NEW TYPE OF LINEAR ULTRASONIC MOTOR WITH TWO DEGREES OF FREEDOM USING LONGITUDINAL AND BENDING MODE

A new type of linear ultrasonic motor with two degrees of freedom (DOF) motion is presented. The concept of the new typical motor is based on the combination of a longitudinal and two bending modes. The construction and the operational principle of motor are described, and the elliptical motion of the driving point of the actuator is proved. Meanwhile, a prototype linear motor is designed by using the finite element method (FEM) and is constructed for experiments. The vibration modes are tested with the laser doppler vibrometer (PSV-300F), and the experimental results prove that the design requirements on the mode shape of the actuator and nature frequency are satisfied. The test run of the motor indicates that the operational principle of the motor and the design results are correct, and the output properties are also tested.

LINEAR ULTRASONIC MOTOR USING LONGITUDINAL VIBRATION

A linear ultrasonic motor using longitudinal vibration of bar with varying section is proposed. The lin- ear ultrasonic motor has two varying section bars connected by semi-circumferential structure. Elliptical trajecto- ries of particles are formed on top of the semi-circumferential structure outer surface where a driving foot is locat- ed. And a mover is pushed to move linearly when the driving foot is pressed onto it. Finite element model of sta- tor is built and results of harmonic analysis verify its principle. Moreover, design requirements of the motor are analyzed through finite element analysis and the results of sensitive analysis provide an efficient way to design the type of linear ultrasonic motor. Prototype test shows that the motor can afford load of 10 N at the speed of 100 mm/s.

LINEAR ULTRASONIC MOTOR WITH 2-DOF USING LONG-ITUDINAL AND BENDING VIBRATION MODES

A two-degree-of-freedom（2-DOF） linear ultrasonic motor （USM） consists of a cylinder-shaped stator and a slider. Two bending vibration modes with orthogonality and one longitudinal vibration mode are excited in the stator by three groups of piezoelectric ceramic elements. The combinations of any one bending mode and the longitudinal mode mentioned above push the slider to move linearly in direction x or y. Some key issues for improving the motor output properties and efficiency are given. They include selection of the vibration modes, consistency of the modal frequencies, placement of the piezoelectric ceramic elements and the supporting plane, setting of pre-pressure, and influence of interfering modes.

Contact Analysis and Modeling of Standing Wave Linear Ultrasonic Motor

A contact model for describing the contact mechanics between the stator and slider of the standing wave linear ultrasonic motor was presented. The proposed model starts from the assumption that the vibration characteristics of the stator is not affected by the contact process. A modified friction models was used to analyze the contact problems. Firstly, the dynamic normal contact force, interface friction force, and steady-state characteristics were analyzed. Secondly, the influences of the contact layer material, the dynamic characteristics of the stator, and the pre-load on motor performance were simulated. Finally, to validate the contact model, a linear ultrasonic motor based on in-plane modes was used as an example. The corresponding results show that a set of simulation of motor performances based on the proposed contact mechanism is in good agreement with experimental results. This model is helpful to understanding the operation principle of the standing wave linear motor and thus contributes to the design of these types of motor.

Optimal design of butterfly-shaped linear ultrasonic motor using finite element method and response surface methodology

A new method for optimizing a butterfly-shaped linear ultrasonic motor was proposed to maximize its mechanical output. The finite element analysis technology and response surface methodology were combined together to realize the optimal design of the butterfly-shaped linear ultrasonic motor. First, the operation principle of the motor was introduced. Second, the finite element parameterized model of the stator of the motor was built using ANSYS parametric design language and some structure parameters of the stator were selected as design variables. Third, the sample points were selected in design variable space using latin hypercube Design. Through modal analysis and harmonic response analysis of the stator based on these sample points, the target responses were obtained. These sample points and response values were combined together to build a response surface model. Finally, the simplex method was used to find the optimal solution. The experimental results showed that many aspects of the design requirements of the butterfly-shaped linear ultrasonic motor have been fulfilled. The prototype motor fabricated based on the optimal design result exhibited considerably high dynamic performance, such as no-load speed of 873 ram/s, maximal thrust of 27.5 N, maximal efficiency of 43%, and thrust-weight ratio of 45.8.

Transient Response Model of Standing Wave Piezoelectric Linear Ultrasonic Motor

A transient response model for describing the starting and stopping characteristics of the standing wave piezoelectric linear ultrasonic motor was presented. Based on the contact dynamic model, the kinetic equation of the motor was derived. The starting and stopping characteristics of the standing wave piezoelectric linear ultrasonic motor according to different loads, contact stiffness and inertia mass were described and analyzed, respectively. To validate the transient response model, a standing wave piezoelectric linear ultrasonic motor based on in-plane modes was used to carry out the simulation and experimental study. The corresponding results showed that the simulation of the motor performances based on the proposed model agreed well with the experimental results. This model will helpful to improve the stepping characteristics and the control flexibility of the standing wave piezoelectric linear ultrasonic motor.

Ultrasonic Linear Motor with Anisotropic Composite

An idea to make up the vibrating body of ultrasonic motor with anisotropic composite is proposed and a linear piezoelectric motor is developed in this paper. Relative problems such as actuating mechanism, resonant frequency are discussed theoretically. According to the feature that impulse exists between the elastic body of composite ultrasonic linear motor and the base, an impulse analysis is presented to calculate the motor′s friction driving force and frictional conversion efficiency. The impulse analysis essentially explains the reason why the ultrasonic motor has great driving force, and can be applied to analyze the non-linear ultrasonic motor.

Turned off Characteristics of Linear Ultrasonic Motor

The high controllability and high resolution control of linear ultrasonic motors depend on effective control of driving signals.For a good control characteristic,step control which the driver output turned off and on was used.Therefore,a novel dual PWM topology structure ultrasonic motor driver was designed and analyzed.According to the characteristics of the circuits,two kinds of hardware turned off methods named methods A and B were discussed.The differences of the voltage applied on motor by different methods were figured out.Finally,a series of experiments were carried out in the clean room to study the influence of step characteristic by different turn off methods.The experimental results show that the steplength was 230 nm by method A and 125 nm by method B,while cycles of driving signals were 6.The method B has a smaller steplength when cycles are 6.The average steplength varies in non-linear while driving cycles changing.The steplength varies approximately in linear while voltage amplitude changing.Therefore,method B is better to implement step control,because it gets a better control in positioning system.

Actuating mechanism and design of a T-type linear ultrasonic motor

To take advantage of merits of higher output-power and efficiency of bolt-clamped transducer,a T-type linear ultrasonic motor was proposed in this paper.The proposed motor contained a horizontal transducer and a vertical transducer.The horizontal transducer included two exponential shape horns,and the vertical transducer contained one exponential shape horn.And the horns intersected at tip ends where a driving foot was located.The longitudinal vibrations of transducers were excited by the stretching vibration of PZT ceramics.Longitudinal vibrations were superimposed in the motor and generated elliptical trajectory at the driving foot.The actuating mechanism of the proposed motor was analyzed.The two working modals of the motor were gained with FEM.The resonant frequencies of two working modals were degenerated by adjusting the structural parameters.The motion trajectory of nodes on the driving foot was gained by transient analysis.The vibration amplitude of node on the driving foot indicates that the proposed motor has potential good output characteristics.The results verify the feasibility of the proposed design and provide instructions for the development of the new ultrasonic motor.

Novel Linear Piezoelectric Motor for Precision Position Stage

Conventional servomotor and stepping motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear motor. A new butterfly-shaped linear piezoelectric motor for linear motion is presented. A two-degree precision position stage driven by the proposed linear ultrasonic motor possesses a simple and compact configuration, which makes the system obtain shorter driving chain. Firstly, the working principle of the linear ultrasonic motor is analyzed. The oscillation orbits of two driving feet on the stator are produced successively by using the anti-symmetric and symmetric vibration modes of the piezoelectric composite structure, and the slider pressed on the driving feet can be propelled twice in only one vibration cycle. Then with the derivation of the dynamic equation of the piezoelectric actuator and transient response model, start-upstart-up and settling state characteristics of the proposed linear actuator is investigated theoretically and experimentally, and is applicable to evaluate step resolution of the precision platform driven by the actuator. Moreover the structure of the two-degree position stage system is described and a special precision displacement measurement system is built. Finally, the characteristics of the two-degree position stage are studied. In the closed-loop condition the positioning accuracy of plus or minus 〈0.5 μm is experimentally obtained for the stage propelled by the piezoelectric motor. A precision position stage based the proposed butterfly-shaped linear piezoelectric is theoretically and experimentally investigated.

The characteristics of hybrid transducer type linear ultrasonic motor with large thrust and large stroke

This hybrid transducer type linear ultrasonic motor is a new troe of the lineax ultrasonic motor proposed by the authors. This paper describes its basic structure and operation principle, provides its mechedsm of the large thrust and large seif lock force when power is cut off. The measured characteristics of the prototype motor are shown, its mtalmum thrust is 11 N and mtalmum output power is 1.4 W, the backward and forward motion performances are roughly coincident

Transducer-type bi-directional linear ultrasonic motor and experiment

A transducer-trpe bi-directional linear ultrasonic motor is presented. It has the features of flexible bi-directional drive, simple construction and easy control, etc. The character- istics parameters of the prototype are: frequency 21.46 kHz, maximum moving speed 400 mm/s under pre-load of 3.2 N, maximum thrust 2.1 N under pre-load of 1.6 N. The influence of phase shift and vibration amplitude of ultrasonic transducers on ideal elliptical locus and output characteristics are investigated with theoretical and experimental methods.

驻波型直线超声波电机接触特性有限元建模与分析

超声波电机接触摩擦是影响电机性能的关键环节,建立超声波电机的接触模型对电机性能优化具有重要作用。现有对驻波型超声波电机接触问题的研究,大多采用解析法,需要采用较多的简化假设,难以准确反映电机实际结构及真实接触情况。针对这一问题,采用有限元法,对驻波型直线超声波电机接触特性进行建模和分析。首先,考虑定子复合结构,建立定子三维有限元模型,分析定子在外加电压作用下的振动响应,得到定子振动位移表达式。在此基础上,考虑定子与动子的结构和接触特点,建立定、动子接触三维有限元模型。基于所建立的模型,分析了定、动子的接触状态、接触压力分布,并研究了驱动电压大小和预压力变化对接触特性和电机性能的影响。最后,搭建试验测试平台,测量了电机的输出特性,并与理论计算值进行对比,对比结果验证了所建立的定、动子三维有限元接触模型。

柱状螺纹直线超声电动机结构设计与实验研究

为改善现有螺纹直线超声电动机定子的结构刚度,降低谐振频率,提高电机输出力,设计了电机定子的结构并进行实验研究。电机由开槽的定子基体、螺纹动子和4片压电陶瓷组成,采用定子的两个三阶面内弯曲模态实现驱动。利用有限元软件分析定子内螺纹开槽宽度对模态频率的影响,同时进行结构动力学分析,得到定子驱动点的位移响应和运动轨迹。试制样机,搭建机械特性测试平台。实验结果表明:电机能够在较宽的频率范围内运行,电机的最佳工作频率75.2 kHz,最大速度为0.59 mm/s,最大为输出力1.4 N,比优化前分别提高了31.1%和16.7%。

超声波电机二阶线性时变模型的迭代学习辨识建模

为了提高超声波电机(USM)转速控制模型的精度,提出一种基于迭代学习辨识的二阶线性时变模型建模方法。针对USM的非线性与时变特性,首先基于超声波电机驱动电压的频率作为输入变量,转速作为输出变量,建立一个描述其动态行为的线性时变模型。为提高模型辨识的精度与鲁棒性,改进迭代学习辨识(ILI)算法,通过优化误差加权范数和参数变化率范数相结合的目标函数,并且设计新的学习律,利用归一化柯西滤波窗口进一步地构造学习律的权重矩阵。仿真与实验结果表明,所提的二阶线性时变模型在描述USM转速运动特性方面具有较高的精度,迭代学习辨识算法展现了优良的收敛性和鲁棒性,能够有效应对时变扰动并改进USM的运动控制性能。

基于虚拟仪器的直线超声电机机械特性测试

针对直线超声电机机械特性测试问题,建立了基于虚拟仪器的直线超声电机机械特性测试系统。设计了力与速度测试系统,为测试的直线电机提供加载,配置的压力传感器与直线型光电编码器分别用于电机输出力与速度的测量,利用虚拟仪器技术搭建了测试硬件平台。利用虚拟仪器编程语言LabVIEW对各个模块进行软件设计,以实现各自的功能。利用该系统对杆式直线超声电机和双变幅杆V形直线超声电机的机械特性进行了测试,测试结果证实该测试系统的可行性,为直线超声电机机械特性测试提供了所必需的条件。

直线型超声电机研究的现状

概述国内外各种直线型超声电机的驱动机理和最新研究进展 ,介绍直线型超声电机的应用前景 ,指出今后直线超声电机的发展趋势。

新型惯性式直线超声压电电机的运动机理及实验研究(英文)

提出了一种新型惯性式直线超声压电电机。该电机利用压电晶体的逆压电效应和惯性位移原理,由定子的轴向变形,通过摩擦力的作用,以惯性位移的形式传递运动。它由两部分组成,定子由具有位移放大功能的压电复合换能器和轴组成,动子为一带有缺口和环形凹槽的环。分析了该电机的工作原理,并通过仿真和实验相结合的方法分析了两种激励方式对电机性能的影响。实验结果表明:样机采用方波驱动比采用锯齿波驱动的效果好;在采用方波驱动信号驱动时,样机的最大空载速度可达到11mm/s,最大输出力达到0.5N。

直线超声电机驱动精密二维定位平台系统

针对当前精密作动技术领域对精密定位系统提出越来越高的要求，设计了一种由蝶形直线超声电机驱动的二维精密定位平台系统。该定位平台系统行程为50mm×50mm，以直线型增量光栅编码器作为位置反馈元件，通过上位机编程实现运动控制卡对精密定位平台系统进行控制。为了实现直线超声电机的驱动，设计了一种新型直线超声电机驱动器，实现驱动电压和驱动频率的独立控制。在控制过程中，通过使用复合控制技术，同时结合直线超声电机具有高分辨率步进的控制特性，最终使系统达到高精度运动的控制效果。实验结果表明，在0～50mm行程内，实现了小于0．28μm的定位精度。