Growth Rate of a-Si∶H Film Influenced by Magnetic Field Gradient in MWECR CVD Plasma System

The magnetic field profiles,which are produced by three ways in the deposition chamber and plasma chamber of single coil divergent field MWECR CVD system,are investigated.The magnetic field gradient of these magnetic field profiles is obtained quantitatively by using Lorentz fit.The results indicate that the gradient value of the magnetic field profile near by the substrate,which is produced by a coil current with 137.7A if a SmCo permanent magnet is equipped under the substrate holder,is the largest;when the SmCo permanent magnet is taken away,the larger one is produced by the coil current with 137.7A and the smallest one produced by a coil current with 115.2A.High deposition rate of a-Si∶H film is observed near by the substrate with high magnetic field gradient.But uneven deposition rate along the radius of the sample holder is also found by infrared analysis technology when sample is deposited in magnetic field profile,which is produced by the coil current with 137.7A if the SmCo permanent magnet is equipped under the substrate holder.

Background concentrations of reactive gases and the impacts of long-range transport at the Jinsha regional atmospheric background station

Lorentz curve fittings are applied to frequency distributions of the concentrations of O3, CO, NOx and SO2 recorded at the Jinsha regional atmospheric background station （JSH） from June 2006 to July 2007, and the peak concentrations of these species for the different seasons are obtained. The peak concentrations are considered to be representative of different background levels for certain processes. The peak concentrations are compared with the corresponding mean （median） concentrations, and the suitability and limitations of the mean （median） values as the background levels are discussed. The mean （median） values might represent the background concentrations in the region under some circumstances, but in other cases these values often underestimate or overestimate the true background concentrations owing to the transport of pollutants and other factors. The effects of air masses transported from different regions on the pollutant background concentrations are obtained by analyzing the 72-hour backward trajectories of air masses 100m above the ground at JSH, These trajectories are estimated using the HYSPLIT model and then clustered for the measurement period. The spatial distribution and seasonal variations of trajectories and the corresponding mean concentrations of O3, SO〉 NOx and CO for different clusters are analyzed. After filtering the seasonal changes in pollutant concentrations, the relative influences of air masses from different regions are obtained. The results show that JSH can be used to obtain the atmospheric background information of different air masses originating from or passing over the Yangtze River Delta, Central South China and the Jianghan Plain. Air masses from Central China, South China, and the western Yangtze River Delta contribute significantly to O3 at JSH. Air masses from the north and northeast of JSH （i.e., the Jianghan Plain, Huang-Huai Plain and North China Plain） and the south （Central South China） contribute significantly to SO2, CO and NOx concentrations. Air masses originating from the ocean often bring clean air. Air masses originating from high altitudes over northwestern regions often have lower CO and NO3 concentrations, lower relative humidity, and higher concentrations of O3 and SO2.