Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on ...Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on reducing the cost and volume of the fuze safety device.The reduction in volume allows more payload and,thus,makes small-caliber rounds more effective and the weapon system more affordable.At present,MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion ething or LIGA technology,and the fabrication process research on the fuze MEMS safety device is in the exploring stage.In this paper,a new micro fabrication method of metal-based fuze MEMS safety device is presented based on ultra violet（UV）-LIGA technology.The method consists of SU-8 thick photoresist lithography process,micro electroforming process,no back plate growing process,and SU-8 photoresist sacrificial layer process.Three kinds of double-layer moveable metal devices have been fabricated on metal substrates directly with the method.Because UV-LIGA technology and no back plate growing technology are introduced,the production cycle is shortened and the cost is reduced.The smallest dimension of the devices is 40 μm,which meets the requirement of size.To evaluate the adhesion property between electroforming deposit layer and substrate qualitatively,the impact experiments have been done on the device samples.The experimental result shows that the samples are still in good condition and workable after undergoing impact pulses with 20 kg peak and 150 μs duration and completely met the requirement of strength.The presented fabrication method provides a new option for the development of MEMS fuze and is helpful for the fabrication of similar kinds of micro devices.展开更多
An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The can...An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The cantilever beam has two stable positions due to the use of permanent magnets. With electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. Mechanical and magnetic analysis are carried out on the actuator, and the device with a size of 2.2 mm × 2.5 mm is fabricated with the UV-LIGA technology. The test results show that a current pulse with an amplitude of 70 mA is needed for actuator＇ s switching between the two stable states, and the switching time is no more than 6 ms. Displacement of the end of cantilever is about 15 μm.展开更多
基金supported by National Basic Research Program of China(973 Program,Grant No. 2007CB714502)National Natural Science Foundation of China (Grant No. 50675025)
文摘Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on reducing the cost and volume of the fuze safety device.The reduction in volume allows more payload and,thus,makes small-caliber rounds more effective and the weapon system more affordable.At present,MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion ething or LIGA technology,and the fabrication process research on the fuze MEMS safety device is in the exploring stage.In this paper,a new micro fabrication method of metal-based fuze MEMS safety device is presented based on ultra violet（UV）-LIGA technology.The method consists of SU-8 thick photoresist lithography process,micro electroforming process,no back plate growing process,and SU-8 photoresist sacrificial layer process.Three kinds of double-layer moveable metal devices have been fabricated on metal substrates directly with the method.Because UV-LIGA technology and no back plate growing technology are introduced,the production cycle is shortened and the cost is reduced.The smallest dimension of the devices is 40 μm,which meets the requirement of size.To evaluate the adhesion property between electroforming deposit layer and substrate qualitatively,the impact experiments have been done on the device samples.The experimental result shows that the samples are still in good condition and workable after undergoing impact pulses with 20 kg peak and 150 μs duration and completely met the requirement of strength.The presented fabrication method provides a new option for the development of MEMS fuze and is helpful for the fabrication of similar kinds of micro devices.
基金Projece supported by National Natural Science Foundatin ofChina(Grant No .10377009)National High-Technology Researchand Development Program(Grant No .863 -2003AA404140) Science Foundation of National Information Industry Ministry ofChina(Grant No .41308050116)
文摘An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The cantilever beam has two stable positions due to the use of permanent magnets. With electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. Mechanical and magnetic analysis are carried out on the actuator, and the device with a size of 2.2 mm × 2.5 mm is fabricated with the UV-LIGA technology. The test results show that a current pulse with an amplitude of 70 mA is needed for actuator＇ s switching between the two stable states, and the switching time is no more than 6 ms. Displacement of the end of cantilever is about 15 μm.
