Liquid phase epitaxy （LPE） is a mature technology. Early experiments on single magnetic crystal films fabricated by LPE were focused mainly on thick films for microwave and magneto-optical devices. The LPE is an exc...Liquid phase epitaxy （LPE） is a mature technology. Early experiments on single magnetic crystal films fabricated by LPE were focused mainly on thick films for microwave and magneto-optical devices. The LPE is an excellent way to make a thick film, low damping magnetic garnet film and high-quality magneto-optical material. Today, the principal challenge in the applied material is to create sub-micrometer devices by using modern photolithography technique. Until now the magnetic garnet films fabricated by LPE still show the best quality even on a nanoscale （about 100 nm）, which was considered to be impossible for LPE method.展开更多
InAsSb epilayers with a cutoff wavelength of 4.8 μm have been successfully grown on InAs substrates by one-step liquid phase epitaxy （LPE） technology. The epilayers were characterized by X-ray diffraction （XRD）, ...InAsSb epilayers with a cutoff wavelength of 4.8 μm have been successfully grown on InAs substrates by one-step liquid phase epitaxy （LPE） technology. The epilayers were characterized by X-ray diffraction （XRD）, Fourier transform infrared （PTIR） transmittance measurements and scanning electron microscopy （SEM）. The influence of different growth conditions on the optical and structural properties of the materials was studied. The results revealed that the good crystalline quality, mirror smooth surface and flat interface of InAsSb epilayers were achieved. They benefited from optimized growth conditions, i.e., sufficient homogeneity of the growth melt and a very slow cooling rate.展开更多
A novel horizontal push-pull multi-substrate epitaxy boat with three separate cells is introduced in this article, with which multi-substrate LPE processing is feasible in horizontal LPE furnace. The processes of LPE ...A novel horizontal push-pull multi-substrate epitaxy boat with three separate cells is introduced in this article, with which multi-substrate LPE processing is feasible in horizontal LPE furnace. The processes of LPE AlxGa1-x)As/ GaAs solar cells are studied and the efficiency of the solar cells achieved 19.8% （AMO, 25℃, 120 mW/cm2）.展开更多
A modified liquid phase epitaxy apparatus for semiconductor materials was used to measure the solubility of GaAs in Bi.Two phase diagrams rich in Bi under H_2 and N_2 atmospheres were obtained according to the results...A modified liquid phase epitaxy apparatus for semiconductor materials was used to measure the solubility of GaAs in Bi.Two phase diagrams rich in Bi under H_2 and N_2 atmospheres were obtained according to the results of measurement.A new phenomenon,in which the parameter Q value(quantity of GaAs dissolved in Bi in fixed time/saturation quantitu,of GaAs in Bi)was different from each other at various temperatures and there existed a maxi- mum Q value at definite temperature,was observed.This phenomenon may be regarded as a common feature of a simple binary metallic system which has the phase diagram similar to that of Bi-GaAs.The difference observed from the dependence of Q values on temperature in both H_2 and N_2 atmospheres was discussed.展开更多
In this paper,the fabrication of 1.3μm InGaAsP/InP gain-coupled DFB lasers with lossgrating is reported for the first time.A technique of regrowth on corrugated surface usingLPE is developed.By using GaAs as the cove...In this paper,the fabrication of 1.3μm InGaAsP/InP gain-coupled DFB lasers with lossgrating is reported for the first time.A technique of regrowth on corrugated surface usingLPE is developed.By using GaAs as the cover of thermal protection and controlling theamount of the super cooling,high quality epitxial layers on corrugated surface are obtained.The oxide stripe lasers with a stripe width of 20μm are fabricated.Single-mode oscillation isachieved at 1.293μm,and a high single-mode oscillation yield is also obtained.展开更多
材料质量好坏对于获得高性能红外探测器至关重要。提出决定材料质量的关键点在于精准控制材料结构中层与层之间的晶格失配度,报道了晶格失配对材料质量和器件暗电流性能的影响。实验结论表明在液相外延技术生长的InAs/InAsSbP材料体系中...材料质量好坏对于获得高性能红外探测器至关重要。提出决定材料质量的关键点在于精准控制材料结构中层与层之间的晶格失配度,报道了晶格失配对材料质量和器件暗电流性能的影响。实验结论表明在液相外延技术生长的InAs/InAsSbP材料体系中,InAs和InAsSbP间的晶格失配不是越小越好,而是有一个最佳值。如果晶格失配偏离这个值,不管是偏大还是偏小,材料的质量都会恶化。阐述了如何调整生长参数以获得合适的晶格失配度。制备了具有适宜晶格失配度的红外探测器件,该探测器零偏压下的室温峰值探测率为6.8×10^(9) cm Hz^(1/2)W^(-1),与国际商用InAs探测器的指标相当。展开更多
基金Project supported by the National Key Research and Development Program of China(Grant No.2016YFA0300801)the National Natural Science Foundation of China(Grant Nos.51702042,61734002,61571079,51572042,and 61471096)+1 种基金the International Science&Technology Cooperation Program of China(Grant No.2015DFR50870)the Sichuan Science and Technology Support Project,China(Grant Nos.2016GZ0250 and 2017JY0002)
文摘Liquid phase epitaxy （LPE） is a mature technology. Early experiments on single magnetic crystal films fabricated by LPE were focused mainly on thick films for microwave and magneto-optical devices. The LPE is an excellent way to make a thick film, low damping magnetic garnet film and high-quality magneto-optical material. Today, the principal challenge in the applied material is to create sub-micrometer devices by using modern photolithography technique. Until now the magnetic garnet films fabricated by LPE still show the best quality even on a nanoscale （about 100 nm）, which was considered to be impossible for LPE method.
基金provided by the National Natural Science Foundation of China (No. 60777022)the Program for Young Excellent Tal-ents in Tongji University
文摘InAsSb epilayers with a cutoff wavelength of 4.8 μm have been successfully grown on InAs substrates by one-step liquid phase epitaxy （LPE） technology. The epilayers were characterized by X-ray diffraction （XRD）, Fourier transform infrared （PTIR） transmittance measurements and scanning electron microscopy （SEM）. The influence of different growth conditions on the optical and structural properties of the materials was studied. The results revealed that the good crystalline quality, mirror smooth surface and flat interface of InAsSb epilayers were achieved. They benefited from optimized growth conditions, i.e., sufficient homogeneity of the growth melt and a very slow cooling rate.
文摘A novel horizontal push-pull multi-substrate epitaxy boat with three separate cells is introduced in this article, with which multi-substrate LPE processing is feasible in horizontal LPE furnace. The processes of LPE AlxGa1-x)As/ GaAs solar cells are studied and the efficiency of the solar cells achieved 19.8% （AMO, 25℃, 120 mW/cm2）.
文摘A modified liquid phase epitaxy apparatus for semiconductor materials was used to measure the solubility of GaAs in Bi.Two phase diagrams rich in Bi under H_2 and N_2 atmospheres were obtained according to the results of measurement.A new phenomenon,in which the parameter Q value(quantity of GaAs dissolved in Bi in fixed time/saturation quantitu,of GaAs in Bi)was different from each other at various temperatures and there existed a maxi- mum Q value at definite temperature,was observed.This phenomenon may be regarded as a common feature of a simple binary metallic system which has the phase diagram similar to that of Bi-GaAs.The difference observed from the dependence of Q values on temperature in both H_2 and N_2 atmospheres was discussed.
基金Supported by National Natural Science Foundation of Chinathe Trans-Century Training Porgramme Foundation for Talents of the State Education Commission.
文摘In this paper,the fabrication of 1.3μm InGaAsP/InP gain-coupled DFB lasers with lossgrating is reported for the first time.A technique of regrowth on corrugated surface usingLPE is developed.By using GaAs as the cover of thermal protection and controlling theamount of the super cooling,high quality epitxial layers on corrugated surface are obtained.The oxide stripe lasers with a stripe width of 20μm are fabricated.Single-mode oscillation isachieved at 1.293μm,and a high single-mode oscillation yield is also obtained.
基金Supported by the National Natural Science Foundation of China (11933006)the Frontier Science Research Project (Key Programs) of the Chinese Academy of Sciences (QYZDJ-SSW-SLH018)the National Natural Science Foundation of China (U2141240)。
文摘材料质量好坏对于获得高性能红外探测器至关重要。提出决定材料质量的关键点在于精准控制材料结构中层与层之间的晶格失配度,报道了晶格失配对材料质量和器件暗电流性能的影响。实验结论表明在液相外延技术生长的InAs/InAsSbP材料体系中,InAs和InAsSbP间的晶格失配不是越小越好,而是有一个最佳值。如果晶格失配偏离这个值,不管是偏大还是偏小,材料的质量都会恶化。阐述了如何调整生长参数以获得合适的晶格失配度。制备了具有适宜晶格失配度的红外探测器件,该探测器零偏压下的室温峰值探测率为6.8×10^(9) cm Hz^(1/2)W^(-1),与国际商用InAs探测器的指标相当。
