunm horizontal arm CMM. Experimental results show that both the effects of systematic components of error motions and force deformations are greatly reduced, which shows the effectiveness of proposed technique. 展开更多
关键词 Error compensation coordinate measuring machine(CMM) Low stiffness
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Single Camera 3-D Coordinate Measuring System Based on Optical Probe Imaging 被引量:4
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作者 MAShu-ying YUZhi-jing 《Semiconductor Photonics and Technology》 CAS 2001年第4期235-240,共6页
A new vision coordinate measuring system--single camera 3 D coordinate measuring system based on optical probe imaging is presented. A new idea in vision coordinate measurement is proposed. A linear model is deduced w... A new vision coordinate measuring system--single camera 3 D coordinate measuring system based on optical probe imaging is presented. A new idea in vision coordinate measurement is proposed. A linear model is deduced which can distinguish six freedom degrees of optical probe to realize coordinate measurement of the object surface. The effects of some factors on the resolution of the system are analyzed. The simulating experiments have shown that the system model is available. 展开更多
关键词 三维测量 光探针 线性模型 图像处理 VCMS
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COORDINATE MEASURING MACHINE PROBING ACCESSIBILITY
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作者 Wu Yongqing Xie Zexiao Liu Shugui Zhang Guoxiong State Key Laboritory of Precision Measuring Technology and Instrument, Tianjin University 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2001年第1期45-50,共6页
The accessibility of coordinate measuring machines (CMMs) in dimensional inspection is studied. The problem of computing the global accessibility cone is solved using a method of angle representation. Otherwise, the l... The accessibility of coordinate measuring machines (CMMs) in dimensional inspection is studied. The problem of computing the global accessibility cone is solved using a method of angle representation. Otherwise, the length and volume of probe are considered sufficiently so that all the feasible probe orientations could be determined for the inspection of a workpiece when a touch trigger probe is used and the shortcoming of abstracting a probe as an infinite half line could be overcome completely. In the end, an example is given to explain the method. 展开更多
关键词 ACCESSIBILITY Probe orientation COLLISION coordinate measuring machines(CMMs) SLOT
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Determination of the workspace of a new coordinate-measuring machine using parallel-link mechanism
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作者 刘得军 黄庆成 +2 位作者 叶东 车仁生 周琳 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2001年第2期147-154,共8页
Presents the detailed algorithm established for determination of workspace for a 3-DOF coordinate measuring machine using parallel link mechanism by constructing the inverse kinematic model first and then reviewing th... Presents the detailed algorithm established for determination of workspace for a 3-DOF coordinate measuring machine using parallel link mechanism by constructing the inverse kinematic model first and then reviewing the physical and kinematical constraints from the structural characteristics of the parallel link mechanism, and discusses the actual geometries of workspace and the factors having effect on workspace through computer simulation thereby providing necessary theoretical basis for the research and development of coordinate measuring machines using parallel link mechanism. 展开更多
关键词 coordinate measuring machine WORKSPACE parallel link mechanism three degrees of freedom spatial coordinate
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Flexible Scanning Method by Integrating Laser Line Sensors with Articulated Arm Coordinate Measuring Machines
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作者 Zexiao Xie Ping Yu +2 位作者 Hanlei Gong Shukai Chi Xiang Gao 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2022年第5期131-140,共10页
Measuring and reconstructing the shape of workpieces have been considered as a fundamental step in both reverse engineering and product quality control.Owing to increasing structural complexity of recent products,meas... Measuring and reconstructing the shape of workpieces have been considered as a fundamental step in both reverse engineering and product quality control.Owing to increasing structural complexity of recent products,measurements from multiple directions are typically required in current scanning techniques.Specifically,the plane structured light can be applied to measure one area of a part at a time,with an additional algorithm required to merge the collected data of each area.Alternatively,the line structured light sensor integrated on CNC machines or CMMs could also realize multi-view measurement.However,the system needs to be repeatedly calibrated at each new direction.This paper presents a flexible scanning method by integrating laser line sensors with articulated arm coordinate measuring machines(AACMM).Since the output of the laser line sensor is 2D raw data in the laser plane,our system model introduces an explicit transformation from the 2D sensor coordinate frame to the 3D base coordinate frame of the AACMM(i.e.,the translation and rotation the of the 2D sensor coordinate in the sixth coordinate system of AACMM).To solve the model,the“conjugate pairs”are proposed and identified by measuring a fixed point(e.g.,a sphere center).Moreover,a search algorithm is adopted to find the optimal solution,which noticeably boosts the model accuracy.The experimental results show that the error of the system is about 0.2 mm,which is caused by the error of the AACMM,the sensor error and the calibration error.By measuring a complicated part,the proposed system is proved to be flexible and facilitate,with the ability to measure a part expediently from any necessary direction.Furthermore,the proposed calibration method can also be used for robot hand-eye relationship calibration. 展开更多
关键词 Reverse engineering Laser line sensors Articulated arm coordinate measuring machines Conjugate pairs
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Development of Flexible Spherical Actuator with 3D Coordinate Measuring Device
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作者 Yasuko Matsui Tetsuya Akagi +2 位作者 Shujiro Dohta Wataru Kobayashi Hiroaki Tamaki 《Journal of Flow Control, Measurement & Visualization》 2018年第2期95-106,共12页
Rehabilitation devices help to recover the physical abilities of patients. This study aims to develop a portable rehabilitation device that is safe to use when?patients are holding it by hands. In a previous study, to... Rehabilitation devices help to recover the physical abilities of patients. This study aims to develop a portable rehabilitation device that is safe to use when?patients are holding it by hands. In a previous study, to realize a home rehabilitation device, a flexible spherical actuator that can provide motion to patients was developed. In this study, to measure the relative position between both handling stages, a 3D coordinate measuring device using three wire-type linear potentiometers and an embedded controller was proposed and tested. In this paper, the spherical actuator with built-in 3D coordinate measuring device is described. The measuring method and experimental results obtained are also presented. The tracking position control of the actuator using the measuring device was carried out. As a result, the position of the handling stages can be successfully controlled using the feedback signal from the tested?measuring device. 展开更多
关键词 FLEXIBLE SPHERICAL ACTUATOR FLEXIBLE PNEUMATIC Cylinder 3D coordinate measuring Device Wire-Type Linear POTENTIOMETER
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ASSESSING THE DYNAMIC ERRORS OF COORDINATE MEASURING MACHINES 被引量:2
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作者 Dong, Chensong Zhang, Guoxiong Mu, Yuhai 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 1998年第4期58-64,共7页
The main factors affecting the dynamic errors of coordinate measuring machines are analyzed. It is pointed out that there are two main contributors to the dynamic errors: One is the rotation of the elements around the... The main factors affecting the dynamic errors of coordinate measuring machines are analyzed. It is pointed out that there are two main contributors to the dynamic errors: One is the rotation of the elements around the joints connected with air bearings and the other is the bending of the elements caused by the dynamic inertial forces. A method for obtaining the displacement errors at the probe position from dynamic rotational errors is presented. The dynamic rotational errors are measured with inductive position sensors and a laser interferometer. The theoretical and experimental results both show that during the process of fast probing, due to the dynamic inertial forces, there are not only large rotation of the elements around the joints connected with air bearings but also large bending of the weak elements themselves. 展开更多
关键词 coordinate measuring machine Dynamic error Laser interferometer Inductive position sensor
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