A laser-produced plasma source based on thin-film Gd targets for next-generation extreme ultraviolet lithography

We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet(EUV)light source of 13.5 nm wavelength based on tin.The influences of the laser intensity on the emission spectra centered around 6.7 nm from thin-film Gd targets were first investigated.It is found that the conversion efficiency of the produced plasma is saturated when the laser intensity goes beyond 2×10^(11)W cm^(-2).We have systematically compared the emission spectra of the laser-produced plasma with the changes in the thicknesses of the thin-film Gd targets.It is proved that a minimum-mass target with a thickness of 400 nm is sufficient to provide the maximum conversion efficiency,which also implies that this thickness is the ablation depth for the targets.These findings should be helpful in the exploration of next-generation EUV sources,as the thin-film Gd targets will reduce the debris during the plasma generation process compared with the bulk targets.

Study of the 6.x nm short wavelength radiation spectra of laser-produced erbium plasmas for BEUV lithography

Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices.In this work,the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd:YAG laser-produced Er plasmas.The spectral contributions from the 4p–4d and 4d–4f transitions of singly,doubly and triply excited states of Er XXIV–Er XXXII in the BEUV band were calculated using Cowan and the Flexible Atomic Code.It was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x nm.Under the assumption of collisional radiative equilibrium of the laser-produced Er plasmas,the relative ion abundance in the experiment was inferred.Using the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays(UTAs),the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental spectrum.The spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.

Improving plasma sterilization by constructing a plasma photocatalytic system with a needle array corona discharge and Au plasmonic nanocatalyst

Efficient sterilization by a plasma photocatalytic system(PPS)requires strong synergy between plasma and photocatalyst to inactivate microorganisms while suppressing the formation of secondary pollutants.Here,we report that a PPS constructed from a needle array corona discharge and Au/TiO2plasmonic nanocatalyst could remarkably improve the sterilization of Escherichia coli(E.coli)and alleviate formation of the discharge pollutant O3.At 6 kV,the combination of corona discharge and Au/TiO2achieves sterilization efficiency of 100%within an exposure time of 5 min.At 5 kV and an exposure time of 8 min,the presence of Au/TiO2improves sterilization efficiency of the corona discharge from 73%to 91%and reduces the O3concentration from 0.38 to 0.04 ppm,whereas the presence of TiO2reduces the sterilization efficiency and O3concentration to 66%and 0.17 ppm,respectively.The Au/TiO2in the PPS enables a uniform corona discharge,enhances the interaction between plasma,E.coli and nanocatalysts,and suppresses the formation of O3.Further,the Au/TiO2can be excited by ultraviolet-visible light emitted from the plasma to generate electron-hole pairs,and thus contributes to the formation of reactive radicals and the oxidative inactivation of E.coli.The PPS constructed from a needle array corona discharge and Au-based plasmonic nanocatalyst provides a promising approach for developing high-efficiency sterilization techniques.

Analysis of extreme ultraviolet spectral profiles of laser-produced Cr plasmas

Radiation from laser-produced plasmas was examined as a potential wavelength calibration source for spectrographs in the extreme ultraviolet(EUV) region.Specifically, the EUV emission of chromium(Cr) plasmas was acquired via spatiotemporally resolved emission spectroscopy.With the aid of Cowan and flexible atomic code(FAC) structure calculations,and a comparative analysis with the simulated spectra, emission peaks in the 6.5–15.0 nm range were identified as 3 p–4 d, 5 d and 3 p–4 s transition lines from Cr5+–Cr10+ions.A normalized Boltzmann distribution among the excited states and a steady-state collisional-radiative model were assumed for the spectral simulations, and used to estimate the electron temperature and density in the plasma.The results indicate that several relatively isolated emission lines of highly charged ions would be useful for EUV wavelength calibration.

Spectral and ion emission features of laser-produced Sn and SnO2 plasmas

We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO2 are irradiated with 1.06 μm, 8 ns Nd：YAG laser pulses. Fast photography employing an intensified charge coupled device （ICCD）, optical emission spectroscopy （OES）, and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet （EUV） conversion efficiency （CE） than the SnO2 plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO2. OES studies show that the Sn plasma parameters （electron temperature and density） are lower compared to those of the SnO2 plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.

A Fokker-Planck Code for Laser-Produced Plasmas

A Fokker-Planck code is developed based upon Epperlein＇s scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations.

Measurement and analysis of the extreme ultraviolet emission band of laser-produced antimony plasmas

The temporal evolution of extreme ultraviolet(EUV)emission spectra of laser-produced antimony(Sb)plasmas has been measured in the 7-16 nm wavelength region using spatio?temporally resolved lase-produced plasma spectroscopy technique.The spectral profiles involve an intense quasi-continuous band with superimposed intense characteristic radiation and are different with the increase of delay time.The spectral structures were also analyzed according to Hartree-Fock calculations with configuration interaction effects and contributed from 4d^4/;4d-4p,and 4d-5f unresolved transition arrays of Sb7*-Sb131.A steady-state collisionalradiative model was used to estimate the electron temperature and density range of Sb plasmas.This work would enrich the spectral data of highly-charged ions and provided a possible selection for developing EUV light sources.

Influence of heating effect in Thomson scattering diagnosis of laser-produced plasmas in air

A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS)method.The evolutions of the electron temperature and electron density were obtained as a function of the time delay which ranged from 300-3200 ns.The heating effect produced by the 532 nm probe beam with different energies on the air plasma at different interaction times was further studied using a time-resolved optical emission spectroscopy technique.The influence of the probe beam on the electron density was found to be negligible,whereas its influence on electron temperature is evident.In addition,the heating effect of the probe beam on the plasma strongly depends on the energy of the probe beam,and gradually weakens with increasing time delay.Our results are helpful for further understanding the TS method and its application in plasma diagnostics.

Analysis of extreme ultraviolet spectra of laser-produced Cd plasmas

In order to provide detailed information about Cd structure and gain more insight regarding ionization degrees and types of transition,as well as the understanding of the temporal evolution behavior of laser produced Cd plasmas,extreme ultraviolet spectra of laser-produced cadmium(Cd)plasmas have been measured in the 8.4-12 nm region using spatiotemporally resolved laser-produced plasma spectroscopy technique.Spectral features were analyzed by the Hartree-Fock(HF)method with relativistic correlations(HFR)using the Cowan code.The results showed that the 4p-5s resonance transition arrays from Cd^9+to Cd^13+merged to form intense lines in this spectral region.A number of new spectral features from Cd^9+and Cd^10+ions are reported in this study.Based on the assumption of a normalized Boltzmann distribution among the excited states associated with a steady-state collisional-radiative model,the plasma parameters were obtained by comparing the experimental and simulated spectra.As a result,we succeeded in reproducing the synthetic spectra for different time delays,which yielded good agreement with the experiments.The temporal evolution behaviors of electron temperature and electron density of plasma were also analyzed.

Time-resolved spectroscopy for 5s^('4)D_(7/2) state transitions undergoing electron–ion recombination in femtosecond laser-produced copper plasma

In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s4D7/2 via electron-ion recombination transfers to 4p4F9/20 （465.11 nm, Λ1 line） and 4p4D7/20 （529.25 nm, Λ2 line） states are investigated by using the time-resolved spectroscopy. The occupation number and relevant lifetime of the excited state 5s4D7/2, the temporal evolutions of spectral intensities for Λ1 line and Λ2 line emissions are demonstrated to be in direct proportion to the employed laser intensity, which reveals the transient features of transition dynamics clearly differing from that resulted in the traditional collision excitation. Furthermore, some unique characteristics for Λ1 and Λ2 transitions stemming from electron-ion recombination are examined in detail.

Effect of dielectronic recombination on charge-state distribution in laser-produced plasma based on steady-state collisional-radiative models

Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet region.Ab initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.

Spectral Efficiency of Extreme Ultraviolet Emission from CO_2 Laser-Produced Tin Plasma Using a Grazing Incidence Flat-Field Spectrograph

A grazing incidence flat-field spectrograph using a concave grating was constructed to measure extreme ultraviolet （EUV） emission from a CO 2 laser-produced tin plasma throughout the wavelength region of 5 nm to 20 nm for lithography. Spectral efficiency of the EUV emission around 13.5 nm from plate, cavity, and thin foil tin targets was studied. By translating the focusing lens along the laser axis, the dependence of EUV spectra on the amount of defocus was investigated. The results showed that the spectral efficiency was higher for the cavity target in comparison to the plate or foil target, while it decreased with an increase in the defocus distance. The source＇s spectra and the EUV emission intensity normalized to the incident pulse energy at 45 from the target normal were characterized for the in-band （2% of bandwidth） region as a function of laser energy spanning from 46 mJ to 600 mJ for the pure tin plate target. The energy normalized EUV emission was found to increase with the increasing incident pulse energy. It reached the optimum value for the laser energy of around 343 mJ, after which it dropped rapidly.

Atmospheric-Pressure DBD Cold Plasma for Preparation of High Active Au/P25 Catalysts for Low-Temperature CO Oxidation

Cold plasma generated by dielectric barrier discharge （DBD） at atmospheric pressure was adopted for preparation of commercial TiO2 Degussa P25 supported Au catalysts （Au/P25- P） with the assistance of the deposition-precipitation procedure. The influences of the plasma reduction time and calcination on the performance of the Au/P25-P catalysts were investigated. CO oxidation was performed to investigate the catalytic activity of the Au/P25 catalysts. The results show that DBD cold plasma for the fabrication of Au/P25-P catalysts is a fast process, and Au/P25-P （4 min） exhibited the highest CO oxidation activity due to the complete reduction of Au compounds and less consumption of oxygen vacancies. In order to form more oxygen vacancies active species, Au/P25-P was calcined to obtain Au/P25-PC catalysts. Interestingly, Au/P25- PC exhibited the highest activity for CO oxidation among the Au/P25 samples. The results of transmission electron microscopy （TEM） indicated that the smaller size and high distribution of Au nanoparticles are the mean reasons for a high performance of Au/P25-PC. Atmospheric- pressure DBD cold plasma was proved to be of great efficiency in preparing high performance supported Au catalysts.

Energy loss of an energetic Ga ion in hot Au plasmas

Self-consistent calculations of energy loss for a Ga ion moving in hot Au plasmas are made under the assumption of wide ranges of the projectile energy and the plasma temperature with all important mechanisms considered in detail.The relevant results are found to be quite different from those of an a particle or a proton.One important reason for this is the rapid increasing of the charge state of a Ga ion at plasma temperature.This reason also leads to the inelastic stopping which does not always decrease with the increase of plasma temperature,unlike the case of an a particle.The nuclear stopping becomes very important at high enough plasma temperature due to the heavy reduced mass of a Ga and an Au ion and the above-mentioned reason.The well-known binary collision model[Phys.Rev.126(1962)1]and its revised one[Phys.Rev.A 29(1984)2145]are not working or unsatisfactory in this case.

Ionic Charge State Distribution of Au Plasma for 7-Ion System

The present work extends the previous work^[2] on 5-ion system to consider 7-ion system （i.e., Au^47＋ -Au^53＋）. It is found that more highly charged ions, e.g., Au^53＋, Au^54＋ etc., could be able to be neglected, however, less highly charged ions, e.g., Au^47＋, Au^46＋ etc., are rather important. Therefore, a new idea to consider 8-ion system, i.e., Au^46＋ - Au^53＋, is under way. As a supplement, we discuss the simultaneous reaction, which would be important in this sort of works.

Improved performance of Au nanocrystal nonvolatile memory by N2-plasma treatment on HfO2blocking layer

The N2-plasma treatment on a HfO2 blocking layer of Au nanocrystal nonvolatile memory without any post annealing is investigated. The electrical characteristics of the MOS capacitor with structure of Al–Ta N/HfO2/Si O2/p-Si are also characterized. After N2-plasma treatment, the nitrogen atoms are incorporated into HfO2 film and may passivate the oxygen vacancy states. The surface roughness of HfO2 film can also be reduced. Those improvements of HfO2 film lead to a smaller hysteresis and lower leakage current density of the MOS capacitor. The N2-plasma is introduced into Au nanocrystal（NC） nonvolatile memory to treat the HfO2 blocking layer. For the N2-plasma treated device, it shows a better retention characteristic and is twice as large in the memory window than that for the no N2-plasma treated device. It can be concluded that the N2-plasma treatment method can be applied to future nonvolatile memory applications.

Extreme ultraviolet spectral characteristic analysis of highly charged ions in laserproduced Cu plasmas

This paper reports the results of spectral measurements and a theoretical analysis of the temporal and spatial evolution of laser-produced Cu plasma in vacuum in the range of 8–14 nm.The time dependence of the extreme ultraviolet band spectrum at different positions near the target surface was obtained and found to be dominated by three broad-band features.The 3p and 3d excitations of Cu5+–Cu9+ions were calculated using the Hartree–Fock theory with configuration interactions.The characteristics of the spectral line distribution for the 3p–nd and 3d–nf transition arrays were analyzed.Based on the steady-state collisional radiation model and the normalized Boltzmann distribution,the complex spectral structure in the band of 13–14 nm is accurately explained through consistency comparisons and benchmarking between the experimental and theoretical simulation spectra,demonstrating that the structure mainly stems from the overlapping contribution of the 3d–4f and 3p–3d transition arrays for the Cu5+–Cu9+ions.These results may help in studying the radiation characteristics of isoelectronic series highly-charged ions involving the 3d excitation process.

纳米碳纤维分离富集电感耦合等离子体质谱法测定地质样品中痕量Au

提出了纳米碳纤维微柱分离富集电感耦合等离子体质谱法(ICP-MS)测定地质样品中痕量Au的方法。考察了在动态条件下纳米碳纤维对Au3+的吸附行为,并确定了最佳吸附及洗脱条件。实验结果表明:在pH2时,待测物可被纳米碳纤维定量富集,用pH1的3%硫脲溶液可将吸附在纳米碳纤维上的Au3+定量洗脱。方法对Au的检出限为0.16ng.mL-1,精密度(RSD)为8.5%(n=6),用于测定实际样品中痕量Au的含量,所得结果与标准值吻合较好。

用STA模型计算Au等离子体的不透明度

在局部热动平衡条件下 ,用STA(超组态跃迁阵 )模型探索研究和计算Au等离子体在一定温度和密度下的跃迁阵的参数 ,并用来计算冲击压缩下等离子体的辐射不透明度。

金等离子体中7离子系统(Au^(47+)～Au^(53+))的电荷态分布及其解析函数关系

根据扩展的相对论多组态Dirac-Fock理论计算得到的Au47+~Au53+离子的平均离子寿命、能级能量和能级简并度,计算了各离子的电离速率常数、复合速率常数和配分函数,并由此得到了离子间的电离-复合平衡常数.基于这些数据,利用电离复合动力学方法研究了金等离子体内7离子系统在一定电子温度和电子密度下的电荷态分布和平均离化度.并给出了Au47+~Au53+的离子丰度与电子温度和电子密度的函数关系.