This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combin...This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.展开更多
Micro electro discharge machining (micro EDM) is a feasible way tomanufacture micro structures and has potential application in advanced industrial fields. For therealization of micro EDM, it is necessary to pay caref...Micro electro discharge machining (micro EDM) is a feasible way tomanufacture micro structures and has potential application in advanced industrial fields. For therealization of micro EDM, it is necessary to pay careful attention to its equipment design and thedevelopment of process techniques. The present status of research and development of micro EDMequipment and process techniques is overviewed. A micro electro discharge machine incorporated withan inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine fordrilling micro holes suitable to industrial use is also introduced. Some of the machiningexperiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDMtechnology to practical use is discussed.展开更多
随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感...随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感器进行封装和温度补偿电路设计。多层绝缘体上硅(Silicon On Insulator,SOI)材料能够使传感器在高温环境下正常工作。无引线的封装方式可有效提升传感器的频响性能。传感器后端集成了桥阻式专用集成电路(Application Specific Integrated Circuits,ASIC),能够显著减小传感器的体积,同时提升传感器整体性能。该MEMS传感器通过自动压力测试系统进行性能试验,结果表明MEMS压力传感器经过补偿后能够实现较高的线性度、稳定的零点输出特性以及理想的动态输出特性。展开更多
Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is ...Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is sometimes unreliable or even wrong in the case of careless operation. The inspection activity itself is dangerous for inspectors, e.g., bridges are located in the sea or river. Some semi-automatic monitoring methods are recently employed, but they are either very expensive or do not work properly. Therefore, the traditional bridge monitoring process becomes an increasing challenge for bridge operators. In this paper, a real-time and automatic bridge monitoring system is presented to meet the bridge monitoring needs, and MEMS （Micro Electro Mechanical Systems） are the key building block in this system. By using the MEMS-based sensors, it is much more efficient and accurate in monitoring bridges with the measurement of inclination, acceleration, displacement, moisture, temperature, stress and other data.展开更多
基金Supported by the National High Technology Research and Development Program of China(863 Program,2011AA-040405)the National Natural Science Foundation of China(Nos.61101049,61201078,61302032,61327810)
文摘This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.
文摘Micro electro discharge machining (micro EDM) is a feasible way tomanufacture micro structures and has potential application in advanced industrial fields. For therealization of micro EDM, it is necessary to pay careful attention to its equipment design and thedevelopment of process techniques. The present status of research and development of micro EDMequipment and process techniques is overviewed. A micro electro discharge machine incorporated withan inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine fordrilling micro holes suitable to industrial use is also introduced. Some of the machiningexperiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDMtechnology to practical use is discussed.
文摘随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感器进行封装和温度补偿电路设计。多层绝缘体上硅(Silicon On Insulator,SOI)材料能够使传感器在高温环境下正常工作。无引线的封装方式可有效提升传感器的频响性能。传感器后端集成了桥阻式专用集成电路(Application Specific Integrated Circuits,ASIC),能够显著减小传感器的体积,同时提升传感器整体性能。该MEMS传感器通过自动压力测试系统进行性能试验,结果表明MEMS压力传感器经过补偿后能够实现较高的线性度、稳定的零点输出特性以及理想的动态输出特性。
文摘Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is sometimes unreliable or even wrong in the case of careless operation. The inspection activity itself is dangerous for inspectors, e.g., bridges are located in the sea or river. Some semi-automatic monitoring methods are recently employed, but they are either very expensive or do not work properly. Therefore, the traditional bridge monitoring process becomes an increasing challenge for bridge operators. In this paper, a real-time and automatic bridge monitoring system is presented to meet the bridge monitoring needs, and MEMS （Micro Electro Mechanical Systems） are the key building block in this system. By using the MEMS-based sensors, it is much more efficient and accurate in monitoring bridges with the measurement of inclination, acceleration, displacement, moisture, temperature, stress and other data.
