Approaches for the fabrication of a low power-operable formaldehyde(HCHO)gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater...Approaches for the fabrication of a low power-operable formaldehyde(HCHO)gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide(In2O3)nanofibers decorated with well-dispersed Au nanoparticles as a sensing material.Homogeneous In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process.Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 nanofibers.The Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes.The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system(MEMS)technique.The micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity.The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration,the size of the adsorbed Au nanoparticles,the applied power to raise the temperature of a sensing part and the kind of target gases.展开更多
基金supported financially by the Basic Science Research Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Education(No.2017R1D1A1B03030796).
文摘Approaches for the fabrication of a low power-operable formaldehyde(HCHO)gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide(In2O3)nanofibers decorated with well-dispersed Au nanoparticles as a sensing material.Homogeneous In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process.Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 nanofibers.The Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes.The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system(MEMS)technique.The micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity.The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration,the size of the adsorbed Au nanoparticles,the applied power to raise the temperature of a sensing part and the kind of target gases.
