This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation i...This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation in multi-waveguides was established first, the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions. Combing with the dispersion characteristics and Tomar＇s method, the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted, and confirmed by the following experimental results. Excellent temperature coefficient of the Love wave device with SU-8/SiO2 on ST-90°X quartz substrate was evaluated experimentally as only 2.16 ppm/℃, which agrees well with the calculated results. The optimized Love wave device is very promising in gas sensing application.展开更多
A detailed investigation is presented for Love waves （LWs） with thick viscoelastic guiding layers. A theoretical calculation and an experiment are carried out for LW devices incorporating an SU-8 guiding layer, an S...A detailed investigation is presented for Love waves （LWs） with thick viscoelastic guiding layers. A theoretical calculation and an experiment are carried out for LW devices incorporating an SU-8 guiding layer, an ST-90° X quartz substrate and two 28-μm periodic interdigital transducers. Both the calculated and the measured results show an increase in propagation velocity when h / λ〉0.05. The measured insertion loss of LWs is consistent with the calculated propagation loss. The insertion loss of bulk waves is also measured and is compared with that of LWs.展开更多
基金supported by the National Nature Science Foundation of China(11074268,10834010)
文摘This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation in multi-waveguides was established first, the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions. Combing with the dispersion characteristics and Tomar＇s method, the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted, and confirmed by the following experimental results. Excellent temperature coefficient of the Love wave device with SU-8/SiO2 on ST-90°X quartz substrate was evaluated experimentally as only 2.16 ppm/℃, which agrees well with the calculated results. The optimized Love wave device is very promising in gas sensing application.
基金Supported by the National Natural Science Foundation of China under Grant No 11104314
文摘A detailed investigation is presented for Love waves （LWs） with thick viscoelastic guiding layers. A theoretical calculation and an experiment are carried out for LW devices incorporating an SU-8 guiding layer, an ST-90° X quartz substrate and two 28-μm periodic interdigital transducers. Both the calculated and the measured results show an increase in propagation velocity when h / λ〉0.05. The measured insertion loss of LWs is consistent with the calculated propagation loss. The insertion loss of bulk waves is also measured and is compared with that of LWs.
