DYNAMIC CHARACTERISTIC ANALY-SIS OF PRECISE LONG STROKE LINEAR MOTOR WITH AIR-BEARING IN OPTICAL LITHOGRAPHY

Dynamic characteristic is presented by identifying the model and the dynamic parameters of a precise long stroke linear motor （PLSLM） with the air-bearing in optical lithography. The PLSLM is supported by air-bearing on the stator, and is driven by on-board two large linear motors in a cross-configuration. Firstly, a model of the PLSLM is established by finite element method （FEM）. Secondly, based on the model, the natural frequencies and model shapes are discusse＆ And the contribution of each active mode is evaluated by computing the modal participation factors （MPF）, which indicates the major vibration direction. Furthermore, by the experimental modal analysis, the experimental results are in agreement with simulation results, which it is sure that the FEM is reasonable. What＇s more, comparing with the effects on the frequency due to the air-bearing stiffness, the relations of the natural frequencies with the air-bearing stiffness are found. It is found that the frequency response curve is fluctuant with the air-bearing stiffness in each direction. Finally, it is conclusion that the natural frequency of the PLSLM is largely affected by the air-bearing stiffness variety. This research is contributed to the dynamic characteristics resulted from the air-beating stiffness. Further work will include better optimization on the dynamic parameter in the controller design through the control algorithm for the precise long stroke motor.

Adaptive current compensation with nonlinear disturbance observer for single-sided linear induction motor considering dynamic eddy-effect

An adaptive current compensation control for a single-sided linear induction motor(SLIM) with nonlinear disturbance observer was developed. First, to maintain t-axis secondary component flux constant with consideration of the specially dynamic eddy-effect(DEE) of the SLIM, a instantaneously tracing compensation of m-axis current component was analyzed. Second,adaptive current compensation based on Taylor-discretization algorithm was proposed. Third, an effective kind of nonlinear disturbance observer(NDOB) was employed to estimate and compensate the undesired load vibrations, then the robustness of the control system could be guaranteed. Experimental verification of the feasibility of the proposed method for an SLIM control system was performed, and it showed that the proposed adaptive compensation scheme with NDOB could significantly promote speed dynamical response and minimize speed ripple under the conditions of external load coupled vibrations and unavoidable feedback control variables measured errors, i.e., current and speed.

Application of Dynamic Linear Detecting Method in Data Processing of the Portable Blood Sugar Analyzer

In this paper,a dynamic linear detecting method,that the non-linear coefficient NL% was led and the non-linearity of data were estimated continuously and dynamically and determined when NL% exceeded reference value (5%),was used for data processing and could solve the problem caused by the phenomenon of substrate depleting occurred following the redox reaction in portable blood sugar analyzer.By contrast to the conventional end-point method,the dynamic linear detecting method is based on multipoint data collecting.Experiments of measuring the calibration glucose solution with 8 various concentrations from 50 mg/dl to 400 mg/dl were carried out with the analyzer developed by our group.The linear regression curve,whose correlation for the data was 0.9995 and the residual was 2.8080,were obtained.The obtained correlation,residual, and the computation workload are all fit for the portable blood sugar analyzer.

A Study on the Dynamic Behavior of Wheel-Type Train Propelled by Superconducting Linear Synchronous Motor

This paper deals with a study on the dynamic behavior of 600 km/h wheel-type train propelled by superconducting linear synchronous motor (LSM). This train is of a traditional wheel-on-rail type with traction motors on wheel-bogies. However, for the 600 km/h speed, on the both sides of each vehicle, superconducting LSMs are attached and the ground coils are installed on the guideway. In this case, the guideway irregularities act as disturbance to the vehicle causing deterioration of ride comfort. And besides thrust force, the normal force could be created in superconducting LSM control, which influences vehicle dynamics during running. In this study, to examine the effect of guideway irregularity and normal force on dynamic behavior of proposed train, the vehicle dynamic model is driven and frequency analysis is performed through simulation. The simulation results show that the lateral directional acceleration is mainly influential to ride comfort;however this could be reduced effectively by electromagnetic damping force from linear generator. It is also shown that the normal force effect from superconducting LSM control is limited even though the attractive normal force acts favorably to ride comfort.

The Dynamic test of Novel Punch Driven by Linear Motor

The key character of punch is its impulsion. For the novel punch driven by linear motor, the computer-aided test system is used. Its frequency performance is calculated by the identification method according to the dynamic demarcation. This dynamic test system presented here can be applied in the sample machines under development and performance test of finished products.

Indirect Vector Control of Linear Induction Motors Using Space Vector Pulse Width Modulation

Vector control schemes have recently been used to drive linear induction motors(LIM)in high-performance applications.This trend promotes the development of precise and efficient control schemes for individual motors.This research aims to present a novel framework for speed and thrust force control of LIM using space vector pulse width modulation(SVPWM)inverters.The framework under consideration is developed in four stages.To begin,MATLAB Simulink was used to develop a detailed mathematical and electromechanical dynamicmodel.The research presents a modified SVPWM inverter control scheme.By tuning the proportional-integral(PI)controller with a transfer function,optimized values for the PI controller are derived.All the subsystems mentioned above are integrated to create a robust simulation of the LIM’s precise speed and thrust force control scheme.The reference speed values were chosen to evaluate the performance of the respective system,and the developed system’s response was verified using various data sets.For the low-speed range,a reference value of 10m/s is used,while a reference value of 100 m/s is used for the high-speed range.The speed output response indicates that themotor reached reference speed in amatter of seconds,as the delay time is between 8 and 10 s.The maximum amplitude of thrust achieved is less than 400N,demonstrating the controller’s capability to control a high-speed LIM with minimal thrust ripple.Due to the controlled speed range,the developed system is highly recommended for low-speed and high-speed and heavy-duty traction applications.

Temperature Rise Calculation and Velocity Planning of Permanent Magnet Linear Synchronous Motor under Trapezoidal Speed

For permanent magnet linear synchronous motor(PMLSM) working at trapezoidal speed for long time, high thrust brings high temperature rise, while low thrust limits dynamic performance. Thus, it is crucial to find a balance between temperature rise and dynamic performance. In this paper, a velocity planning model of the PMLSM at trapezoidal speed based on electromagnetic-fluid-thermal(EFT) field is proposed to obtain the optimal dynamic performance under temperature limitation. In this model, the winding loss is calculated considering the acceleration and deceleration time. The loss model is indirectly verified by the temperature rise experiment of an annular winding sample. The actual working conditions of the PMLSM are simulated by dynamic grid technology to research the influence of acceleration and deceleration on fluid flow in the air gap, and the variation rule of the thermal boundary condition is analyzed. Combined with the above conditions, the temperature rise of a coreless PMLSM(CPMLSM) under the rated working condition is calculated and analyzed in detail. Through this method and several iterations, the optimal dynamic performance under the temperature limitation is achieved. The result is verified by a comparison between simulation and prototype tests, which can help improve the dynamic performance.

Fractional-order Generalized Principle of Self-support (FOGPSS) in Control System Design

This paper reviews research that studies the principle of self-support U+0028 PSS U+0029 in some control systems and proposes a fractional-order generalized PSS framework for the first time. The existing PSS approach focuses on practical tracking problem of integer-order systems including robotic dynamics, high precision linear motor system, multi-axis high precision positioning system with unmeasurable variables, imprecise sensor information, uncertain parameters and external disturbances. More generally, by formulating the fractional PSS concept as a new generalized framework, we will focus on the possible fields of the fractional-order control problems such as practical tracking, U+03BB-tracking, etc. of robot systems, multiple mobile agents, discrete dynamical systems, time delay systems and other uncertain nonlinear systems. Finally, the practical tracking of a first-order uncertain model of automobile is considered as a simple example to demonstrate the efficiency of the fractional-order generalized principle of self-support U+0028 FOGPSS U+0029 control strategy. © 2014 Chinese Association of Automation.

基于紧格式动态线性化的吊舱推进电机滑模矢量控制

针对复杂海况下吊舱推进电机存在的模型建立困难以及负载扰动问题,提出了基于紧格式动态线性化的滑模矢量控制方法。首先,考虑船舶实际工况建立包含船舶运动模型和螺旋桨负载特性的船-桨数学模型,并通过紧格式动态线性化方法,建立带时变参数和负载扰动项的吊舱推进电机数据模型;然后,设计基于最小转速跟踪误差指标的滑模控制器,同时设计神经网络观测器对控制律中的未知负载扰动项进行估计,并将估计值反馈到控制器中进行扰动补偿。仿真结果表明,所设计的控制器减小了推进电机的转速超调、转矩脉动,提高了吊舱推进电机系统的控制性能。

基于模糊扩展卡尔曼的直线感应电机无速度传感器控制

直线感应电机(linear induction motor,LIM)可实现无接触、无摩擦的直线运动,具有爬坡强、横断面小、低噪音等优势,在中低速磁悬浮与城市轨道交通中被广泛应用。其中,基于观测器的电机无速度传感器矢量控制方法,是解决速度传感器成本高、可靠性低、维护难等问题的有效途径。针对LIM速度辨识受系统内外扰动影响导致观测精度下降问题,提出基于模糊扩张卡尔曼滤波(Fuzzy Extended Kalman Filter,FEKF)的速度观测方法,提高观测器鲁棒性。首先在αβ坐标系下建立考虑动态边端效应的LIM数学模型,利用LIM的实时电流和电压作为输入信号,以电流、磁链和速度作为状态变量,推导出基于扩展卡尔曼滤波(extended kalman filter,EKF)观测器电机状态空间方程的离散模型,利用EKF对LIM的速度和磁链进行在线观测,并用于实现LIM的矢量控制。其次,为提高EKF的噪声协方差矩阵Q对LIM系统内外扰动的鲁棒性,引入模糊控制方法对矩阵Q进行自适应调整,实现速度与磁链的估计精度。具体通过计算系统理论残差与实际残差的偏离程度得到噪声调节因子,实时调整噪声协方差矩阵Q,并在下一周期更新模糊扩展卡尔曼的反馈增益矩阵,提高对速度与磁链的估计精度。之后对系统的能观性与FEKF的收敛性进行分析,探明矩阵Q中各参数的边界及整定规律。最后通过仿真和硬件在环实验验证所提FEKF优化算法的有效性,结果表明FEKF能有效提高对LIM速度辨识准确性,实现LIM无速度传感器矢量控制。

用于连续碰撞检测的线性动态分离轴算法

针对连续碰撞检测的检测效率低的问题,为了减少三角形基元检测数量,基于分离轴理论提出一种使用线性动态分离轴的快速连续碰撞检测算法.在三角形对运动前后,利用迭代算法各找到一条分离轴,将其构造为线性动态分离轴;然后剔除在动态分离轴上的投影始终不相交的三角形对;最后对无法剔除的三角形对使用其他剔除算法或者传统算法.在多个可变形基准模型上的实验结果表明,所提算法的基础检测剔除率超过89%,在精确检测阶段具有更高的检测效率.

动磁式直线电机定位误差检测与校正

提出一种针对动磁式直线电机定位方案的误差检测及校正的方法。首先,通过相位检测算法检测传感器阵列的相位偏差是否符合要求;然后,通过幅值相位纠正算法实现对磁场数据归一化,并对小幅度相位偏差引起的位置误差进行校正;最后,对数据采集和处理过程中的延时误差进行补偿。对动子运动方向的磁栅尺寸误差补偿后,定位精度达到了±92μm。

永磁同步电动机速度伺服系统最优输出反馈控制器设计

针对永磁同步电动机(Permanent magnet synchronous motor,PMSM)模型参数未知以及电枢电流和负载转矩无法直接测量的问题,设计一种基于自适应动态规划(Adaptive dynamic programming,ADP)的输出反馈控制方案,实现PMSM最优速度跟踪控制.首先,根据PMSM内部特性确定其数学模型的结构,构建与原始系统相对应的辅助系统,引入新的线性二次指标来实现速度最优跟踪调节.其次,设计一种嵌入式观测器,该观测器能够在系统模型未知情况下用可测量数据重构系统全部状态.此外,提出一种离线策略的ADP方法逼近最优控制增益的解.最后,仿真结果验证所提控制方案在模型参数未知以及电枢电流和负载转矩不可测量的情况下,实现了精确的速度跟踪性能和良好的瞬态响应,同时降低了电压的冲击.

振动激励环境下的滚动轴承动载荷测试

载荷是决定轴承使用寿命的关键参数,针对工程应用中轴承实际载荷通常较难获取的问题,基于轴承载荷与接触点位移间的线性关系设计了一种轴承动载荷测试装置。通过静载荷标定得到不同轴承载荷下的力传感器示值,0.99的相关系数表明轴承载荷与力传感器示值呈高度线性相关,采用一元线性回归方法进行拟合,得到轴承载荷与力传感器示值的转化系数,进而通过轴承动载荷测试装置有效测试了振动激励环境下的轴承动载荷。

柱状螺纹直线超声电动机结构设计与实验研究

为改善现有螺纹直线超声电动机定子的结构刚度,降低谐振频率,提高电机输出力,设计了电机定子的结构并进行实验研究。电机由开槽的定子基体、螺纹动子和4片压电陶瓷组成,采用定子的两个三阶面内弯曲模态实现驱动。利用有限元软件分析定子内螺纹开槽宽度对模态频率的影响,同时进行结构动力学分析,得到定子驱动点的位移响应和运动轨迹。试制样机,搭建机械特性测试平台。实验结果表明:电机能够在较宽的频率范围内运行,电机的最佳工作频率75.2 kHz,最大速度为0.59 mm/s,最大为输出力1.4 N,比优化前分别提高了31.1%和16.7%。

基于非线性动力学模型的PMLSM自适应趋近律滑模位置控制

为了解决摩擦力、定位力、参数失配和外部扰动等不确定性因素影响永磁直线同步电动机(PMLSM)位置跟踪性能的问题,提出基于非线性动力学模型的自适应趋近律滑模控制(ARLSMC)方法。由于定位力和摩擦力是系统中主要的非线性动力学因素,且其模型参数会随PMLSM动子位置而变化,因此设计基于非均匀有理B样条(NURBS)函数的精确模型,为电机控制系统设计提供模型基础。其次,设计ARLSMC方法抑制不确定性因素对系统的影响,ARLSMC中所采用的自适应趋近律可以随位置误差大小实时变化,能够在提高收敛速度的同时减小系统抖振,提高位置跟踪精度。为进一步增强系统对于不确定性的鲁棒性,设计滑模扰动观测器(SMDO)实时估计扰动值并将估计值前馈补偿到ARLSMC的控制律。最后,通过仿真和实验验证本文方法在提高PMLSM伺服系统的位置跟踪性能和鲁棒性能方面的可行性和有效性。

考虑纵向动态边端效应的短初级直线感应电机等效电路改进模型

直线感应电机由于纵向动态边端效应的存在,在运行过程中会产生附加损耗和附加力,使得电机性能表现变差。针对该问题,本文从传统等效电路出发,通过在原有励磁支路上添加并联边端效应支路的方式,构建了考虑纵向动态边端效应的短初级直线感应电机等效电路改进模型,并推导了边端效应支路上的电磁参数。试验结果表明,本文提出的等效电路改进模型与传统等效电路相比,推力计算误差更小,验证了本文提出的改进模型准确性。

直线超声电机设计、建模和应用的研究进展

直线超声电机作为一种新型作动器,以其独特的结构和驱动原理,在高新技术领域有着广泛的应用。首先,回顾了电机结构设计方面的研究进展,提出了电机的设计理论和方法,阐述了电机结构形式的演化和夹持结构的设计方法;其次,介绍了有关电机理论模型的研究进展,提出了定子机电耦合模型、摩擦接触模型和定/动子冲击模型等;最后,报道了直线超声电机在高精度运动平台、细胞显微操作、微夹持器和绝对重力仪方面的最新应用。

磁悬浮电动机的状态反馈线性化控制

借助电磁场的有限元计算建立了磁悬浮电动机的数学模型 ,针对系统具有多变量、强耦合、非线性的特点 ,应用多变量非线性控制的状态反馈线性化方法 ,设计出非线性控制器 ,经过该控制器的补偿 ,将原非线性强耦合的多变量系统解耦并线性化 ,成为转速、转子磁链及转子位置等彼此无耦合的线性子系统。应用线性系统理论对这些线性子系统进行综合。仿真表明 ,系统具有良好的静、动态性能。应用高磁场稀土钕铁硼永磁铁推力轴承 ,实现转子的轴向稳定。

无位置传感器的SRD调速系统的初始位置检测

该文基于对SRM线性电感模型和连续两相电磁特性进行分析的基础上,探讨了转子处于静止和有初始转动两种状态下,转子初始位置检测及初始导通相的确定方法,通过对6/4极的三相开关磁阻电机的实验,验证了该方法的可行性。