An Si(001)/SiO2/Ti/Pt/Fe/Cu multilayer was prepared by direct-current magnetic sputtering system. The phase composition of the film was characterized by X-ray diffractometry(XRD), and the microstructure was observed b...An Si(001)/SiO2/Ti/Pt/Fe/Cu multilayer was prepared by direct-current magnetic sputtering system. The phase composition of the film was characterized by X-ray diffractometry(XRD), and the microstructure was observed by scanning electronic microscopy(SEM). Through the film annealed in magnetic field perpendicular to the surface of the film, FCC FePt film with (001) texture was obtained. And the density of the particle in the film annealed without magnetic field is very small compared with that in the film annealed with magnetic field. And the effect of magnetic field annealing on the microstructure of Fe/Pt film and the segregation of FCC FePt phase were also discussed.展开更多
文摘An Si(001)/SiO2/Ti/Pt/Fe/Cu multilayer was prepared by direct-current magnetic sputtering system. The phase composition of the film was characterized by X-ray diffractometry(XRD), and the microstructure was observed by scanning electronic microscopy(SEM). Through the film annealed in magnetic field perpendicular to the surface of the film, FCC FePt film with (001) texture was obtained. And the density of the particle in the film annealed without magnetic field is very small compared with that in the film annealed with magnetic field. And the effect of magnetic field annealing on the microstructure of Fe/Pt film and the segregation of FCC FePt phase were also discussed.
