MEMS vacuum packaging is now the impediment of the MEMS appliance in some specified fields. The major problem of current packaging approach is that the packaging process cannot meet the requirement of the ultra low le...MEMS vacuum packaging is now the impediment of the MEMS appliance in some specified fields. The major problem of current packaging approach is that the packaging process cannot meet the requirement of the ultra low leak. But the process cannot be improved with the existing technology. We propose a novel approach for MEMS vacuum packaging which can remarkably lower the leak rate. This paper analyzed the vacuum maintaining time of the vacuum packaging and compared the current design and new packaging method.展开更多
Inertial confinement fusion targets are complex systems designed to allow fine control of temperature and pressure for making precise spherical ice layers of hydrogen isotopes at cryogenic temperatures. We discuss the...Inertial confinement fusion targets are complex systems designed to allow fine control of temperature and pressure for making precise spherical ice layers of hydrogen isotopes at cryogenic temperatures. We discuss the various technical considerations for a maximum leak rate based on heat load considerations. This maximum flow rate turns out to be 5 x 10-6 standard cc per second, which can be caused by an orifice less than half a micron in diameter. This makes the identification of the location and resolution of the leak a significant challenge. To illustrate this, we showcase one example of a peculiar failure mode that appeared suddenly but persisted whereby target production yield was severely lowered. Identification of the leak source and the root cause requires very careful analysis of multiple thermomechanical aspects to ensure that the end solution is indeed the right remedy and is robust.展开更多
基金the High-tech Research and Development Program of China under Grant No.2005AA404260
文摘MEMS vacuum packaging is now the impediment of the MEMS appliance in some specified fields. The major problem of current packaging approach is that the packaging process cannot meet the requirement of the ultra low leak. But the process cannot be improved with the existing technology. We propose a novel approach for MEMS vacuum packaging which can remarkably lower the leak rate. This paper analyzed the vacuum maintaining time of the vacuum packaging and compared the current design and new packaging method.
文摘Inertial confinement fusion targets are complex systems designed to allow fine control of temperature and pressure for making precise spherical ice layers of hydrogen isotopes at cryogenic temperatures. We discuss the various technical considerations for a maximum leak rate based on heat load considerations. This maximum flow rate turns out to be 5 x 10-6 standard cc per second, which can be caused by an orifice less than half a micron in diameter. This makes the identification of the location and resolution of the leak a significant challenge. To illustrate this, we showcase one example of a peculiar failure mode that appeared suddenly but persisted whereby target production yield was severely lowered. Identification of the leak source and the root cause requires very careful analysis of multiple thermomechanical aspects to ensure that the end solution is indeed the right remedy and is robust.
