MEMS Safety-and-Arming(S&A)device is the new generation of S&A device which integrates the mechanism of actuation and barrier.The features of minimized structure and easy integration make it to be the indispen...MEMS Safety-and-Arming(S&A)device is the new generation of S&A device which integrates the mechanism of actuation and barrier.The features of minimized structure and easy integration make it to be the indispensable support to the development of weapon miniaturization,integration and intelligence.As a key component in the new generation weapon system,the sound development of MEMS S&A devices will have a significant impact on the future national defense system.Herein,the research status and development trend of MEMS S&A devices are introduced in this paper.From literature review on various MEMS S&A devices,it can be seen that the researches have evolved from individual components to system integration,and many prototypes have the potential for live-fire testing.Different driven principles and structures of the MEMS S&A devices are compared and summarized.At present,the MEMS S&A device can realize the mutual integration of the driving mechanism and the blocking mechanism on the micron level.In the future,with the establishment of new design criteria,MEMS S&A devices will develop from prototypes to practical applications,which will further promote the integration and intelligent of weapon systems.展开更多
The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high c...The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.展开更多
micro-electro-mechanical system （MEMS） device has the advantages of both electronic system and mechanical system. With the development of MEMS devices for satellite, it is possible to establish much lighter and smal...micro-electro-mechanical system （MEMS） device has the advantages of both electronic system and mechanical system. With the development of MEMS devices for satellite, it is possible to establish much lighter and smaller nanosatellites with higher performance and longer lifecyele. The power consumption of MEMS devices is usually much lower than that of traditional devices, which will greatly reduce the consumption of power. For its small size and simple architecture, MEMS devices can be easily integrated together and achieve redundancy. Launched on April 18, 2004, NS - 1 is a nanosatellite for science exploration and MEMS devices test. A mass of science data and images were acquired during its running. NS - 1 weights less than 25 kg. It consists of several MEMS devices, including one miniature inertial measurement unit（MIMU） , three micro complementary metal oxide semiconductor （CMOS）cameras, one sun sensor, three momentum wheels, and one micro magnetic sensor. By applying micro components based on MEMS technology, NS - 1 has made success in the experiments of integrative design, manufacture, and MEMS devices integration. In this paper, some MEMS devices for nanosatellite and picosatellite are introduced, which have been tested on NS -1 nanosatellite or on the ground.展开更多
As an essential component of ammunition, pyrotechnics can control ignition with high reliability.However, due to limits of fabrication technology, traditional pyrotechnics are bulky. To achieve both functionality and ...As an essential component of ammunition, pyrotechnics can control ignition with high reliability.However, due to limits of fabrication technology, traditional pyrotechnics are bulky. To achieve both functionality and miniaturization, MEMS pyrotechnics integrate initiator, safety-and-arming(S&A) device and lead charge and keep all components within a small size. MEMS S&A devices, as the core component to ensure system safety, are difficult to achieve active and rapid response to control signals with high safety and reliability. In order to overcome the difficulty, we propose the design and characterization of a MEMS pyrotechnic with a double-layer barrier S&A device. The MEMS pyrotechnic is a high-integrated device with an overall size of 13.4 × 8.5 × 5.2 mm^(3). The initiator is a Ni Cr bridge foil covered with an Al/Cu O energetic film, which can generate flame when ignited by an excitation voltage.To match the flame energy, lead styphnate is chosen in this study as the lead charge. The S&A device contains four semi-circular barriers, which are directly driven by V-shape electro-thermal actuators to gain active control of the pyrotechnics’ ignition condition with rapid response. To improve the system’s reliability, the four barriers are axisymmetrically placed in two layers, two barriers for each layer, to constitute a double-layer structure with a thickness of 100 μm. The ignition test results show that the S&A device can prevent the initiator from detonating the lead charge in safety condition. In arming condition, the lead charge will be detonated.展开更多
Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS swi...Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS switch with a straight top electrode.The insertion loss,isolation,actuator voltage,and stress distribution of the switch are optimized and explored simultaneously by HFSS and COMSOL software,taking into account both its RF and mechanical properties.Based on the optimized results,a switch was fabricated by a micromachining process compatible with conventional IC processes.The RF performance in the DC to 18 GHz range was measured with a vector network analyzer,showing isolation of more than 21.28 dB over the entire operating frequency range.Moreover,the required actuation voltage was about 9.9 V,and the switching time was approximately 33μs.A maximum lifetime of 109 switching cycles was obtained.Additionally,the dimension of the sample is 1.8 mm×1.8 mm×0.3 mm,which might find application in the current stage.展开更多
A multi-try counter-meshing gears (CMG) discrimination device based on micro electromechani-cal system (MEMS) technology was designed for some specified information fields. The discrimination device consists of two gr...A multi-try counter-meshing gears (CMG) discrimination device based on micro electromechani-cal system (MEMS) technology was designed for some specified information fields. The discrimination device consists of two groups of metal CMG, two pawl/ratchet mechanisms, two driving micromotors and two re-setting micromotors, which make the CMG withdraw by raising the pawls. The energy-coupling element is a photoelectric sensor with a circular plate which is notched. Micromotor is fabricated using the ultraviolet LiGA (UV-LiGA) fabrication process and precision mechanical engineering. The discrimination device has the function which can automatically reset, with the correct resetting code, it can be tried another times.展开更多
基金The work is supported by China Postdoctoral Science Foundation(2018M640977)the Fundamental Research Funds for the Central Universities(xzy012019004).
文摘MEMS Safety-and-Arming(S&A)device is the new generation of S&A device which integrates the mechanism of actuation and barrier.The features of minimized structure and easy integration make it to be the indispensable support to the development of weapon miniaturization,integration and intelligence.As a key component in the new generation weapon system,the sound development of MEMS S&A devices will have a significant impact on the future national defense system.Herein,the research status and development trend of MEMS S&A devices are introduced in this paper.From literature review on various MEMS S&A devices,it can be seen that the researches have evolved from individual components to system integration,and many prototypes have the potential for live-fire testing.Different driven principles and structures of the MEMS S&A devices are compared and summarized.At present,the MEMS S&A device can realize the mutual integration of the driving mechanism and the blocking mechanism on the micron level.In the future,with the establishment of new design criteria,MEMS S&A devices will develop from prototypes to practical applications,which will further promote the integration and intelligent of weapon systems.
基金Project supported by High-Technology Research and Develop-ment Program of China (Grant No .863 -2003AA404210)
文摘The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.
文摘micro-electro-mechanical system （MEMS） device has the advantages of both electronic system and mechanical system. With the development of MEMS devices for satellite, it is possible to establish much lighter and smaller nanosatellites with higher performance and longer lifecyele. The power consumption of MEMS devices is usually much lower than that of traditional devices, which will greatly reduce the consumption of power. For its small size and simple architecture, MEMS devices can be easily integrated together and achieve redundancy. Launched on April 18, 2004, NS - 1 is a nanosatellite for science exploration and MEMS devices test. A mass of science data and images were acquired during its running. NS - 1 weights less than 25 kg. It consists of several MEMS devices, including one miniature inertial measurement unit（MIMU） , three micro complementary metal oxide semiconductor （CMOS）cameras, one sun sensor, three momentum wheels, and one micro magnetic sensor. By applying micro components based on MEMS technology, NS - 1 has made success in the experiments of integrative design, manufacture, and MEMS devices integration. In this paper, some MEMS devices for nanosatellite and picosatellite are introduced, which have been tested on NS -1 nanosatellite or on the ground.
基金the National Key R&D Program of China(2017YFB1102900)the Fundamental Research Funds for the Central Universities(xzy012019004).
文摘As an essential component of ammunition, pyrotechnics can control ignition with high reliability.However, due to limits of fabrication technology, traditional pyrotechnics are bulky. To achieve both functionality and miniaturization, MEMS pyrotechnics integrate initiator, safety-and-arming(S&A) device and lead charge and keep all components within a small size. MEMS S&A devices, as the core component to ensure system safety, are difficult to achieve active and rapid response to control signals with high safety and reliability. In order to overcome the difficulty, we propose the design and characterization of a MEMS pyrotechnic with a double-layer barrier S&A device. The MEMS pyrotechnic is a high-integrated device with an overall size of 13.4 × 8.5 × 5.2 mm^(3). The initiator is a Ni Cr bridge foil covered with an Al/Cu O energetic film, which can generate flame when ignited by an excitation voltage.To match the flame energy, lead styphnate is chosen in this study as the lead charge. The S&A device contains four semi-circular barriers, which are directly driven by V-shape electro-thermal actuators to gain active control of the pyrotechnics’ ignition condition with rapid response. To improve the system’s reliability, the four barriers are axisymmetrically placed in two layers, two barriers for each layer, to constitute a double-layer structure with a thickness of 100 μm. The ignition test results show that the S&A device can prevent the initiator from detonating the lead charge in safety condition. In arming condition, the lead charge will be detonated.
基金supported by the Equipment Development Department of the New Product Project,the Shanxi Province Postgraduate Education Reform Project,the Double First-Class Disciplines,the National First-class Curriculum Construction,and the Province Future Technology Project (Grant Nos.2019XW0010,11012103,11012133,11013168,and 11013169).
文摘Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS switch with a straight top electrode.The insertion loss,isolation,actuator voltage,and stress distribution of the switch are optimized and explored simultaneously by HFSS and COMSOL software,taking into account both its RF and mechanical properties.Based on the optimized results,a switch was fabricated by a micromachining process compatible with conventional IC processes.The RF performance in the DC to 18 GHz range was measured with a vector network analyzer,showing isolation of more than 21.28 dB over the entire operating frequency range.Moreover,the required actuation voltage was about 9.9 V,and the switching time was approximately 33μs.A maximum lifetime of 109 switching cycles was obtained.Additionally,the dimension of the sample is 1.8 mm×1.8 mm×0.3 mm,which might find application in the current stage.
基金the National High Technology Re-search and Development Program (863) of China(No. 2003AA404210, 2005AA404250, 2003AA404210,2006AA01Z443)
文摘A multi-try counter-meshing gears (CMG) discrimination device based on micro electromechani-cal system (MEMS) technology was designed for some specified information fields. The discrimination device consists of two groups of metal CMG, two pawl/ratchet mechanisms, two driving micromotors and two re-setting micromotors, which make the CMG withdraw by raising the pawls. The energy-coupling element is a photoelectric sensor with a circular plate which is notched. Micromotor is fabricated using the ultraviolet LiGA (UV-LiGA) fabrication process and precision mechanical engineering. The discrimination device has the function which can automatically reset, with the correct resetting code, it can be tried another times.
