A laser-produced plasma source based on thin-film Gd targets for next-generation extreme ultraviolet lithography

We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet(EUV)light source of 13.5 nm wavelength based on tin.The influences of the laser intensity on the emission spectra centered around 6.7 nm from thin-film Gd targets were first investigated.It is found that the conversion efficiency of the produced plasma is saturated when the laser intensity goes beyond 2×10^(11)W cm^(-2).We have systematically compared the emission spectra of the laser-produced plasma with the changes in the thicknesses of the thin-film Gd targets.It is proved that a minimum-mass target with a thickness of 400 nm is sufficient to provide the maximum conversion efficiency,which also implies that this thickness is the ablation depth for the targets.These findings should be helpful in the exploration of next-generation EUV sources,as the thin-film Gd targets will reduce the debris during the plasma generation process compared with the bulk targets.

A Fokker-Planck Code for Laser-Produced Plasmas

A Fokker-Planck code is developed based upon Epperlein＇s scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations.

Effect of dielectronic recombination on charge-state distribution in laser-produced plasma based on steady-state collisional-radiative models

Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet region.Ab initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.

Theoretical analysis and numerical simulation of the impulse delivering from laser-produced plasma to solid target

A plasma is produced in air by using a high-intensity Q-switch Nd：YAG pulsed laser to irradiate a solid target, and the impulses delivering from the plasma to the target are measured at different laser power densities. Analysing the formation process of laser plasma and the laser supported detonation wave （LSDW） and using fluid mechanics theory and Pirri＇s methods, an approximately theoretical solution of the impulse delivering from the plasma to the target under our experimental condition is found. Furthermore, according to the formation time of plasma and the variation of pressure in plasma in a non-equilibrium state, a physical model of the interaction between the pulse laser and the solid target is developed. The plasma evolutions with time during and after the laser pulse irradiating the target are simulated numerically by using a three-dimensional difference scheme. And the numerical solutions of the impulse delivering from the plasma to the target are obtained. A comparison among the theoretical, numerical and experimental results and their analyses are performed. The experimental results are explained reasonably. The consistency between numerical results and experimental results implies that the numerical calculation model used in this paper can well describe the mechanical action of the laser on the target.

Numerical investigation of non-local electron transport in laser-produced plasmas

Non-local electron transport in laser-produced plasmas under inertial confinement fusion （ICF） conditions is studied based on Fokker-Planck （FP） and hydrodynamic simulations. A comparison between the classical Spitzer-Harm （SH） transport model and non-local transport models has been made. The result shows that among those non-local models the Epperlein and Short （ES） model of heat flux is in reasonable agreement with the FP simulation in overdense region. However, the non-local models are invalid in the hot underdense plasmas. Hydrodynamic simulation is performed with the flux limiting model and the non-local model, separately. The simulation results show that in the underdense region of the laser-produced plasmas the temperature given by the flux limiting model is significantly higher than that given with the non-local model.

Laser-produced plasma helium-like titanium Kα x-ray source and its application to Rayleigh-Taylor instability study

Several experiments are performed on the ShenGuang-Ⅱ laser facility to investigate an x-ray source and test radiography concepts. X-ray lines emitted from laser-produced plasmas are the most practical means of generating these high intensity sources. By using a time-integrated space-resolved keV spectroscope and pinhole camera, potential helium-like titanium Kα x-ray backlighting （radiography） line source is studied as a function of laser wavelength, ratio of pre-pulse intensity to main pulse intensity, and laser intensity （from 7.25 to ～ 11.3 × 10^15 W/cm2）. One-dimensional radiography using a grid consisting of 5 #m Au wires on 16 μm period and the pinhole-assisted point projection is tested. The measurements show that the size of the helium-like titanium Ka source from a simple foil target is larger than 100 ~m, and relative x-ray line emission conversion efficiency ~x from the incident laser light energy to helium- like titanium K-shell spectrum increases significantly with pre-pulse intensity increasing, increases rapidly with laser wavelength decreasing, and increases moderately with main laser intensity increasing. It is also found that a gold gird foils can reach an imaging resolution better than 5-μm featured with high contrast. It is further demonstrated that the pinhole-assisted point projection at such a level will be a novel two-dimensional imaging diagnostic technique for inertial confinement fusion experiments.

Influence of heating effect in Thomson scattering diagnosis of laser-produced plasmas in air

A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS)method.The evolutions of the electron temperature and electron density were obtained as a function of the time delay which ranged from 300-3200 ns.The heating effect produced by the 532 nm probe beam with different energies on the air plasma at different interaction times was further studied using a time-resolved optical emission spectroscopy technique.The influence of the probe beam on the electron density was found to be negligible,whereas its influence on electron temperature is evident.In addition,the heating effect of the probe beam on the plasma strongly depends on the energy of the probe beam,and gradually weakens with increasing time delay.Our results are helpful for further understanding the TS method and its application in plasma diagnostics.

Online plasma diagnostics of a laser-produced plasma

In this study,we report a laser interferometry experiment for the online-diagnosing of a laserproduced plasma.The laser pulses generating the plasma are ultra-fast（30 femtoseconds）,ultraintense（tens of Terawatt） and are focused on a helium gas jet to generate relativistic electron beams via the laser wakefield acceleration（LWFA） mechanism.A probe laser beam（λ=800 nm） which is split-off the main beam is used to cross the plasma at the time of arrival of the main pulse,allowing online plasma density diagnostics.The interferometer setup is based on the No Marski method in which we used a Fresnel bi-prism where the probe beam interferes with itself after crossing the plasma medium.A high-dynamic range CCD camera is used to record the interference patterns.Based upon the Abel inversion technique,we obtained a 3D density distribution of the plasma density.

High performance streaked X-ray spectrometer for research of laser-produced plasmas

In order to mitigate the effect of the strong electromagnetic pulse, which produces laser-plasma interactions, we designed a new streaked X-ray spectrometer （SXS） enclosed within a well-sealed, electromag- netic interference-free cavity. The SXS can cover a wide selection of spectral windows using interchangeable Bragg crystals and by appropriate adjustment of the Bragg angle. The SXS has been used to observe time-re- solved X-ray spectrum in the 2.5 keV to 3.5 keV photon-energy range, resulting in a demonstrated spectral res- olution of about 13 at 2960 eV with a time resolution of 10 ps. The observed time and spectral resolutions dem- onstrate the applicability of the SXS for studies of laser-produced plasmas.

Study of the 6.x nm short wavelength radiation spectra of laser-produced erbium plasmas for BEUV lithography

Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices.In this work,the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd:YAG laser-produced Er plasmas.The spectral contributions from the 4p–4d and 4d–4f transitions of singly,doubly and triply excited states of Er XXIV–Er XXXII in the BEUV band were calculated using Cowan and the Flexible Atomic Code.It was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x nm.Under the assumption of collisional radiative equilibrium of the laser-produced Er plasmas,the relative ion abundance in the experiment was inferred.Using the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays(UTAs),the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental spectrum.The spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.

Time-resolved K-shell x-ray spectra of nanosecond laser-produced titanium tracer in gold plasmas

A study of a nanosecond laser irradiation on the titanium-layer-buried gold planar target is presented. The timeresolved x-ray emission spectra of titanium tracer are measured by a streaked crystal spectrometer. By comparing the simulated spectra obtained by using the FLYCHK code with the measured titanium spectra, the temporal plasma states, i.e.,the electron temperatures and densities, are deduced. To evaluate the feasibility of using the method for the characterization of Au plasma states, the deduced plasma states from the measured titanium spectra are compared with the Multi-1D hydrodynamic simulations of laser-produced Au plasmas. By comparing the measured and simulated results, an overall agreement for the electron temperatures is found, whereas there are deviations in the electron densities. The experiment–theory discrepancy may suggest that the plasma state could not be well reproduced by the Multi-1D hydrodynamic simulation, in which the radial gradient is not taken into account. Further investigations on the spectral characterization and hydrodynamic simulations of the plasma states are needed. All the measured and FLYCHK simulated spectra are given in this paper as datasets. The datasets are openly available at http://www.doi.org/10.57760/sciencedb.j00113.00032.

Spectral and ion emission features of laser-produced Sn and SnO2 plasmas

We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO2 are irradiated with 1.06 μm, 8 ns Nd：YAG laser pulses. Fast photography employing an intensified charge coupled device （ICCD）, optical emission spectroscopy （OES）, and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet （EUV） conversion efficiency （CE） than the SnO2 plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO2. OES studies show that the Sn plasma parameters （electron temperature and density） are lower compared to those of the SnO2 plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.

The development of laser-produced plasma EUV light source

Extreme ultraviolet lithography(EUVL)has been demonstrated to meet the industrial requirements of new-generation semiconductor fabrication.The development of high-power EUV sources is a long-term critical challenge to the implementation of EUVL in high-volume manufacturing(HVM),together with other technologies such as photoresist and mask.Historically,both theoretical studies and experiments have clearly indicated that the CO 2 laser-produced plasma(LPP)system is a promising solution for EUVL source,able to realize high conversion efficiency(CE)and output power.Currently,ASML’s NXE:3400B EUV scanner configuring CO_(2) LPP source sys-tem has been installed and operated at chipmaker customers.Mean-while,other research teams have made different progresses in the development of LPP EUV sources.However,in their technologies,some critical areas need to be further improved to meet the requirements of 5 nm node and below.Critically needed improvements include higher laser power,stable droplet generation system and longer collector life-time.In this paper,we describe the performance characteristics of the laser system,droplet generator and mirror collector for different EUV sources,and also the new development results.

Spectral Efficiency of Extreme Ultraviolet Emission from CO_2 Laser-Produced Tin Plasma Using a Grazing Incidence Flat-Field Spectrograph

A grazing incidence flat-field spectrograph using a concave grating was constructed to measure extreme ultraviolet （EUV） emission from a CO 2 laser-produced tin plasma throughout the wavelength region of 5 nm to 20 nm for lithography. Spectral efficiency of the EUV emission around 13.5 nm from plate, cavity, and thin foil tin targets was studied. By translating the focusing lens along the laser axis, the dependence of EUV spectra on the amount of defocus was investigated. The results showed that the spectral efficiency was higher for the cavity target in comparison to the plate or foil target, while it decreased with an increase in the defocus distance. The source＇s spectra and the EUV emission intensity normalized to the incident pulse energy at 45 from the target normal were characterized for the in-band （2% of bandwidth） region as a function of laser energy spanning from 46 mJ to 600 mJ for the pure tin plate target. The energy normalized EUV emission was found to increase with the increasing incident pulse energy. It reached the optimum value for the laser energy of around 343 mJ, after which it dropped rapidly.

Analysis of extreme ultraviolet spectra of laser-produced Cd plasmas

In order to provide detailed information about Cd structure and gain more insight regarding ionization degrees and types of transition,as well as the understanding of the temporal evolution behavior of laser produced Cd plasmas,extreme ultraviolet spectra of laser-produced cadmium(Cd)plasmas have been measured in the 8.4-12 nm region using spatiotemporally resolved laser-produced plasma spectroscopy technique.Spectral features were analyzed by the Hartree-Fock(HF)method with relativistic correlations(HFR)using the Cowan code.The results showed that the 4p-5s resonance transition arrays from Cd^9+to Cd^13+merged to form intense lines in this spectral region.A number of new spectral features from Cd^9+and Cd^10+ions are reported in this study.Based on the assumption of a normalized Boltzmann distribution among the excited states associated with a steady-state collisional-radiative model,the plasma parameters were obtained by comparing the experimental and simulated spectra.As a result,we succeeded in reproducing the synthetic spectra for different time delays,which yielded good agreement with the experiments.The temporal evolution behaviors of electron temperature and electron density of plasma were also analyzed.

Time-resolved spectroscopy for 5s^('4)D_(7/2) state transitions undergoing electron–ion recombination in femtosecond laser-produced copper plasma

In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s4D7/2 via electron-ion recombination transfers to 4p4F9/20 （465.11 nm, Λ1 line） and 4p4D7/20 （529.25 nm, Λ2 line） states are investigated by using the time-resolved spectroscopy. The occupation number and relevant lifetime of the excited state 5s4D7/2, the temporal evolutions of spectral intensities for Λ1 line and Λ2 line emissions are demonstrated to be in direct proportion to the employed laser intensity, which reveals the transient features of transition dynamics clearly differing from that resulted in the traditional collision excitation. Furthermore, some unique characteristics for Λ1 and Λ2 transitions stemming from electron-ion recombination are examined in detail.

High resolution X-ray spherically bent crystal spectrometer for laser-produced plasma diagnostics

A new high spectral resolution crystal spectrometer is designed to measure very low emissive X-ray spectra of laser-produced plasma in 0.5-0.9 nm range. A large open aperture （30 ×20 （mm）） mica （002） spherically bent crystal with curvature radius R = 380 mm is used as dispersive and focusing element. The imaging plate is employed to obtain high spectral resolution with effective area of 30 × 80 （mm）. The long designed path of the X-ray spectrometer beam is 980 mm from the source to the detector via the crystal. Experiment is carried out at a 20-J laser facility. X-ray spectra in an absolute intensity scale is obtained from Al laserproduced plasmas created by laser energy of 6.78 J. Samples of spectra obtained with spectral resolution of up to E/△E - 1500 are presented. The results clearly show that the device is good to diagnose laser high-density plasmas.

Analysis of extreme ultraviolet spectral profiles of laser-produced Cr plasmas

Radiation from laser-produced plasmas was examined as a potential wavelength calibration source for spectrographs in the extreme ultraviolet(EUV) region.Specifically, the EUV emission of chromium(Cr) plasmas was acquired via spatiotemporally resolved emission spectroscopy.With the aid of Cowan and flexible atomic code(FAC) structure calculations,and a comparative analysis with the simulated spectra, emission peaks in the 6.5–15.0 nm range were identified as 3 p–4 d, 5 d and 3 p–4 s transition lines from Cr5+–Cr10+ions.A normalized Boltzmann distribution among the excited states and a steady-state collisional-radiative model were assumed for the spectral simulations, and used to estimate the electron temperature and density in the plasma.The results indicate that several relatively isolated emission lines of highly charged ions would be useful for EUV wavelength calibration.

High-resolution X-ray focusing concave (elliptical) curved crystal spectrograph for laser-produced plasma

The X-ray spectrum emitted, from laser-produced plasma contains plentiful information. X-ray spectrometer is a powerful tool for plasma diagnosis and studying the information and evolution of the plasma. X-ray concave (elliptical) curved crystals analyzer was designed and manufactured to investigate the properties of laser-produced plasma. The experiment was carried out on Mianyang Xingguang-Ⅱ Facility and aimed at investigating the characteristics of a high density iron plasma. Experimental results using KAP, LIF, PET, and MICA curved crystal analyzers are described, and the spectra of Au, Ti laser-produced plasma are shown. The focusing crystal analyzer clearly gave an increase in sensitivity over a flat crystal.