Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instrum...Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instruments operate close to their physical limitations. Depending on the specific measuring task either point-wise or areal optical measurement may be advantageous. Hence, examples for both approaches are discussed. Furthermore, systematic effects, which are related to the measuring principle have to be taken into account, e.g. if sharp edges or slopes are present on the measuring object. As it is shown, for white-light interferometry these difficulties can be solved by a two-wavelength technique.展开更多
The non-linearity problem of aircraft system could not be overcome by using the MEMS sensor only.In order to improve the accuracy of aerial vehicle attitude,an aircraft attitude estimation of the MEMS sensor based on ...The non-linearity problem of aircraft system could not be overcome by using the MEMS sensor only.In order to improve the accuracy of aerial vehicle attitude,an aircraft attitude estimation of the MEMS sensor based on modified particle filter is proposed.The aircraft attitude is optimized by the conjugate gradient method,and the drift error of gyroscope is reduced.Moreover,the particle weight is updated by the observed value to obtain an optimized state estimate.Finally,the conjugate gradient method and the modified particle filter are weightily combined to determine the optimal weighting factor.The attitude estimation is carried out with STM32 and MEMS sensor as the core to design system.The experimental results show that the static and dynamic attitude estimation performances of the aircraft are improved.The performances are well,the attitude data is relatively stable,and the tracking characteristics are better.Moreover,it has better robustness and stability.展开更多
Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which...Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which combines expectation maximum(EM)with maximum a posterior(MAP)to form an adpative unscented Kalman filter(UKF),called EMMAP-UKF.According to the MAP estimation principle,a suboptimal unbiased MAP noise statistical estimation model is constructed.Then,EM algorithm is introduced to transform the noise estimation problem into the mathematical expectation maximization problem,which can dynamically adjust the variance of the observed noise.Finally,the estimation and filtering of gyroscope random drift error can be realized.The performance of the gyro noise filtering method is evaluated by Allan variance,and the effectiveness of the method is verified by hardware-in-the-loop simulation.展开更多
This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduc...This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduced and described in detail. Experimental results demonstrate that the signal to noise ratio of the robust design scheme is better than those of the other experimental schemes.Over the full temperature range from -40 to 80°C, the temperature sensitivities of phase margin, gain margin, sensitivity margin,the maximum amplitude of open loop system, bandwidth of closed loop system, and the performance function of the robust design system are all smaller than those of the original design system. Meanwhile, the temperature sensitivity of the bandwidth of the robust design system is improved to 126 from 1075 ppm/°C. Moreover, the bias drift over the full temperature range of the robust design system is improved to 61°/h from 179°/h.展开更多
文摘Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instruments operate close to their physical limitations. Depending on the specific measuring task either point-wise or areal optical measurement may be advantageous. Hence, examples for both approaches are discussed. Furthermore, systematic effects, which are related to the measuring principle have to be taken into account, e.g. if sharp edges or slopes are present on the measuring object. As it is shown, for white-light interferometry these difficulties can be solved by a two-wavelength technique.
基金National Natural Science Foundation of China(No.61261029)
文摘The non-linearity problem of aircraft system could not be overcome by using the MEMS sensor only.In order to improve the accuracy of aerial vehicle attitude,an aircraft attitude estimation of the MEMS sensor based on modified particle filter is proposed.The aircraft attitude is optimized by the conjugate gradient method,and the drift error of gyroscope is reduced.Moreover,the particle weight is updated by the observed value to obtain an optimized state estimate.Finally,the conjugate gradient method and the modified particle filter are weightily combined to determine the optimal weighting factor.The attitude estimation is carried out with STM32 and MEMS sensor as the core to design system.The experimental results show that the static and dynamic attitude estimation performances of the aircraft are improved.The performances are well,the attitude data is relatively stable,and the tracking characteristics are better.Moreover,it has better robustness and stability.
基金National Natural Science Foundation of China(No.61863024)Scientific Research Projects of Higher Institutions of Gansu Province(No.2018C-11)+1 种基金Natural Science Foundation of Gansu Province(No.18JR3RA107)Science and Technology Program of Gansu Province(No.18CX3ZA004)。
文摘Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which combines expectation maximum(EM)with maximum a posterior(MAP)to form an adpative unscented Kalman filter(UKF),called EMMAP-UKF.According to the MAP estimation principle,a suboptimal unbiased MAP noise statistical estimation model is constructed.Then,EM algorithm is introduced to transform the noise estimation problem into the mathematical expectation maximization problem,which can dynamically adjust the variance of the observed noise.Finally,the estimation and filtering of gyroscope random drift error can be realized.The performance of the gyro noise filtering method is evaluated by Allan variance,and the effectiveness of the method is verified by hardware-in-the-loop simulation.
基金supported by the National Natural Science Foundation of China (Grant Nos. 61434003 & 51505089)
文摘This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduced and described in detail. Experimental results demonstrate that the signal to noise ratio of the robust design scheme is better than those of the other experimental schemes.Over the full temperature range from -40 to 80°C, the temperature sensitivities of phase margin, gain margin, sensitivity margin,the maximum amplitude of open loop system, bandwidth of closed loop system, and the performance function of the robust design system are all smaller than those of the original design system. Meanwhile, the temperature sensitivity of the bandwidth of the robust design system is improved to 126 from 1075 ppm/°C. Moreover, the bias drift over the full temperature range of the robust design system is improved to 61°/h from 179°/h.
