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WSI Polycide工艺的研究 被引量:2
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作者 朱赛宁 聂圆燕 陈海峰 《电子与封装》 2012年第3期29-32,共4页
文章基于0.5μm CMOS工艺,研究了造成Polycide工艺中WSI剥落、色斑等异常现象的原因。同时,研究了WSI淀积前清洗、退火温度及Cap Layer层对WSI薄膜翘曲度及应力的影响,并通过实验优化,以大量的数据为依据,对影响WSI薄膜特性的工艺参数... 文章基于0.5μm CMOS工艺,研究了造成Polycide工艺中WSI剥落、色斑等异常现象的原因。同时,研究了WSI淀积前清洗、退火温度及Cap Layer层对WSI薄膜翘曲度及应力的影响,并通过实验优化,以大量的数据为依据,对影响WSI薄膜特性的工艺参数进行调试和论证,主要考察更改各条件对圆片翘曲度及应力的变化,并通过显微镜镜检圆片表面,获得了0.5μm Polycide工艺较优的工艺条件。实验结果表明,在WSI淀积后增加Cap Layer层工艺对Polycide工艺工期WSI剥落、色斑等异常有较好的改善作用,且圆片表面形貌能达到MOS器件的工艺制造要求。 展开更多
关键词 WSI CAP layer层 优化 Polycide 应力
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桂枝茯苓骨架缓释双层片释药机理及药效评价研究 被引量:3
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作者 廖正根 梁新丽 +2 位作者 将且英 平其能 杨明 《中药药理与临床》 CAS CSCD 北大核心 2010年第6期12-15,共4页
目的:研究桂枝茯苓骨架缓释双层片,探讨其体外释药机理及药效学。方法:制备多种成分同步释放的桂枝茯苓骨架缓释双层片,并以多种成分的释放度为指标,引用多种数学模型拟合释药曲线,结合药效学指标评价其剂型的合理性。结果:多种数学模... 目的:研究桂枝茯苓骨架缓释双层片,探讨其体外释药机理及药效学。方法:制备多种成分同步释放的桂枝茯苓骨架缓释双层片,并以多种成分的释放度为指标,引用多种数学模型拟合释药曲线,结合药效学指标评价其剂型的合理性。结果:多种数学模型综合判断桂枝茯苓骨架缓释双层片中苦杏仁苷(Lae)、芍药苷(Paeon if)以扩散释放为主;而丹皮酚(Pae)以骨架溶蚀为主,桂枝茯苓骨架缓释双层片与原剂型桂枝茯苓胶囊药效学无显著差异。结论:桂枝茯苓骨架缓释双层片剂型合理,多种成分可同步释放且具有明显的缓释效果。 展开更多
关键词 桂枝茯苓骨架缓释双 释药机理 药效评价 同步释放
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Analytical layer-element solutions for a multi-layered transversely isotropic elastic medium subjected to axisymmetric loading
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作者 Zhi-yong AI Nai-rui CANG Jie HAN 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2012年第1期9-17,共9页
This paper presents an analytical layer-element method used to analyze the displacement of a multi-layered transversely isotropic elastic medium of arbitrary depth subjected to axisymmetric loading.Based on the basic ... This paper presents an analytical layer-element method used to analyze the displacement of a multi-layered transversely isotropic elastic medium of arbitrary depth subjected to axisymmetric loading.Based on the basic constitutive equations and the HU Hai-chang's solutions for transversely isotropic elastic media,the state vectors of a multi-layered transversely isotropic medium were deduced.From the state vectors,an analytical layer element for a single layer(i.e.,a symmetric and exact stiffness matrix) was acquired in the Hankel transformed domain,which not only simplified the calculation but also improved the numerical efficiency and stability due to the absence of positive exponential functions.The global stiffness matrix was obtained by assembling the interrelated layer elements based on the principle of the finite layer method.By solving the algebraic equations of the global stiffness matrix which satisfy the boundary conditions,the solutions for multi-layered transversely isotropic media in the Hankel transformed domain were obtained.The actual solutions of this problem in the physical domain were acquired by inverting the Hankel transform.This paper presents numerical examples to verify the proposed solutions and investigate the influence of the properties of the multi-layered medium on the load-displacement response. 展开更多
关键词 Transverse isotropy Analytical layer element Multi-layered elastic medium Axisymmetric loading Hankel transform
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